JOURNAL.doc
JOURNAL.doc
Abstract
Aiming at the problems of low monitoring accuracy and large memory consumption of traditional monitoring software, a
visual monitoring software for MEMS micro-drive debugging is designed in this paper. According to the characteristics of
MEMS system and the driving principle of micro actuator, the functional module of visual monitoring software for micro
actuator debugging is designed. It includes monitoring pause button module program, visual display module program,
monitoring quadrature signal module program and monitoring signal communication module program. Improve the
monitoring accuracy through the connection between various modules. Select the material of the micro-drive and set its
structural parameters, connect and debug the hardware of the drive, and test the performance of the designed software. The
experimental results show that the software designed in this paper has high accuracy and low memory loss, the average
accuracy is more than 90%, and the memory consumption is only 156 kb. It shows that this method can effectively monitor
MEMS micro actuator, and the monitoring results are reliable.
© 2022 Jordan Journal of Mechanical and Industrial Engineering. All rights reserved
Keywords: MEMS; Micro actuator; Function module; Connect and debug; Visual monitoring.
module of micro actuator debugging visual monitoring under the action of ac voltage. The permanent magnet is
software is designed. driven by the electromagnetic coil to do up and down
(2) Select the material of the micro drive and set its vibration, so the silicon film is also driven to do up and
structural parameters, connect and debug the hardware of down vibration.
the drive. The advantages of electromagnetic drive include simple
(3) The monitoring results of the designed software structure, sensitive action, easy to control, high reliability,
verify that the visual monitoring software designed in this low price, etc., but it also has shortcomings, such as high
paper has ideal application effect. energy consumption, large volume, large noise, high
manufacturing difficulty and so on. The S120 drive control
2. Micro-Drive Debugging of Electromechanical system adopted in this paper adopts modular structure
System design [12]. In terms of hardware structure, it can be
divided into two parts: power module and motor module,
The composition of the MEMS system in this paper is which are connected by DC bus, and each motor module
shown in Figure 1. shares the power source module. The S120 integrates a
new communication interface DRIVE-CLiq, through
Force Movement
which the S120 can be connected to motors and encoder
Light Energy and other components. Each component has an electronic
Sound Analog Digital Analog Information
nameplate, and all components can be automatically
Sensor signal signal signal Actuator identified by the DRIVE-CLiq cable.
Temperature processing processing processing Control The power module converts three-phase
Chemical Node ALTERNATING current into direct current, and supplies
Communication/interface with other power to subsequent motor modules through DC bus.
Other other
Microsystems (optical/electrical/magnetic) There are two types of power supply modules: Active Line
Module (ALM) and Smart Line Module (SLM). ALM is
Figure 1. The composition of the MEMS system equipped with DRIVE-CLiq interface (X200-X202). The
DRIVE cable derived from the DRIVE-CLiq interface of
In the debugging process of the micro-drive, the axial
the NUMERICAL control system is connected to the X200
length of the internal micro beam is larger than the inner
interface of ALM, and the X201 interface of ALM is
wall length of the external frame of the drive [7, 8], which
connected to the adjacent motor module. SLM does not
is intended to provide certain axial extrusion pressure to
have DRIVE-CLiq interface. The DRIVE cable derived
the micro beam [9]; The drive structure also includes
from the DRIVE-CLiq interface of the CNC system is
sixteen adjusting electrode pairs and a pair of driving
connected to the X200 interface of the first motor module.
electrode pairs. The adjusting electrode pair is realized to
First, connect the motor module X201 to the next adjacent
control both ends of the micro beam synchronously by
motor module, and so on. It should be noted that the more
adjusting the external adjusting circuit. The axial force on
powerful motor module should be installed adjacent to the
the micro beam is regulated, and the voltage provided by
power module.
the external regulating circuit is driven laterally by the
Use one SLM power module and two biaxial motor
driving electrode to the micro beam. Thus, the micro-drive
modules. The communication cable derived from the X1
produces transverse displacement [10]. In MEMS, the
interface of the CNC system is connected to the X200
micro-drive is a very important component. Micro actuator
(DRIVE-CLiq) interface of the first biaxial motor module.
has the advantages of small size, high precision and low
The X201 (DRIVE-CLiq) interface of the first biaxial
energy consumption. At present, compared with foreign
motor module is connected to the X200 (DRIVE-CLiq)
countries, domestic researches on micro-drives are still in
interface of the second biaxial motor module. The X202
the laboratory stage, with only a small part of micro-drives
and X203 (DRIVE-CLiq) interfaces of the two motor
products. But these products can only be used in some
modules are used to connect the encoder on the servo
special fields, has not formed a complete industry group.
motor.
So now, our country urgent problems for micro-drive is to
After the hardware wiring is connected, the CNC
keep up with the pace of the international as soon as
system needs to be debuggable first, and then the S120
possible, shorten the gap, improve research level, and then
drive can be debuggable.
let the micro-drive to realize industrialization. Micro-drive
The debugging process consists of the following main
refers to the micro electrical parts that enable micro
steps:
devices to realize movement. It is a very important
(1) Check CNC system before power on
component of MEMS [11]. Electromagnetic drive When
The inspection before electrification includes four
the electromagnetic coil and magnetic medium (permanent
aspects: 1) Check whether the power module of the drive
magnet or soft magnet) interact with each other will
and the 24 V DC power supply of the motor module are
produce mutual attraction or mutual repulsion force. Under
connected correctly. 2) Check that the power module of
the action of this force, a certain displacement will be
the drive and the DC bus of the motor module are
generated, so as to realize the electromagnetic drive of
connected correctly. 3) Check whether the DRIVE-CLiq
MEMS drive. The drive consists of a movable silicon film,
cable is connected correctly. 4) Check whether the
a permanent magnet, and an electromagnetic coil, where
PROFIBUS cable is connected correctly and whether the
the permanent magnet is above the movable silicon film
terminal resistance is set correctly.
and the electromagnetic coil. When ac voltage is applied to
(2) Numerical control system electrification
both ends of the coil, an electromagnetic field is generated
© 2022 Jordan Journal of Mechanical and Industrial Engineering. All rights reserved - Volume 16, Number 1 (ISSN 1995-6665) 135
If no errors are checked before energizing, the system connector, Debugger etc. [13]. Processor Expert (PE) is an
can be energized. Close the system main power switch, internal sub-module of CW, which encapsulates embedded
802Dsl host, PP72/48, and drive are powered on. The two internal function modules and peripheral function modules
green lights on PP72/48 marked “POWER” and into independent modules. With the support of hardware
“EXCHANGE” indicate that the PP72/48 module is ready circuits, you only need to configure the corresponding
and data is exchanged by the bus. The indicator light on modules to use its functions without writing the underlying
the power module and motor module of the drive. The program. PE mainly completes the initialization of
READY light if it is color means that the drive has not set modules, and CW completes project integration, editing,
parameters, and if it is red, it is faulty. DC LINK lamp if it compilation and downloading, etc. The cooperation of PE
is orange means normal, if it is red means incoming power and CW effectively improves the development speed
failure. If there is no indicator light, it means there is no based on Freescale chip systems. CW has cutting-edge
DC 24V power supply. debugging technology and a sound development
(3) Nc system initialization environment, that brings embedded development to a new
After the 802Dsl is powered on, the system level of development [14, 15], and also provides
initialization should be performed first, and the required developers with a highly visual and automated framework.
initialization files should be passed into the 802Dsl system It greatly improves the speed of project development, and
using Siemens tooling software RCS802 or CF card. After creates applications for users of various development
the components of the 802Dsl are properly connected, the levels that are simple and convenient. The powerful
PLC control logic should be designed and debugged. The compiling function of CW can check out obvious syntax
drive and 802Dsl parameters can only be debugged after format errors in the code. After the compiling software is
all the safety functions of the PLC are correct. passed, use USB TAP to burn the program, and it can be
(4) S120 drive debugging debugged online. The development environment of CW is
Only after the PLC application program is correct, the shown in Figure 3.
drive can then be debugged. In order to simplify the
debugging of the S120 drive, Siemens 802Dsl has
specially designed a graphical drive debugging wizard,
which can easily realize the fast debugging of the drive.
The process is as follows: 1) Load S120 drive firmware.
Ensure that all components of the drive have the same
firmware version. 2) Load S120 drive factory settings.
Activate the factory parameters of each drive component.
3) Topology identification and confirmation. Read the
structure of the drive connection and the control
parameters of the actual motor, and set the topological
structure comparison level.
Complete the debugging of the micro-drive through the
above steps. Based on this, the debugging result
monitoring software is designed below.
The debugging process of S120 drive is shown in
Figure 2.
Start Figure 3 Code Warrior development environment
N
The main program of the system completes the
Check before power on PLC application is correct initialization of the program and the selection of function
N Y modules. The initialization program is the operation of the
No errors found MC56F84789 register after the terminal is powered on. It
S120 drive debugging
is an indispensable part of the program. In the terminal, it
Y
mainly initializes the ADC module, PWM module, IO
CNC system electrification End status, timer module, etc. To ensure the normal operation
of the system program. The terminal is divided into three
CNC system initialization functional modules: signal source, signal monitoring and
digital signal. The signal source includes PWM, CLK,
monitor quadrature signal, analog voltage signal and
Figure 2. S120 drive debugging flow chart single-ended voltage signal; Signal monitoring includes
CLK signal monitoring and encoder signal monitoring;
3. The Design of the Function Module of the Visual digital commands are issued under RS232 and CAN
Monitoring Software for Micro-Drive Debugging communication respectively. After power-on, the system
first initializes and enters the main menu interface. After
Introduction to Software Development Environment the effective button is monitored, enter the corresponding
Code Warrior (CW) is a software integrated development secondary menu according to the button value. When the
environment developed by Metrowerks. It provides a effective button is pressed again, the program jumps to the
series of tools for software development, including the function module to work. The person presses the return
Integrated Development Environment (IDE), compiler,
136 © 2022 Jordan Journal of Mechanical and Industrial Engineering. All rights reserved - Volume 16, Number 1 (ISSN 1995-6665)
key, the program returns to the previous menu, and waits 3.2. Visual display module program
for the next key command [16, 17].
The LCD visual display screen visually displays the
3.1. Monitoring pause button module program running status of the system in real time, and cooperates
with the button function to realize the human-computer
In the process of debugging and monitoring the micro- interaction function. The visual display module uses
drive, if an abnormal situation occurs, it must be paused in Jinpeng OCMJ44X8C-15 LCD visual display, and uses
time to check the specific fault. This section designs the only 4 wires with MC56F84789 to realize data serial
program of the monitoring pause button module. The transmission, and combines the OCMJ44X8C-15 data
button is used to realize the human-computer interaction manual for programming. The LCD screen of
function of the debugging terminal, and the corresponding OCMJ44X8C-15 is a 128 × 64 dot matrix with an
function is entered through the button selection and integrated font library chip, which can visually display
parameter setting. The stability of the button program is 8192 Chinese characters and 126 symbol fonts, and users
the basic guarantee for the stable operation of the terminal. can also visually display drawings. OCMJ44X8C-15
In the key hardware circuit, the debugging terminal uses provides basic and extended instruction set to meet the
the CH455 chip, which is connected to the I2C (Inter- needs of developers, such as clear visual display, function
Integrated Circuit) interface of MC56F84789, with an setting, setting DDRAM address and other practical
external interrupt IO port. In the process of software functions. Write and send a data function module
writing, configure the Internal I2C module and EINT according to the serial timing diagram of the data manual.
module in the PE, and write the program in conjunction First, set the PSB signal low to set the transmission mode
with the CH455 chip data manual. First, MC56F84789 to serial mode, set the chip select CS high, start
sends a work start instruction to CH455 chip according to transmitting the start byte, and receive 5 consecutive “1”.
the instruction code of the data manual. CH455 chip starts As the starting byte, the transmission count is reset and the
to work according to the received digital instruction, and serial is synchronized to the serial transmission. The three
continuously scans the keyboard. The internal part of bits received later are used as the transmission direction bit
CH455 chip is divided into row scan and column scan to (RW), and the register selection is (RS) and “0”. After
prevent misjudgment of keystrokes. In this case, CH455 receiving the start byte, each eight-bit instruction is
chip uses double discrimination to be valid. When the two divided into two parts. The upper four bits (DB7~DB4) are
keyboard scan results are the same, the key is confirmed to received in the LSB part of the first byte, and the lower
be valid. Each key corresponds to a unique key code. The four bits (DB3~DB0) are in the LSB part of the first byte.
key code is determined by judging the position of the key The LSB part of the second byte is received. The
pressed. When a key is pressed, MC56F84789 detects the remaining bits of the first and second bytes are 0. In the
interrupt signal and generates an effective low-level LCD visual display function module, first write the
keyboard interrupt, and then reads the key code through sending data module according to the set time sequence,
the serial port. The key program flowchart is shown in initialize the LCD screen with data manual instructions, set
Figure 4. the visual display row and column position, and finally use
Start the pointer to transfer the characters that need to be
visualized to LCD module.
Keyboard scanning
3.3. Monitor quadrature signal module program
N
A key press?
The monitor quadrature signal is two rectangular waves
Y with the same frequency, duty cycle, and amplitude, and a
Delay to shake phase difference of 90°. Among the many signal sources of
the micro-drive, the monitor quadrature signal is one of
Keyboard scanning them. The micro-drive debugging terminal uses
MC56F84789 internal integration.
N The PWM module realizes the function of monitoring
Find the close the quadrature signal. On the hardware circuit, only one
key?
output signal circuit is configured on the PWMA and
Y
PWMB ports, which can be realized by software
programming. The PWM module is divided into center-
N
aligned mode trigger and edge-aligned mode trigger. Using
Releas e key? the different trigger mode characteristics of the PWM
module, when channel A is 90° ahead of channel B, set
Y PWMA module to edge-aligned mode trigger and PWMB
Send key values to module to configure center-aligned Mode trigger; vice
the master controller versa. Figure 5 is the timing diagram of channel A ahead
of channel B by 90°.
Orthogonal signal
output
F F:Frequency
End D D:Duty ratio
Figure 6. Program flow chart of monitoring orthogonal signal Figure 7. Monitoring signal waveform
The test of the monitoring waveform mainly focuses on
3.4. Monitoring signal communication module program the change of the duty cycle at different frequencies.
Therefore, the design of the test data during the test is
RS232 communication and CAN communication are shown in Table 1. Each set frequency corresponds to three
two widely used communication methods at present. The sets of duty cycle values, which can be clearly seen as high
monitoring signal communication module program of the the error of the duty cycle increases under the frequency
micro-drive debugging terminal uses a reasonable condition, which is consistent with the setting.
structure. When the function module program is written,
138 © 2022 Jordan Journal of Mechanical and Industrial Engineering. All rights reserved - Volume 16, Number 1 (ISSN 1995-6665)
Table 1 Monitoring signal waveform data module program, monitoring quadrature signal module
Set Read Set monitoring Read program and monitoring signal communication module
monitoring monitoring duty cycle (%) monitoring duty program. Through the connection between each module,
frequency frequency cycle (%) the monitoring accuracy is improved.
(Hz) (Hz) (3) Comparison of memory loss between different
12 12 20.00, 50.00, 20.00, 50.00, monitoring software
70.00 70.00 Memory consumption (KB) was compared with the
500 500 20.00, 50.00, 19.99, 49.99, monitoring software designed in References [5] and [6],
70.00 69.00
and the analysis results were shown in Table 2.
1000 1000 20.00, 50.00, 19.98, 49.98,
Table 2 Compares the memory consumption of different
70.00 69.97
monitoring software
5000 4999 20.00, 50.00, 19.97, 49.88,
70.00 69.99 Software Memory cost/kb
10000 9996 20.00, 50.00, 19.98, 49.98, Software in this paper 156
70.00 69.97
20000 19980 20.00, 50.00, 19.33, 49.34, Software in Reference [5] 3608
70.00 69.75 Software in Reference [6] 895
30000 29970 20.00, 50.00, 19.05, 49.58,
70.00 69.99
It can be seen from Table 2 that the memory
20.00, 50.00, 19.90, 49.08,
consumption in the monitoring process using the designed
40000 399300
70.00 69.17 system is relatively low. The memory consumption
50000 499000 20.00, 50.00, 18.76, 49.75, generated by software in Reference [5] is the highest,
70.00 69.73 followed by that in Reference [6]. The experimental results
(2) Comparison of accuracy of different monitoring show that the difference between the memory cost of
software Reference [5] and the memory cost of the designed
The monitoring software is difficult to ensure that no software is 3456 kb. The difference between the memory
errors will occur during the running process. In order to cost of Reference [6] and that of the designed software is
verify the effectiveness of the designed electromechanical 739 kb. The lower memory loss effectively increases the
system micro-drive debugging and visual monitoring applicability of the visual monitoring software for micro-
software, the designed software is compared with the drive debugging, and the application scope is wider. The
design in Reference [5] and Reference [6]. The monitoring data obtained from the experiment show that the
accuracy rate of the micro-drive debugging monitoring applicability of the designed software is better than the
software is compared, and the comparison result is shown other three traditional electromechanical system micro-
in Figure 8.
drive debugging visual monitoring software.
Proposed method
(4) Test the packet loss rate of different monitoring
100 software with or without queuing
Packet loss rate refers to the ratio of the number of
80 Methods in Reference [5]
monitoring packets lost in the monitoring test to the sent
Accuracy/%
debugging. The comparison results are shown in Figure Project name: Development of Automatic Multi-
10. Functional Nursing Bed (No. 20180204).