Ultrasonic Machinings
Ultrasonic Machinings
Abstract:
This study presents a new method called template-based electrophoretically assisted micro-ultrasonic
machining (TBEPAMUSM) to create precise microchannels on tough materials like silicon and glass.
By applying a DC field, tiny abrasive particles stay in the machining area, allowing efficient and
accurate channel shaping. Tests showed that larger particles and higher ultrasonic power increased
material removal, while the right abrasive concentration and DC voltage improved both removal rate
and surface smoothness. The best settings were 70% ultrasonic power, 18 µm particle size, 18%
concentration, and 40 V DC.
Objectives:
Explore how electrophoretic assistance USM can improve the presence of fine abrasive
particles in the machining area, enhancing precision.
Investigate the impact of key process parameters—abrasive particle size, concentration,
ultrasonic power, and DC voltage—on material removal rate (MRR) and surface roughness
(SR).
Identify optimal parameter settings that balance machining quality with efficiency for the
process.
Experimental Setup:
1) Power Part:
o DC Power Supply: Provides an electrophoretic field with positive terminal on the microchannel
template and negative on the auxiliary electrode.
2) Machining Part:
o Annular Auxiliary Electrode: Positioned in the working-fluid tank with the workpiece.
3) Control Part:
o Industrial Computer, Data Cards, PI Controllers, Sensors: For monitoring and controlling
machining parameters.
4) Motion Part:
o 3D Micro Motion Platform: Provides precise movement with a range of 102 mm × 102 mm ×
25 mm and 0.1 μm resolution per axis.
Ultrasonic Power: Higher ultrasonic power (90%) increased both MRR and SR, with 70%
power providing the best balance for quality machining.
Optimized parameters for minimal SR and maximum MRR were found to be 13 μm particle size, 40 V
electrophoresis voltage, 18% concentration, and 70% ultrasonic power.
Reference:
Haishan Lian, Cuiyuan Deng, Linpeng Zhang, Yuandong Mo, Junfeng He, Zhongning Guo, The
International Journal of Advanced Manufacturing Technology (2023) 129:5287–5302
https://doi.org/10.1007/s00170-023-12605-5