MAss flow controller

Edition 8/2012
Mass flow controller program
World leader in flow technology for over 35 years
With AERA® and SAM® Mass Flow Controllers these product ranges apply as a world stable process control; last but not least multi-gas, multi-range, pressure-insen-
leader in flow technology for over 35 years. The success is based on many proper- sitive and live-gas certified MFCs. Our customers, often market leaders in their
ties that were in charge of developing MFC: A fast, repeatable, accurate, reliable, industry, verify the top quality of our products integrating both series into gas
field-proven technology; absolute and differential pressure control, enabling handling system solutions of the highest quality standard demand.

Worldwide, the AERA® brand is synonymous with high-quality, high-performing From the release of the first of our MFCs, SAM® brand high-performance mass flow
designs that are backed by exceptionally responsive customer service. AERA®’s has an controllers continue in the tradition of perfection. High corrosion resistance and
outstanding reputation for digital MFC reliability and performance with shipments of stable control performance are possible thanks to our waveform diaphragm made of
over 100 000 digital MFC units. Ni-Co alloy.

Series R7700/R7800 Series F

AERA® 7700 delivers precise flow control, while offering the economic benefits of SAM® controllers that are equipped with these technologies enjoy a well deserved
elastomer seals. reputation from globally recognized customers. Real SAM®-brand products are highly
AERA® 7800 shows precise flow control as well as the corrosion resistance and high valued as premium performance design.
leak integrity of metal seals.
Series FX
Series DR980 While inheriting the tradition of our earlier Mass Flow Controllers, the FX series is a
AERA® DR980 deliver performance excellence and operational versatility. bold advance into the next generation. The major element of innovation is the combi-
nation of technologies derived from the G series. Not such advanced as G with its full
scale PI function, they have greater PI performance as the F series.
Series Transformer®
AERA® Transformer will transform your process, providing superior flexibility and Series G
efficiency for improved yield, higher productivity, and lower cost of ownership.
This SAM® G design is positioned to play a major role in the next generation of control-
lers. The G series is an all-in-one mass flow controller that meets or exceeds the next
Series PI-980® generation of requirements, a step ahead of the competition. These advances are in
response to our customers’ needs for high level functions.
The AERA® PI-980® pressure-insensitive MFC’s anticipate the increasing demands of
next-generation manufacturing and reduce gas panel footprint and cost.

AERA TECHNOLOGY DEVELOPMENT

Average Price

PI-980™ Series
Most frequently requested gas types NeuralStep™ Control Technology
Pressure-Insensitive, Multi-Gas / Multi-Range digital MFC

TRANSFORMER™ Series
He Multi-Gas / Multi-Range digital MFC
SiH4
Single Gas digital MFC
SiH2Cl2
Semiconductor (Si) TEOS (Si (OC 2H5)4) Analog MFC
AsH3
Semiconductor (Compound) NH3
Performance, Technology
PH3
MO B2H 6
CF4

PV HCl
NF3 MFC Application Areas
TFT-LCD TMG ((CH3)3GA)
WF6
HBr Analytical Instruments, Biopharmaceuticals, Catalysis, Cell culture and fer-
Glass fiber
GeH4 mentation control, Chemical Engineering, Fiber optics, Fuel cells, Glass coating,
Industrial, Life Sciences, Medical device, Modified Atmosphere Packaging MAP),
N2O
Optoelectronics, Petrochemical, Photovoltaics, Process Industry, Quality control,
Semiconductors, Solar cells, Surface Technology.

2
Ultimate Technology
Now designed to play a major role in next generation of controllers

MFC Quality and Precision

accuracy - Repeatability - High leak integrity - temperature stability - low zero drift - Speed
AERA® and SAM® Mass Flow Controllers enjoy a well deserved reputation from Gas functionality, guaranteed control accuracy with the actual gas, Pressure In-
globally recognized customers. They are valued as a premium performance de- sensitivity function and built-in Shut-Off-Valves. Complete Digital Remote Control
sign. Advanced products have been developed in close contact with our customer’s with extended program functionality like Flow-Rate-Verification are appropriate
needs for functions meeting or even exceeding the next generation of require- steps to receive ongoing good marks from our customers caused from limiting in-
ments of high performance and highest product quality: Multi-Range and Multi- vestment and precise flow control.

Thermal Sensor Technology

Flow sensing
s Consists of two heated resistance wires wound around the outside of a thin walled Our flow rate sensor, another key component in MFC’s, employs a coil type thermal
capillary tube. sensor based on technology we have been accumulating for half a century, thus
s The resistance of the coils is known at given temperatures. resulting in extreme reliability.
s The coils are connected in a bridge circuit and supplied with regulated current.
s Changes in the bridge resistance are related to mass flow rate, thus creating the
basis value for control. Sensor drive voltage First stage amplifier

Temperature
DC voltage out
proportional to
flow
No flow Current Sense Resistor

Flow
Flow

Distance along sensor tube

Fig.: Flow and temperature change Fig.: Flow measuring with wheatstone bridge

System Solutions Gas panel technology trends

Gas handling applications vary f.e. from flame control over atmosphere
control to plasma control. Precise gas and gas mixtures mass flow into
process chambers therefore enable sophisticated gas treatment for high end
products to be manufactured. Because the need of a flow rate guarantee
to be able to generate reproducible processes is absolutely indispensable,
AERA® and SAM® system engineering delivers convincing packages.
Modular, compact installations, leak proofed device, highly developed multi
functionality systems are - not really surprising - future proofed and a safe
investment.

Regulators
Air operated valve Displays

Pressure transducer

Manual valve Filter

MFC

Process gas in

Process gas out

Process gas outlet

Fig.: System integration with modular, compact installations Fig.: Progressive system miniaturization

3
Software / control
Control - Consoles - Connectors
Depending on the model, the set point value and actual Single channel unit: RO 120 Readout Unit is capable to Multi channel unit: The ROD-4A is an operating unit for
value signals can be predefined and fed back either by supply power to a single MFC, controlling flow rate and up to four mass flow controllers in combination with
analog or digital communication: analog via standard providing readouts of the flow rate. analog or digital MFC, which correspond to the available
signal interface or digital via RS-232/RS-422 or field bus connections. The operation can be executed via keypad
interface (Profibus, Device Net, Ethernet). The digital at the front panel of the device or interface RS232 via PC
RS-232 or RS-422 interface is required for communica- alternatively. In order to maintain the preset mixture of
tion with the Mass Flow Controller software (device gases at changing flow rates the ROD-4A has a master/
dependent). The microprocessor controlled electronics slave function.
provide significant benefits: they reduce drift and offset
occurrences of the components and enable software-
based control of the most important processes. The
relevant data for this (calibration curves, correcting
functions, control functions, etc.) can be stored in the
memory. Operator consoles are available in two differ-
ent models (RO 120, ROD-4A) - each one suitable for cer-
tain functions and number of control channels.
Fig.: Readout units RO 120 and ROD-4a front view

Field Programmability

The Programming Window allows to be configured the

connected MFC recognized on the Search Window.
This window allows you to send a gas type, CF type
and full scale to an individually specified MFC. Reading
the configured data in the MFC, printing the read data
and reading/writing data file is also available on this
window.

Fig.: GUI Programming window

DeviceNet™ Communication DN
DeviceNet™ is a field network world wide recognized, and it is approved as a standard
PLC Master sensor bus by the SEMI. Field devices can be connected using serial communication in
+24V VDC place of an I/O connection, allowing transfer of a large volume of data effectively. The
DeviceNet TM specifications are administrated by the ODVA (Open DeviceNet™ Vendor
Association, Inc.) a non-profit body established to promote the spread of this system
Power world-wide.

Benefits
Distribution Box
● No need of AD / DA / O board which can decrease configuration and set up costs.
PLC bus line ● Only network cables are needed reducing cabling costs.
● With power supply of +24 VDC no need of ±15 VDC for MFC.
● DeviceNet™ specifications follow international standards opening lots of control
DeviceNet™ Cable devices available from multiple vendors.

Fig.: DeviceNet connected device

4
Implemented Functions
Pressure Insensitive Function
PI PI Benefits
The PI (Pressure Insensitive) function improves the controller‘s ability to tolerate ● Smaller fluctuations in the actual flow rate
variations in the primary pressure. This function improves durability and is currently
● More stable gas flow to the chamber improves process results and yield
highly desired in mass flow controllers.
● Faster response enables new processes and faster throughput
Upstream gas supply pressure changes may cause ordinary mass flow controllers to
fluctuate in pressure because the MFC tries to maintain control as it detects pressure
change at the flow rate sensor. Therefore, any current mass flow controller, without
this regulator, is directly influenced by fluctuation in the gas supply inlet pressure,
and the actual flow rate will change instantly by a large amount.

PC Board / Electronics

Circuit
- No overshoot
- Quick response for
1.0 sec for 0-100%
Valve - Less than 1.5 sec
even at low setting
Actuator of 0-5%
- Little dependent on
the type of gas
Flow and
Pressure temperature Valve actuator
Sensor sensor - Piezo electric stack
is used
Fig.: PI function and
Control Metal diaphragm
Valve - NiCo alloy pressure fluctuation
- Excellent corrosion
Bypass resistance and stable How does a PI-function work?
operation
- Minimized particle
An additional pressure sensor measures the fluctuations in gas pressure before it
Body
generation and slid- reaches the flow sensor .
ing parts Then NeuralStep - an additive control algorithm - makes the valve adjustment to keep
Gas inlet Gas outlet Valve orifice
- Simple flow path
the flow stable and accurate before the pressure fluctuation reaches the flow sensor.
Surface Sensor Material - Optimized This interrupts the feedback from the flow rate sensor to the control valve, and keeps
- Special - Large diameter to - 316LSS (Standard) the control valve opening at an optimum level..
electropolishing make clog-proof - 16LSS (Developed 3)
- Ni Sensor for CIFs - VIM-VAR (Option)
and HF What is the result of PI-function?
- Ni free sensor for
Output flow rate and pressure change will be significantly reduced in both the
CO and O3 Fig.: PI Function components
amount and timing. Downstream processing will be less influenced.

Multi-Gas / Multi-Range Function

MG / MR Benefits
A conventional mass flow controller only guarantees the flow rate accuracy with N2
● Allows one mass flow controller to handle two or more gas types and ranges
gas and one controller would only handle one type of gas and one full scale flow rate
range. This means, that customers need to have a dedicated mass flow controller for ● The need for dedicated devices is reduced to only a few models
each system, and for each process recipe. ● Reduces the capital investment and inventory liability
● Performance (precision and response) can be maintained after gas change
To get the flow rate conditions for your actual gas using a conventional MFC, a conver-
sion factor must be used as a coefficient to convert the flow rate. The reference values ● MG/MR is the biggest achievement that digital technology brought to MFC
for these coefficients have been based of a variety of values, including calculated val-
ues, actually measured values, and empirical values. And, these were merely guide-
lines or reference values with some gas types. N2 500 SCCM

With flow controllers equipped with the MG/MR function, you can have up to a lot of RS232
user recipes to match the intended flow range, and you can change the gas type and RS485
flow rate to match the actual gas you want to handle by changing the metering condi- Before conversion
tions instantly connecting the MFC to a personal computer.
Our actual gas flow rate accuracy warranty system backs up this MG/MR function. Host PC
With MG/MR mass flow controllers, in addition to the flow rate reference for N2 gas
(that ensures conformance with the national standard using the conventional gravi-
metric method), we installed full scale actual gas metering and exhaust gas process- After conversion
ing facilities at our factory. Using these facilities, measurement is made for each type
of gas at each full-scale range, and record the data. This is then used as actual gas
data.
Simple use of the MG/MR conversion program
Gas type and flow rate can be converting using an MG/MR with a simple GUI interface SF6 100 SCCM HBr 400 SCCM
O2 300 SCCM
conversion program. Connect the mass flow controller to a personal computer using a
digital communication cable, first select the gas type, and then flow rate units. A the
flow rate range will appear, change it and the setting is complete. Fig.: MG/MR driven device simplification

5
Implemented Functions
Valve Shut-off Function
VSO
Available only for series

The major purpose of the valve-shut-off function is to reduce the gas purge time that
is required to vent residual gas in the space between the downstream pneumatic
valve and the mass flow controller valve. The ordinary flow rate control valve installed
Construction: Integrates a miniature solenoid
in a mass flow controller cannot shut-off the gas completely. In order to overcome
driven penumatic valve (normally open). this problem, a valve is integrated near the downstream flow rate control valve, to
G Series MFC
enable the Valve Shut-off Function. This pneumatic valve is a normally fully open
Operation: Shuts off the gas inlet completely type. It absolutely shuts off all gas with a setting of 0 % or when a close fully signal
when set to 0 % or when connected to a is received. Also the volume of gas leaking (that could cause a gas surge) will be
close fully input signal
approximately 1/10 that in a combination of an ordinary mass flow controller and
pneumatic valve.
Dead volume 0.25 ccm (appr.
1/10 of a standard MFC) Diaphragm valve
Benefits
● VSO reduces the gas purge time
● Reduction of gas that can surge into a chamber
● Shorten the gas purge time needed to achieve a stable flow rate
Gas inlet Gas outlet
● Provides productivity improvements
● Reduces the amount of wasted expensive gas

Minature
pneumatic Pneumatic valve
valve operation air:
0.4 to 0.7 MPa

Solenoid to drive the

pneumatic valve

Fig.: Example - G2 Series construction

Flow Rate Verification Function

FVF
Available only for series

Flow rate verification is a method for verifying changes in the flow rate over time. It
compares reference data for normal operation when starting to the current flow rate
verification results at certain intervals.
Operation
A tank with an integrated pressure sensor and a side inlet valve are the main items
used for verification. At the beginning of the verification the MFC temporarily stops
the normal flow rate control and locks the opening position of the flow rate control
valve. Next, the side inlet valve closes.
The chart below shows the relationship between the internal tank pressure P and the
Fig.: Flow rate flow rate sensor output RO, with time on the horizontal axis and pressure and output
verification on the vertical axis. After closing the side inlet valve, P and RO change as shown
below. The amount of flow rate deviation (the verification value), can be obtained
from the ratio between flow rate when starting to use the MFC, and the results of the
The requirements for flow rate accuracy and repeatable performance of MFCs verification calculation after a certain period has elapsed.
are constantly growing. In manufacturing semiconductor devices, where process
margins are tight and stopping operation of the devices is not allowed, it must be Operation uses a special program on a personal computer. Another method is a stand
possible to evaluate the performance of the mass flow controller without removing alone operation using the MFC by itself. With this method, the zero reset switch on
it from the gas circuit. top of the main housing is used for the verification and the verification results are
shown on the LCD. This method does not need a personal computer. The third method
controls the operation with commands from a system.
In any of these methods, the basic operation procedures are the same. You can easily
calibrate a periodically verified flow rate.

Benefits
● You can identify risks that might otherwise cause significant damage to your
products
● Verifying changes in the flow rate over time
● Verification can be checked on a personal computer display or on the LCD
Fig.: Flow ● Prolongs the life of the mass flow controller
calibration ● Contributes to maintaining planned maintenance cycles

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MFC Series AERA®
Analog Mass Flow Controller FC-R7700
Highlights
Precise, economical, elastomer-sealed design. For process and equipment engineers working in the
As the field-proven standard for a range of applications, semiconductor, flat panel display, data storage, industrial
AERA® FC-R7700 series delivers precise flow vacuum, and industrial coating markets, this series provides
control, while offering the economic benefits of elastomer high reliability and superior performance for non-corrosive
seals. gas applications, including CVD, PVD, etch, ion implantation,
sputtering, thermal oxidation, optical glass coating, optical
Features fiber, surface treatment, and other coating processes.
● Elastomer seals
● VCR® , VCO®, and Swagelok® compatible connections Benefits
● Full-scale flow ranges from 10 SCCM to 200 slm
● Fast response < 2 sec flow setting time between set
● Normally-closed or normally open solenoid control valve
points
● Leak integrity of 1x10 -6 atm-cc/sec of He
● Easy integration - standard connectors and dimensions

Analog Mass Flow Controller FC-R 7800

Highlights
Corrosion resistant design. Superior results - high-quality
Precise, reliable, metal-sealed corrosion resistant design thin-film characteristics. Suits the majority of gas-controlled
AERA® FC-R7800 series delivers precise flow control, as well as applications. Convenience-enhancing features, such as
the corrosion resistance and high leak integrity standard electrical connectors and standardized critical
of metal seals, to suit the majority of gas-controlled applica- dimensions allow quick-and-easy replacement of existing
tions. mass flow controllers with no installation hassles.

Convenience-enhancing features, such as standard electrical

connectors and standardized critical dimensions
allow quick-and-easy replacement of existing mass flow
controllers (MFCs).
Features Benefits
● Metal seals ● Fast response < 1 sec flow settling time between set
● Corrosion resistance points
● VCR® , VCO®, and Swagelok® compatible connections ● Easy integration — standard connectors and dimensions
● Full-scale flow ranges from 10 SCCM to 200 slm ● Outstanding reliability
● Normally-closed or normally open solenoid control valve ● Superior results — high-quality thin-film characteristics
● Leak integrity of 1x10 -10 atm-cc/sec of He

Digital/Analog Mass Flow Controller FC-DR980 Implemented Functions

MG / MR
Highlights
Leading digital Multi-Gas/Multi-Range MFC, providing Easily field-programmable to run various gas types. For quick
superior versatility in various systems. gas and full-scale reassignment.
AERA® FC-DR980 series deliver performance excellence and Multiple output options enable analog or digital control. For
operational versatility, resulting in significant cost savings comprehensive monitoring and control capabilities, RS-485
and ease of use. communications (RS-232 with converter) , combined with a
Features full range of diagnostic and alarm functions, put operational
parameters at your fingertips.
● Multi-Gas/ Multi-Range selection
● Multi mode operation: analog, analog/digital and digital Benefits
modes for operation with any control system
● Superior accuracy, repeatability and stability
● Highly sensitive, rapid response and small diameter sensor
● Significant cost savings
● Piezoelectric control valves
● Superior operational versatility
● Multiple alarm and diagnostic capabilities
● Superior reliability
● Metal seals with a leak integrity of 1x10-10
● Electro-polished and ultra-cleaned gas-wetted surfaces

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MFC Series AERA®
Digital/Analog Mass Flow Controller TRANSFORMER
Transforms your process with greater flexibility and
lower cost of ownership. Implemented Functions
Suitable for a variety of applications, including CVD,
PVD, diffusion and etch, Transformer mass flow
controllers (MFCs) and mass flow meters (MFMs) will
MG / MR
transform your process, providing superior flexibility Highlights
and efficiency for improved yield, higher productivity, Advanced sensor and valve technology, field-proven
and lower cost of ownership. platform components and high-speed, digital circuitry
deliver very precise gas flow control. Transformer
Features
enables film deposition and etch characteristics that are
● All-metal seals and ultra-pure design not only extremely uniform, but also highly repeatable.
● Multi-gas, multi-range selection Designed with field-proven AERA® platform compo-
● Fast response nents and high-speed digital circuitry, Transformer has
● Field programmable achieved superior reliability performance with < 0.5%
● Wide range of gas selection without recalibration zero drift over one year and superior repeatability of
0.2% of full scale. Comprehensive communication and
● Long term zero point stability
control functions include flow, valve and CPU alarms,
● Multiple alarm and diagnostic capabilities gas-flow totalizing and ramping control, system over-
ride capabilities and in-situ gas and range custom-
ization. Transformer‘s outstanding technology
capabilities reduces overall costs by cutting inventory
Benefits
requirements (Just 8 Transformers can replace
● Outstanding accuracy, repeatability, and stability hundreds of spares and part numbers).
● Superior reliability
● Comprehensive communication and control
● Easy integration
● Substantial cost savings
● World-class service and support
● Just eight multi-gas, multi-range Transformer MFCs
can replace hundreds of spares and part numbers

Digital/Analog Mass Flow Controller FC-PI 980

Next-generation PI technology for tomorrow’s manu-
facturing demands. Highlights
With industry-leading flow control technology, AERA® This innovative technology platform provides faster
PI-980 Series pressure- insensitive MFCs anticipate the response, greater gas-flow stability and superior
increasing demands of next-generation semiconductor real-time process control when compared to previous
manufacturing processes, including etch, CVD, PVD and technologies. High-flow stability delivers greater cham-
diffusion. ber-to-chamber process repeatability for improved
production yields. Its’s design integrates traditional
Features thermal flow architecture with a pressure and tempera-
● All-metal seals and ultra-pure design ture sensor, and Neural Step control technology. This
● Pressure-insensitive operation creates a single, compact delivery package, eliminating
l Integrated self diagnostics the need for a number of costly gas panel components
traditionally utilized. Multi-gas, multi-range function-
● High accuracy and repeatability
ality dramatically reduces supporting inventory require-
● Integrated gas panel components ments, further enhancing cost efficiency. In addition
● Live gas certified, multi-gas,multi-range to integrated diagnostics, this next-generation MFC
configuration technology has been combined with our field-proven
● Field programmable D980 series product platform design to increase system
● DeviceNet™, RS-485, and analog control uptime and make trouble shooting quick and easy.
Benefits
Implemented Functions ● Improved gas delivery performance and production

PI
yields
● Easy integration on tool
● Substantial gas panel cost savings
● Reduced gas panel footprint
● Real-time communication and control
● World-class service and support

8
MFC Series AERA®
Overview Mass Flow Controllers

Model FC-R 7700 FC-R 7800 FC-DR980 Transformer FC-PI 980

Type Analog MFC Analog MFC Analog/digital MFC Analog /digital MFC Analog/digital MFC
Short Precise, economical, Precise, reliable, Providing superior Transform your Next-generation PI
elastomer-sealed metal-sealed design versatility in various processes with greater technology for tomor-
design systems flexibility and lower cost row’s manufacturing
of ownership demands
Functions MG/MR MG/MR PI
Control modes Analog 0 - 5V Analog 0 - 5V Analog 0 - 5V / Analog 0 - 5V / Analog 0 - 5V / Ethernet,
DeviceNet™ and RS485 DeviceNet™ and RS485 DeviceNet™ and RS485
Specialties Corrosion resistant Multiple alarm & Field programmable. Pressure insensitive. Su-
design. Superior results diagnostic capabilities. Wide range of gases perior real-time process
- high-quality thin-film Multi-gas, multi-range, without recalibration. control. Real time com-
characteristics. multi-mode. Comprehensive commu- munication and control.
nication and control Live gas certified.
Flow range 0,01-200 SLM 0,01-200 SLM 0,01 - 50 SLM 0,01 - 30 SLM 0,005 - 100 SLM
Normal operat- 5 bar / 70 psi 5 bar / 70 psi 5 bar / 70 psi 5 bar / 70 psi 7 bar / 100 psi
ing pressure
Response time < 2 sec < 1 sec < 1 sec < 1 sec < 1 sec
Accuracy < 1,0 % of FS* < 1,0 % of FS* < 0,25% FS/ 1% of SP** < 0,25% FS/ 1% of SP** < 0,25% FS/ 1% of SP**
Stability < 0,5 % / 1 % of FS* < 0,5 % / 1 % of FS Superior Superior Superior
< 0,5 % of FS < 0,5 % of FS < 0,5 % of FS
Repeatability < 0,2 % of FS < 0,2 % of FS < 0,15 % of FS < 0,2 % of FS < 0,25 % of FS
Sealing Elastomer design Metal design Metal design Metal design Metal design
Leak 1x10 -6 atm-cc/sec 1x10 -10 atm-cc/sec 1x10 -10 atm-cc/sec 1x10 -10 atm-cc/sec 1x10 -10 atm-cc/sec
integrity of He of He of He of He of He

Connections VCR® , VCO® and VCR® , VCO® and VCR®, IGS (C or W seal) VCR®, IGS (C or W seal) VCR®, IGS (C or W seal)
Swagelok® comp. Swagelok® compatible
Control valve NO or NC solenoid NO or NC solenoid NO or NC piezoelectric NO or NC solenoid NO or NC piezoelectric
Alarm and Multiple capabilities Multiple capabilities Multiple capabilities
diagnostics
Easy Standard connectors Standard connectors Replacing other Easy integration on tool
integration and dimensions and dimensions brands—with no
installation hassles
Cost Effective and precise Allows quick-and-easy Dramatically reduction Reduces overall costs Substantial gas panel
aspects design replacement of existing of spare inventory by cutting inventory re- cost savings. Increasing
mass flow controllers quirements, can replace system uptime and make
any other MFC used in troubleshooting easy
the process, regardless
of gas type

*) FS = Full scale, value depends on model. **) SP = Setpoint, value depends on setting: <25% of FS: 0,25 % of FS, 25-100 % of FS: 1% of SP.

Response or Settling Time stable flow levels through short-term effects such as Zero drift has been essentially eliminated in AERA® flow
The time that it takes, for actual flow, it to stabilize after pressure and temperature changes, and through lang- products. The typical zero drift of our MFCs is less than
a set point change has been made. term effects such as aging of the component parts. 0.5% of full-scale flow over a period of one year. This is
Zero Drift the result of using the highest-quality sensor wire and
Repeatability electrical components on the PC board. Perhaps more
Another primary factor is the repeatability of actual flow Zero drift is the most common complaint of MFC users.
It is a time-dependent shifting of the zero calibration importantly, the sensors assembled in our MFC, are
for an MFC or from one MFC to another at any set point. subjected to extreme burn-in procedure and stringent,
point from its original zero value to an offset value, and
Linearity is generally caused by aging effects of various electrical multiple QC inspections to screen out all marginal
Linearity is the straightness of the curve of actual flow components on the PC board as well as by aging of the components.
vs. set point, in other words, accuracy over the entire sensor windings. The aging phenomenon that results in Thus means, we do not hide the zero drift move, we
flow range. zero drift not only causes a shift in the zero calibration prevent it.
Stability point but also a shift of the entire curve of control
Stability refers to the ability of an MFC to maintain voltage vs. flow.

9
MFC Series SAM®
Digital/Analog Mass Flow Controllers series SFC-F
SFC-F is the basic series of compact digital MFCs.
Features
Benefits
● Diaphragm direct sealing valve ● No need to switch gas piping
● Outstanding control characteristics
● Original digital control method ● A wealth of data resources available
● Large amounts of data are available
● High accuracy by digital multi-point calibration ● Very low differential pressure < 10 Torr available
● MFC selection according to service gas type,
● High accuracy at low flow set-points ● Simple valve structure allows high Cv-value reserve operation pressure and temperature conditions
● Long-time stability of zero despite compact dimensions
● Minimized dead space

G series
Integrated
pressure/ PI Function
Valve temp. sensors
MG/MR
shut-off
Function
function

Dual range Small Flow rate

Inline flow rate
type zero drift accuracy
verification and
self calibration guaranteed

Diaphragm
direct sealing F series
valve
Fig.: SAM MFC
functionalities

All in One Functionality

With SAM’s advanced technologies, such as its reliable diaphragm valve structure,
digital control, etc., the G series offers innovative features that can be used for a
variety of new functions. Hitachi Metals is developing a product lineup that best
meets user’s needs, such as an all-in-one mass flow controller that includes all the
functions along with models that include only desired functions.

Sectional View
The G series controllers are all-in-one mass flow controllers ready for
the next generation of requirements for guaranteed accuracy with the
actual gas, MG/MR, PI, valve shut off, and flow rate verification.

Fig.: Sectional view with diaphragm

10
MFC Series SAM®
Series SFC-1480F

SFC-1480F Series is a basic series of compact digital Mass

Flow Controllers offering very low flow.
Features Benefits
● Very fast response < 0,7-1,2 sec flow settling time ● Monitoring of operation using digital interface is
● Metal / rubber seals possible
● Flow 1 SCCM - 20 SLM (12 models available) ● Minimal particle generation
● Leak integrity < 1x10 -11Pa m3/s He (Viton 10 -8) ● Long operation life

Series SFC-1580/1680F
SFC-1580/1680F series is the high temperature version of compact digital Mass Flow Controllers.

Features Benefits
● Higher operating temperature 150 °C ● Application into high temperature processing
● Built-in structure to prevent recondensation ● Easy integration - standard connectors and
● Fast response < 1 sec flow settling time dimensions
● Metal seals
● Flow 10 SCCM - 30 SLM (14 models available)
Highlights
● Leak integrity < 1x10 -11 Pa m3/s He
A separate control unit with heat proofed connection, a
lower sensor heating temperature, and high tempera-
Higher ture piezo-stack are used. A simple valve structure,
which does not compress and expand gas, prevents
Operating Temperatures re-condensation. MFC F series with separate Control Unit SCU 1500

Series SFC-1480/2480FX Implemented Functions

This highly advanced SAM® brand model with advanced

sensor and valve technology, field-proven components
and high-speed, digital circuitry delivers precise flow
MG / MR PI
control even at very low flow rate down to 1 SCCM.
Features Highlights
● Multi-gas, multi-range selection Designed with field-proven components and high-
● Pressure-insensitive operation speed digital circuitry, FX has achieved superior
reliability performance with < 0.5 % zero drift over one
● Diaphragm direct sealing valve
year and superior repeatability of 0.06 % of full scale.

DN
● Extremely reliable coil type thermal sensor Comprehensive communication and control functions
● Guaranteed precision include flow, valve and CPU alarms, gas-flow totalizing
● Extremely corrosion-proof with stable control and ramping control, system override capabilities and
waveform NiCo alloy diaphragm in-situ gas and range customization. FX‘s outstanding
● Unique, special electro-polished surfaces technology capabilities reduces overall costs by cutting
● High corrosion resistance inventory requirements.
● Low flow rates available (1 SCCM)
● Comprehensive alarm functions

Benefits
● Outstanding accuracy, repeatability, and stability
● Impressive alarm and diagnostic functions
● Comprehensive communication and control
● Superior reliability flexibility
● Greater flexibility and lower cost of ownership

11
MFC Series SAM®
Overview F Series

Model SFC 1460 F SFC 1470 F SFC 1480 F SFC 1580/1680 F SFC 1570/1670 F
Short Compact low flow model Compact quick response Compact quick response High temperature, quick High temperature, quick
models models response models, re- response models
condensation preventing
Flow range 0,001-0,01 SLM Flow customer specified 10 - 20 SLM 0,01-30 SLM Flow customer specified
Specialties Very low flow, vacuum Very low differential Very low flow, vacuum Very low flow, vacuum Very low differential
serving. Minimized dead pressure less than 0,2 psi. serving. Minimized serving. Minimized pressure less than 0,2 psi.
space and particle genera- Minimized dead space and dead space and particle dead space and particle Minimized dead space
tion. particle generation. generation. generation. and particle generation.
Operating pressure 7 - 44 psi Customer specified 7 - 44 psi 7 - 44 psi Customer specified
Operating 5 - 50°C 5 - 50°C 5 - 50°C 5 - 80°C / 150°C (1680F) 5 - 80°C / 150°C (1670F)
Temperature °C
Response Time < 2 sec < 1 sec < 1 sec 0,7 - 1,2 sec 0,7 - 1,2 sec
Control Valve NC or NC piezoelectric NO or NC piezoelectric NO or NC piezoelectric NO or NC piezoelectric NO piezoelectric
Leak integrity 1x10-10 atm-cc/sec of He 1x10-10 atm-cc/sec of He 1x10-10 atm-cc/sec of He 1x10-10 atm-cc/sec of He 1x10-10 atm-cc/sec of He
(rubber sealing 1x10 -8)"

Overview FX- and G-Series

Normal operating pressure: 7 - 44 psi, Operating temperature: 5 - 50°C, Response time:< 1 sec, Surface treatment: Special electropolishing.

Model SFC 1480/2480 FX SFC 1480/2480 G1 SFC 1480/2480 G2 SFC 1480/2480 G3 SFC 1480/2480 G4
Type Digital MFC/MFM Digital MFC/MFM Digital MFC/MFM Digital MFC/MFM Digital MFC/MFM
MG/MR function x x x x x
PI function x x x x
Valve shut-off x x x
function
Flow rate verifica- x
tion function
LCD display unit x x x
Flow range 0,001 - 50 SLM 0,005 - 50 SLM 0,005 - 50 SLM 0,005 - 0,05 SLM 0,005 - 50 SLM
Communication DeviceNet™, RS-485, RS232 DeviceNet™, RS-485, DeviceNet™, RS-485, RS232 DeviceNet™, RS-485, DeviceNet™, RS-485,
and analog RS232 and analog and analog RS232 and analog RS232 and analog
Specialties Extremely reliable thermal PI function reduces gas 100% shut-off valve reduces Including features of G1 + Outstanding top model
coil sensor. Reduced supply inlet pressure gas surge into a chamber G2; G3 offers a LCD display offering all available
particular contamination, fluctuation influence in and gas purge time, provides unit. LCD display (temp, functions. LCD display
high corrosion resistance, the actual flow rate. LCD productivity improvements. pressure, set, output) (temp, pressure, set,
outstanding control perfor- display (temp, pressure, LCD display (temp, pressure, output)
mance. LCD display (temp, set, output) set, output)
pressure, set, output)
Control valve NO or NC piezoelectric NO pneumatic NO pneumatic NO pneumatic NO pneumatic
Sealing metal design metal design metal design metal design metal design
Leak integrity 1x10 -10 atm-cc/sec of He 1x10 -10 atm-cc/sec of He 1x10 -10 atm-cc/sec of He 1x10 -10 atm-cc/sec of He 1x10 -10 atm-cc/sec
of He
Connections W/C/H1G seal, 1/4" HMJ W/C/H1G seal, 1/4" HMJ W/C/H1G seal W/C/H1G seal W/C/H1G seal
male male
Alarm and diag- Comprehensive alarm and Comprehensive alarm and Comprehensive alarm and Comprehensive alarm and Comprehensive alarm
nostics diagnostic functions diagnostic functions, LED diagnostic functions, LED diagnostic functions, LED and diagnostic func-
display display display tions, LED display

12
MFC Series SAM®
Digital/Analog Mass Flow Controllers series G1 - G4
From the release of the first SAM® Flow controller, SAM® Features Benefits
controllers continue in the tradition of perfection. Now ● Guaranteed control accuracy ● Outstanding repeatability, accuracy and stability
SAM® brand G models satisfy the demand for the next
● Integrated pressure/temperature sensors ● Impressive alarm and diagnostic functions
generation of semiconductor production meeting or
exceeding the next generation of requirements. ● Extremely corrosion-proof with stable control ● Comprehensive communication and control
waveform NiCo alloy diaphragm ● Superior reliability flexibility
The MG/MR function handles two or more gases and ● Diaphragm direct sealing valve ● Greater flexibility and lower cost of ownership
ranges and reduces the capital investment and inventory
● Unique, special electro-polished surfaces
liability. Even though G series provide a flow rate accuracy
guarantee for the actual gas type, the precision and ● High corrosion resistance
Highlights
response of the flow can be maintained after any change. ● Comprehensive alarm functions
G1 has achieves superior reliability performance
PI function reduces gas supply inlet pressure fluctuation with < 0.5 % zero drift over one year and superior
influence on flow rate by sensing changes with a repeatability of 0.01 % of full scale. Comprehensive
supplementary incorporated pressure sensor. From there communication and control functions include flow,
control valve will be kept opening at optimum level. sensor and side inlet valve) and reporting deviations by
valve and CPU alarms, gas-flow totalizing and ramping
comparing measured with previously recorded data. By
Usually a pneumatic control valve is installed up and control, system override capabilities and in-situ gas
that, risks may be identified soonest without causing
down stream to shut of gas stream completely if and range customization. G‘s outstanding technology
damage and the MFC’s life might be prolonged.
necessary. But sometimes leaking gas may be left over capabilities reduces overall costs by cutting inventory
in-between. To avoid unwanted gas surge because of An LCD display (temp, pressure, set, output) easifies any requirements.
that, a positive shut-off valve function (VSO) with an necessary control routines.
ultra-small pneumatic valve linked to the control valve G series achieves superior reliability performance
has been integrated. with < 0.5 % zero drift over one year and superior
Wherever process margins are tight and the repeatability of 0.01 % of full scale. Comprehensive
interruption of ongoing processes is not possible, communication and control functions include flow,
MFC’s performance must be possible to be valve and CPU alarms, gas-flow totalizing and ramping
evaluated without removing it from the gas circuit. control, system override capabilities and in-situ gas
In line flow verification and self calibration functions and range customization. G‘s outstanding technology
(FVF) turns that demand into reality, integrating a capabilities reduces overall costs by cutting inventory
verification system (tank and integrated pressure requirements.

Implemented Functions
Series 1480/2480 G1
G1 models satisfy the demand for the next generation of Benefits
MG / MR PI DN
semiconductor production.
● Great inlet pressure change insensitivity
Features ● Allows one mass flow controller to handle two or more
● Multi-gas, multi-range selection gas types and ranges
● Pressure-insensitive operation ● The need for dedicated devices is reduced to only a
Valve shut-off function few models
● LCD display (temp, pressure, set, output) easifies ● Reduces the capital investment and inventory liability
control routines ● Performance maintained after gas change

Series 1480/2480 G2
G2 models satisfy the demand for the next generation
DN Benefits
of semiconductor production. ● Shortening gas purge time needed
Features ● Complete gas shut-off
● Multi-gas, multi-range selection ● Gas leaking volume 1/10 related to that with a
● Valve shut-off function standard combination (MFC and pneumatic valve)
● Self calibration function ● Reduction of gas surge
● Allows one mass flow controller to handle two or more
gas types and ranges
Implemented Functions ● The need for dedicated devices is reduced to only a

MG / MR VSO
few models
● Reduces the capital investment and inventory liability
● Performance maintained after gas change

13
MFC Series SAM®
Implemented Functions
Series 1480/2480 G3

G3 models satisfy the demand for the next generation

MG / MR PI VSO
of semiconductor production
Features ● Reduces the capital investment and inventory liability
● Multi-gas, multi-range selection ● Performance maintained after gas change
● Pressure-insensitive operation PI ● Shortening gas purge time needed
● LCD display (temp, pressure, set, output) easifies ● Complete gas shut-off
control routines ● Gas leaking volume 1/10 related to that with a
● Self calibration function standard combination (MFC and pneumatic valve)
● Reduction of gas surge
Benefits ● Allows one mass flow controller to handle two or more
● Great inlet pressure change insensitivity gas types and ranges
● Allows one mass flow controller to handle two or more ● The need for dedicated devices is reduced to only a
gas types and ranges few models
● The need for dedicated devices is reduced to only a
few models
● Reduces the capital investment and inventory liability
● Performance maintained after gas change DN

Series 1480/2480 G4 Implemented Functions

G4 models is the most advanced MFC meeting or

MG / MR PI VSO FVF
exceeding the demand of the actual and also the next
generation of semiconductor production.
Features ● Gas leaking volume 1/10 related to that with a
● Multi-gas, multi-range selection standard combination (MFC and pneumatic valve)
● Pressure-insensitive operation ● Reduction of gas surge
● Valve shut-off function ● Allows one mass flow controller to handle two or more
● In-line integrated flow verification system gas types and ranges
● Self calibration function ● The need for dedicated devices is reduced to only a
few models
● LCD display (temp, pressure, set, output) easifies
control routines ● Reduces the capital investment and inventory liability
● Performance maintained after gas change
Benefits

DN
● Great inlet pressure change insensitivity
● Allows one mass flow controller to handle two or more
gas types and ranges
● The need for dedicated devices is reduced to only a
few models
● Reduces the capital investment and inventory liability
● Performance maintained after gas change
● Shortening gas purge time needed
● Complete gas shut-off

14
Our Company
The GCE Group
The GCE Group is Europe’s leading gas-equipment leaders within their own respective regional markets Netherlands representing an almost unequaled wealth
company and organized according to four main business and applications. of experience of gas supply handling and device.
areas: Process Applications, Cutting and Welding, Medi-
The GCE Group’s headquarters are located in Malmö, In addition to certification according to the ISO 9001
cal and High Purity.
from our central stock location in Prague we service quality standard, products are tested and certified by
Today’s product portfolio corresponds to a large variety more than 8,000 customers across the world. BAM, BSI, Norske Veritas, US DOT , UL, CEN, DIN and SIS,
of applications, from simple pressure regulators and among others.
blowpipes for Cutting and Welding to sophisticated gas Founded in 1968 the group now has in total 18
supply systems for medical and electronics industry subsidiaries located in China, Czech Republic, France, The GCE Group has grown rapidly since its establishment
applications. GCE’s portfolio includes a large number Germany, Hungary, India, Italy, Panama, Poland, Portu- and is leading the restructuring of the European gas-
of brands such as Butbro, Charledave, DruVa, Mediline, gal, Romania, Russia, Spain, Sweden and the UK, with equipment industry through mergers and acquisitions.
Mujelli, Propaline, Rhöna and Sabre Medical, which are additional local sales offices in Austria, Denmark and the The group currently employs approximately 900 people.

Calibration - Service - Maintenance: Precise, quick and close to our customers

Repair, cleaning and calibration of MFC’s
Based upon a long experience in solid state, plasma
and high-frequency technologies the laboratory’s main
purposes of activity are technological and technical
sophisticated solutions as well as quick, professional
assistance especially by:
• Technology acceptance test in our facilities
• Cooperation with leading equipment suppliers for the
vacuum thin film technology and related components as
for example high frequency power supplies Measuring equipment and power supplies Service and Support for our customers
• Collaboration with Research centers and Universities
with the latest measuring and analysis equipment. • RF / VHF measuring instruments. • Repair, change calibration, re-calibration, full-service,
• RF / VHF power supply up to 100 MHz. upgrade-service.
Facilities, Equipment • Optical emissions spectroscopy. • Repair of regenerated and used devices.
Clean rooms for assembly and repair of processing • Temperature array sensors.
• 24 h service seven days a week.
equipment. • Vacuum measuring instruments.

FAP GmbH Dresden - Gostritzer Str. 67 - 01217 Dresden/Germany - Tel.: + 49 351 8718110 - Fax: + 49 351 8718416 - E-mail: [email protected]
15
 GCE worldwide - We are close to you !
Germany Italy Russia
GCE GmbH GCE Mujelli spa GCE Krass OOO
Weyherser Weg 8 Via F. Cervi, 11 Russian Federation
36043 Fulda 37036 San Martino B.A. (VR) 129343, Moscow,
Phone: +49 (0)661-8393-0 Phone: +39 045 878 0 525 Urzhymskaya Street, no 4
Fax: +49 661 8393 25 Fax: +39 045 878 0 750 Phone: +7 495 745 26 99
[email protected] [email protected] Fax: +7 495 745 26 90
[email protected]
Czech Republic Poland
GCE Trade s.r.o. GCE Sp z o.o. Spain
Zizkova 381 ul. Drapińska 12 GCE Ibérica
CZ-583 01 Chotebor 03-581 Warszawa C/ San Romualdo 12-14 3° 5
Phone: +420 569 661 122 Phone: +48 22 511 23 57 E-28037 Madrid
Fax: +420 569 661 107 Fax: +48 22 677 70 90 Phone: +34 91 571 98 74
[email protected] [email protected] Fax: +34 91 571 27 56
[email protected]
France Portugal
GCE S.a.s. GCE Portugal Sweden
70, rue du PUITS CHARLES Rua de Vila Boa, nş10, casa 16 GCE Norden AB
BP N° 40110 PT-4520-160 Sta Maria da Feira Källvattengatan 9
FR-58403 La Charité-sur-Loire Phone: +351 256 373 682 200 21 Malmö
Phone: +33/3 86 69 46 00 Fax: +351 256 378 260 Phone: +46-40-388300
Fax: +33/3 86 70 09 15 [email protected] Fax: +46-40-388353
[email protected] [email protected]
Romania
Hungary GCE Romania S.R.L United Kingdom & Ireland
GCE Hungária Kft. 22, Al.Puskin Street, Ap.1, GCE Ltd.
II. Rákóczi Ferenc út 90/B Bucharest 1, 011996 Yew Tree Way, Stone Cross Park
H-2314 Halásztelek Phone: +40 21 316 76 72 Golborne, Warrington WA3 3JD
+36 (24) 521 200 Fax: +40 21 316 76 74 Phone: +44 (0)1942 29 29 50
Fax: +36 (24) 521 201 [email protected] Fax: +44 (0)1942 29 29 77
[email protected] [email protected]

India P.R. China

GCE India Pvt Ltd.Headquarter No.4 Building, 318 Xiao Wan Road
‘Prem-Bagh’ 1st floor Fengxian District, Shanghai 201401,
31 Benson Road, Benson Town Phone: +86-21-37198408
Bangalore 560046, Karnataka Fax: +86-21-37198617
Phone/Fax: +91 80 23631685
[email protected]

www.gcegroup.com
16