Vacuum Equipment

Vacuum Ejector Variations

ZK2 ZQ

P.55 P.101

Series

Digital pressure switch with an energy saving Compact type vacuum ejector with a width of
function is mounted. Suction flow is 10 mm and a weight of 109 g. Has vacuum
increased by the two-stage ejector. Both the pressure switch LED display.
Features single unit and manifold are applicable to
reduced-wiring. Valve with a self-holding
function ensures power saving. Can also
accommodate a pump system.
Vacuum pump system  
Nozzle diameter [mm] 0.7 1.0 1.2 1.5 0.5 0.7 1.0
Max. suction flow [L/min(ANR)] 29 44 61 67 5 10 22
Air consumption [L/min(ANR)] 24 40 58 90 14 23 46
2       
4       
6       
Guidelines for applicable pad diameter [mm]∗

8       
10       
13       
16      
20      
25     
32     
40    
50   
63  
80  
100  
125  
150 
200
250
With valve  
With filter  
With silencer  
With manifold  
Switch output  
Vacuum pressure
switch Digital display  
Analog output (Pressure sensor) 
Single unit, Width dimension [mm] 15 10
Single unit, Weight [g] 81 109
∗ It is assumed as a basis that one pad is used for one ejector. The sizes given should only be regarded as guidelines.
The optimal pad size may differ depending on factors such as piping conditions, desired ducts, etc. Be sure to confirm
the selection method described in the catalog and make a selection accordingly.

2
 4
Best Pneumatics
Vacuum Ejector Variations

ZR ZB ZL

P.131 P.181 P.207

Necessary functions can be combined Quick response, Energy saving, Compact/ Suction flow rate increased by a 3-stage
through modular design. Lightweight diffuser construction.
Double solenoids provide a self-holding With vacuum pressure switch, Can copy Functions such as a digital vacuum
function. to up to 10 switches simultaneously. switch or a vacuum pressure gauge can
Can also accommodate a vacuum pump. be selected.

 
1.0 1.3 1.5 1.8 2.0 0.3 0.4 0.5 0.6 1.2 1.2 x 2
25 42 63 74 95 2 3.5 4.5 7 100 200
53 86 102 155 194 3.5 6.5 10 18 63 126
          
          
          
          
         
        
       
       
      
      
     
     
    
    
    
   
  
 
 
  
  
   
 
   
   
   
31 10 36 40
275 46 600 800

3 A
Vacuum Equipment

Vacuum Ejector Variations

ZH ZU

P.221 P.261

Series

Can be connected with the combination of a Vacuum port and supply port are located
one-touch and a screw-in connection. collinearly to facilitate piping.

Features

Vacuum pump system

Nozzle diameter [mm] 0.5 0.7 1.0 1.3 1.5 1.8 2.0 0.5 0.7
Max. suction flow [L/min(ANR)] 6 12 26 40 58 76 90 7 12
Air consumption [L/min(ANR)] 13 27 52 84 113 162 196 14 29
2         
4         
6         
Guidelines for applicable pad diameter [mm]∗

8         
10         
13         
16       
20       
25     
32     
40    
50    
63   
80   
100   
125  
150 
200
250
With valve
With filter
With silencer 
With manifold
Switch output
Vacuum pressure
switch Digital display
Analog output
Single unit, Width dimension [mm] 14 to 22 12.8
Single unit, Weight [g] 5 to 23.3 7

4
 4
Vacuum Equipment Best Pneumatics
Air Suction Filter Variations
ZFA ZFB ZFC

P.276 P.279 P.281

Series

Pleated element provides a Unrestricted 360° piping tube IN/OUT straight piping
large filter area. mounting With One-touch fitting
Adaptable for a manifold With One-touch fitting
Features application

Screw-in 1/8 1/4 — — — — — — — — —

Port
size Applicable tubing O.D.
for One-touch fittings (Metric) — — 4 6 8 10 4 6 8 10 12

20
Air flow [L/min(ANR)] 50 200 10 30 50 75 10 70 80 100
30
Filtration [µm] 30 30 5

Vacuum Filter Suction Filter

AFJ Series ZFC050
P.779 P.272

5
Vacuum Equipment

Vacuum Pad Variations ZP3/ZP3E/ZP2/ZP Series

Pad Diameter List : ZP3 series : ZP3E series ): ZP2 series D: ZP series

Pad type Symbol

0.8 1.1 1.5 2 3 3.5 4 5 6 7 8 9 10 11 13 14 15
D — )Note)
U — —  ) — D — D — D — D — —
  D
MU — — — )Note) — )Note) )Note) )Note) )Note) — )Note) — )Note) — — — )Note)
Flat
EU — — — )Note) — — )Note) — )Note) — ) — — — — — )

AU — — — ) ) — ) — ) Note)
— ) — — — — — —

Flat with rib C — — — — — — — — ) ) ) — D — D — —

Flat with
groove UM — — — — — —  —  —  —  —  — —

Bellows type
with groove BM — — — — — — — — — — — — — — — — —

Thin flat
(pad) UT — — — — — — — ) ) — — — D ) D ) —

Thin flat
with rib CT — — — — — — — — — — — — D — D — —

— )Note) )Note) D D
B — — — — — — — — — — — —
 D D  
J — — — — — — — — ) — — ) ) Note)
— — ) )Note)
Bellows (pad)
MB — — — — — — )Note) — )Note) — )Note) — )Note) — — — )Note)

ZJ — — — ) — — ) ) ) — — — — — — — —

Deep D — — — — — — — — — — — — D — — — —

Nozzle pad AN ) ) — — — — — — — — — — — — — — —

Flat pad MT — — — — — — — — — — — — ) Note)

— — — )Note)
4 x 10 5 x 10 6 x 10
3.5 x 7 4 x 20 5 x 20 6 x 20 8 x 20
W —
) 4 x 30 5 x 30 6 x 30
8 x 30
Oval pad — — — — ) ) ) — ) — — — — — —
2x4 3.5 x 7 4 x 10
U D D D — — —

Flat H — — — — — — — — — — — — — — — — —

HT — — — — — — — — — — — — — — — — —
Heavy-duty pad
Bellows HB — — — — — — — — — — — — — — — — —

Oval HW — — — — — — — — — — — — — — — — —

U — — — — — — ) — ) — ) — ) — — — —
Mark-free pad
Related pad H — — — — — — — — — — — — — — — — —

Sponge pad S — — — — — — ) — ) — ) — ) — — — )
Resin
attachment K — — — — — — — — ) — ) — ) — ) — —

Pad with ball

spline buffer U — — — ) — — ) — ) — ) — — — — — —

H — — — — — — — — — — — — — — — — —
Heavy-duty
ball joint pad
HB — — — — — — — — — — — — — — — — —

Non-contact gripper Made to Order Note) The ZP2 series is blast type.

The ZP3 series is available from ø1.5 to ø16. If you need other sizes or shapes, choose from the ZP or ZP2 series.

6
 4
Best Pneumatics
Vacuum Pad Variations

Pad diameter Page Page Page Page

Symbol of of of of
16 18 20 25 30 32 40 46 50 63 80 100 125 150 250 300 340 ZP3 ZP3E ZP2 ZP

D — D D — D D — D — — — — — — — — U P.324 — P.528 P.637

— — — — — — — — — — — — — — — — — MU — — P.529 —

— — — — — — — — — — — — — — — — — EU — — P.532 —

— — — — — — — — — — — — — — — — — AU — — P.535 —

D — D D — D D — D — — — — — — — — C — — P.528 P.637

 — — — —   —      — — — — UM P.324 P.404 — —

— — — — —   —      — — — — BM — P.404 — —

P.528
D ) ) — — — — — — — — — — — — — — UT — —
P.537

D — — — — — — — — — — — — — — — — CT — — — P.637

D — D D — D D — D — — — — — — — — B P.324 — P.528

) — — ) Note)
) Note)
— — — — — — — — — — — — J — — P.540 —

— — ) — — — — — — — — — — — — — — MB — — P.541 —

— — — — — — ) ) — — — — — — — — — ZJ — — P.543 —

D — — D — — D — — — — — — — — — — D — — — P.637

— — — — — — — — — — — — — — — — — AN — — P.536 —

— — Note)
) ) Note)
) Note)
— — — — — — — — — — — — MT — — P.538 —

W — — P.550 —
— — — — — — — — — — — — — — — — —

U — — — P.637

— — — — — ) D — D D D D D — — ) ) H — — P.566 P.582

— — — — — — — — — — — — — ) ) — — HT — — P.566 —

— — — — — ) D — D D D D D ) — — — HB — — P.568 P.582

30 x 50
— — — —
) — — — — — — — — — — — — HW — — P.569

) — — ) — ) ) — ) — — — — — — — — U — — P.560

— — — — — — ) — ) ) ) ) ) — — — — H — — P.561

— — — — — — — — — — — — — — — — — S — — P.563
—
) — ) ) — ) — — — — — — — — — — — K — — P.562

— — — — — — — — — — — — — — — — — U — — P.557

— — — — — — ) — ) ) ) ) ) — — — — H — — P.570

— — — — — — ) — ) ) ) ) ) — — — — HB — — P.576

Products other than above Vacuum pad for Vacuum pad Vacuum saving
transferring disks…P.592 for fixing panel…P.593 valve…P.627

7
Vacuum Equipment

Vacuum Pad ZP3 Series

Overall length is shortened. In the case of Flat type (Pad diameter: ø2)

Pad unit Max. 9 mm shortened With adapter Max. 11 mm shortened

Actual size Actual size

12 19.5
mm mm

8.5 mm
3 mm

ZP3 ZP (Current model)

ZP3 ZP (Current model)

Space-saving ø2 piping reduces working space!

ø2 ø4
Area Vertical Lateral
75%
• Male thread • Female thread
• Female thread • Barb fitting (Applicable tubing: ø2)
• Barb fitting (Applicable tubing: ø2) • One-touch fitting (Applicable tubing: ø2)
ø2 x 7 pcs. reduced ø4 x 7 pcs. • One-touch fitting
Area Area (Applicable tubing: ø2)
28.26 mm2 113.04 mm2

Barb fitting One-touch fitting Barb fitting One-touch fitting

Variations Pad diameter ø1.5 added!

Pad diameter
Type
ø1.5 ø2 ø3.5 ø4 ø6 ø8 ø10 ø13 ø16
Flat

Flat
with groove

Bellows

8
 4
Best Pneumatics
ZP3 Series Vacuum Pad

Excellent functions

 Excellent functions 
 Construction to prevent diameter
pad from coming off
Pad

 Easier identification
from
Adsorption surface is shot-blasted ø1.5 SMC logo mark
New shape for
Micro-dents and bumps on connecting
the surface facilitate easy with the
removal. adapter
With groove prevents the
pad from
Less contact surface with the coming off.
workpiece makes it easy to
remove.


 Fixing boss allows easy mounting and repeatability.
Fixing boss

Compact buffer body


 Overall length is shortened.  Short stroke type: 3 mm added

∗ Lateral
vacuum inlet
Max.

55.5 mm
shortened

ZP3 ZP 3 mm 6 mm 10 mm 15∗ mm 20∗ mm

Pad diameter ø8, Flat, With One-touch fitting
Buffer stroke (∗ With bushing)
ZP3 ZP
Stroke Overall length (mm) Stroke Overall length (mm)
3 40 3 — Stroke (mm)
Pad diameter Buffer specifications
6 46 6 78.5 3 6 10 15 20
10 56 10 109.5 ø1.5, ø2, ø3.5 Rotating, Non-rotating   — — —
15 59 15 114.5 Rotating    — —
ø4, ø6, ø8
20 66.5 20 — Rotating, With bushing — — —  
ø10, ø13, ø16
25 — 25 124.5 Non-rotating     

Wide selection of piping

Male thread Female thread For ø2 piping!
Barb fitting One-touch
fitting

9
Vacuum Equipment

Vacuum Pad ZP3 Series Variations

Pad diameter
Type Material Page
ø1.5 ø2 ø3.5 ø4 ø6 ø8 ø10 ø13 ø16

Flat
For adsorption of
general workpieces
For adsorption of work
pieces with flat and not
deformed surface
NBR
Flat with groove Silicone rubber
For a workpiece Urethane rubber
which is likely to P.297
deform FKM
For releasing a workpiece
certainly Conductive NBR
Conductive silicone rubber

Bellows
For adsorption of
work pieces with
inclined surface

10
 4
Best Pneumatics
ZP3 Series Variations Vacuum Pad

Vacuum inlet direction Buffer attachment Vacuum inlet Page

Vertical Male thread M3, M5

Female thread M3, M5

Without buffer
P.326
(with adapter) Polyurethane tubing ø2
Barb fitting Soft nylon/
Polyurethane tubing ø4, ø6

One-touch fitting ø2, ø4, ø6

ZP3-T -

Vertical Female thread M3, M5

Stroke with buffer
3 mm Polyurethane tubing ø2
6 mm
Barb fitting Soft nylon/ P.338
10 mm Polyurethane tubing ø4, ø6
15 mm
20 mm
J One-touch fitting ø2, ø4, ø6
ZP3-T - JB
K
-

Lateral Female thread M3, M5

Polyurethane tubing ø2
Without buffer
Barb fitting Soft nylon/ P.348
(with adapter) Polyurethane tubing ø4, ø6

One-touch fitting ø2, ø4, ø6

ZP3-Y --

Lateral Female thread M3, M5

Stroke with buffer
3 mm Polyurethane tubing ø2
6 mm
Barb fitting Soft nylon/ P.354
10 mm Polyurethane tubing ø4, ø6
15 mm
20 mm
J One-touch fitting ø2, ø4, ø6
ZP3-Y - JB
K
-

11
Vacuum Equipment

Vacuum Pad ZP3E Series

Stability of suction position

Groove and rib formed to adsorb with entire surface

Groove on the adsorption surface secures the interior space.

Ribs reduce the inclinations during transport of workpiece.
ZP (Current model/Bellows pad) ZP3E (Bellows pad)
Groove
Secures the interior space,
: Groove (Hollow part) up to the edge of the pad,
: Part in contact with during adsorption.
the workpiece

Rib

Adsorption state of
the workpiece

Improved ease of removal

With groove
Dents and bumps on the adsorption surface prevent the
workpiece from sticking to it. This facilitates easy removal.
Shot-blasted
Micro-dents and bumps are formed on the adsorption surface.
Workpieces can be removed easily.

The number of mounting screws reduced

Mounting screw
Mounting screw
4 pcs. 1 pc.

Mounting screw Mounting screw

ZP series (Heavy-duty type) ZP3E Series

12
 4
Best Pneumatics
ZP3E Series Vacuum Pad

Can be disposed of separately. Mark-free

The rubber pad and metal The metal parts and rubber parts For use where adsorption marks must not be left on workpieces.
part can be separated.
can be separated completely.
Clear trace No trace of
of the pad the pad!
Holder

Metal plate Plate

Stopper
Rubber pad

Pad
Mark-free
Standard pad NBR pad
ZP series (Heavy-duty type) ZP3E Series

Suction flow rate increased Ball joint type pad weight reduced Weight reduced
Double by up to
suction port size
Applicable to workpieces with a large Weight reduced by changing the internal structure and materials 290 g
suction flow rate and high permeability, (Compared with the ZP series)
Pad diameter: ø63, ø80
The pad material when weight was measured is NBR.

and vacuum blow pumps with large

suction flow rates.

ø8 ø16.4

ZP (Current model) ZP3E ZP2/Flat type ZP3E/Flat type with groove

Pad diameter Suction port Area [mm2] Suction port Area [mm2] Pad diameter Weight [g] Weight [g]
ø32 — — ø32 — 56
ø40 ø8.4 55.4 ø40 91 57
ø6 28.3
ø50 ø50 110 75
ø63 ø63 230 150
ø8 50.2
ø80 ø80 270 160
ø16.4 211
ø100 ø100 430 190
ø10 78.52
ø125 ø125 560 270

Direct mounting with male thread added

Direct # Reduced in height
mounting # Easy mounting with tightening with a hexagonal wrench
Seal washer

Standard type Ball joint type

ZP3E
13
Vacuum Equipment

Vacuum Pad ZP3E Series Variations

Pad Unit Variations

Pad diameter
Form Material Page
ø32 ø40 ø50 ø63 ø80 ø100 ø125
Flat type with groove
For adsorption of general
workpieces. To be used P.404
when adsorption surface
of the workpiece is flat and NBR
ZP3E-;UM-; not deformed. Silicone rubber
Urethane rubber
FKM
Bellows type with Mark-free NBR
groove
To be used when P.404
adsorption surface of the
ZP3E-;BM-; workpiece is slanted.

14
 4
Best Pneumatics
ZP3E Series Variations Vacuum Pad

With Adapter Variations

Standard Ball Joint

Type Type

Vacuum inlet direction Mounting Buffer Vacuum inlet direction Mounting Buffer
Page Page
Mounting thread size attachment Mounting thread size attachment

Vertical Vertical
M10 M6
Male thread/Direct mounting P.408 Male thread/Direct mounting P.436
M16 M12

ZP3E-T;;;-; ZP3E-TF;;;-;

Vertical Vertical
Male thread/Plate connection M14 Without Male thread/Plate connection M14 Without
P.408 P.436
M16 buffer M16 buffer

ZP3E-T;;;-; ZP3E-TF;;;-;

Vertical M8 Vertical
M10 M8
Female thread mounting P.408 Female thread mounting P.436
M12 M12
M18
ZP3E-T;;;-; ZP3E-TF;;;-;

Lateral Lateral
Male thread mounting M14 Male thread mounting M14
P.420 P.449
M16 M16

ZP3E-Y;;;-; Without ZP3E-YF;;;-; Without

buffer buffer
Lateral Lateral
Female thread mounting M8 Female thread mounting M8
P.420 P.449
M12 M12

ZP3E-Y;;;-; ZP3E-YF;;;-;

Vertical Vertical
Male thread mounting Male thread mounting

P.428 P.458

With buffer With buffer

ZP3E-T;;;JB; M18 Stroke
ZP3E-TF;;;JB; M18 Stroke
M22 · 10 mm M22 · 10 mm
Lateral · 30 mm Lateral · 30 mm
· 50 mm · 50 mm
Male thread mounting Male thread mounting

P.432 P.463

ZP3E-Y;;;JB; ZP3E-YF;;;JB;

15
Vacuum Equipment

Vacuum Pad ZP2 Series Variations

Pad
Variations Symbol Adapter type Page
Type Diameter

Compact Pad Single unit

Flat U Flat ø3, ø4
For adsorption of general work pieces
For adsorption of work pieces with flat and
not deformed surface
Single unit
Flat with rib
For a workpiece which is likely to deform C Flat with rib ø6, ø7, ø8
or for releasing a workpiece certainly
Thin flat
P.528
For a workpiece which is likely to deform
Bellows Single unit
For adsorption of work pieces with inclined UT Thin flat ø5, ø6 ZP Series
surface Common adapter

Single unit B Bellows ø6, ø8

Short-type Pad ø2, ø3.5, ø4

Space-saving in the height direction MU ø5, ø6, ø8 P.529
ø10, ø15
Single unit With adapter

ø2, ø4, ø6
EU Flat P.532
ø8, ø15
Single unit With adapter

ø2, ø3, ø4
AU — P.535
Single unit ø6, ø8

Nozzle Pad
For adsorption of small AN Nozzle ø0.8, ø1.1 P.536
components such as IC
chips Single unit With adapter
Thin Flat Pad Single
ø5, ø6, ø11
For adsorption of soft work pieces such as thin unit Thin flat
UT ø14, ø18 ZP Series P.537
sheets or vinyl. Wrinkling or deformation (Skirt) Common adapter
during adsorption is reduced. ø20

Flat Pad ø10, ø15

For adsorption of flexible sheets or Thin flat
MT ø20, ø25 P.538
film. Deformation of the flat surface (With groove)
ø30
during adsorption is reduced. Single unit With adapter
Bellows Pad ø6, ø9, ø10
For use where there is Bellows ø14, ø15
Single unit J P.540
no space for the buffer (Multistage type) ø16, ø25
(spring type). For ø30 ZP Series Common adapter
adsorption of work
pieces with inclined ø4, ø6, ø8
surface MB ø10, ø15 P.541
ø20
Single unit With adapter

ø2, ø4, ø5
Bellows
ø6, ø40, ø46
— P.543
Single unit
ZJ
ø15, ø20
ø30, ø40 P.544
ø46
Single unit With adapter
16
 4
Best Pneumatics
ZP2 Series Variations Vacuum Pad

Pad
Variations Symbol Adapter type Page
Type Diameter

Blast-type Pad Single unit

Blast treatment to create finely U Flat ø4
uneven surface for adsorption.
Work pieces can be removed
easily. Single unit

C Flat with rib ø6, ø8 P.528

Single unit B Bellows ø6, ø8

ZP Series
Common adapter
Bellows ø10, ø15
Single unit J P.540
(Multistage type) ø25, ø30

ø2, ø3.5, ø4
MU Flat ø5, ø6, ø8 P.529
Single unit With adapter
ø10, ø15

EU Flat ø2, ø4, ø6 P.532

Single unit With adapter

ø10, ø15
Thin flat
MT ø20, ø25 P.538
(With groove)
With adapter ø30
Single unit

ø4, ø6, ø8
MB Bellows ø10, ø15 P.541
ø20
Single unit With adapter

Oval Pad
For work pieces with limitations P.550
on the adsorption surface
Single unit 3.5 x 7

With adapter: 4 x 10
Vacuum inlet
direction 5 x 10 P.551
Vertical 6 x 10

With buffer: 4 x 20
Vacuum inlet
direction W Oval 5 x 20 P.552
Vertical 6 x 20
8 x 20
With adapter:
Vacuum inlet 4 x 30
direction P.554
Lateral
5 x 30
6 x 30
With buffer: 8 x 30
Vacuum inlet
direction Lateral P.556

Pad with Ball

Spline Buffer With buffer: ø2, ø4 ZP Series
Vacuum inlet U Flat P.557
Ball spline guide is ø6, ø8 Common adapter
direction Vertical
used to the buffer.
17
Vacuum Equipment

Vacuum Pad ZP2 Series Variations

Pad
Variations Symbol Adapter type Page
Type Diameter

Mark-free Pad
For use where adsorption marks must ø4, ø6, ø8
not be left on work pieces.
ø10, ø16
Standard pad Mark-free pad U Flat P.560
ø25, ø32
ø40, ø50
Single unit ZP Series
Common adapter

Clear trace of the pad No trace on the object

Mark-free NBR pad
Stuck fluororesin pad Single
unit

ø40, ø50
Heavy-duty
H ø63, ø80 P.561
(Flat with rib)
ø100, ø125

Related Pad Made to Order

Non-contact gripper
P.727

Resin Attachment
Mark-free. ø6, ø8
Prevents sticking of ø10, ø13
the rubber and the Bellows P.562
workpiece.
ø16, ø20
ø25, ø32
Single unit With pad ZP Series
Attachment Common adapter
Sponge Pad
For adsorption of work pieces
with bumps P.563
Single unit ø4, ø6
S Sponge ø8, ø10
ø15

P.564

With adapter

Heavy-duty Pad
For heavy or large work pieces Heavy-duty ø32, ø300
H
(Flat with rib) ø340

P.566

Heavy-duty
HT ø150, ø250
(Thin flat with rib)

Heavy-duty
HB
(Bellows)
ø32, ø150 P.568

Heavy-duty
HW
(Oval)
30 x 50 P.569

18
 4
Best Pneumatics
ZP2 Series Variations Vacuum Pad

Pad
Variations Symbol Page
Type Diameter

Heavy-duty
Ball Joint Pad With adapter:
 For adsorption of work pieces Vacuum inlet
with inclined or curved surface direction P.570
Vertical

With adapter:
Vacuum inlet
direction P.571
Lateral ø40
ø50
Heavy-duty ø63
H
(Flat with rib) ø80
ø100
With buffer: ø125
Vacuum inlet
direction P.572
Vertical

With buffer:
Vacuum inlet
direction P.574
Lateral

With adapter:
Vacuum inlet
direction P.576
Vertical

With adapter:
Vacuum inlet
direction P.577
Lateral ø40
ø50
Heavy-duty ø63
HB
(Bellows) ø80
ø100
With buffer: ø125
Vacuum inlet
direction P.578
Vertical

With buffer:
Vacuum inlet
direction P.580
Lateral

19
Vacuum Equipment

Vacuum Pad ZP Series Variations/Applications (Pad/Adapter)

Pad
Variations Symbol Adapter type Page
Type Diameter

Heavy-duty Pad
Heavy-duty type (Flat with rib)
Ideal for heavy or large work pieces Heavy-duty
such as CRT and automobile bodies H
(Flat with rib)
Heavy-duty type (Bellows)
• Ideal for work pieces with curved
surface ø40, ø50
ZP Series
• Ideal for heavy or large work pieces ø63, ø80 P.582
Common adapter
ø100, ø125

Heavy-duty
HB
(Bellows)

Applications (Pad/Adapter)
Variations Note Page

Vacuum Pad for Transferring Disks

 For adsorbing circular components like CD and DVD
Bellows mechanism is realized in the
pad to dampen the impact to the work. 20 x 25
P.592
(ID x OD: PCD 22.5)

Vacuum Pad for Fixing Panel

 For adsorbing and fixing the stage of panels or glass circuit board, etc.
 Bellows mechanism allows complete contact with
curved work surface.
Glass circuit board P.593

Vacuum Saving Valve Connection thread size

Can restrict the reduction of for pad side
vacuum pressure even when ¡M5 x 0.8
there is no workpiece. ¡M6 x 1
No need for switching operation ¡M8 x 1.25 P.627
when changing work pieces ¡R1/8
Multiple vacuum pads can be ¡Rc1/8
operated by one ejector. ¡G1/8
¡NPT1/8

ZP2/ZP Series Adapter/Buffer ZP Series Adapter Assembly Part No. P.611

Applicable Pad List P.595

ZP2 Series Buffer Assembly Part No. P.613

ZP2 Series Mounting Adapter Part No. P.602

ZP Series Buffer Assembly Part No. P.622

ZP Series Mounting Adapter Part No. P.607

ZP2 Series Adapter Assembly Part No. P.610

20
 4
Best Pneumatics
Related Equipment
SP ZCUK AMJ
Adsorption plate Free Mount Cylinder Drain Separator for Vacuum
P.749 for Vacuum P.759 P.773
Series

¡Ideal for adsorption and fixing in place of thin ¡In the rectangular, compact cylinder CU ¡Removes water droplets from air by
sheets, glass panels, and soft workpieces. series which has a high level of mounting simly installing in vacuum equip-
Features

Workpieces do not deform since they are precision, a vacuum passage is provided ment connection lines.
adsorbed with multiple micro air vents on the in the rod to facilitate the mounting of a ¡Effective for removing water drop-
adsorption surface. vacuum pad, and save space. lets form the air sucked into vacu-
¡A high level of machining accuracy. ¡Standard vacuum pads (ø2 to ø50) um pumps and ejectors, etc.
¡Strong adsorption force. can be mounted.
AFJ AMV ZH--X185
Vacuum Filter Exhaust Vacuum Flow
P.779 Cleaner P.788 P.790
for Vacuum
Series

Pump

¡Prevents vacuum equipment trouble! ¡Captures 99.5% of oil mist exhaust- ¡A discharge flow rate 4 times the
¡Elements can be reused by wash- ed form the vacuum pump. supply air can be generated.
Features

ing them. ¡Creates a comfortable working en- ¡A suction flow rate 3 times the sup-
¡Water drops can be removed vironment without oil mist. ply air can be generated.
¡The bowl is covered with a trans- ¡Captures and separates 99.5% of highly ¡Contributes to reduction in flow con-
parent bowl guard! concentrated oil mist with a low flow rate. sumption if discharge and suction
¡No need for an exhaust duct from the vacuum pump. requires flow rate.
Related Equipment for Vacuum System
Vacuum Regulator Electronic Vacuum Regulator Directional
P.795 P.795 Control Valve P.796

SJ3A6

IRV ITV209 VQD1000-V SY3AR/SY5AR

Vacuum Pressure Switch/Flow Switch Vacuum Pressure Gauge

P.801 P.802
Series

ZSE20

GZ46 GZ46-K2K
ZSE30A PFM

Flow Control Equipment Made to Order

P.804

Vacuum release valve with throttle valve: SY5A2R········· P.805

Vacuum release valve with throttle valve: SV1A4R-X8 ··· P.809

AS AKH

21
 Vacuum Equipment

Adsorption Transfer System by Ejector

Ejector Module System

Equipment (ejector supply valve, release valve, throttle valve, vacuum pressure
switch, and filter) that is needed for the ejector adsorption transfer system has been
integrated to achieve efficient assembly work and a compact design.

Compressed air
preparation filter
AFF/AM/AMD Air filter Mist separator
series AF series AFM series

Ejector module/Circuit
Compressor

Refrigerated air dryer Regulator Release valve

IDF series AR series

Supply valve Speed controller

for release flow
adjustment

P
Vacuum
pressure switch
Filter

Ejector unit

Pad
Ejector module
ZK2, ZB, ZR,
Workpiece
ZQ, ZL

Flow switch
PF2M series

For the ZK2, ZB, ZR, ZQ

Pressure gauge
and ZL, the combination of for vacuum
single units at right can be Air suction filter GZ series
integrated into a unit. ZF series ZSE series
AMJ series PSE series
AFJ series
Removes dust that is
present in air that has
been drawn in.

A 22
 4
Best Pneumatics
Adsorption Transfer System by Ejector

Single Unit System

Equipment such as an ejector is configured as an individual unit. Thus, it is possible to create

a flexible system configuration in which the circuit composition and the mounting locations
can be selected as desired.

Controls vacuum
generation by turning Control ON/OFF of vacuum release
ON/OFF the supply air in order to speed up work
air to the ejector. ejection after vacuum adsorption.

One-touch fitting

Supply valve Release valve

Controls compressed air to ejector. Controls compressed air
Throttle valve that is used for ejecting
a work piece.
(Flow control valve)
Ejector Controls ejection time and
ZH series prevents blow-away by con-
ZU series trolling the release flow rate
during work ejection.
Pressure gauge
for vacuum
GZ series Acquires a signal indi-
A filter is provided to prevent ZSE series cating the specified
problems with valves, ejec- PSE series vacuum pressure has
tors, sensors and other parts been achieved in vacu-
resulting from suction of um adsorption, and
debris in the environment Vacuum takes that to be the op-
Flow switch pressure switch
around the pad. PF2M series eration start point of the
ZS series cylinder, etc.
ZSE series
PSE series
Air suction filter Detects the vacuum
ZF series pressure and verifies
AMJ series the adsorption.
AFJ series Pressure gauge
Removes dust that for vacuum
is present in air that Vacuum pressure
has been drawn in. switch
GZ series
ZSE series
PSE series

Vacuum pad / ZP3 series Free mount

ZP2 series cylinder for
ZP series vacuum
ZCUK series

Work piece

23 A
 Vacuum Equipment

Adsorption Transfer System for Vacuum Pump

Equipment (vacuum switching valve, release valve, throttle valve, vacuum pressure
switch, and filter) that is needed for controlling the vacuum pressure has been integrated to
achieve efficient assembly work and a compact design.
Compressed air
preparation filter
AFF/AM/AMD Air filter Mist separator
series AF series AFM series

Compressor Vacuum pump

Refrigerated air dryer Regulator

IDF series AR series Vacuum regulator / IRV series
Direct operated vacuum regulator that regulates vacuum
pressure
Electronic vacuum regulator / ITV209 series
Controls vacuum pressure by external electric signal.

Control unit /
ZK2
ZB
ZR100
ZQ
VQD1000-V
For the ZK2, ZB, ZR, ZQ
and VQD, the combination
of single units at right can ∗ If the control unit is not used, it is possible to
configure the system by using individual
be integrated into a unit units such as a switching valve, release
valve, filter, pressure switch, etc.
Pressure gauge
Flow switch
for vacuum
PF2M series Vacuum pressure
switch
Air suction filter GZ series
ZF series ZSE series
AMJ series PSE series
Vacuum pad / ZP series Free mount AFJ series
cylinder for
Removes dust that is
vacuum
present in air that has
ZCUK series been drawn in.

Work piece

Regulator to control vacu- Control unit/Circuit

um release pressure. A vacuum regulator is provided to
prevent pulsation of the vacuum
Vacuum pump source and maintain vacuum pres-
sure at the specified pressure.
Control ON/OFF of vacuum re-
lease air in order to speed up work
ejection after vacuum adsorption.
Vacuum release Control ON/OFF of the vacuum sup-
Vacuum switch valve
valve plied from the vacuum pump.

Controls ejection time and prevents

blow-away by controlling the re- Acquires a signal indicating the speci-
lease flow rate during work ejection. P fied vacuum pressure has been
Vacuum pressure switch achieved in vacuum adsorption, and
Filter takes that to be the operation start
A filter is provided to prevent problems with point of the cylinder, etc.
valves, ejectors, sensors and other parts re- Control unit
sulting from suction of debris in the environ-
ment around the pad. Pad
Workpiece

A 24
 Vacuum Equipment
Model Selection
CONTENTS
1 Features and Precautions for Vacuum Adsorption P.26

2 Vacuum Pad Selection P.26

 Vacuum Pad Selection Procedures
 Points for Selecting Vacuum Pads
A. Theoretical Lifting Force
B. Shear Force and Moment Applied to Vacuum Pad
 Lifting Force and Vacuum Pad Diameter
1. Theoretical Lifting Force
 Vacuum Pad Type
 Vacuum Pad Material
 Rubber Material and Properties
 Color and Identification
 Buffer Attachment
 Pad Selection by Workpiece Type
 Vacuum Pad Durability

3 Selection of Vacuum Ejector and Vacuum Switching Valve P.33

 Calculating Vacuum Ejector and Switching Valve Size with the Formula

4 Leakage Volume during Workpiece Adsorption P.33

 Leakage Volume from Conductance of Workpiece
 Leakage Volume from Adsorption Test

5 Adsorption Response Time P.34

 Relationship between Vacuum Pressure and Response Time after Supply Valve (Switching Valve) is Operated
 Calculating Adsorption Response Time with the Formula
 Adsorption Response Time from the Selection Graph

6 Precautions on Vacuum Equipment Selection and SMC’s Proposal P.36

 Safety Measures
 Precautions on Vacuum Equipment Selection
 Vacuum Ejector or Pump and Number of Vacuum Pads
 Vacuum Ejector Selection and Handling Precautions
 Supply Pressure of Vacuum Ejector
 Timing for Vacuum Generation and Suction Verification
A. Timing for Vacuum Generation
B. Suction Verification
C. Set Pressure for Vacuum Pressure Switch
 Dust Handling of Vacuum Equipment

7 Vacuum Equipment Selection Example P.40

 Transfer of Semiconductor Chips

8 Data P.41
 Selection Graph
 Glossary of Terms
 Countermeasures for Vacuum Adsorption System Problems (Troubleshooting)
 Non-conformance Examples
 Time of Replacement of Vacuum Pad
25
Model Selection

1 Features and Precautions for Vacuum Adsorption

Vacuum adsorption system as a method to hold a workpiece has the following features.

• Easy construction
• Compatible with any place where adsorption is possible.
• No need for accurate positioning
• Compatible with soft and easily-deformed work pieces

However, special care is required in the following conditions.

• Workpiece may drop under certain conditions since it is transferred being adsorbed.
• Liquid or foreign matter around the workpiece may be sucked into the equipment.
• Large adsorption area is necessary to get large gripping force.
• Vacuum pad (rubber) may deteriorate.

Fully understand the features above and select the equipment that suits your operating conditions.

2 Vacuum Pad Selection

 Vacuum Pad Selection Procedures
1) Fully taking into account the balance of a workpiece, identify the adsorption positioning, number of pads and applicable pad
diameter (or pad area).
2) Find the theoretical lifting force from the identified adsorption area (pad area x number of pads) and vacuum pressure, and
then find the lifting force considering actual lifting and safety factor of transfer condition.
3) Determine a pad diameter (or pad area) that is sufficient to ensure the lifting force is greater than the workpiece mass.
4) Determine the pad type and materials, and the necessity of buffer based on the operating environment, and the workpiece
shape and materials.

The above shows selection procedures for general vacuum pads; thus, they will not be applicable for all pads. Customers are
required to conduct a test on their own and to select applicable adsorption conditions and pads based on the test results.

 Points for Selecting Vacuum Pads

A. Theoretical Lifting Force
• The theoretical lifting force is determined by vacuum pressure and adsorption area of the vacuum pad.
• Since the theoretical lifting force is the value measured at the static state, the safety factor responding to the actual
operating conditions must be estimated in the actual operation.
• It is not necessarily true that higher vacuum pressure is better. Extremely high vacuum pressure may cause problems.

• When the vacuum pressure is unnecessarily high, pads are likely to be worn out earlier or cracked, causing shorter pad
service life.
Doubling the vacuum pressure makes the theoretical lifting force double, while to doubling the pad diameter makes the
theoretical lifting force quadruple.
• When the vacuum pressure (set pressure) is high, it makes not only response time longer, but also the necessary energy
to generate a vacuum larger.

Example) Theoretical lifting force = Pressure x Area

2 times
Vacuum pressure Vacuum pressure
Area (cm2)
Pad diameter [-40 kPa] [-80 kPa]

Theoretical lifting force Theoretical lifting force

ø20 3.14
12 N 25 N
4 times
Theoretical lifting force Theoretical lifting force
ø40 12.56
50 N 100 N

26
 Model Selection

B. Shear Force and Moment Applied to Vacuum Pad

• Vacuum pads are not resistant to shear force (parallel force with adsorption surface) and moment.
• Minimize the moment applied to the vacuum pad with the position of the workpiece center of gravity in mind.
• The acceleration rate of the movement must be as small as possible, and make sure to take into consideration the wind
pressure and impact. If measures to slow down the acceleration rate are introduced, safety to prevent the workpiece from
dropping will improve.
• Avoid lifting the workpiece by adsorbing the vertical side with a vacuum pad (vertical lifting) if possible. When it is
unavoidable, a sufficient safety factor must be secured.

Lifting Force, Moment, Horizontal Force

To lift a workpiece vertically, make sure to take into consideration the acceleration rate, wind pressure, impact, etc., in addition to the mass
of the workpiece. (Refer to Fig. 1)
Because the pads are susceptible to moments, mount the pad so as not to allow the workpiece to create a moment. (Refer to Fig. 2)
When a workpiece that is suspended horizontally is moved laterally, the workpiece could shift depending on the extent of the acceleration
rate or the size of the friction coefficient between the pad and the workpiece. Therefore, the acceleration rate of the lateral movement must
be minimized. (Refer to Fig. 3)

Loading by acceleration and wind Pad positioning Caution for friction force between pad and
pressure lifting workpiece
Lifting direction

Pad
Fig. 1

Fig. 2

Fig. 3
Pad Pad
Pad

Balance of Pad and Workpiece

Make sure that the pad's suction surface is not larger than the surface of the workpiece to prevent vacuum leakage and unstable picking.

Pad

Caution

Guide for drop prevention

If multiple pads are used for transferring a flat object with a large surface area, properly allocate the pads to maintain balance. Also make
sure that the pads are aligned properly to prevent them from becoming disengaged along the edges.
Pad

Caution

Guide for drop prevention

Provide an auxiliary device (example: a guide for preventing the workpieces from dropping) as necessary.

Mounting Position
As a rule, the unit must be installed horizontally. Although a diagonal or a vertical installation should be avoided whenever possible, if the
unit must be installed in such a manner, be certain to guarantee guide and absolute safety.

Pad

Guide
Horizontal lifting Vertical lifting
27
Model Selection

 Lifting Force and Vacuum Pad Diameter

1. Theoretical Lifting Force

• Set the vacuum pressure below the pressure that has been stabilized after adsorption.
• However, when a workpiece is permeable or has a rough surface, note that the vacuum pressure drops since the workpiece
takes air in. In such a case, carry out an adsorption test for confirmation.
• The vacuum pressure when using an ejector is approximately –60 kPa as a guide.
The theoretical lifting force of a pad can be found by calculation or from the theoretical lifting force table.

Pad
Calculation

W = P x S x 0.1 x 1 W : Lifting force (N)

t P : Vacuum pressure (kPa)
S : Pad area (cm2)
t : Safety factor Horizontal lifting: 4 or more Horizontal lifting Vertical lifting
Vertical lifting: 8 or more
This type of application should
basically be avoided.
Theoretical Lifting Force
The theoretical lifting force (not including the safety factor) is found from the pad diameter and vacuum pressure.
The required lifting force is then found by dividing the theoretical lifting force by the safety factor t.

Lifting force = Theoretical lifting force ÷ t

(1) Theoretical Lifting Force (Theoretical lifting force = P x S x 0.1)

Pad Diameter (ø1.5 to ø50) (N)
Pad diameter (mm) ø1.5 ø2 ø3.5 ø4 ø6 ø8 ø10 ø13 ø16 ø20 ø25 ø32 ø40 ø50
Pad area S (cm2) 0.02 0.03 0.10 0.13 0.28 0.50 0.79 1.33 2.01 3.14 4.91 8.04 12.6 19.6
−85 0.15 0.27 0.82 1.07 2.40 4.2 6.6 11 17 26 41 68 106 166
−80 0.14 0.25 0.77 1.00 2.26 4.0 6.2 10 16 25 39 64 100 157
−75 0.13 0.24 0.72 0.94 2.12 3.7 5.8 10 15 23 36 60 94 147
−70 0.12 0.22 0.67 0.88 1.98 3.5 5.5 9.3 14 22 34 56 87 137
Vacuum
pressure −65 0.11 0.20 0.63 0.82 1.84 3.2 5.1 8.6 13 20 31 52 81 127
(kPa) −60 0.11 0.19 0.58 0.75 1.70 3.0 4.7 8.0 12 18 29 48 75 117
−55 0.10 0.17 0.53 0.69 1.55 2.7 4.3 7.3 11 17 27 44 69 107
−50 0.09 0.16 0.48 0.63 1.41 2.5 3.9 6.7 10 15 24 40 62 98
−45 0.08 0.14 0.43 0.57 1.27 2.2 3.5 6.0 9.0 14 22 36 56 88
−40 0.07 0.13 0.38 0.50 1.13 2.0 3.1 5.3 8.0 12 19 32 50 78
Pad Diameter (ø63 to ø340) (N)
Pad diameter (mm) ø63 ø80 ø100 ø125 ø150 ø200 ø250 ø300 ø340
Pad area S (cm2) 31.2 50.2 78.5 122.7 176.6 314.0 490.6 706.5 907.5
−85 265 427 667 1043 1501 2669 4170 6005 7714
−80 250 402 628 982 1413 2512 3925 5652 7260
−75 234 377 589 920 1325 2355 3680 5299 6806
−70 218 351 550 859 1236 2198 3434 4946 6353
Vacuum
pressure −65 203 326 510 798 1148 2041 3189 4592 5899
(kPa) −60 187 301 471 736 1060 1884 2944 4239 5445
−55 172 276 432 675 971 1727 2698 3886 4991
−50 156 251 393 614 883 1570 2453 3533 4538
−45 140 226 353 552 795 1413 2208 3179 4084
−40 125 201 314 491 706 1256 1962 2826 3630
Oval Pad (2 x 4 to 8 x 30, 30 x 50) (N)
Pad diameter (mm) 2 x 4 3.5 x 7 4 x 10 5 x 10 6 x 10 4 x 20 5 x 20 6 x 20 8 x 20 4 x 30 5 x 30 6 x 30 8 x 30 30 x 50
Pad area S (cm2) 0.07 0.21 0.36 0.44 0.52 0.76 0.94 1.12 1.46 1.16 1.44 1.72 2.26 13.07
−85 0.60 1.79 3.0 3.7 4.4 6.4 7.9 9.5 12.4 9.8 12.2 14.6 19.2 112
−80 0.56 1.68 2.8 3.5 4.1 6.0 7.5 8.9 11.6 9.2 11.5 13.7 18.0 105
−75 0.53 1.58 2.7 3.3 3.9 5.7 7.0 8.4 10.9 8.7 10.8 12.9 16.9 98
−70 0.49 1.47 2.5 3.0 3.6 5.3 6.5 7.8 10.2 8.1 10.0 12.0 15.8 92
Vacuum
pressure −65 0.46 1.37 2.3 2.8 3.3 4.9 6.1 7.2 9.4 7.5 9.3 11.1 14.6 85
(kPa) −60 0.42 1.26 2.1 2.6 3.1 4.5 5.6 6.7 8.7 6.9 8.6 10.3 13.5 79
−55 0.39 1.16 1.9 2.4 2.8 4.1 5.1 6.1 8.0 6.3 7.9 9.4 12.4 72
−50 0.35 1.05 1.8 2.2 2.6 3.8 4.7 5.6 7.3 5.8 7.2 8.6 11.3 66
−45 0.32 0.95 1.6 1.9 2.3 3.4 4.2 5.0 6.5 5.2 6.4 7.7 10.1 59
−40 0.28 0.84 1.4 1.7 2.0 3.0 3.7 4.4 5.8 4.6 5.7 6.8 9.0 53
28
 Model Selection

 Vacuum Pad Type

• Vacuum pads are available in flat, deep, bellows, thin flat, with rib, and oval types, etc. Select the optimal shape in accordance
with the workpiece and operating environment. Please contact SMC for shapes not included in this catalog.

Pad Type
Pad shape Application Pad shape Application

To be used when adsorption surface of

Flat To be used when adsorption surface of
work is flat and not deformed.
Ball joint
work is not horizontal.

To be used when work is likely to deform

Flat with rib
or in the case of releasing work certainly.

To be used when work height is not even

Long stroke buffer
or cushioning toward work is required.
Deep To be used when work is curved shape.

To be used when there is not enough

Bellows space to install buffer or adsorption Large To be used when work is heavy weight.
surface of work is slanted.

To be used when work has limited As one of the countermeasures against the
Oval adsorption surface or long in length and Conductive static electricity, rubber material with reduced
work is required to locate precisely. resistance is used. For antistatic measures

 Vacuum Pad Material

• It is necessary to determine vacuum pad materials carefully taking into account the workpiece shape, adaptability in the
operating environment, effect after being adsorbed, electrical conductivity, etc.
• Based on the workpiece transfer example for each material, select after confirming the characteristics (adaptability) of rubber.

Vacuum Pad/Example of Workpiece Transfer

Material
Material Application
NBR Transfer of general workpieces, Corrugated board, Veneer plate, Iron plate and others
Silicone rubber Semiconductor, Removing from die-casting, Thin workpieces, Food processor
Urethane rubber Corrugated board, Iron plate, Veneer plate
FKM Chemical workpieces
Conductive NBR General workpieces of semiconductor (Static electricity resistance)
Conductive silicone rubber Semiconductor (Static electricity)

29
Model Selection

 = Excellent --- Not affected at all, or almost no effect
 = Good --- Affected a little, but adequate resistance
depending on conditions
 = Better not to use if possible
 Rubber Material and Properties = Unsuitable for usage. Severely affected.
General FKM EPR Conductive Conductive
NBR CR Conductive Conductive
name Silicone Urethane (Fluoro (Ethylene- NBR CR sponge
(Nitrile (Chloroprene silicone silicone
rubber rubber rubber) propylene (Nitrile (Chloroprene
rubber) rubber) rubber sponge
rubber) rubber) sponge)
Good oil Excellent Excellent Best heat Well balanced Good aging Good oil Very Excellent Excellent impact
resistance, heat mechanical resistance, weather resistance, resistance, excellent heat heat resilience, and
abrasion resistance, strength and resistance, ozone ozone abrasion resistance, insulation, sound
Main features resistance, and cold chemical resistance, and resistance, resistance, and and cold and impact insulation.
and aging resistance resistance chemical and electrical aging resistance. resistance. resilience Flame
resistance resistance properties Conductive Conductive retardance
Pure gum property (specific gravity) 1.00-1.20 0.95-0.98 1.00-1.30 1.80-1.82 1.15-1.25 0.86-0.87 1.00-1.20 0.95-0.98 0.4g/cm3 0.161g/cm3
Impact resilience  
 
  
   
  to   to 
Physical properties of blended gum

Abrasion resistance 
  to  
 
 
  
  to   
Tear resistance   to  
      to   
Flex crack resistance   to  
      to   
Maximum operation
temperature °C 120 200 60 250 150 150 100 200 180 120
Minimum operation
temperature °C 0 −30 0 0 −40 −20 0 −10 −30 −20
Volume resistivity (Ωcm) — — — — — — 104 or less 104 or less 4.8 x 104 3.8 x 104
Heat aging  
  
    
  
Weather resistance  
 
 
 
   
  
Ozone resistance  
 
 
  
  
  
Gas permeability resistance   to   to   to    to    to   
Gasoline/Gas oil 
  to  
 
   
  to   
Chemical resistance

 to   to    to   to 
Oil resistance

Benzene/Toluene      
Alcohol 
 
   to 
 
 
 
 
  
Ether  to   to    to   to    to   to   
Ketone (MEK)      to  
    
Ethyl acetate  to    to    to  
  to    
Water 
   
 
 
 
   
Alkaline resistance
Acid resistance

Organic acid  to     to   to    to    
Organic acid of high
concentration  to    
    to    
Organic acid of low
concentration    
 
 
    
Strong alkali  
   
 
  
  
Weak alkali  
   
 
  
  
∗ The indicated physical properties, chemical resistance and other numerical values are only approximate values used for reference. They are not guaranteed values.
· The above general characteristics may change according to the working conditions and the working environment.
· When determining the material, carry out adequate confirmation and verification in advance.
· SMC will not bear responsibility concerning the accuracy of data or any damage arising from this data.

 Color and Identification (ZP/ZP2)

General FKM EPR Conductive Conductive
NBR CR Conductive Conductive
name Silicone Urethane (Fluoro- (Ethylene- NBR CR sponge
(Nitrile (Chloroprene silicone silicone
rubber rubber rubber) propylene (Nitrile (Chloroprene
rubber) rubber) rubber sponge
rubber) rubber) sponge)
Color of rubber Black White Brown Black Black Black Black Black Black Black
Identification · Green 1 dot · Red 1 dot · · Silver 1 dot · Silver 2 dots
(Dot or stamp) — — — — —
· ·
Rubber hardness Other than Heavy duty A40/S
A50/S A60/S A60/S A50/S A50/S A50/S A50/S 20 15
HS (±5°) Heavy duty A50/S

 Color and Identification (ZP3)

General
name NBR FKM Conductive NBR Conductive
Silicone rubber Urethane rubber
(Nitrile rubber) (Fluororubber) (Nitrile rubber) silicone rubber

Color of rubber Black White Brown Black Black Black

Identification (Dot) — — — · Green 1 dot · Silver 1 dot · Pink 1 dot
Rubber hardness HS (±5°) A60/S
Note) The hardness of rubber shall conform to JIS K 6253. The hardness of sponge shall conform to SRIS 0101.
30
 Model Selection

 Buffer Attachment
• Choose buffer type when the workpieces are of varying heights, the workpieces are fragile, or you need to reduce the impact
to the pad. If rotation needs to be limited, use non-rotating buffer.

Unsteady Distance between Pad and Workpiece

When the workpieces are of varying heights, use the buffer type pad with
built-in spring. The spring creates a cushion effect between the pad and the
workpieces. If rotation needs to be limited further, use non-rotating buffer
type.

 Pad Selection by Workpiece Type

• Carefully select a pad for the following workpieces.

1. Porous Workpiece 2. Flat Plate Workpiece

To pick a permeable workpiece such as paper, select a pad with a When a workpiece with a large surface area such as sheet glass
small diameter that is sufficient to lift the workpiece. Because a or PCB is suspended, the workpiece could move in a wavelike
large amount of air leakage could reduce the pad’s suction force, it motion if a large force is applied by wind pressure or by an impact.
may be necessary to increase the capacity of an ejector or vacuum Therefore, it is necessary to ensure the proper allocation and size
pump or enlarge the conductance area of the piping passage. of pads.

Plate glass, circuit board, etc.

Porous work

3. Soft Workpiece 4. Impact to Pad

If a soft workpiece such as vinyl, paper, or thin sheet is picked up, When pushing a pad to a workpiece, make sure not to apply an
the vacuum pressure could cause the workpiece to deform or impact or a large force which would lead to premature deformation,
wrinkle. In such a case, it will be necessary to use a small pad or a cracking, or wearing of the pad. The pad should be pushed against
ribbed pad and reduce the vacuum pressure. the workpiece to the extent that its skirt portion deforms or that its
ribbed portion comes into slight contact with the workpiece.
Pad Especially, when using a smaller diameter pad, make sure to locate
it correctly.

Decide the position

not to strike

Vinyl, paper, etc.

31
Model Selection

5. Adsorption Mark
The main adsorption marks are as follows:
Before suction After suction Countermeasure
P Mark due to deformed (lined) 1) Reduce the vacuum pressure.
workpiece If lifting force is inadequate,
increase the number of pads.
2) Select a pad with a smaller
center area.

Suction conditions Workpiece: Vinyl

Vacuum pad: ZP20CS Vacuum pressure: –40 kPa
P Mark due to components Use the following products.
contained in the rubber pad 1) Mark-free NBR pad
(material) moving to the 2) ZP2 series
workpiece. • Stuck fluororesin pad
• Resin attachment
Suction conditions Workpiece: Glass
Vacuum pad: ZP20CS Vacuum pressure: –40 kPa
P A mark which remains on the Use the following products.
rough surface of the 1) ZP2 series
workpiece due to wear-out of • Stuck fluororesin pad
the rubber (pad material). • Resin attachment

Suction conditions Workpiece: Resin plate (Surface roughness 2.5 m)

Vacuum pad: ZP20CS Vacuum pressure: –80 kPa

Vacuum Pad Durability

• Need to be careful of the vacuum pad (rubber) deterioration.
• When the vacuum pad is used continuously, the following problems may occur.
1) Wear-out of the adsorption surface.
Shrinkage of the pad dimensions, sticking of the part where the rubber materials come into contact with each other (bellows
pad)
2) Weakening of the rubber parts (skirt of the adsorption surface, bending parts, etc.)
* It may occur at an early stage depending on the operating conditions (high vacuum pressure, suction time [vacuum holding],
etc.).
• Decide when to replace the pads, referring to the signs of deterioration, such as changes in the appearance due to wear,
reduction in the vacuum pressure or delay in the transport cycle time.

32
 Model Selection

3 Selection of Vacuum Ejector and Vacuum Switching Valve

 Calculating Vacuum Ejector and Switching Valve Size with the Formula
Average suction flow rate for achieving adsorption response time

V x 60 Q : Average suction flow rate L/min (ANR)

Q = ——— + QL
T1 V : Piping capacity (L)
T2 = 3 x T1 T1 : Arrival time to stable Pv 63% after adsorption (sec)
T2 : Arrival time to stable Pv 95% after adsorption (sec)
QL : Leakage volume during workpiece adsorption L/min (ANR) Note 1)
Max. suction flow rate
Qmax = (2 to 3) x Q L/min (ANR)
<Selection Procedure>
• Ejector
Select the ejector with the greater maximum suction flow rate from the Qmax indicated above.
• Direct operation valve
Qmax
Conductance C = ———— [dm3/(s·bar)]
55.5
∗ Select a valve (solenoid valve) having a conductance that is greater than that of the conductance C formula given above from
the related equipment (page 793).

Note 1) QL: 0 when no leakage occurs during adsorbing a workpiece.

If there is leakage during adsorbing a workpiece, find the leakage volume based on “4. Leakage Volume during Workpiece Adsorption.”
Note 2) Tube piping capacity can be found in “8. Data: Piping Capacity by Tube I.D. (Selection Graph (2)).”
Note 3) When selecting a ZL series multistage ejector, these details do not apply. Refer to the “Time to Reach Vacuum” graph in the catalog for applicable details.

4 Leakage Volume during Workpiece Adsorption

Air could be drawn in depending on the type of workpiece. As a result,
the vacuum pressure in the pad becomes reduced and the amount of Pad
vacuum that is necessary for adsorption cannot be attained. Pad
When this type of workpiece must be handled, it is necessary to select
the proper size of the ejector and the vacuum switching valve by taking
into consideration the amount of air that could leak through the
workpiece. Ventilation workpiece Rough workpiece surface

 Leakage Volume from Conductance of Workpiece

Leakage volume QL = 55.5 x CL
QL: Leakage volume L/min (ANR)
CL: Conductance between workpiece and pad, and workpiece opening area [dm3/(s·bar)]

 Leakage Volume from Adsorption Test

As described in the illustration below, pick up the workpiece with the ejector, using an ejector, pad and a vacuum gauge.
At this time, read vacuum pressure P1, obtain the suction flow rate from the flow rate characteristics graph for the ejector that is being used,
and render this amount as the leakage of the workpiece.

Vacuum pressure: P1
ZH07BS, ZH07DS
Flow rate Characteristics
Pad Exhaust Characteristics Supply pressure {0.45 MPa}
Suction flow rate (L/min (ANR))
Air consumption (L/min (ANR))
re

Workpiece
ssu
Vacuum pressure (kPa)

Vacuum pressure (kPa)

on
pre

pti
um
m

Exercise: Using a supply pressure of 0.45 MPa, when the ejector ns

u
cu

o
ir c
Va

(ZH07S) picks up a workpiece that leaks air, the vacuum gauge A

indicated a pressure of –53 kPa. Calculate the leakage volume Suction flow rate
from the workpiece.

<Selection Procedure>
When obtaining the suction flow rate at a vacuum pressure of
–53 kPa from the ZH07DS flow rate characteristics graph, the
suction flow rate is 5 L/min (ANR).
Supply pressure (MPa) Suction flow rate (L/min (ANR))
Leakage volume ≈ Suction flow rate 5 L/min (ANR)
33 A
 Model Selection

5 Adsorption Response Time

When a vacuum pad is used for the adsorption transfer of a workpiece, the approximate adsorption response time can be
obtained (the length of time it takes for the pad’s internal vacuum pressure to reach the pressure that is required for adsorption
after the supply valve {vacuum switching valve} has been operated). An approximate adsorption response time can be obtained
through formulas and selection graphs.
However, when selecting a ZL series multistage ejector, these details do not apply. Refer to the “Time to Reach Vacuum” graph in
the catalog for applicable details.

 Relationship between Vacuum Pressure and Response Time after Supply Valve
(Switching Valve) is Operated
The relationship between vacuum pressure and response time after the supply valve (switching valve) is operated as shown below.

Vacuum System Circuit Vacuum Pressure and Response Time after Supply
Valve (Switching Valve) is Operated
Switching valve Switching valve
Supply valve
(Switching valve)
operation

P P Vacuum pressure (P)

Pad Pad

Work Work

Arrival time (sec)

Pv: Final vacuum pressure

T1 : Arrival time to 63% of final vacuum pressure Pv
T2 : Arrival time to 95% of final vacuum pressure Pv

 Calculating Adsorption Response Time with the Formula

Adsorption response times T1 and T2 can be obtained through the formulas given below.
Adsorption response time T1 = ——— V x 60
T1 : Arrival time to 63% of final vacuum pressure Pv (sec)
Q
Adsorption response time T2 = 3 x T1 T2 : Arrival time to 95% of final vacuum pressure Pv (sec)
Q1 : Average suction flow rate L/min [ANR]
Piping capacity Calculation of average suction flow rate
3.14 1
V = —— D2 x L x –––– (L) • Ejector
4 1000 Q1 = (1/2 to 1/3) x Ejector max. suction flow rate L/min [ANR]
• Vacuum pump
Q1 = (1/2 to 1/3) x 55.5 x Conductance of vacuum pump [dm3/(s·bar)]
D : Piping diameter (mm)
L : Length from ejector and switch valve to pad (m)
V : Piping capacity from ejector and switching valve to pad (L)
Q2 : Max. flow from ejector and switching valve to pad by piping system
Q2 = C x 55.5 L/min [ANR]
Q : Smaller one between the Q1 and Q2 L/min [ANR]
C : Conductance of piping [dm3/(s·bar)]

For the conductance, the equivalent conductance can be found in “8. Data: Conductance by Tube I.D. (Selection Graph (3)).”

A 34
 Model Selection

 Adsorption Response Time from the Selection Graph

1. Tube Piping Capacity

Piping capacity from the ejector and switching valve at vacuum pump to the pad can be found in “8. Data: Piping Capacity by
Tube I.D. (Selection Graph (2)).”
2. Obtain the adsorption response times.
By operating the supply valve (switching valve) that controls the ejector (vacuum pump), the adsorption response times T1 and
T2 that elapsed before the prescribed vacuum pressure is reached can be obtained from the Selection Graph (1).

Selection Graph (1) Adsorption Response Time

[dm3/(s·bar)]

Piping capacity
Max. suction flow rate Q (L/min (ANR))
55.5
Q
Valve conductance =

Arrival time of vacuum pressure (63%) T1 (sec)

Arrival time of vacuum pressure (95%) T2 (sec)

∗ Conversely, the size of the ejector or the size of the switching valve of the vacuum pump system can be obtained from the adsorption response time.

How to read the graph

Example 1: For obtaining the adsorption response time until the pressure in the piping system with a piping capacity of 0.02 L is
discharged to 63% (T1) of the final vacuum pressure through the use of the vacuum ejector ZH07S with a maximum suction flow rate of 12
L/min (ANR).

<Selection Procedure>
From the point at which the vacuum ejector’s maximum vacuum suction flow rate of 12 L/min (ANR) and the piping capacity of 0.02 L
intersect, the adsorption response time T1 that elapses until 63% of the maximum vacuum pressure is reached can be obtained. (Sequence
in Selection Graph (1), ) T1 ≈ 0.3 seconds.

Example 2: For obtaining the discharge response time until the internal pressure in the 5 L tank is discharged to 95% (T2) of the final
vacuum pressure through the use of a valve with a conductance of 3.6 [dm3/(s·bar)].

<Selection Procedure>
From the point at which the valve’s conductance of 3.6 [dm3/(s·bar)] and the piping capacity of 5 L intersect, the discharge response time (T2)
that elapses until 95% of the final vacuum pressure is reached can be obtained. (Sequence in Selection Graph (1), ) T2 ≈ 12 seconds.

35
Model Selection

6 Precautions on Vacuum Equipment Selection and SMC’s Proposal

 Safety Measures
• Make sure to provide a safe design for a vacuum pressure drop due to a disruption of power supply, or a lack of supply air.
Drop prevention measures must be taken in particular when dropping a workpiece presents some degree of danger.

 Precautions on Vacuum Equipment Selection

As a countermeasure for power outages,
select a supply valve that is normally
open or one that is equipped with a
self-holding function.

Be aware that the composite

conductance consisting of the areas
from the pad to the ejector of a vacuum
switching valve does not decrease.

P P

For the release valve, select a 2/3 port • During the adsorption and transfer of a Use a suction filter (ZFA, ZFB, ZFC
valve with a low vacuum specification. workpiece, verification of the vacuum switch series) to protect the switching valve and
Also, use a needle valve to regulate the is recommended. to prevent the ejector from becoming
release flow rate. • In addition, visually verify the vacuum clogged. Also, a suction filter must be
gauge when handling a heavy or a hazard- used in a dusty environment. If only the
ous item. unit's filter is used, it will become
• Install a filter (ZFA, ZFB, ZFC series) before clogged quickly.
the pressure switch if the ambient air is of
low quality.

 Vacuum Ejector or Pump and Number of Vacuum Pads

Ejector and number of pads Vacuum pump and number of pads
Vacuum line

Tank

P P P P P P P P P

Ideally, one pad should be When more than one pad is attached to a single Ideally, one pad should be When more than one pad is attached to a single
used for each ejector. ejector, if one of the workpieces becomes used for each line. vacuum line, take the countermeasures listed below.
detached, the vacuum pressure will drop, causing • Adjust the needle valve to minimize the
other workpieces to become detached. Therefore, pressure fluctuation between adsorption and
the countermeasures listed below must be taken. non-adsorption operation.
• Adjust the needle valve to minimize the • Include a tank and a vacuum pressure
pressure fluctuation between adsorption and reduction valve (vacuum pressure regulator
non-adsorption operations. valve) to stabilize the source pressure.
• Provide a vacuum switching valve to each • Provide a vacuum switching valve to each
individual pad to minimize the influences on individual pad to minimize the influences on
other pads if an adsorption error occurs. other pads if an adsorption error occurs.

36
 Model Selection

 Vacuum Ejector Selection and Handling Precautions

Ejector Selection Ejector Nozzle Diameter Selection
There are 2 types of ejector flow rate characteristics: the high vacuum If a considerable amount of leakage
type (S type) and the high flow type (L type). occurs between the workpiece and
During the selection, pay particular attention to the vacuum pressure the pad, resulting in incomplete
when adsorbing workpieces that leak. adsorption, or to shorten the
Vacuum
pressure adsorption and transfer time, select
High Vacuum Type High Flow Type an ejector nozzle with a larger
Flow Rate Characteristics/ Flow Rate Characteristics/
P diameter from the ZH, ZR, or ZL
ZH13S ZH13L series.
Leakage
Vacuum pressure (kPa)

Vacuum pressure (kPa)

Manifold Use
Individual exhaust Centralized exhaust

Suction flow rate (L/min (ANR)) Suction flow rate (L/min (ANR))

The vacuum pressure varies in accordance with the leakage volumes

indicated in the above diagrams.
If the leakage volume is 30 L/min (ANR), the vacuum pressure of the S If there are a large number of
type is –20 kPa q → w → e, and for the L type it is –33 kPa q' → w' ejectors that are linked on a
→ e'. If the leakage volume is 5 L/min (ANR), the vacuum pressure of If there are a large number of manifold, which exhaust
the S type is –80 kPa r → t → y, and for the L type it is –47 kPa r' ejectors that are linked on a collectively, install a silencer at
→ t' → y'. Thus, if the leakage volume is 30 L/min (ANR) the L type manifold and operate both ends. If the exhaust must be
can attain a higher vacuum pressure, and if the leakage volume is 5 simultaneously, use the discharged outdoors through
L/min (ANR), the S type can attain a higher vacuum pressure. built-in silencer type or the piping, make the diameter of the
Thus, during the selection process, make sure to take the flow rate port exhaust type. piping larger to control its back
characteristics of the high vacuum type (S type) and the high flow type pressure to 5 kPa or less so that
(L type) into consideration in order to select the type that is optimal for the back pressure will not affect
your application. the operation of the ejectors.

• If the vacuum ejector makes an intermittent noise (abnormal noise) from exhaust at a certain supply pressure, the vacuum
pressure will not be stable. It will not be any problem if the vacuum ejector is used under this condition. However, if the noise
is disturbing or might affect the operation of the vacuum pressure switch, lower or raise supply pressure a little at a time, and
use in an air pressure range that does not produce the intermittent noise.

 Supply Pressure of Vacuum Ejector

• It is recommended to use the vacuum ejector at the standard supply pressure.
The maximum vacuum pressure and suction flow rate can be obtained when the vacuum ejector is used at the standard
supply pressure, and as a result, adsorption response time also improves. From the viewpoint of energy-saving, it is the most
effective to use the ejector at the standard supply pressure. Since using it at an excessive supply pressure may cause the
ejector performance to lower, it is recommended to use at the standard supply pressure.
• The vacuum ejector continues to consume air during vacuum generation. As a result, even when the product is set at the
standard supply pressure when vacuum is stopped, the pressure right before the ejector may drop when vacuum is
generated due to the influence of compressed air supply capacity, air preparation equipment and piping size, and the
simultaneous operation of peripheral equipment.
Therefore, be sure to confirm the operating pressure in advance to prevent reduced vacuum pressure and lifting power
caused by pressure drops.
• In order to prevent pressure drops during the generation of vacuum, we recommend using a piping system that provides a
margin 3 times the air consumption amount of the vacuum ejector.

37 A
Model Selection

 Timing for Vacuum Generation and Suction Verification

A. Timing for Vacuum Generation

The time for opening/closing the valve will be counted if a vacuum is generated after the adsorption pad descends to adsorb a
workpiece. Also, there is a timing delay risk for the generating vacuum since the operational pattern for the verification switch,
which is used for detecting the descending vacuum pad, is not even.
To solve this issue, we recommend that vacuum be generated in advance, before the vacuum pad begins to descend to the
workpiece. Adopt this method after confirming that there will be no misalignment resulting from the workpiece’s light mass.

B. Suction Verification
When lifting the vacuum pad after absorbing a workpiece, confirm that there is a suction verification signal from the vacuum
pressure switch, before the vacuum pad is lifted. If the vacuum pad is lifted, based on the timing of a timer, etc., there is a risk
that the workpiece may be left behind.
In general adsorption transfer, the time for adsorbing a workpiece is slightly different since the position of the vacuum pad and
the workpiece are different after every operation. Therefore, program a sequence in which the suction completion is verified
by a vacuum pressure switch, etc. before moving to the next operation.

C. Set Pressure for Vacuum Pressure Switch

Set the optimum value after calculating the required vacuum pressure for lifting a workpiece.
If a higher pressure than required is set, there is a possibility of being unable to confirm the suction even though the
workpiece is adsorbed. This will result in a suction error.
When setting vacuum pressure switch set values, you should set using a lower pressure, with which a workpiece can be
adsorbed, only after considering the acceleration or vibration when a workpiece is transferred. The set value of the vacuum
pressure switch shortens the time to lift a workpiece. Since the switch detects whether the workpiece is lifted or not, the
pressure must be set high enough to detect it.

Vacuum Pressure Switch (ZSE Series), Timing Chart Example

Flow Sensor (PFMV Series), During adsorption During vacuum release
Vacuum Pressure Gauge (GZ Series)
Cylinder UP
When adsorbing and transferring a workpiece, verify at the vacuum
pressure switch as much as possible (In addition, visually verify the
vacuum gauge, especially when handling a heavy or a hazardous Cylinder DOWN
item.).
Approx. ø1 adsorption nozzle Cylinder switch
The difference in pressure between ON and OFF becomes small
depending on the capacity of the ejector and vacuum pump. In such a
case, it is necessary to use the digital pressure switch ZSE10 or
ZSE30A with a fine smallest settable increment or a flow switch for Supply valve
flow rate detection.
Note) • A vacuum generator with a large suction capacity will not
Release valve
be detected properly, so an ejector with an appropriate
capacity must be selected.
• Since the hysteresis is small, vacuum pressure must be V port vacuum By lowering the
stabilized. pressure setting of the Atmospheric
vacuum switch, the pressure
takt time can be
Vacuum pressure shortened.
switch set value

Vacuum
pressure at
operation

Vacuum
pressure switch
Vacuum pressure switch Flow sensor Vacuum pressure
ZSE10, ZSE30A PFMV gauge
GZ46
Refer to the Best Pneumatics No. 8 for details.

38
 Model Selection

 Dust Handling of Vacuum Equipment

• When the vacuum equipment is used, not only the workpiece, but also dust in the surrounding environment is taken in the
equipment. Preventing the intrusion of dust is required more than for any other pneumatic equipment. Some of SMC’s
vacuum equipment comes with a filter, but when there is a large amount of dust, an additional filter must be installed.
• When vaporized materials such as oil or adhesive are sucked into the equipment, they accumulate inside, which may cause
problems.
• It is important to prevent dust from entering the vacuum equipment as much as possible.
(1) Make sure to keep the working environment and surrounding area of the workpiece clean so that dust will not be sucked
in the equipment.
(2) Check the amount and types of dust before using the equipment and install a filter, etc., in the piping when necessary.
(3) Conduct a test and make sure that operating conditions are cleared before using the equipment.
(4) Perform filter maintenance depending on the amount of dirt.
(5) Filter clogging generates a pressure difference between the adsorption and ejector parts. This requires attention, since
clogging can prevent proper adsorption from being achieved.

Air Suction Filter (ZFA, ZFB, ZFC Series)

• To protect the switching valve and the ejector from becoming clogged, a suction filter in the vacuum circuit is recommended.
• When using an ejector in a dusty environment, the unit’s filter will become clogged quickly, so it is recommended that the ZFA, ZFB or ZFC
series be used concurrently.

Vacuum Line Equipment Selection

Determine the volume of the suction filter and the conductance of the switching valve in accordance with the maximum suction flow rate of the
ejector and the vacuum pump. Make sure that the conductance is greater than the value that has been obtained through the formula given
below. (If the devices are connected in series in the vacuum line, their conductances must be combined.)

Qmax
C= C: Conductance [dm3/(s·bar)]
55.5
Qmax: Max. suction flow rate L/min (ANR)

39
Model Selection

7 Vacuum Equipment Selection Example

 Transfer of Semiconductor Chips
Selection conditions:
(1) Workpiece: Semiconductor chips
Dimensions: 8 mm x 8 mm x 1 mm, Mass: 1 g
(2) Vacuum piping length: 1 m
(3) Adsorption response time: 300 msec or less

1. Vacuum Pad Selection

(1) Based on the workpiece size, the pad diameter is 4 mm (1 pc.).
(2) Using the formula on page 28, confirm the lifting force.
W = P x S x 0.1 x 1/t W = 1 g = 0.0098 N
0.0098 = P x 0.13 x 0.1 x 1/4 S = π/4 x (0.4)2 = 0.13 cm2
P = 3.0 kPa t = 4 (Horizontal lifting)
According to the calculation, –3.0 kPa or more of vacuum pressure can adsorb the workpiece.
(3) Based on the workpiece shape and type, select:
Pad type: Flat with groove
Pad material: Silicone rubber
(4) According to the results above, select a vacuum pad part number ZP3-04UMS.

2. Vacuum Ejector Selection

(1) Find the vacuum piping capacity.
Assuming that the tube I.D. is 2 mm, the piping capacity is as follows:
V = π/4 x D2 x L x 1/1000 = π/4 x 22 x 1 x 1/1000
= 0.0031 L
(2) Assuming that leakage (QL) during adsorption is 0, find the average suction flow rate to meet the adsorption response
time using the formula on page 33.
Q = (V x 60) /T1 + QL = (0.0031 x 60) /0.3 + 0 = 0.62 L
From the formula on page 33, the maximum suction flow rate Qmax is
Qmax = (2 to 3) x Q = (2 to 3) x 0.62
= 1.24 to 1.86 L/min (ANR)
According to the maximum suction flow rate of the vacuum ejector, a nozzle with a 0.5 diameter can be used.
If the vacuum ejector ZX series is used, representative model ZX105 can be selected.
(Based on the operating conditions, specify the complete part number for the vacuum ejector used.)

3. Adsorption Response Time Confirmation

Confirm the adsorption response time based on the characteristics of the vacuum ejector selected.
(1) The maximum suction flow rate of the vacuum ejector ZX105 is 5 L/min (ANR). From the formula on page 34,
the average suction flow rate Q1 is as follows:
Q1 = (1/2 to 1/3) x Ejector max. suction flow rate
= (1/2 to 1/3) x 5 = 2.5 to 1.7 L/min (ANR)

(2) Next, find the maximum flow rate Q2 of the piping. The conductance C is 0.22 from the Selection Graph (3).
From the formula on page 34, the maximum flow rate is as follows:
Q2 = C x 55.5 = 0.22 x 55.5 = 12.2 L/min (ANR)
(3) Since Q2 is smaller than Q1, Q = Q1.
Thus, from the formula on page 34, the adsorption response time is as follows:
T = (V x 60)/Q = (0.0031 x 60)/1.7 = 0.109 seconds
= 109 msec
It is possible to confirm that the calculation result satisfies the required specification of 300 msec.

40
 Model Selection

8 Data
 Selection Graph
Selection Graph (2) Piping Capacity by Tube I.D.
Piping capacity V (L)

.
I.D
be
Tu

Tube length L (m)

How to read the graph

Example: For obtaining the capacity of tube I.D. ø5 and 1 meter length
<Selection Procedure>
By extending leftward from the point at which the 1 meter tube length
on the horizontal axis intersects the line for a tube I.D. ø5, the piping
capacity approximately equvalent to 0.02 L can be obtained on the
vertical axis.
Piping capacity ≈ 0.02 L

Selection Graph (3) Conductance by Tube I.D.

Tube I.D. ø9
10
8 7.5
6.5
6
Equivalent conductance [dm3(s·bar)]

4B

2 5 4.5
4

0.6
3 2.5
0.4 2.18
2
0.2

0.1

0.06
A
0.04
0.5 1 2 3 5 10 20

Tube length (m)

How to read the graph

Example: Tube size ø8/ø6 and 1 meter length

<Selection Procedure>
By extending leftward from the point at which the 1 meter tube length
on the horizontal axis intersects the line for a tube I.D. ø6, the
equivalent conductance approximately 3.6 [dm3/(s·bar)] can be
obtained on the vertical axis.
Equivalent conductance ≈ 3.6 [dm3/(s·bar)]

41
Model Selection

 Glossary of Terms
Terms Description
Volume of air taken in by the ejector. The maximum value is the volume of air taken in
(Max.) suction flow rate without having anything connected to the vacuum port.

Maximum vacuum pressure The maximum value of the vacuum pressure generated by the ejector

Air consumption The compressed volume of air consumed by the ejector

Standard supply pressure The optimal supply pressure for operating the ejector

The relationship between the vacuum pressure and the suction flow rate when the
Exhaust characteristics
supply pressure to the ejector has been changed.
The relationship between the vacuum pressure and the suction flow rate with the
Flow rate characteristics
standard supply pressure supplied to the ejector.
Vacuum pressure switch Pressure switch for verifying the adsorption of a workpiece

(Air) supply valve Valve for supplying compressed air to the ejector

(Vacuum) release valve Valve for supplying positive pressure or air for breaking the vacuum state of the
adsorption pad
Flow adjustment valve Valve for adjusting the volume of air for breaking the vacuum

Pilot pressure Pressure for operating the ejector valve

The action of breaking the vacuum using externally supplied air instead of using the
External release
ejector unit
Vacuum port Port for generating vacuum

Exhaust port Port for exhausting air consumed by the ejector, and air taken in from the vacuum port.

Supply port Port for supplying air to the ejector

Back pressure Pressure inside the exhaust port

The entry of air into the vacuum passage, such as from an area between a workpiece
Leakage and a pad, or between a fitting and a tube. The vacuum pressure decreases when
leakage occurs.

Response time The time from the application of the rated voltage to the supply valve or release
valve,until V port pressure reaches the specified pressure.

Average suction flow rate The suction flow rate by the ejector or pump for calculating the response speed. It is 1/2
to 1/3 of the maximum suction flow rate.

Conductive pad A low electrical resistance pad for electrostatic prevention measure

Any pressure below the atmospheric pressure. When the atmospheric pressure is used
as a reference, the pressure is presented by –kPa (G), and when the absolute pressure
Vacuum pressure is used as a reference, the pressure is represented by kPa (abs).
When referencing a piece of vacuum equipment such as an ejector, the pressure is
generally represented by –kPa.
A unit for generating vacuum by discharging the compressed air from a nozzle at a high
Ejector speed, based on the phenomenon in which the pressure is reduced when the air around
the nozzle is sucked.
Vacuum filter provided in the vacuum passage for preventing the dust intrusion into the
Air suction filter
ejector, vacuum pump, or peripheral equipment

42
 Model Selection

P Countermeasures for Vacuum Adsorption System Problems (Troubleshooting)

Condition & Description
Contributing factor Countermeasure
of improvement
Initial adsorption Adsorption area is small. Recheck the relationship between workpiece mass and lifting
problem (Lifting force is lower than the force.
(During trial operation) workpiece mass.) • Use a vacuum pad with a large adsorption area.
• Increase the quantity of vacuum pads.
Vacuum pressure is low. Eliminate (reduce) leakage from adsorption surface.
(Leakage from adsorption surface) • Reconsider the shape of a vacuum pad.
(Air permeable workpiece) Check the relationship between suction flow rate and arrival
pressure of vacuum ejector.
• Use a vacuum ejector with a high suction flow rate.
• Increase adsorption area.
Vacuum pressure is low. Repair leakage point.
(Leakage from vacuum piping)
Internal volume of vacuum circuit Check the relationship between internal volume of the vacuum
is large. circuit and suction flow rate of the vacuum ejector.
• Reduce internal volume of the vacuum circuit.
• Use a vacuum ejector with a high suction flow rate.
Pressure drop of vacuum piping Reconsider vacuum piping.
is large. • Use a shorter or larger tube (with appropriate diameter).
Inadequate supply pressure of Measure supply pressure in vacuum generation state.
vacuum ejector • Use standard supply pressure.
• Reconsider compressed air circuit (line).
Clogging of nozzle or diffuser Remove foreign matter.
(Infiltration of foreign matter
during piping)
Supply valve (switching valve) is Measure supply voltage at the solenoid valve with a tester.
not being activated. • Reconsider electric circuits, wiring and connectors.
• Use in the rated voltage range.
Workpiece deforms during Since a workpiece is thin, it deforms and leakage occurs.
adsorption. • Use a pad for adsorption of thin objects.
Late vacuum achieving Internal volume of vacuum circuit Check the relationship between internal volume of the vacuum
time is large. circuit and suction flow rate of the vacuum ejector.
(Shortening of response • Reduce internal volume of the vacuum circuit.
time) • Use a vacuum ejector with a high suction flow rate.
Pressure drop of vacuum piping Reconsider vacuum piping.
is large. • Use a shorter or larger tube (with appropriate diameter).
Using the product as close to the Set vacuum pressure to minimum necessary value by optimizing
highest vacuum power in the the pad diameter etc.
specifications. As the vacuum power of an ejector (venturi) rises, the vacuum
flow actually lowers. When an ejector is used at its highest
possible vacuum value, the vacuum flow will lower. Due to this,
the amount of time needed to achieve adsorption is lengthened.
One should consider an increase in the diameter of the ejector
nozzle or an increase the size of the vacuum pad utilized in order
to lower the required vacuum pressure, maximum the vacuum
flow, and speed up the adsorption process.
Setting of vacuum pressure Set to suitable setting pressure.
switch is too high.
Fluctuation in vacuum Fluctuation in supply pressure Reconsider compressed air circuit (line).
pressure (Addition of a tank etc.)
Vacuum pressure may fluctuate Lower or raise supply pressure a little at a time, and use in a
under certain conditions due to supply pressure range where vacuum pressure does not
ejector characteristics. fluctuate.
Occurrence of abnormal Intermittent noise may occur Lower or raise supply pressure a little at a time, and use in a
noise (intermittent noise) under certain conditions due to supply pressure range where the intermittent noise does not
from exhaust of vacuum ejector characteristics. occur.
ejector
Air leakage from vacuum Exhaust air from the ejector Use a vacuum ejector with a check valve.
port of manifold type enters the vacuum port of another (Please contact SMC for the part number of an ejector with a
vacuum ejector ejector that is stopped. check valve.)

43
Model Selection

Condition & Description

Contributing factor Countermeasure
of improvement
Adsorption problem over Clogging of suction filter Replace filters.
time Improve installation environment.
(Adsorption is normal Clogging of sound absorbing Replace sound absorbing materials.
during trial operation.) material Add a filter to supply (compressed) air circuit.
Install an additional suction filter.
Clogging of nozzle or diffuser Remove foreign matter.
Add a filter to supply (compressed) air circuit.
Install an additional suction filter.
Vacuum pad (rubber) Replace vacuum pads.
deterioration, cracking, etc. Check the compatibility of vacuum pad material and workpiece.
Workpiece is not Inadequate release flow rate Open release flow adjustment needle.
released. Vacuum pressure is high. Reduce the vacuum pressure.
Excessive force (adhesiveness of If inadequate lifting force causes a problem in transferring the
the rubber + vacuum pressure) is workpieces, increase the number of pads.
applied to the pad (rubber part).
Effects due to static electricity Use a conductive pad.
Adhesiveness of the rubber Replace pads.
increases due to the operating Reconsider the pad material and check the compatibility of pad
environment or wearing of the material and workpiece.
pad. Reconsider the pad form.
• Adhesiveness of the rubber (Changes to rib, groove, blast options)
material is high. Reconsider the pad diameter and quantity of pads.
• Adhesiveness increases due to
wearing of the vacuum pad
(rubber).

44
 Model Selection

P Non-conformance Examples
Phenomenon Possible causes Countermeasure
No problem occurs during • Setting of the vacuum switch is not 1) Set the pressure for the vacuum equipment (supply
the test, but adsorption appropriate. Supply pressure is unstable. pressure, if using an ejector) to the necessary vacuum
becomes unstable after Vacuum pressure does not reach the set pressure during the adsorption of the workpieces.
starting operation. pressure. And set the set pressure for the vacuum switch to
• There is leakage between the workpiece the necessary vacuum pressure for adsorption.
and the vacuum pad. 2) It is presumed that there was leakage during the
test, but it was not serious enough to prevent
adsorption. Reconsider the vacuum ejector and the
shape, diameter, and material of the vacuum pad.
Reconsider the vacuum pad.
Adsorption becomes • Initial setting conditions (vacuum 1) Reconsider the operating conditions including
unstable after replacing the pressure, vacuum switch setting, height vacuum pressure, the set pressure of the vacuum
pad. of the pad) have changed. Settings have switch, and the height of the pad.
changed because the pad was worn out 2) Reconsider the engagement.
or had permanent setting due to the
operating environment.
• When the pad was replaced, leakage
was generated from the screw connection
part, or the engagement between the pad
and the adapter.
Identical pads are used to • There is leakage between the workpiece 1) Reconsider the pad diameter, shape, material,
adsorb identical and the vacuum pad. vacuum ejector (suction flow rate), etc.
workpieces, but some of • The supply circuit for the cylinder, the solenoid 2) Reconsider the pneumatic circuit.
the pads cannot adsorb valve and the ejector is in the same pneumatic 3) Reconsider the engagement.
the workpieces. circuit system. The supply pressure decreases
when they are used simultaneously. (Vacuum
pressure does not increase.)
• There is leakage from the screw
connection part or the engagement
between the pad and the adapter.
Generation of sticking of When the vacuum pad (bellows type) The operating conditions will determine the product life.
bellows of the bellows pad reaches the end of its life, weakening of Inspect it sufficiently and determine the replacement time.
and/or recovery delays. bent parts, wearing, or sticking of rubber • Replace pads.
(It may occur at an early parts occurs. • Reconsider the diameter, form, and material of vacuum pads.
stage.) • Reconsider the quantity of vacuum pads.
Vacuum pressure is higher than necessary, Reduce the vacuum pressure.
so excessive force (adhesiveness of the If inadequate lifting force causes a problem in
rubber + vacuum pressure) is applied to transferring the workpieces due to the reduction of
the pad (rubber part). vacuum pressure, increase the number of pads.
Load is applied to the bellows due to the following Reduce the load applied to the pad.
operations, leading to sticking of rubber parts or • Review the equipment so that an external load
reduction of the pad recovery performance. exceeding the pad displacement (operating range) is
• Pushing exceeding pad displacement not applied.
(operating range), external load. • Avoid workpiece holding and waiting.
• Workpiece holding/waiting The operating conditions will determine the product
Waiting 10 seconds or more while the life. Inspect it and determine the replacement time.
workpiece is being held
* Even when under 10 seconds, pads
sticking or a recovery delay issues may
occur earlier depending on the operating
environment and operating method.
Longer workpiece holding times lead to
longer recovery times and a shorter life.
The product life is • The settings of the product changed. If the problem (cannot adsorb) does not occur when
shortened after • Tube had been pulled. starting operation, the product may reach the end of its
replacement of the product Unbalanced load in clockwise direction increased. life due to the customer's specification conditions.
(pad, buffer, etc.). • The transfer speed increased. Reconsider the piping and operation (specifications).
• The workpiece to be transferred was changed. The selected model may not be appropriate for the
(Shape, center of gravity, weight, etc.) current workpiece to be transferred or the specifications.
• The mounting orientation was at an angle. Select the product model again by reconsidering the
• The operating environment changed. pad shape, diameter, quantity, and suction balance.
• The buffer (mounting nut) was not
tightened with the appropriate torque.
Pad comes out from the Load is applied to the pad (rubber part) The selected model may not be appropriate for the
adapter during operation. due to the following factors. current workpiece to be transferred or the
Cracks are generated on • Inadequate lifting force specifications.
the pad. • Incorrect suction balance Select the product model again by reconsidering the
• Loads due to transfer acceleration are not pad shape, diameter, quantity, and suction balance.
considered when selecting the product model.

45
Model Selection

Phenomenon Possible causes Countermeasure

Cracks are generated on • The product is operated in an ozone envi- Reconsider the operating environment.
the rubber (NBR, conduc- ronment. Reconsider the materials to be used.
tive NBR). • An ionizer is used.
* This phenomenon occurs earlier if
pushing or the high vacuum pressure is
used.

Even when a mark-free If the pad adsorbs a highly clean work- Use the following products.
pad is used, the pad end piece, slippage is minimized, and a load • Stuck fluororesin pad
wears out quickly. (Suction (impact) is applied to the pad end. • Clean attachment
marks are generated.)
Even when a mark-free • Incorrect application Check the mark generated on the workpiece.
pad is used, suction marks (The mark was generated due to a 1) Mark due to deformed (lined) workpiece
are generated. deformation.) Reconsider the pad diameter, form, material,
• Contamination (insufficient cleaning) on vacuum ejector (suction flow rate), etc.
the pad when installing the equipment, 2) Mark due to worn rubber
dust in the operating environment etc. Reconsider the pad diameter, form, material,
vacuum ejector (suction flow rate), etc.
3) Mark generated by moving components
If the suction mark disappears or becomes smaller after
wiping with cloth or waste cloth (without using solu-
tions), clean the pad as it may have been contaminated.
Refer to "Cleaning method (Mark-free NBR pad)"
on page 559 of this catalog.

46
 Model Selection

When mounted with the nut, sometimes the buffer operation is not smooth, or the buffer does not slide.
[Possible causes]
• The tightening torque of the nut for mounting the buffer is too high.
• Particles stuck to the sliding surface, or it is scratched.
• Lateral load applied to the piston rod, causing eccentric wearing.
[Remedy]
Tighten the nut to the recommended tightening torque.
The nut may become loose depending on the operating conditions and environment. Be sure to perform regular maintenance.
ZP/ZP2
Product specifications
Nut tightening torque
Pad diameter Product part no. Mounting thread size
ZP (02 to 08) U, B
ø2 to ø16
ZP (10 to 16) UT, C M8 x 1 1.5 to 2.0 N·m
2004 to 4010 ZP (2004 to 4010) U
ZP (10 to 32) U, C, B, D
ø10 to ø32 M10 x 1 2.5 to 3.5 N·m
ZP (10 to 16) F
ZP (40, 50) U, C, B, D
ø20 to ø50 M14 x 1 6.5 to 7.5 N·m
ZP (20 to 50) F
ZP3
Product specifications
Nut tightening torque
Pad diameter Product part no. Mounting thread size
M6 x 0.75 1.5 to 1.8 N·m
ø1.5 to ø3.5 ZP3-∗(015 to 035) U∗
M8 x 0.75 2.0 to 2.5 N·m
ZP3-∗(04 to 16) UM,B∗
ø4 to ø16 M8 x 0.75 2.0 to 2.5 N·m
ZP3-∗(10 to 16) UM,B∗
Heavy-duty Pad
Product specifications
Nut tightening torque
Pad diameter Product part no. Mounting thread size Buffer body material
J Aluminum alloy 9.5 to 10.5 N·m
ZP (40/50) H
ø40, ø50 JB  M18 x 1.5 Brass 28 to 32 N·m
ZP (40/50) HB
JF Steel 48 to 52 N·m
J Aluminum alloy 9.5 to 10.5 N·m
ZP (63/80) H
ø63, ø80 JB  M18 x 1.5 Brass 28 to 32 N·m
ZP (63/80) HB
JF Steel 48 to 52 N·m
J Aluminum alloy 9.5 to 10.5 N·m
ZP (100/125) H
ø100, ø125 JB  M22 x 1.5 Brass 45 to 50 N·m
ZP (100/125) HB
JF Steel 75 to 80 N·m
Heavy-duty Ball Joint Pad
Product specifications
Nut tightening torque
Pad diameter Product part no. Mounting thread size Buffer body material
ZP2-F (40/50) H JB Brass 28 to 32 N·m
ø40, ø50  M18 x 1.5
ZP2-F (40/50) HB JF Steel 48 to 52 N·m
ZP2-F (63/80) H JB Brass 45 to 50 N·m
ø63, ø80  M22 x 1.5
ZP2-F (63/80) HB JF Steel 75 to 80 N·m
ZP2-F (100/125) H JB Brass 45 to 50 N·m
ø100, ø125  M22 x 1.5
ZP2-F (100/125) HB JF Steel 75 to 80 N·m

How to Replace the Pad

Remove bolts with a hex. key wrench from the pad underside. Tighten new pad with the bolts ensuring there is no gap between the adapter plate
and the pad.
Adapter plate
Adapter plate
Mark

Pad

Hexagon socket
head cap screw

Gap

47
Model Selection

Time of Replacement of Vacuum Pad

The vacuum pad is disposable. Replace it on a regular
Recommended Tightening Torque for Replacement of
basis.
Continued use of the vacuum pad will cause wear and tear on the
Heavy-duty Pad
adsorption surface, and the exterior dimensions will gradually get Product specifications Bolt tightening
smaller and smaller. As the pad diameter gets smaller, lifting force torque
will decrease, though adsorption is possible. Pad diameter Product part no. Bolt
It is extremely difficult to provide advice on the frequency of ZP (40/50) H
vacuum pad exchange. This is because there are numerous ø40, ø50 M3 x 8 0.7 to 0.9 N·m
ZP (40/50) HB
factors at work, including surface roughness, operating
environment (temperature, humidity, ozone, solvents, etc.), and ZP (63/80) H
ø63, ø80 M4 x 8 0.9 to 1.1 N·m
operating conditions (vacuum pressure, workpiece weight, ZP (63/80) HB
pressing force of the vacuum pad on the workpiece, presence or ZP (100/125) H
absence of a buffer, etc.). ø100, ø125 M5 x 10 2.3 to 2.7 N·m
ZP (100/125) HB
(Weakening of bent parts, wear, or sticking of rubber parts may
occur with the bellows type pad.) Tighten the nut to the recommended tightening torque.
Thus, the customer should decide when the vacuum pad should
be exchanged, based on its condition at time of initial use.
The bolt may become loose depending on the operating
conditions and environment. Be sure to perform regular
maintenance.

48