TruPlasma Bias 4036

DC Generator

USER MANUAL

Notice!
This operating manual is required for the safe operation
of the TruPlasma Bias 4036 Generators. Therefore, you should
keep the operating manual close to the unit.
 TruPlasma Bias 4000 Family

Operating instructions
for TruPlasma Bias 4036
Generator

HUETTINGER Electronic
Sp. z o.o.
Marecka 47
PL - 05-220 Zielonka
tel: +48 22 761 38 00
fax: +48 22 761 38 01

[email protected]
www.huettinger.com

Operating Instructions for TruPlasma Bias 4036 Generator Page 2

Rev. 3.1.1.1.P.09.F
 TruPlasma Bias 4000 Family

Headquarters

HÜTTINGER Elektronik HUETTINGER Electronic

GmbH + Co. KG Sp. z o.o.

Bötzinger Straße 80 Marecka 47

79111 Freiburg PL-05-220 Zielonka
Germany Poland
Tel. +49 761 89 71-0 Tel. +48 22 761 38 00
Fax +49 761 89 71-1150 Fax. +48 22 761 38 01
[email protected] [email protected]

HUETTINGER Electronic Inc.

111 Hyde Road

Farmington, CT 06032
USA
Tel. +1 860 255 65 55
Fax +1 860 255 64 23
[email protected]

HÜTTINGER Electronic K.K.

Shinyokohama Tobu AK bldg. 7F

3-23-3 Shinyokohama, Kohoku-ku,
Yokohama city, Kanagawa 222-0033
Japan
Tel. +81 45 470 3761
Fax +81 45 470 3510
[email protected]

HÜTTINGER Electronics Ltd.

11H, Century Ba-Shi Building

398 Huai Hai Zhong Road
Shanghai 200020-P.R.
China
Phone +86-21-63 85-12 38 ext 301
Telefax +86-21-63 85-16 60
[email protected]

Operating Instructions for TruPlasma Bias 4036 Generator Page 3

Rev. 3.1.1.1.P.09.F
 TruPlasma Bias 4000 Family

© 2009, HUETTINGER Electronic.

All rights reserved. This manual is purposed to enable the reader to install and
operate safely the equipment described below. Making copies of any part of this manual
for any purpose other than these is a violation of Poland copyright law.

In the interest of providing even better equipment, HUETTINGER Electronic reserves

the right to make product modifications without notification or obligation. To the best of
our knowledge, the information contained in this manual is the most accurate available as
of the date on the front page.

© 2009, HUETTINGER Electronic.

To ensure years of dependable service, HUETTINGER Electronic® products are

thoroughly tested and found to be among the most reliable and highest quality systems
available.

For Customer Service or Support, call:

HUETTINGER Electronic Sp. z o.o.

tel: +48 22 761 38 00
fax: +48 22 761 38 01
[email protected]

Returning Units for Repair

Before returning any product for repair or adjustment, call HUETTINGER

Electronic Service and discuss the problem with a representative service engineer. Be
prepared to give the serial number of the unit and the reason for the purposed return.
This consultation call will allow Customer Service to determine if the unit needs to be
returned. Such technical consultation is always available at no charge.

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Table of contents
page

1. SAFETY INFORMATION .........................................................................................6

1.1. Important information ....................................................................................................................... 6
1.2. Personnel............................................................................................................................................... 6
1.3. Safety standards profile .................................................................................................................... 6
1.4. Transportation and storage .............................................................................................................. 7

2. EXPLANATION OF SYMBOLS AND NOTES ...........................................................8

3. GENERAL INFORMATION ......................................................................................9

3.1. TruPlasma Bias 4036 block diagram................................................................................................ 9

4. ELECTRICAL AND MECHANICAL SPECIFICATION ...............................................11

4.1. Electrical and mechanical specification in tables ....................................................................... 11
4.2. Power characteristics for TruPlasma Bias 4036 module ........................................................... 13
4.3. Pulse description................................................................................................................................ 14

5. INSTALLATION .....................................................................................................15
5.1. Installation site .................................................................................................................................. 15
5.2. Fusing ................................................................................................................................................... 15

6. CONNECTING THE POWER SUPPLY ....................................................................16

6.1. Suggested cabling technique ......................................................................................................... 17
6.2. Connection terminals ....................................................................................................................... 18
6.3. Analog control terminals description ........................................................................................... 19
6.4. RS-232 communication terminal description .............................................................................. 22
6.5. Profibus terminal description ......................................................................................................... 22
6.6. Synchro cable ..................................................................................................................................... 23

7. WORKING WITH THE FRONT PANEL CONSOLE..................................................25

8. DESCRIPTION OF DISPLAYED DATA AND SETTINGS .........................................28

8.1. Basic control and readout parameters ......................................................................................... 28
8.2. Basic ON/OFF and mode settings .................................................................................................. 29
8.3. User setup menu................................................................................................................................ 30

9. SETTING THE ARC DETECTION CRITERIA ............................................................31

10. INTERFACES......................................................................................................34
10.1. RS232 communication protocol for TruPlasma Bias 4036 units ............................................. 34
10.2. Profibus communication protocol ................................................................................................. 41

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1. Safety information

1.1. Important information

The TruPlasma Bias 4036 Power Supply is designed to power industrial vacuum
process chambers operating in PVD surface treatment technologies. Any other use, or any
use beyond the foregoing, is deemed to be improper. The HUETTINGER Electronic
company shall not be liable for any loss and damages resulting from such usage.

Correct usage also includes:

• compliance with all instructions from the operating manual,
• adherence to inspection and maintenance intervals.

Safe operating procedures and proper use of the equipement are

the responsibility of the user of this system.

1.2. Personnel

Only qualified personnel may work with the TRUPLASMA BIAS 4036. "Qualified"
means that the staff will be familiar with safe installation, maintenance and operation.

All of the personnel working with this equipment must take precautions to protect
themselves against possible electrical shocks or other fatal injuries. They must be
acquainted with the entire TruPlasma Bias 4036 operating instruction manual and
understand all of its contents.

Do not be careless around the equipment!

1.3. Safety standards profile

The TruPlasma Bias 4036 Power Supply was designed and constructed in
compliance with requirements included in the following standards and EC
directives:

• EN 60950: 1992 "Safety of information technology equipment,

including electrical business equipment"
• EN 50178: 1998 "Electronic equipment for use in power
installations"
• EN 61000-6-4: 2001 "Generic standards -Emission standards for
industrial environments"
• EN 61000-6-2: 2001 "Generic standards – Immunity for industrial
environments”
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 TruPlasma Bias 4000 Family
EC directives:

• 73/23/EEC Low Voltage Directive – Law for electrical

equipment within certain voltage limits
• 89/336 EMC Directive as amended by 93/68/EEC – Laws relating
to electromagnetic compatibility

Check the external fuse value and grounding circuit before

switching the mains on.

Never unscrew the front terminal cover before switching the

mains off.

The positive output of the power supply must be connected

to the chamber potential (grounded).

1.4. Transportation and storage

Transportation

TruPlasma Bias 4036 system must be firmly situated in a horizontal position.

Storage

Storage environments should be dry, free of aggressive vapors and not exposed to
temperatures from beyond the 3k3 class range – EN 50178 (i.e.: -25, +55ºC). See table
‘Environment’.

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2. Explanation of symbols and notes

Failure to comply with these precautions means that slight physical

injury or damage to property is possible.

Failure to comply with these warnings means that death, serious

physical injury or damage to property are possible.

Failure to comply with these information can cause faults or failure

of the TruPlasma Bias 4036 system performance.

Useful notice and tips about correct handling, operation and

maintenance.

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Rev. 3.1.1.1.P.09.F
 TruPlasma Bias 4000 Family
3. General information
The TruPlasma Bias 4036 Power Supply is designed to power industrial vacuum
process chambers operating in PVD surface treatment technologies. Its dual-mode power
system and pulsed output feature enable effective operation in low and high voltage
modes delivering sufficient supply to the etching, glowing and coating process stages.

The power-electronic design is based on switched mode technology which ensures

low output current ripples, high efficiency, small dimensions and weight, and also low
audio noise generation. Modular construction of the power converter circuits simplifies
transportation, installation and servicing duties.

All units are microprocessor-controlled. All control-signal connections are digital

and opto-isolated giving high resistance to electric disturbances.

A multi-control system gives the user a possibility of selecting from four optional
control sources:

• Local: DISPLAY console located on the front panel of the TRUPLASMA BIAS
4036.
• Remote RS232 / RS485 link for the PC computer.
• Remote Profibus
• Remote: ANALOG - potentiometers, switches, LEDs and gauges connected to
the analog control connectors (*optional).

3.1. TruPlasma Bias 4036 block diagram

The power supply section is equipped with appropriate voltage, current and power
regulators, and dual (HV and LV) mode circuits. It delivers the sufficient voltage to the
pulse-unit section which is responsible for detecting and quenching arc occurrences, and
also pulsing the output.

A block diagram of the TruPlasma Bias 4036 is shown below. TruPlasma Bias 4036
block diagram consists of the following functional blocks:

• input EMI filter to reduce the EMI interferences delivered to the mains.
• power relays providing a soft switch-on
• three-phase rectifier and filter
• high frequency switched-mode DC/AC power converter
• 4 high frequency pulse transformers and high frequency rectifiers
• 4 pulse units
• solid state switch coupled with arc switch-off circuitry
• HV / LV range selection circuitry
• control electronics and LCD display panel

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4. Electrical and mechanical specification

4.1. Electrical and mechanical specification in tables

Overall
Mains voltage V 3 x 400 ±10%
Mains frequency Hz 50 – 60Hz
Maximum mains input current A 3 x 64A
Recommended fusing A 3 x 80A, C class

Output
Operation modes - HV (High Voltage) DC
- LV (Low Voltage) DC
- HV (High Voltage) Pulsed
- LV (Low Voltage) Pulsed

Output voltage and current: A 0 … 1200V 0 … 30 A

HV DC mode 0 … 300V 0 … 120 A
LV DC mode V 0 … 1200Vpeak 0 … 30 Apeak
HV Pulsed mode 0 … 300Vpeak 0 … 120 Apeak
LV Pulsed mode
Control modes: Local display panel
Remote RS232
Remote optional analog port
Profibus digital port
Output parameters control U, regulation
I, P regulation: optional
Efficiency Approximately 93%

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 TruPlasma Bias 4000 Family

Arc Management
Arc detection criteria: Imax
UxI
dU
Imax an arc is detected when the adj. Imax threshold 10 … 100% In
output current exceeds the Im separately in HV and LV modes
value
U x I (cross detection) adj. Ux threshold 0 … 200V,
an arc is detected when output adj. Ix threshold 10 … 100% In
current exceeds the Ix threshold Both values adjustable separately in
value while the output voltage
drops below the Ux value
HV and LV modes
dU (dynamic voltage change)
a spark is detected (in case
spark detection mode is preset ∆U = 75% Uact
selected) when the output
voltage drops rapidly by 75% of
its value
Arc detection time µs <1
Spark quenching time µs <0,5
Arc quenching delay µs User setting: 2 … 10
Maximum arcing frequency Arc/s 50 Arcs/s
Maximum allowable peak output V 1500V in HV mode
voltage 400V in LV mode
Pulse frequency kHz 2 – 100kHz
Pause duration s 1 – 10µs set with 1µs resolution
Reverse voltage % 15 % of output voltage

Mechanical specification
Size (W x H x D) mm (19”) 482 x 410 x 743
Weight kg 86

Environmental specification
Ambient operating temperature °C 0 … +40
°F +32…+104
Storage temperature °C -25 … +55
°F -13…+131
Relative humidity % 5...85 (Non-condensing)
g/m3 1…25
Air pressure kPa 80-106
mbar 800-1060 (approximately 2000
above sea level)
Pollution degree <2 (see chapter 5.1 – installation site
– contamination)

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4.2. Power characteristics for TruPlasma Bias 4036 module

U[V]

1200

HV mode

300

LV or HV LV mode

0
30 120 I [A]

Fig.1. Power characteristic for TruPlasma Bias 4036 module.

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4.3. Pulse description

U [V]

1/f = pulse period

PT: Pause Time [µs]

Urev

t
t [µs]

Aux Time
Uset
Upeak

Pulse period (PP) = 1/frequency.

Pause Time (PT) - the pulse unit’s pause duration. This value can be set in the range of
1÷10µs with 1µs resolution and with respect to some limits due to the frequency setting
and hardware properties. The pause time limit can be described by an equation:

PTmax = (int)(PP/2) – 2µs)

Urev – the value of the output voltage during the pause time. Urev is equal to 15% of
the value of the output voltage just before the pause time.

Urev = (-) 0.15 x Uset

Upeak and Aux Time – The hardware circuit generates an additional voltage peak at the
beginning of each succeeding pulse for a time, which is equal to the pause time. The peak
voltage value at this time is:

Upeak = Uset x 1.15

Uset - The required output voltage value which is set by the user. In DC mode the output
voltage is equal to this value. In pulsed mode the voltage which appears after the Aux
time is equal to the Uset.

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5. Installation

5.1. Installation site

Unpacking

Inspect the devices packaging for damage and compare its contents with delivery
documents. Use crane and lifting bracket to lift and position the module.

Enclosure

The TruPlasma Bias 4036 power supply is built into a standard 19” casing and is
designed to fit into a standard 19”, 800mm deep rack cabinet. The weight of this device
is ca. 86kg. The mechanical construction of the cabinet should be strong enough to hold
it. Forced ventilation inside the cabinet is recommended. Inlet air temperature must not
exceed +35°C.

Contamination

Cooling air should be free from corrosive vapors and particles that are conductive
or could become conductive after exposure of moisture. A proper environment conditions
ensure long lasting reliable performance- significantly increasing the MTBF.

5.2. Fusing

External fusing is recommended. A set of 80A, C class external fuses will provide
the necessary circuit protection.

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6. Connecting the power supply
All connection terminals are located at the front side of TRUPLASMA BIAS 4036,
and should be covered by a protection grid after cabling. Sufficient gaps (at least ½ U)
between modules installed together inside one cabinet for cabling should be provided.

Profibus PE terminal
(under the front plate) at least 16mm2 cable

3x at least
OUTPUT terminals Analog control terminals RS232 control 16mm2
2x at least 35mm2 (DC and pulse mode) cable for
twisted or shielded MAINS
HV cable for output
Synchro connector
(or dummy)

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 TruPlasma Bias 4000 Family
6.1. Suggested cabling technique

power terminals

at least 8cm
for air flow

rear cabinet panel

protection plate
slide rails

cable ducts on both sides of module Power cables and control

cables should run in
separate ducts.
row of fuses

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 TruPlasma Bias 4000 Family
6.2. Connection terminals

Power terminals description

Terminal Description Cable Cable endings
2
MAINS 3 x 400VAC min. 3x 16mm 3x ferrule
PE Protective earth min. 16mm2 ∅ 6 mm
OUTPUT 1200V / 120A min. 2x 35mm2 twisted on entire 2x ∅ 8 mm
length or shielded (shield
connected to ground) high voltage
(preferably 3kV) cable. Positive
output connected to the chamber.

Control terminals description.

Terminal Description Cable Cable endings
RS232 Communication standard RS232 connection. See SUBD 9pin
with PC pin assignment below female
Synchro Cable for See pin assignment below SUBD 15pin male
coonector synchronized See chapter 7.4.
operation of
several pulsed
power supplies
Analog control: DC parameters See pin assignment below SUBD 25pin
(optional) female
Analog control: Pulse See pin assignment below SUBD 25pin male
parameters (optional)
Profibus Communication One twisted pair shielded for SUBD 9pin male
with PC, Profibus; with terminators

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6.3. Analog control terminals description

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 TruPlasma Bias 4000 Family
DC analog control connector
Pin no Name Type Description
1 Uact Analog output 0..10 V against GND represents 0..Un V output voltage
2 Iact Analog output 0..10 V against GND represents 0.. In A output current
3 Pact Analog output 0..10 V against GND represents 0.. Pn kW output power
14 Uset Analog input Setpoint value for the output voltage 0..10 V at this pin
against GND represents a set-point of 0… Un V
15 Ix Analog input Setpoint value for the output current 0..10 V at this pin
against GND represents a set-point of 0… In A
16 Iset Analog input Setpoint value for the output power 0..10 V at this pin
against GND represents a set-point of 0… In kW
4, 17 GND Analog GND Reference ground for all analog signals
5, 18 GND Digital GND Reference ground for all digital signals
8 ONenable Digital Input It must be active (connected to +24V) to enable power ON.
Power is switched off if this pin goes inactive
9 HVrequest Digital Input Connect momentarily to 24V with the ONenable input active
to switch power supply ON in HV mode.
10 LVrequest Digital Input Connect momentarily to 24V with the ONenable input active
to switch power supply ON in LV mode.
12 Interlock Digital input Must be connected to 24V (pin 6, 19) to enable power
supply switch-ON. This is a relay-based hardware connection
6, 19 +24V Supply 24V supply for all digital inputs

22 HV on Digital output Voltage from pin 20 is coupled to this pin to show, that the
indication. (isolated) power supply is running in HV mode. Maximum voltage at
this pin is 30V. Maximum current is 10mA
23 LV on Digital output Voltage from pin 20 is coupled to this pin to show, that the
indication. (isolated) power supply is running in LV mode. Maximum voltage at
this pin is 30V. Maximum current is 10mA
21 Arc occurs Digital output Voltage from pin 20 is coupled to this pin for ca 20ms to
indication (isolated) show, that an arc has occurred. These signals are not
synchronized with the actual arc occurrence (50 ... 500ms
time shift). The number of “blinks” shows the number of
arcs.
20 Common Digital output All optocoupler collectors are connected to this common pin.
collectors (isolated) Max. voltage between this pin and pins 21 and 22 may not
exceed 30V. Max. current drawn from pins 21 and 22 may
not exceed 10mA each
13, 25 Alarm Digital output Potential – free contacts open when alarm state occurs or no
mains present at mains terminals. Maximum load is 30V,
0,5A. This signal can also be used as READY indication.

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 TruPlasma Bias 4000 Family
Pulse analog control connector

Pin no Name Type Description

2 Common Digital Aux. All open collector outputs are connected to this common
Pullup input pin through 10kΩ resistors. Maximum voltage at this pin
is 30V.
3 OverCurr Digital output – High state (open collector released) when the
open collector semiconductor current exceeds maximum values (over-
current)
15,17 Fail Digital output – High state (open collector released) when over-voltage
open collector occurs constantly
PauseDur: Digital inputs Pause duration setting. These 4 digits set the value of the
pause duration in the range of 1 … 10 microseconds
21, PD0, according to the following table:

9, PD1, (1 = pin shorted to GND, 0 = pin open or shorted to

+15V at pin 14)
22, PD2,
PD3 PD2 PD1 PD0 µs]
Duration [µ
11 PD3. 0 0 0 0 1
0 0 0 1 2
0 0 1 0 3
0 0 1 1 4
0 1 0 0 5
0 1 0 1 6
0 1 1 0 7
0 1 1 1 8
1 0 0 0 9
1 0 0 1 10
all other states 10
23 PulseMode Digital input Sets unit to Pulsed Mode ON when shorted to GND.
8 Spark Det. Digital input Switches the dynamic (dU) arc detection ON when
connected to GND
PulseMode Spark Det. Description
0 0 DC mode ON, hard arc
ON, microarc OFF
0 1 DC mode ON, hard arc
ON, microarc ON
1 0 Pulsed mode ON, hard
arc ON, microarc ON
1 1 Slave mode
10 Cnt-Rst Digital input Resets the arc counters when momentarily connected to
GND
24 Arc-Cnt Analog output Voltage value at this output represents the state of the
arc counters. 0 .. 10V represent 0 ... 10000 arcs
12 Freq Analog input 0,2 … 10V at this input set the pulse frequency
to 2 ... 100kHz.
Voltage below 0,1V is interpreted as 1kHz.
13 GND Ground Ground for analog signals
25 GND Ground Ground for digital signals
14 +15V Supply Supply for digital inputs
16 OverTemp Digital output High state when over temperature occurs
20 Plsma_ON Digital input Enables/disables control of ARM devices by SSOff signal
13 GND Ground Ground for analog signals
4 SSOff Digital Output When device detects arcs, ARM power supplies which are
installed in the system, are switched off by SSOff signal

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6.4. RS-232 communication terminal description

Pin no Name Type Description

1 - n/c n/c
2 TxD Digital output RS232 transmit data
3 RxD Digital input RS232 receive data
4 - n/c n/c
5 GND GND Can be used for cable shield
6 - n/c n/c
7 - n/c n/c
8 - n/c n/c
9 - n/c n/c

COM
RS 232 standard cable X232
PC 1 1 1 1
TRUPL
MP-5
6 6 6 6 ASMA
2 2 2 2
TxD 7 7 7 7 TxD
3 3 3 3
RxD 8 8 8 8 RxD
4 4 4 4
9 9 9 9
5 5 5 5
GND GND
Shield
male female female male

6.5. Profibus terminal description

Pin no Name Type Description

1 n/c n/c n/c
2 n/c n/c n/c
3 RxD/TxD-P Digital I/O Differential I/O signal
4 n/c n/c n/c
5 DGND GND Isolated Profibus ground
6 VP +5V DC Isolated Profibus supply voltage
7 n/c n/c n/c
8 RxD/TxD-N Digital I/O Differential I/O signal
9 n/c n/c n/c

PMP3
+5V
PROFIBUS
1 1
6 6
2 2
7 7
3 3 RxD/TxD-P
8 8
4 4 RxD/TxD-N
9 9
5 5
X

Male Female GND

Isolated Cable

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6.6. Synchro cable

The idea of synchronization is to generate the reverse pulses in all cooperating

pulsed power supplies simultaneously. In standard cases to enable pulsed mode operation
of the individually working module, the TruPlasma Bias 4036 power supplies are
delivered only with a dummy plug, which must be placed in the SYNCHRO connector.

Synchronized operation requires, that the cooperating units are connected with a
synchronization cable. The length and the amount of terminals on this cable depends on
the way the units are installed inside the cabinet. This cable can be made by the user, or
ordered at AC as an accessory. The layout of the cable is shown in the drawing below. It
is recommended to use a shielded cable with 3 twisted pairs of wires. A standard shielded
Ethernet cable (4 twisted pairs) can be used as well, with one of the pairs unused. As
much care as possible must be taken to ensure proper connections of the wires and
shielding.

Master Slave Slave Slave

twisted twisted twisted
2 8 8 8
9 15 15 15
1 twisted twisted twisted
6 6 6 6
10 14 14 14
11 twisted twisted twisted
14
3 7 7 7
shield shield shield shield
10 10 10
SUBD 15pin MALE
11 11 11
SUBD 15pin MALE SUBD 15pin MALE SUBD 15pin MALE

Total length: Max 200 cm

DUMMY PLUG
1
9
2
10
3
In case the synchronization feature is not used, a properly 11
4
cabled dummy plug must be placed into the SYNCHRO 12
5
connector. The connection layout for this plug is presented 13
6
here. 14
7
15
8

SUBD 15pin MALE

Running a pulsed power supply simultaneously with other pulsed or DC cathode

power supplies (magnetron) creates a conflict, and can be dangerous for the pulsed
power supply. This happens during the reverse pulse. The positive output voltage of the
TruPlasma Bias 4036 attracts the entire electron current produced by the cooperating

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power supply / supplies. The value of this current may easily exceed the nominal output
current value of the pulsed power supply and result in an over-current switch-off. There
are several ways to prevent this:

1. Connect a diode in series with the power supply’s output,

2. Decrease the output current of the magnetron power supplies,
3. Decrease the reverse time setting to a value which will not allow the reverse
current to rise beyond critical values,
4. Use synchronized operation of the power supplies.

Synchronized operation gives the least limitations to the power supply’s

performance, and therefore is considered to be best for the process.

The TruPlasma Bias 4036 power supply is equipped with a SYNCHRO connector,
which enables synchronized operation of several pulsed power supplies – in pulsed mode
as well as in DC-spark detection mode. In order to configure the power supplies to run in
synchronized mode a special SYNCHRO cable must be used to connect all cooperating
pulsed power supplies. The layout of this cable is presented above.

The principle of synchronization is based on the simultaneous generator of the

reverse pulses (MASTER) and synchronous transmitting them to all cooperating pulsed
power supplies (SLAVE). In pulsed mode these reverse pulses are generated with a
frequency set by the user. In DC mode the reverse pulses are generated randomly - by
spark occurrences. In both cases they must be synchronized. The SYCHRO cable is a
common bus for both: the pulse generation and spark detection signals. All units are
controlled by the signals which are present on this common bus, but the signals are sent
to the common bus only by one unit – the MASTER. The master plug connection is
therefore different. The master unit is the one, which is connected to the MASTER
connector.

In consequence, in order to run a TruPlasma Bias 4036 unsynchronized, the

dummy plug is required to simulate the common bus for the unit. The connector is
equipped with a plug sensor, and the power supply WILL NOT START if this connector is
not plugged in showing the SYNCH CONN alarm.

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 TruPlasma Bias 4000 Family
7. Working with the Front Panel Console
The next several pages contain a description of the TruPlasma Bias 4036 Front
Panel Console functions and how to access them. All indications and settings can be
accessed through the front panel of the device.

LCD Display

LED lines;
Voltage and
current indication

Menu/Cancel Key
LED indicators

Enter/Accept Key

Cursor Keys

The most important states are displayed on LED indicators for quick identification.
These are:
Name Color Meaning
Standby green The power supply is powered, but not switched-on yet.

HVon green The power supply is running in HV mode. 1)

LVon green The power supply is running in LV mode. 1)

Pulsed green Blinks when the power supply is in pulsed mode.

Analog, Shows the actual control mode. Both LEDs dark when controlled by the display
RS232 green console. RS232 LED blinks to show proper RS transmission during PC monitoring.

Alarm red Blinks when critical conditions occur. Also an audible signal is sounded then.

Interlock yellow Interlock or door-closed detection circuits open,

Arc occ. yellow Blinks each time an arc is detected. Sparks are not indicated.

Reg U green
Reg I green Indicate which parameter is actually considered by the regulators
Reg P green
* This LED blinks in standby mode when parameters are being changed (display panel in Modify Mode) to
indicate the mode that the parameters refer to.

Operating Instructions for TruPlasma Bias 4036 Generator Page 25

Rev. 3.1.1.1.P.09.F
 TruPlasma Bias 4000 Family
The data displayed on the LCD display is organized into several item lists.
The 2 basic ones are:
• Basic controls and readouts,
• Basic ON/OFF and mode control

Use arrow keys  and  to Use MENU/CANCEL key to

scroll display window along the list switch between the item lists

Basic controls and Basic ON/OFF and mode

readouts settings

>Uout= 680 / 679V< >POWER SUPPLY ON <

>Iout= 15 / 5.2 A< >POWER MODE HV <
>Pout= 36.0/ 3.5kW< >PULSE MODE SPRKDET<
ALARM: NONE PULSE FREQ= 100kHz
Im ArcCount= 0 PAUSE TIME= 3 us
UxIArcCount= 0
MicArcCount= 0
> RESET COUNTERS <
> ACCESS CODE STRD <

Init On/Off

An item, which can be modified, is indicated by a line-cursor:

> modifiable item <. In this case it is sensitive to the ENTER/ACCEPT key. If the correct
ACCESS CODE has been previously selected, pressing ENTER/ACCEPT will bring us into
MODIFY mode and allow modification of the selected item values. The MODIFY mode is
indicated by two arrows: >> Value = 0000 << . The value can be now modified by using
the  and  keys. Press ENTER/ACCEPT to activate the new setting. Press MENU/CANCEL
to leave MODIFY mode without changing the setting.

The ACCESS CODE feature keeps critical data from being accidentally changed. It
also provides access to additional item lists, which are used during testing and service
operations.

The initial access level is STANDARD (STRD). This allows the user to change the
voltage, current and power settings for the power supply’s regulators, reset the arc
counters, switch the power supply on and off, change the operating modes and – of
course – change the access level by entering the appropriate ACCESS CODE.

Selecting SETUP (SETP) access level will reveal a two additional item lists and allow
the user to change the rest of the settings. The access code for this level is initially 1. This
code can be changed from a PC.

Operating Instructions for TruPlasma Bias 4036 Generator Page 26

Rev. 3.1.1.1.P.09.F
 TruPlasma Bias 4000 Family
The available item lists after entering the SETUP access code will be:

Init On/Off User Setup Producer and product

information

see see USER SETUP MENU: HUETTINGER

above above >CONTROL: ANALOG < Electronic, Poland
LOCAL SETTINGS: Marecka 47
>ArcOffDelay= 0us< 05-220 Zielonka
>ArcDet ImHV= 10A< Tel:+48 22 7613800
>ArcDet IxHV= 28A< Fax:+48 22 7613801
>ArcDetUxHV = 200V< info@
>ArcDet IxLV= 25A< pl.huettinger.com
>ArcDet ImLV= 30A< DEVICE: PBP36v01
>ArcDet IxLV= 120A< PVD-Power Supply
>ArcDetUxLV= 10V< MAINS:3x400V+/-10%
>BreakTime= 20ms< 50/60Hz, 3x 64A
>RampRate= units< Output:
>Auxiliary NORM< HV:0-1200V 0- 30A
>Profibus ID= 120< LV:0- 300V 0-120A
>RS SPEED 38400< PULSED: 2-100kHz
Off Time:1-10 us
PROGRAM VERSIONS:
P15con3 :PBF36-37
P15PC2 :P15PC- 7
P15user1: U- 7

Init On/Off User Setup Info

There is one more level. It is the SERVICE (SERV) access level. It enables
modification of input and output calibration values, voltage thresholds etc. Since
improper modification of any of these settings which may cause a malfunction of the
device, the access code to this level is known by the service staff only.

Improper modification of any of input and output calibration values

may cause a malfunction of the device. Therefore the access code
to SERVICE level is known by the service staff only.

Operating Instructions for TruPlasma Bias 4036 Generator Page 27

Rev. 3.1.1.1.P.09.F
 TruPlasma Bias 4000 Family
8. Description of displayed data and settings

8.1. Basic control and readout parameters

Display Modif. Description

>Uout= 680 / 679 V< Yes Voltage regulator setting (first number) and actual
power supply’s output voltage readout (second
number).

>Iout= 10.0/ 3.5 A< Yes Current regulator setting (first number) and actual
power supply’s output current readout(second
number).

>Pout= 5.0 / 2.4kW< Yes Power regulator setting (first number) and actual
power supply’s output power readout (second
number).

ALARM: NONE No When the ALARM LED blinks, this cyclically displays
the states which caused the alarm.

Im ArcCount = 2345 No Number of arcs detected by the Imax criteria,

which occurred from the last counter reset (max
10000)

UxIArcCount = 2345 No Number of arcs detected by the UxI criteria, which

occurred from the last counter reset (max 10000)

MicArcCount = 2345 No Number of sparks which occurred from the last

counter reset (max 10000)

>RESET COUNTERS< - Press ENTER to reset the arc counters

>ACCESS CODE STRD< Yes Entering the appropriate access code gives access
to the USER SETUP MENU list and SERVICE SETUP
list.

Operating Instructions for TruPlasma Bias 4036 Generator Page 28

Rev. 3.1.1.1.P.09.F
 TruPlasma Bias 4000 Family
8.2. Basic ON/OFF and mode settings

Display Modif. Description

>POWER SUPPLY ON < If the control mode is set to DISPLAY-panel,
the power supply can be switched ON or OFF

>POWER MODE HV < Displays the current HV or LV mode.

If the control mode is set to DISPLAY-panel,
the power supply can be switched
to HV or LV mode.

>PULSE MODE: PULSED< Yes, but Displays the current pulse unit mode.
only if If the control mode is set to DISPLAY-panel,
DISPLAY the pulse unit can be switched to ARCDET,
mode SPRKDET PULSED or SLAVE mode can be
selected selected

PULSE FREQ= 30kHz The actual pulse unit’s frequency setting with
reference to the control source (DISPLAY,
ANALOG or RS232).

PULSE TIME= 5us The actual pulse unit’s pause duration setting
with reference to the control source (DISPLAY,
ANALOG or RS232)

Operating Instructions for TruPlasma Bias 4036 Generator Page 29

Rev. 3.1.1.1.P.09.F
 TruPlasma Bias 4000 Family
8.3. User setup menu

Display Modif. Description

> CONTROL: ANALOG < Yes The control mode (control source) can be switched between
DISPLAY-console or ANALOG. The RS232 control mode is
automatically activated when RS232 transmission is detected
and the RS232 control feature is selected at the PC, and
deactivated when this feature is deselected or no
transmission is present for more then 5sec.
Arc off delay Yes delay between the moment an ac is detected and the
moment the arc is quenched 5 … 25us
ArcDet ImHV Yes current threshold for Imax detector 5 … 32A
ArcDet IxHV Yes* cross detection current threshold 5 … 30A
ArcDet UxHV Yes cross detection voltage threshold 0 … 200V
ArcDet ImLV Yes current threshold for Imax detector 5 … 130A
ArcDet IxLV Yes* cross detection current threshold 5 … 120A
ArcDet UxLV= Yes cross detection voltage threshold 0 … 200V
>BreakTime= 20ms< Yes After each arc the power supply will be inhibited for this
amount of time 2 … 60ms.
>RampRate= 40V/ms< Yes The voltage recovery ramp slope setting. This can be changed
from 5 to 40 units. 5 is the slowest; 40 is the fastest slope
rate. See chart below.
>Arc Recovery AUTO< Not implemented
>RS ADRESS 255< Yes address for RS485 communication
>RS SPEED 38400< Yes Baud Rate for serial port
*) If ANALOG control mode selected this value is controlled by the Ix setting through the
analog control port.

Ramprate setting Ramp in HV mode Ramp in LV mode

[V/ms] [V/ms]
5 40 10
10 80 20
20 160 40
30 320 80

Operating Instructions for TruPlasma Bias 4036 Generator Page 30

Rev. 3.1.1.1.P.09.F
 TruPlasma Bias 4000 Family
9. Setting the arc detection criteria
Arcs which may occur in normal process conditions may damage the treated
surface by leaving arc tracks. On the other hand, some arc energy might be needed in
some cases to burn out contamination particles left on the surface. Selecting the proper
arc detection criteria has a significant influence on the power supply’s response to the arc,
and thus the quality of the treated surface. The TruPlasma Bias 4036 detects an arc in 3
ways:
• dynamic voltage change – dU (spark detection)
• simultaneous voltage drop and current increase – (U x I) cross detector
• over-current (Imax)

A spark is detected when the output voltage is rapidly decreased by 75% of its
value. The Imax and UxI threshold settings can be separately adjusted in each mode. In
order to change these settings from the display panel you must switch to SETUP ACCESS
(enter code “1”) and select the USER SETUP MENU screen.

The parameters, which influence the response to arcs are listed below
Parameter Description Notes
>ArcDet ImHV= 30A< Current threshold for the Imax detection criteria in HV
mode
>ArcDet IxHV= 5A< Current threshold for the UxI detection criteria in HV 1
mode.
>ArcDet UxHV=100V< Voltage threshold for the UxI detection criteria in HV
mode
>ArcDet ImLV= 60A< Current threshold for the Imax detection criteria in LV
mode
>ArcDet IxLV= 15A< Current threshold for the UxI detection criteria in LV 1
mode
>ArcDet UxLV= 80V< Voltage threshold for the UxI detection criteria in LV
mode
>BreakTime = 20ms < The output power is inhibited for this time. 10 … 100ms
>RampRate = 100V/ms< The voltage come-back ramp. 20 … 200V/ms
Notes:
1. This setting should always be LOWER then the set-point for the output current regulator, otherwise the
output current will not be able to trip the arc detection level.

The basic principal of the arc detectors operation is shown on the graph below.
The dU (dynamic voltage change) detector is the fastest possible way of detecting an arc.
This is because the output of the power supply is inductive, and an arc makes the voltage
drop much faster then the current can rise. However the dU detector can fail in case the
succeeding arcs occur before the voltage reaches a certain value from which a voltage
drop will be recognized. This value is ca. 150V.
The UxI detector is static and will detect an arc as well as a long-term short circuit at the
output of the power supply protecting the treated surface from being burnt by arcs. The
reaction time in this case is 10…100 times longer then the response of the dU detection.

The Imax detector will switch off the power if the output current exceeds the Imax level
regardless the reason (arc or overload).

Operating Instructions for TruPlasma Bias 4036 Generator Page 31

Rev. 3.1.1.1.P.09.F
 TruPlasma Bias 4000 Family

Iset Current regulator setting above the Ix and

Imax Imax settings

Ix
Voltage
U1
Current Arc energy

I1
150V
U2
25% U1
Ux
Uarc

0 AB C D E F G H J K L Time
[see description below]

This figure shows the response of the dU, UxI and Imax detector. The events are as
follows:

0-A: Process runs. (e.g.: U1= 300V; I1=10A)

A: Arc occurs. Voltage drops immediately, current starts rising.
B: Arc is detected by the dU detector and arc quenching begins (A-B < 0.5us).
Current starts decreasing. The decrease rate depends also on the inductance of the
cables used to connect the TruPlasma Bias 4036 with the chamber.
C: The arc current reaches 0. Arc is extinguished.
C-D: BREAKTIME = 10 … 100ms. This time can be set by the user. During this time
the power is switched off.
D-E: Voltage starts rising with a rate dependent on the user’s
RAMPRATE=20-200V/ms setting.
E: Before the voltage reaches 150V (U2<150V) another arc occurs. This, however
is not detected by the dU detector because this detection method needs an
initial 150V output voltage to reset the detector. This level is not reached yet.
E-F: The arc current rises. This increment ramp depends on the voltage, cable
inductance, power supply’s output inductance and settings.
Typically E-F = 10..100us.
F: The current value reaches the cross detector (U x I) Ix level while the voltage is
below the detectors Ux level (arc voltage ca 20-30V) so the UxI arc detector is
activated (both Ux and Ix conditions are filled in) and the arc is quenched.
F-G: Again this time depends mainly on the cable inductance.
G-H: Again the break-time.
H-J: The output current and voltage reach their previous values.

Operating Instructions for TruPlasma Bias 4036 Generator Page 32

Rev. 3.1.1.1.P.09.F
 TruPlasma Bias 4000 Family
K: An additional load appears (e.g. another ion source - arc or magnetron -
activated) leading to a current increase without an arc on the substrate.
L: The Imax detector is triggered and the power is switched off.

Operating Instructions for TruPlasma Bias 4036 Generator Page 33

Rev. 3.1.1.1.P.09.F
 TruPlasma Bias 4000 Family
10. Interfaces

10.1. RS232 communication protocol for TruPlasma Bias 4036

units

The Bias acts as a slave device in the communication process. It never initiates a
transmission. The master computer (PC) sends a command which is executed by the Bias
and a reply is generated (with respect to note 1). The recognized commands are
presented below. Additional commands can be implemented if necessary.
The baud rate can be set from 2400 to 38400 from the Bias front panel console to
correspond to the rate set at the PC.

8913 Normal run

PC to Bias
0 1 2 3 4 5 6 7 8 9 10 11
$16 $E9 $89 $13 Adr Uset0 Uset1 Uset2 Uset3 Iset0 Iset1 Iset2
12 13 14 15 16 17 18 19 20 21 22 23
Iset3 Pset0 Pset1 Pset2 Pset3 Freq PDT Bits SH SL

Where:
Adr RS485 address 0..255
Uset (float) Voltage setpoint [V] 0..300V (LV), 0..1200V (HV)
Iset (float) Current setpoint [A] 0... 120A (LV), 0..30A (HV)
Pset (float) Power setpoint [kW] 0...36kW
Freq (byte) Pulse frequency [kHz] 2...100
PDT (byte) Pause Time [us] 1...10

Control Bits:
0: Take over control (1); Do not take over control (0)
1: PlasmaBit ON (1); OFF (0)
2: Mains relays ON (1), Relays OFF (0)
3: Power ON (1), Power OFF (0)
4: Mode: HV (1), LV (0)
5: Arc counter reset(1 – for 1 transmission)
6: Pulsed mode ON (1); OFF (0)
7: Spark Detection (ON (1); OFF (0)

Operating Instructions for TruPlasma Bias 4036 Generator Page 34

Rev. 3.1.1.1.P.09.F
 TruPlasma Bias 4000 Family

Bias to PC
0 1 2 3 4 5 6 7 8 9 10 11
$16 $E9 $40 $00 Uact0 Uact1 Uact2 Uact3 Iact0 Iact1 Iact2 Iact3
12 13 14 15 16 17 18 19 20 21 22 23
Sprk0 Sprk1 Arc0 Arc1 Bits0 Bits1 Freq PDT SH SL

Where:
Uact (float) Output voltage [V] 0...1200V
Iact (float) Output current [A] 0... 120A
Sprk (integer) Spark counter 0...10000
Arc (integer) Arc counter 0...10000
Freq Actual pulsing frequency setting 2...100 kHz
PDT Actual pause time setting 1...10 us
Bits0: Acknowledge bits 1:
0: Digital control Ack (1); other (0)
1: Plasma ON Ack
2: Relays ON Ack
3: Power ON Ack
4: Mode Ack: 1: HV; 0: LV
5: Pulsed mode Ack
6: Spark Detection Ack
7: =1 for 1 transmission after reset

Bits1: Acknowledge bits 2:

0: Interlock Ack
1: OverTemp Ack
2: PowerFail Ack
3: Over Current Ack
4: Commun. Fail Ack
5: EEsum Error Ack
6: EEwrite Error Ack
7: AlarmActive Ack

5112 Show Identification String

PC to Bias
0 1 2 3 4 5 6
$0B $F4 $51 $12 xx Adr $EA
7 8 9 10 11
$62 0 0 SH2) SL2)

Where:
Adr Address for RS485 0..255 1)
xx Ignored

Operating Instructions for TruPlasma Bias 4036 Generator Page 35

Rev. 3.1.1.1.P.09.F
 TruPlasma Bias 4000 Family

Bias reply (OK.)

0 1 2 3 4 … 23 (20 ascii characters) 24 25
$1A $E5 $40 $00 “14 “ SH2) SL2)

8003 Set a floating point value

PC to Bias
0 1 2 3 4 5 6
$0D $F2 $80 $03 Adr Chan1 Chan2
7 8 9 10 11 12
Val0 Val1 Val2 Val3 SH2) SL2)

Where:
Adr Address for RS485 0..255 1)
Chan (int) Channel number (see channel assignment tables)
Val (float) Value to be set

Bias reply
0 1 2 3 4 5
$06 $F9 AckH3) AckL3) SH2) SL2)

8004 Read a floating point value

PC to Bias
0 1 2 3 4 5 6
$09 $F6 $80 $04 Adr Chan1 Chan2
7 8
SH2) SL2)

Where:
Adr Address for RS485 0..255 1)
Chan (int) Channel number (see channel assignment tables)

Bias reply (OK.)

0 1 2 3 4 5 6
$0A $F5 $40 $00 Val0 Val1 Val2
7 8 9
Val3 SH2) SL2)

Bias reply (Fail)

0 1 2 3 4 5
$06 $F9 AckH3) AckL3) SH2) SL2)

Operating Instructions for TruPlasma Bias 4036 Generator Page 36

Rev. 3.1.1.1.P.09.F
 TruPlasma Bias 4000 Family
8006 Set a byte value

PC to Bias
0 1 2 3 4 5 6
$0A $F5 $80 $06 Adr Chan1 Chan2
7 8 9
Val SH2) SL2)

Where:
Adr Address for RS485 0..255 1)
Chan (int) Channel number (see channel assignment tables)
Val (byte) Value to be set

Bias reply
0 1 2 3 4 5
$06 $F9 AckH3) AckL3) SH2) SL2)

8007 Read a byte value

PC to Bias
0 1 2 3 4 5 6
$09 $F6 $80 $07 Adr Chan1 Chan2
7 8
SH2) SL2)

Where:
Adr Address for RS485 0..255 1)
Chan (int) Channel number (see channel assignment tables)

Bias reply (OK.)

0 1 2 3 4 5 6
2)
$07 $F8 $40 $00 Val SH SL2)

Where:
Val (byte) Asked byte value

Bias reply (Fail)

0 1 2 3 4 5
$06 $F9 AckH3) AckL3) SH2) SL2)

Operating Instructions for TruPlasma Bias 4036 Generator Page 37

Rev. 3.1.1.1.P.09.F
 TruPlasma Bias 4000 Family
8009 Read an integer value

PC to Bias
0 1 2 3 4 5 6
$09 $F6 $80 $09 Adr Chan1 Chan2
7 8
SH2) SL2)

Where:
Adr Address for RS485 0..255 1)
Chan (int) Channel number (see channel assignment tables)

Bias reply (OK.)

0 1 2 3 4 5 6 6
$08 $F7 $40 $00 ValH ValL SH2) SL2)

Where:
Val (byte) Asked byte value

Bias reply (Fail)

0 1 2 3 4 5
3) 3) 2)
$06 $F9 AckH AckL SH SL2)

Special commands:
5105 Show Your RS485 Address
Do not use this command if more then 1 unit connected to the RS485 chain.

PC to Bias
0 1 2 3 4 5 6 7
$08 $F7 $51 $05 xx 255 SH2) SL2)

Where:
xx Ignored

Bias reply (OK.)

0 1 2 3 4 5 6 7
2)
$08 $F7 $40 $00 0 Adr SH SL2)

Where:
Adr Actual address for RS485 0..255 1)

Operating Instructions for TruPlasma Bias 4036 Generator Page 38

Rev. 3.1.1.1.P.09.F
 TruPlasma Bias 4000 Family
Channel numbers:
Byte values:
Chan Parameter Meaning Range Modif.
0 FreqLoc Pulse frequency (for display control) 2...100 YES
[kHz]
1 PlsTimeLoc Pause duration (for display control) [us] 1 … 10 YES
3 BreakTime Break time [ms] 3 … 60 YES
4 RampTime Ramp rate [V/ms] 1 … 40 YES
5 Address RS485 address / Profibus ID 0 … 255 YES
/ 0…128
6 HV- KpU 0 .. 200
7 HV- TiU 0 .. 200
8 HV- TdU 0 .. 200
9 HV- Kpi 0 .. 200
10 HV- TiI 0 .. 200
11 HV- TdI 0 .. 200 do not
12 HV- TiP 0 .. 200 change
Dynamic settings for regulators
13 LV- KpU 0 .. 200 without
14 LV- TiU 0 .. 200 acceptance
15 LV- TdU 0 .. 200
16 LV- Kpi 0 .. 200
17 LV- TiI 0 .. 200
18 LV- TdI 0 .. 200
19 LV- TiP 0 .. 200

Float values:
Chan Parameter Description Range Modif.
0 ArcDet ImHV Current threshold for Imax arc 30 – 33 A Yes
detection in HV
1 ArcDet IxHV Current threshold for UxI arc detection 30 – 30 A Yes
in HV
2 ArcDet UxHV Voltage threshold for UxI arc detection 0 – 300V Yes
in HV
3 ArcDet ImLV Current threshold for Imax arc 12 – 132 A Yes
detection in LV
4 ArcDet IxLV Current threshold for UxI arc detection 12 – 120 A Yes
in LV
5 ArcDet UxLV Voltage threshold for UxI arc detection 0 – 300V Yes
in LV
6 T5: PULS1 Internal temperature at pulsator 0…100°C No
7 T6: PULS2 Internal temperature at pulsator 0…100°C No
8 T7: PULS3 Internal temperature at pulsator 0…100°C No
9 T8: PULS4 Internal temperature at pulsator 0…100°C No
10 U600 Rectified mains voltage 0…700V No
11 U24 Controller supply voltage 0...30V No

Operating Instructions for TruPlasma Bias 4036 Generator Page 39

Rev. 3.1.1.1.P.09.F
 TruPlasma Bias 4000 Family
Integer values:
Chan Parameter Description Modif
28 P15con4 Power supply software version 0…65535 NO
29 P15AD1 ArcDetection PCB software version 0…65535 NO
30 P15user2 Analog Interface PCB software version 0…65535 NO
31 User4 Profibus Interface PCB software version 0…65535 NO

NOTES:
1) If Adr=255 the Bias will always react to the received command, regardless its own address, but
it will send a reply (confirmation) only if its own address matches the Adr.
2) SH, SL are the high and low bytes of the check-sum. The check-sum is an arithmetic sum of
bytes 2 … (n-2), where n is the number of the last byte of transmission.
3) AckH and AckL are acknowledge codes which are listed below.

Acknowledge and failure codes (HEX format)

4000 OK
Transmission OK. and command executed.
4001 Transmission length error
Byte1 is not a negation of byte0.
4002 Check sum error
The two byte checksum is not equal to the sum of bytes nr 2 … (n-2)
4003 Command not executable
Command is understood, but can not be executed due to technical conditions (for
instance channel don’t exist).
4004 Command not understood
Command is not implemented.

Operating Instructions for TruPlasma Bias 4036 Generator Page 40

Rev. 3.1.1.1.P.09.F
 TruPlasma Bias 4000 Family
10.2. Profibus communication protocol

PROFIBUS is an interface that allows you communicate with the Bias 4036 from a
PROFIBUS master. Arc acts as a slave device in the communication process. It never
initiates a transmission. The PROFIBUS master sends a command coded in modules, which
is executed by Arc unit, and a reply is generated. The recognized modules are presented
below. Additional modules can be implemented if it is necessary.

Baud Rate for communication between PROFIBUS master and PROFIBUS slave

The PROFIBUS slave in Bias unit has the auto –baude feature, which allows to
adjust automatically to the rate of the PROFIBUS master system during start-up. Baud rate
are accessible in discrete steps from 9.6 kbits to 12 Mbits.

Settings of PROFIBUS ID
The ID number is setting by using the front panel console of Bias unit. The
software read the ID number from unit at the beginning the program. If the ID number
was changed, the unit must be restarted.

PROFIBUS module construction

Bias4036 use a few modules, which have a different length of byte. It is very
important to put modules in properly order, otherwise the “Parameter data error” can be
appearing.
All integer (2 byte) values are given with the MSB first. There is no possibility to set
the float value, but it can be implemented if it is necessary. All types of modules are
presented below.

Module 1 - Control Bits - (identification 0x82,0x00,0x00,0x01)

Control byte represented by 8 control bits:

0: PROFIBUS master controls Bias (1)
1: PlasmaBit ON (1); OFF (0)
2: Mains relays ON (1), OFF (0)
3: -
4: Mode: HV (1), LV (0)
5: Arc counter reset(1 – for 1 transmission)
6: Pulsed mode ON (1); OFF (0)
7: Spark Detection (ON (1); OFF (0)

Module 2 – Voltage SetPoint - (ident. 0x82,0x01,0x00,0x02)

This module consists of two bytes, which represent voltage setpoint value in a 16-
bit integer format. The full voltage range of power supply:
0 … 1200 [V]
is represented by a
0 … 10000 integer value

Operating Instructions for TruPlasma Bias 4036 Generator Page 41

Rev. 3.1.1.1.P.09.F
 TruPlasma Bias 4000 Family
Module 3 - Current SetPoint - (ident. 0x82,0x01,0x00,0x03)

This module consists of two bytes, which represent current setpoint value in a 16-
bit integer format. The full current range of power supply:
0 … 120 [A]
is represented by a
0 … 10000 integer value

Module 4 - Current Sensitivity - (ident. 0x82,0x01,0x00,0x04)

This module consists of two bytes, which represent current threshold value for UxI
detection in a 16-bit integer format. The current sensitivity is stored in EPROM. The full
current range of power supply:
0 … 120 [A]
is represented by a
0 … 10000 integer value

Module 5 - Frequency SetPoint - (ident. 0x82,0x00,0x00,0x05)

This module consists one byte, which represent frequency setpoint in 8-bit byte
format. Scaling: 2..100 represents 2..100kHz

Module 6 - PDT SetPoint - (ident. 0x82,0x00,0x00,0x06)

This module consists one byte, which represent pause duration time in 8-bit byte
format. Scaling: 1..10 represents 1..10 us

Module 7 - Average Current - (ident. 0x42,0x01,0x00,0x07)

This module consists of two bytes and displays actual output current value in 16-bit
integer format. Full current range of power supply
0 … 120 [A]
is represented by a
0 … 10000 integer value

Module 8 - Average Voltage- (ident. 0x42,0x01,0x00,0x08)

This module consists of two bytes which represent actual output voltage value in a
16-bit integer format. The full power range of power supply
0 … 1200 [V]
is represented by a
0 … 10000 integer value

Operating Instructions for TruPlasma Bias 4036 Generator Page 42

Rev. 3.1.1.1.P.09.F
 TruPlasma Bias 4000 Family
Module 9 - Average Power - (ident. 0x42,0x01,0x00,0x09)

This module consists of two bytes, which represent actual output power value in a
16-bit integer format. The full power range of power supply
0 … 36 [kW]
is represented by a
0 … 10000 integer value

Module 10 - ARC Counter - (ident. 0x42,0x01,0x00,0x0A)

This module consists of two bytes, which represent actual Arc counter value in a
16-bit integer format. The range of Arc counter is: 0 - 10000.

Module 11- Acknowledge Bits - (ident. 0x42,0x01,0x00,0x0B)

This module consists of 2 bytes which present basic binary status data. These bytes
are described below.

Bits0: Acknowledge bits:

LSB 0: PB control acknowledge (1), analog or local control (0)
1: Plasma ON Ack
2: Relays ON ack. (1), or OFF (0)
3: Power ON (1), INHIBIT (0)
4: Mode ack: 1: HV; 0: LV
5: Pulsed mode Ack
6: Spark Detection Ack
MSB 7: =1 after RESET until the 1-st transmission to PC

Bits1: More acknowledge bits:

LSB 0: Interlock (1), no interlock (0)
1: OverTemp Bit: 1=Overtemp
2: PowerFail (1), power OK (0)
3: Over Current Ack
4: Communication with pulse unit Fail (1) OK (0)
5: EEprom data sum error (1), OK (0)
6: EEwrite Error Ack
MSB 7: AlarmActive (1), inactive (0).

Module 12- Integer value (write) - (ident. 0x82,0x02,0x00,0x0C)

These three bytes enables to write new threshold values. The first byte represent
channel number, second and third bytes represent the new value in integer. The list of
available channels presented is on the next page.
Scaling is: 0..10000 represents 0..200 value.

Operating Instructions for TruPlasma Bias 4036 Generator Page 43

Rev. 3.1.1.1.P.09.F
 TruPlasma Bias 4000 Family
Module 13- Integer value (read) - (ident. 0xC1,0x00,0x01,0x0D)

These three byte enables to read threshold values or temperatures. The output
byte represent channel number of the value, which will be read. The read value is
represented by a 16 bit (two input bytes) integer number. The list of availability channel; is
presented on next page. Scaling is: 0..10000 represents 0..200 value. (with the exception
of channel no: 11)
For channel number 11 scaling is: 0..10000 represents 0..1000 value

Module 14- Byte value (write) - (ident. 0x82,0x01,0x00,0x0E)

These two bytes enables to write new byte values (new PI regulators settings, etc.).
The first byte represent the channel number and the second byte represent the new value
in byte. The list of available channels presented is on the next page.

Module 15- Byte value (read) - (ident. 0xC1,0x00,0x01,0x0F)

These two byte enables to read byte value(new PI regulators settings, etc.) from
selected channel. The output byte represent channel number of the value, which will be
read.
The read value is represented by a one input byte. The list of availability channel; is
presented on next page.

Operating Instructions for TruPlasma Bias 4036 Generator Page 44

Rev. 3.1.1.1.P.09.F
 TruPlasma Bias 4000 Family
Channel numbers:
Integer values:
Chan Parameter Description Range Modif.
Arc detection threshold settings
1 ArcDet ImHV Current threshold for Imax arc 3.0 – 33.0 A Yes
detection in HV
2 ArcDet IxHV Current threshold for UxI arc detection 3.0 – 30.0 A No
in HV
3 ArcDet UxHV Voltage threshold for UxI arc detection 0 – 300V Yes
in HV
4 ArcDet ImLV Current threshold for Imax arc 12.0 – 132.0 Yes
detection in LV A
5 ArcDet IxLV Current threshold for UxI arc detection 12.0 – 120.0 No
in LV A
6 ArcDet UxLV Voltage threshold for UxI arc detection 0 – 300V Yes
in LV
Internal temperature values and voltages
7 T5: PULS1 Internal temperature at pulsator 0…100°C NO
8 T6: PULS2 Internal temperature at pulsator 0…100°C NO
9 T7: PULS3 Internal temperature at pulsator 0…100°C NO
10 T8: PULS4 Internal temperature at pulsator 0…100°C NO
11 U600 Rectified mains voltage 0…700V NO
12 U24 Controller supply voltage 0...35V NO
Software version
29. P15con4 Power supply software version 0…65535 NO
30. P15-PC2 DCDetection PCB software version 0…65535 NO
31. P15user2 Analog Interface PCB software version 0…65535 NO

The precision for integer value for all channel (in except channel no: 11) is:
for 0 - 200
0 - 10000
For channel number 11 (Rectified mains voltage) the precision is
for 0V - 1000V
0 - 10000

Operating Instructions for TruPlasma Bias 4036 Generator Page 45

Rev. 3.1.1.1.P.09.F
 TruPlasma Bias 4000 Family
Byte values:
Chan Parameter Meaning Range Modif.
1 FreqLoc Pulse frequency (for display control) 2...100 YES
[kHz]
2 PlsTimeLoc Pause duration (for display control) [us] 1 … 10 YES
4 BreakTime Break time [ms] 3 … 60 YES
5 RampTime Ramp rate [V/ms] 1 … 40 YES
PID settings for regulators
7 HV- KpU 0 .. 200
8 HV- TiU 0 .. 200
9 HV- TdU 0 .. 200
10 HV- Kpi 0 .. 200
11 HV- TiI 0 .. 200
12 HV- TdI 0 .. 200 do not
13 HV- TiP 0 .. 200 change
Dynamic settings for regulators
14 LV- KpU 0 .. 200 without
15 LV- TiU 0 .. 200 acceptance
16 LV- TdU 0 .. 200
17 LV- Kpi 0 .. 200
18 LV- TiI 0 .. 200
19 LV- TdI 0 .. 200
20 LV- TiP 0 .. 200
21 Pulse Mode Pulsing mode (for display control) 0…2 NO
0: Arc detection only
1: Spark detection
2: Pulsed mode
22 Control Control source 0…2 NO
0: Display
1: User Analog interface
2: RS232/ PROFIBUS
23 User4 Profibus Interface PCB software version 0…65535 NO

Operating Instructions for TruPlasma Bias 4036 Generator Page 46

Rev. 3.1.1.1.P.09.F
 TruPlasma Bias 4000 Family
Profibus safety
In any case when the PROFIBUS slave lost connection with PROFIBUS master or
when master stops communicating, DC unit turn off output power and restart PROFIBUS
slave. After then the PROFIBUS slave will be try to connect with PROFIBUS master.

Physical layer and configuration of Bias4036

To connect DC unit with the PROFIBUS, an isolated RS-485 interface (according
with EN 50170) is required. Please ensure that termination resistors are available at both
ends of the cable. If special PROFIBUS connectors are being used, these resistors are often
found inside the connector and must be switched on. The cable shield should be firmly
connected to ground at every device. Make sure that there is no potential difference
between the grounds at the devices.

GSD files
GSD (Electronic data sheet of a device) files contain and describe the functions and
character of PROFIBUS device. Therefore, to use this unit in a PROFIBUS system, it needs
to have a specific GSD file that is compatible with the unit. Please, use only this GSD file,
which is delivered with DC unit.

Specification for PROFIBUS slave Bias4036:

Configuration data: in accordance with GSD file (TruPlasma_Bias_4000_v6.gsd)
Technology: ASIC
Physical separation fieldbus side: Standard
Baud rate for RS485: Automatic detection up to 12 Mbaud
Sync: Supported
Freeze: Supported
Primitive fieldbus ID: 120
Dipswitch: Supported

Operating Instructions for TruPlasma Bias 4036 Generator Page 47

Rev. 3.1.1.1.P.09.F
 TruPlasma Bias 4000 Family

The TruPlasma Bias 4036 power supply is delivered in a ready to

use condition. If all connections have been made properly and the
operating instructions will carefully be followed there should be no
problems with the activation of the power supply. The default settings
should give proper behavior of the device in the most commonly used
system configuration.

It would be useful, however to learn as much about the

maintenance and operation principals as possible before proceeding
with the startup. Understanding the systems operating principals will
help the user obtain more useful information from the controllers display
and understand the behavior of the entire power supply. Introducing any
changes into the devices settings will obviously require full knowledge of
the system (and also the password).

Operating Instructions for TruPlasma Bias 4036 Generator Page 48

Rev. 3.1.1.1.P.09.F