We take content rights seriously. If you suspect this is your content, claim it here.
Available Formats
Download as PDF, TXT or read online on Scribd
You are on page 1/ 6
ISFET
Ion Sensitive Field Effect
Transistor Details
● FET Technology: Control of an
electric field applied to semiconductor material. ● Glass electrodes usually measure electric potential of a solution. ● ISFET electrodes measure change in electric charge due to presence of hydrogen ions in the solution.
Figure: Schematic of ISFET electrode
How it works?
● Ion Sensitive Layer: Usually glass (SiO2) but
can be other oxides like Aluminium oxide, Titanium and Zirconium oxides, Polymers like Polythiophene, Polyaniline. ● This layer comes in contact with our solution and reacts with hydrogen ions in the solution which causes the change in electric charge of ISL. ● This change in electric charge is detected by Silicon substrate which is a transducer. ● Channel: A small groove inside the substrate is made to allow detection of pH change. How it works?
● AgCl electrode is used in ISFET
electrodes as a reference electrode. ● Usually reference electrodes are used as a fixed point of comparison. ● This ensures having accurate and reliable pH readings. ● This is typically a half-cell. ● The other reference half cell used here is KCL solution. ● This is a reference electrolyte. How it works?
● The change in electric charge of ISL creates
change in electric field at the interface of gate electrode and ISL. ● This creates the conductivity of n-type Si beneath the gate electrode. ● This is proportional to pH of the test solution. ● This change in conductivity is given out as current or voltage output. How it works?
● The source and drain semiconductors act as electrodes
of FET and detect the change in electric field of gate electrode. ● Source is closer to gate electrode. This produces a voltage across source and drain semiconductors which in turn produce flow of electrons from source to drain via channel. ● Closer source provide sensitivity but increases response time. ● p-Si substrate is other electrode of FET. It changes conductivity due to the electric current produced above. ● Si is used because it is chemically stable, inexpensive, having necessary electric conductivity.