Sierra 820 Series

Top-Trak™ Mass Flow Meters

Models: 820, 820S, 822, 822S, 824, 824S, 826 and 827

Instruction Manual
Part Number IM-82
Revision J, August 2022
Table of Contents Series 820 Instruction Manual

GLOBAL SUPPORT LOCATIONS: WE ARE HERE TO HELP!

CORPORATE HEADQUARTERS
5 Harris Court, Building L Monterey, CA 93940
Phone (831) 373-0200 www.sierrainstruments.com

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Phone +31 72 5071400

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Phone: + 8621 5879 8521

IMPORTANT CUSTOMER NOTICE: OXYGEN SERVICE

Sierra Instruments, Inc. is not liable for any damage or personal injury, whatsoever, resulting from
the use of Sierra Instruments standard mass flow meters or controllers for oxygen gas. You are re-
sponsible for determining if this mass flow meter or controller is appropriate for your oxygen appli-
cation. You are responsible for cleaning the mass flow meter or controller to the degree required
for your oxygen flow application.

© COPYRIGHT SIERRA INSTRUMENTS 2020

No part of this publication may be copied or distributed, transmitted, transcribed, stored in a re-
trieval system, or translated into any human or computer language, in any form or by any means,
electronic, mechanical, manual, or otherwise, or disclosed to third parties without the express writ-
ten permission of Sierra Instruments. The information contained in this manual is subject to change
without notice.

TRADEMARKS
Top-TrakTM and Cal-Bench TM is a Registered Trademark of Sierra Instruments, Inc. Other product
and company names listed in this manual are trademarks or trade names of their respective manu-
facturers.
Series 820 Instruction Manual Table of Contents

Table of Contents
Chapter 1 Introduction
Introduction ............................................................................ 1-1
Using this Manual............................................................. 1-1
Safety Information ............................................................ 1-2
Receipt of System Components ....................................... 1-2
Technical Assistance ........................................................ 1-2
Top Trak Features................................................................... 1-3
The 820 Series Flow Sensing Principle .................................. 1-4

Chapter 2 Installation
Installation Overview.............................................................. 2-1
Installing the Transducer ........................................................ 2-2
Compression Fittings ........................................................ 2-2
VCO Fittings .................................................................... 2-2
VCR Fittings .................................................................... 2-3
All 1/2-inch Size Connections .......................................... 2-3
Wiring the Transducer ............................................................ 2-4
Standard 0-5 VDC Output Signal Wiring ........................ 2-5
Optional 4-20 mA Output Signal Wiring ......................... 2-5
Remote Display Installation ................................................... 2-6

Chapter 3 Operation
Transducer Operation ............................................................. 3-1
Transducer Accuracy ........................................................ 3-1
Referencing the Transducer to Non-Standard Conditions .... 3-2
Transducer Over-Ranging ................................................ 3-2
Zero and Span Adjustments ............................................. 3-3
Totalizer Option ................................................................ 3-4

Chapter 4 Maintenance and Repair

Transducer Cleaning ............................................................... 4-1
Flow Path Cleaning Model 822/824....................................... 4-2
Inlet and Outlet Screens.................................................... 4-2
Laminar Flow Element ..................................................... 4-3
Flow Path Cleaning Model 826/827....................................... 4-4
Laminar Flow Element ..................................................... 4-4
Flow Path Cleaning Model 822-S/824-S ............................... 4-5
Laminar Flow Element ..................................................... 4-5
Sensor Cleaning and Inspection ....................................... 4-8
Transducer Calibration ........................................................... 4-9
Transducer Troubleshooting................................................... 4-11
Returning Equipment to the Factory ...................................... 4-13

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Table of Contents Series 820 Instruction Manual

Appendix A Conversion Formulas and Gas Tables

Appendix B 822/824 Product Specifications
Appendix C 822S/824S Product Specifications
Appendix D 826/827 Product Specifications

List of Figures
1-1. Top-Trak Features (Typical) ....................................... 1-3
1-2. Flow Paths through the Transducer ............................ 1-4
1-3. Flow Measuring Principle ........................................... 1-4
2-1. Piping Requirements for 1/2-inch Size Connections ... 2-3
2-2. Transducer D-Connector Pin Assignments ................. 2-4
2-3. Standard 0-5 VDC Output Signal Wiring................... 2-5
2-4. Single Transducer Current Loop Connection.............. 2-5
2-5. Multiple Transducer Current Loop Connections ........ 2-6
2-6. Mounting the Remote Display .................................... 2-6
4-1. Model 822/824 Flow Components ............................. 4-2
4-2. Correct LFE Position................................................... 4-3
4-3. Model 826/827 Flow Components .............................. 4-4
4-4. Low Flow Transducer LFE Cleaning ......................... 4-5
4-5. Medium Flow Transducer LFE Cleaning ................... 4-6
4-6. High Flow Transducer LFE Cleaning......................... 4-7
4-7. Printed Circuit Board Component Locations .............. 4-11

0-4 IM-82
Series 820 Instruction Manual Table of Contents

Cautions

Caution! Only qualified personnel should install the transducer.

Caution! Do not supply +DC power at the D-connector while using a

power supply at the power jack. Both supplies may be damaged.

Caution! Operating a 12 VDC transducer at 24 VDC will cause equip-

ment damage.

Caution! Only qualified personnel should perform transducer service, ca-

libration or troubleshooting procedures.

Caution! When using toxic or corrosive gases, purge the unit thoroughly
with inert dry gas before disconnecting from the gas line.

Caution! Printed circuit boards are sensitive to electrostatic discharge. To

avoid damaging the board, follow these precautions to minimize the risk
of damage:

• before handling the assembly, discharge your body by touching

a grounded, metal object
• handle all cards by their edges unless otherwise required
• when possible, use grounded electrostatic discharge wrist
straps when handling sensitive components

IM-82 0-5
Series 820 Instruction Manual Chapter 1 Introduction

Chapter 1 Introduction
This instruction manual covers the installation, operation and
maintenance of Sierra’s 820 Series product line including the fol-
lowing Top-Trakª Models:
• 822 Mass Flow Meter with display (nylon flow body)
• 824 Mass Flow Meter without display (nylon flow body)
• 826 Hi-Flow Meter with display (aluminum flow body)
• 827 Hi-Flow without display (aluminum flow body)
• 822-S Mass Flow Meter with display (stainless steel flow body)
• 824-S Mass Flow Meter without display (stainless steel flow body)

Sierra’s Top-Trakª Mass Flow Meters are designed for precise

measurement of gas mass flow. The 820 Series offers a broad
range of sizes and process connections for flexibility and versatili-
ty. The primary standard calibration ensures starting point accura-
cy and NIST traceability. The meter’s 0-5 VDC or 4-20 mA output
signal is provided for recording, data-logging or control. The op-
tional display reads the mass flow rate directly in engineering units
or percentage of full scale.

Using This Manual

This manual is organized into four chapters:
• Chapter 1 includes the introduction and theory of operation
• Chapter 2 provides installation and wiring instructions
• Chapter 3 describes transducer operation and features
• Chapter 4 covers maintenance, calibration and troubleshooting

Gas tables and conversion formulas are found in Appendix A.

The product specifications and dimensional drawings are found
in Appendix B.

Throughout this manual, we use the word transducer as a ge-

neric term to represent all models of Sierra’s 820 Series Top-
Trak Mass Flow Meters.

IM-82 1-1
Chapter 1 Introduction Series 820 Instruction Manual

Safety Information
Caution and warning statements are used throughout this book to
draw your attention to important information.

Warning! Caution!
This statement appears with information that This statement appears with information that is
is important to protect people and equip ment important for protecting your equipment and
from damage. Pay very clo se attention to all performance. Read and follow all cautions that
warnings that apply to your application. apply to your application.

Receipt of System Components

When receiving a Sierra transducer, carefully check the outside
packing carton for damage incurred in shipment. If the carton is
damaged, notify the local carrier and submit a report to the factory
or distributor. Remove the packing slip and check that all ordered
components are present and match your specifications (as ordered).
Make sure any spare parts or accessories are not discarded with the
packing material. Do not return any equipment to the factory with-
out first contacting Sierra Customer Service.

Technical Assistance
If you encounter a problem with your transducer, review the confi-
guration information for each step of the installation, operation and
set up procedures. Verify that your settings and adjustments are
consistent with factory recommendations. Refer to Chapter 4,
Troubleshooting, for specific information and recommendations.

If the problem persists after following the troubleshooting proce-

dures outlined in Chapter 4, contact Sierra Instruments by fax or by
E-mail (see inside front cover). For urgent phone support you may
call (800) 866-0200 or (831) 373-0200 between 8:00 a.m. and 5:00
p.m. PST. In Europe contact Sierra Instruments bv at +31 20
6145810. When contacting Technical Support, make sure to include
this information:

• the flow range, serial number, Sierra order number and

model number (all marked on the transducer nameplate)
• the problem you are encountering and any corrective action
taken
• application information (gas, pressure, temperature, pipe
and fitting configuration)

1-2 IM-82
Series 820 Instruction Manual Chapter 1 Introduction

Top-Trak Features
Standard Top-Trak Mass Flow Meters require a 12 to 15 VDC ex-
ternal power source (24 VDC input power optional). The transduc-
er’s 0 to 5 VDC output signal allows for flow recording, data-logging
or control. A 4 to 20 mA output signal is optionally available. Input
power and output signal connections are made via the 9-pin sub-
type D-connector located on the side of the transducer. An addi-
tional input power jack is located just below the D-connector. (It is
important to connect input power at only one location.)

The transducer shown below is a typical example of a 822 Series

Top-Trak Mass Flow Meter. Other models may vary slightly in
their appearance but are operationally equivalent.

Figure 1-1. Top-Trak Features (Typical)

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Chapter 1 Introduction Series 820 Instruction Manual

The 820 Series Flow Sensing Principle

The operating principle of Top-Trak transducers is based on heat
transfer and the first law of thermodynamics. During operation
process gas enters the instrument’s flow body and divides into two
flow paths, one through the sensor tube, the other through the la-
minar flow element bypass. The laminar flow bypass generates a
pressure drop, P1 –P2 , forcing a small fraction of the total flow to
pass through the sensor tube (m1 ).

Figure 1-2. Flow Paths through the Transducer

Two resistance temperature detector (RTD) coils around the sensor

tube direct a constant amount of heat (H) into the gas stream. In
actual operation, the gas mass flow carries heat from the upstream
coil to the downstream coil. The resulting temperature difference
(?T) is detected by the RTD coils and gives the output signal.
Since the molecules of the gas carry away the heat, the output sig-
nal is linearly proportional to gas mass flow.

Figure 1-3. Flow Measuring Principle

1-4 IM-82
Series 820 Instruction Manual Chapter 2 Installation

Chapter 2 Installation
Installation Overview
To ensure a successful installation, inlet and outlet tubing should be clean
and free from burrs or rims caused by cutting prior to plumbing the transduc-
er into the system. The protective caps covering the inlet/outlet fittings
should not be removed until immediately prior to installation.

Before installing the transducer, verify the following:

1. Make sure the installation site meets the specific operating parameters
recorded on the transducer’s nameplate. Each transducer is factory-
configured for a specific gas and flow range. If the operating pressure is
more than 50 psi (3.4 bar) away from the calibration pressure, it is advis-
able to return the unit to the factory for re-calibration. (Adjusting zero
may be sufficient to remain within specification.)

2. Do not locate the transducer in areas subject to sudden temperature

changes, moisture, drafts or near equipment radiating significant amounts
of heat. Make sure to allow adequate space for cable connectors and wir-
ing.

3. For 1/2-inch size inlet/outlet process connections on models 826 and 827
make sure the location meets the minimum number of recommended pipe
diameters upstream and downstream of the transducer. A minimum of 5
inches (127 mm) upstream and 2-1/2 inches (64 mm) downstream is al-
ways recommended. (not necessary for other models)

4. Horizontal mounting is preferable. Vertical mounting is possible with

best results achieved when the factory calibration is specifically per-
formed for vertical mounting. In vertical positions zero shift will occur
depending on the gas pressure at zero flow.

5. If the gas contains any particulate matter, install an in-line filter prior to
the transducer. Recommended filter size: 15 micron for flows of 10
sccm to 30 slpm, 30 micron for above 30 slpm.
6. If a potential over-flow condition exists, insert a valve or critical orifice
in the line to limit flow to approximately 25 percent above the full scale
range of the meter.

7. Confirm that the transducer o-ring material is compatible with the gas to
be measured.
8. For remote displays, confirm the supplied cable is of sufficient length to
connect the components.
IM-82 2-1
 Chapter 2 Installation Series 820 Instruction Manual

Installing the Transducer

Follow the installation instructions that apply to your transducer’s
process connection. For all 1/2-inch size process connections, observe
Caution! the piping recommendations given on page 2-3. Before operation, all
Only qualified personnel
should install the plumbing should be checked carefully for leaks and the transducer
transducer. purged with dry nitrogen.

Compression Fittings
1. Position the transducer with the flow direction arrow pointing
downstream in the direction of flow.
2. Verify the position of the front
and back ferrule. Insert the
tubing into the fitting. Make
sure that the tubing rests firmly
on the shoulder of the fitting
and that the nut is finger tight.
(Do not mix or interchange
parts of tube fittings made by different manufactur- ers.)
3. Hold the body steady with a backup wrench. For 1/2-inch size,
tighten the nut 1-1/4 turns from finger tight. For 1/8-inch, 1/4- inch
and 3⁄8-inch sizes, tighten only 3/4 turn from finger tight. Do not
over-tighten!

4. Check the system’s entire flow path thoroughly for leaks. (Do not
use liquid leak detectors, instead monitor pressure decay. Over-
exposing the transducer to leak detector fluid may damage the unit.)

VCO Fittings
1. Position the transducer with the flow direction arrow pointing
downstream in the direction of flow.

2. Install new o-rings compatible with the gas to be used. (Do not mix
or interchange parts of tube fittings made by different manu-
facturers.)

3. Hold the body steady with a backup wrench. Tighten the nut
finger tight and then 1/4 turn tighter with a wrench. Do not over-
tighten!
4. Check the system’s entire flow path thoroughly for leaks. (Do not use
liquid leak detectors, instead monitor pressure decay. Over- exposing
the transducer to leak detector fluid may damage the unit.)
2-2 IM-82
Series 820 Instruction Manual Chapter 2 Installation

1/4 inch Female NPT Connections (standard on nylon flow bodies )

1. Position the transducer with the flow direction arrow pointing in the di-
rection of flow.

2. Use a good quality paste pipe thread sealant. Apply to pipe threads.

3. Tighten the pipe no more than 1 turn past hand-tight. Caution! Do not
over-tighten. Damage to the instrument may result.

1/2-Inch Size NPT Connections

1. Install a section of straight pipe at least ten pipe diameters in length up-
stream of the transducer. Also, allow at least five pipe diameters down-
stream for accurate operation. DO NOT use reducers. If the preceeding
components in the flow path create disturbances extend the upstream pipe
length.

2. Position the transducer with the flow direction arrow pointing down-
stream in the direction of flow.
3. Tighten fittings until leak tight (refer to published standards for specific
recommendations).
4. Check the system’s entire flow path thoroughly for leaks. (Do not use liq-
uid leak detectors, instead monitor pressure decay. Over-exposing the
transducer to leak detector fluid may damage the unit.)

Figure 2-1 Piping Requirements for all 1/2-Inch Size Process Connections

IM-82 2-3
 Chapter 2 Installation Series 820 Instruction Manual

Wiring the Transducer

Standard Top-Trakrm transducers require a 12 to 15 VDC power supply
(15 VDC nominal, 100 mA maximum). 24 VDC input power is
Caution! optional. Transducers are connected to the power supply through
Do not supply +DC power either the dedicated DC power jack or through the 9-pin D-connector
at the D-connector while located on the side of the enclosure. Before powering the unit, check
using a power supply at
the power jack. Both sup- the transducer’s nameplate to confirm input power:
plies may be damaged. • PV1 = 12 to 15 VDC
• PV2 = 24 VDC

Note: operating a 24 VDC transducer at 12 to 15 VDC will result in unreliable

operation.
Caution!
Operating a 12 VDC trans- The transducer’s standard 0 to 5 VDC (4-20 mA optional) output sig- nal is
ducer at 24 VDC will cause available through the D-connector. The mating connector is in- cluded with the
equipment damage. transducer. Connection details are given on the fol- lowing pages.

When the transducer is configured for a remote display, signal con-

nections are made via the 9-pin connector. Input power connections
are not included in the standard interface cable. Power connections
for the display and the transducer are shared when the connector is
wired for a remote display. Optionally the input power can be applied
at the power jack (either 12 volts (PV 1) or 24 volts (PV2). Remote
display mounting dimensions are given at the end of this chapter.

2-4 IM-82
Series 820 Instruction Manual Chapter 2 Installation

Figure 2-2. Transducer D-Connector Pin Assignments

Note: The power jack requires a plug that has a 2.5mm inner diameter and a 5mm outer
diameter. The center is positive (+).

IM-82 2-5
Chapter 2 Installation Series 820 Instruction Manual

Standard 0-5 VDC Output Signal Wiring

The standard 0-5 VDC output signal flows from Pin 3 (0-5 VDC Out)
through the load (1K Ohm minimum) to Pin 7 (Power Common). The
figure below is a typical example of input power and output signal
connections.

Figure 2-3. Standard 0-5 VDC Output Signal Wiring

Warning! Output voltage rises to 8 volts (12-15 volt input

units) and 16 volts (24 vdc input units) during initial warm
up (2-5 seconds) and also during extreme over range
events.

Optional 4-20 mA Output Signal Wiring

The optional 4-20 mA output signal flows from Pin 9 (4-20 mA Out)
through the load (50 to 500 Ohms maximum) to Pin 7 (Power Com-
mon). The figure below is a typical example of input power and output
signal connections. (Multiple transducer current loop output connec-
tions are given on the next page.)

Figure 2-4. Single Transducer Current Loop Connection

2-6 IM-82-E
Series 820 Instruction Manual Chapter 2 Installation

Figure 2-5. Multiple Transducer Current Loop Connections

Remote Display Installation

Mount the remote display at a convenient location within reach of the
supplied interface cable. The maximum cable length is 100 feet (30 m).

Figure 2-6. Mounting the Remote Display

IM-82 2-7
Series 820 Instruction Manual Chapter 3 Operation

Chapter 3 Operation
The output signal of the transducer is either 0-5 VDC (standard) or
4-20 mA (optional). The output signal is linear and proportional to
the gas mass flow rate. For example, for a 0-5 VDC output signal,
5.00 VDC is the output signal for the full scale listed on the trans-
ducer’s nameplate, 2.50 VDC is for one-half of full scale, and 0.00
VDC is for zero flow. For a 4-20 mA output signal, 20.00 mA is
the output signal for the full scale, 12.00 mA is for one-half of full
scale, and 4.00 mA is for zero flow.

Transducer Operation
When the transducer is installed and the system has undergone a
complete leak check:

1. Apply power. The output signal will be at a high level for the
first 10 to 20 seconds while the sensor warms up to its normal
operating temperature range. Assuming zero flow, the output
signal will then drop to zero (or 4 mA, depending on output
configuration). Allow at least thirty minutes of warm-up time.

2. For first-time start ups, perform an initial zero output check as

described on page 3-3. After checking the initial zero setting,
the transducer is ready to monitor the gas mass flow rate.

Transducer Accuracy
The standard accuracy of Top-Trak is ±1.5% of full scale. The
±1.5% of full scale accuracy means that the 0-5 VDC output sig-
nal is accurate to within ±.075 VDC. The 4-20 mA output is ac-
curate to within ±0.24 mA.

For example, the output signal for zero flow can be as much as
±.075 VDC or +0.24 mA. If the transducer has an output signal at
zero flow, as long as it is within either of these two ranges, it does
not mean it is malfunctioning.

For transducers with a digital display, the accuracy is simply .015

times the full scale flow rate stated on the nameplate. For exam-
ple, if the full scale is 10 slpm, the digital display will be accurate
to ±0.15 slpm. The reading at zero flow may be as much as +0.15
slpm and still be within the stated accuracy specification.

IM-82 3-1
Chapter 3 Operation Series 820 Instruction Manual

Referencing the Transducer to Non-Standard Conditions

The gas flow rate output of your transducer is referenced to
“normal” conditions of 21 °C (70°F) and 760 mm of mercury (1
atmosphere) unless otherwise specified on the certificate of
calibration. Check the stated reference conditions of your transducer.
If you are comparing your transducer’s output with another type of flow
meter, different reference conditions could cause a discrepancy
between the flow readings.

For example, the output reading of a Top-Trak will be approximately

7% lower when referenced to 0°C rather than 21°C. To find the flow
rate referenced to other standard conditions or the actual temperature
and pressure conditions in the pipe where your transducer is located,
see Appendix A.

Transducer Over-Ranging
If the flow rate exceeds the full scale value listed on the transducer
nameplate, the output signal and digital display (if so equipped)
will read a higher value. The transducer is not calibrated for over-
ranged flows and will probably be both non-linear and inaccurate.
Over-range conditions are indicated by the display and/or output
signal going to a level above the full scale range. When the over-
range condition is removed, it may take several seconds for the
transducer to recover and resume normal operation.

If the supply voltage is only 12 VDC, the over-ranged reading may

exceed the full scale value by 3 volts. If the supply voltage is
higher, as with the 24 VDC option, then the output can exceed the
full scale by as much as 10 volts, or more. Digital displays cannot
exceed 3-1/2 digits (1999). If the flow rate exceeds 1999, the right-
most digits will blank and only the left-hand “1” will appear on the
display.

3-2 IM-82
Series 820 Instruction Manual Chapter 3 Operation

Zero and Span Adjustments

The zero and span potentiometers are
accessed through the ports marked on
the side of the transducer. Normally,
span adjustments are not made unless
you are calibrating the transducer. The
span adjustment should not be used
unless you have a known, precise non-
zero flow rate that you wish to match.
Before making any zero adjustments,
confirm that the system has reached its
normal operating temperature and
pressure and the transducer is mounted
in its final position.

For transducers without the digital display:

1. Power the transducer and allow at least 30 minutes of warm up

time before attempting any adjustments. Set gas flow to zero.
Confirm that no flow exists.

2. Connect a digital multimeter to Pin 3 (0-5 Out) or, Pin 9 (4-20 Out)
and Pin 7 (Power Common). Check the reading. If it does not
indicate 0± .05 VDC, (or 4.0± .016mA) adjust the zero poten-
tiometer.

Since the output signal does not indicate negative numbers, it is

necessary to adjust down from a slightly positive reading. Begin by
slowly rotating the zero pot clockwise until a positive reading is
indicated. To complete the zero adjustment, slowly turn the pot
counterclockwise until zero is achieved, or to the point where out- put
quits changing (may be slightly above zero point in some cas- es) DO
NOT ADJUST DOWNWARD BEYOND THIS POINT.

For transducers with the digital display:

1. Power the transducer and allow at least 30 minutes of warm up

time before attempting any adjustments. Set gas flow to zero.
Confirm that no flow exists.

2. Observe the reading on the digital display. If the reading is

greater than 1.0% of full scale, adjust the zero potentiometer.

IM-82 3-3
Chapter 3 Operation Series 820 Instruction Manual

820 Totalizer Operation

The optional 820 totalizer is designed to provide a totalizer func-
tion within the digital display of the 820 series. It will display the
flow rate, the total flow or both at once. If your instrument has this
option, it is described below. Note the flow units and the totalizer
units are pre-set at the factory and must be the same.

Screens:
The totalizer display has three screens which are accessed by
pressing the button circled in the photo below:

Screen 1 (start-up screen shown in photo above): Flow units are

shown together with the actual flow
Screen 2: Totalized flow in the same units as Screen 1 above
Screen 3: Actual flow is shown together with the total flow

Totalizer:
A total of 8 digits can be shown by the totalizer ranging from
.0000001 to 99999999. The decimal point will automatically shift
position as the total increases. Upon reaching the maximum count
(99999999), the totalizer will “roll-over”--be cleared and begin
counting from zero again.

The totalizer may be cleared by going to screen 2 or 3 and then

pressing the button for more then 5 seconds. The clearing of the to-
talizer can be observed on the screen.

The total count is saved in non-volatile memory every 5 minutes.

If the unit is switched off within 5 minutes from power-up then no
total will be saved and the previous total will be shown at the next
power-up.

Caution: Due to the combination of the hardware/LCD, it may

happen that during power up the screen remains blank. If this oc-
curs, please turn the unit off and then back on again

3-4 IM-82
Series 820 Instruction Manual Chapter 4 Maintenance and Repair

Chapter 4 Maintenance and Repair

Top-Trakm transducers essentially require no scheduled mainten-
ance other than periodic flow path cleaning if the gas is dirty. If an
Caution! in-line filter is used, the filtering element should be periodically
It is important that this replaced or ultrasonically cleaned.
transducer be serviced CAUTION: If the laminar flow element is removed from any Top-
and/or calibrated by
qualified personnel. Trakm flow meter, re-calibration will be required to return the in-
strument to original accuracy.

Calibration of Sierra Instruments flow meters and controllers re-

quires a calibrating standard of at least equal accuracy and prefera-
bly an order of magnitude better than the transducer, and a skilled
factory technician familiar with the Top-Trak. It is recommended
that Top-Trak meters be returned to the factory for annual evalua-
tion and calibration.

Included in this chapter are general instructions for:

• Transducer Cleaning Instructions .........................................page 4-1

• Transducer Calibration ...............................................................page 4-9
• Transducer Troubleshooting.................................................page 4-11
• Returning Equipment to the Factory ................................page 4-12

Transducer Cleaning
Due to transducer design variations, separate cleaning instructions
are given in this chapter for each of the following models:

• Model 822/824 with nylon flow body

• Model 826/827 with aluminum flow body
• Model 822-S/824-S with stainless steel flow body

When toxic or corrosive gases are used, the transducer must be

thoroughly purged with inert dry gas before disconnecting from the
gas line. Transducers used with toxic or corrosive gases SHOULD
NOT BE returned to the factory since they constitute a safety ha-
zard. Contact the factory with specific questions.

IM-82 4-1
 Chapter 4 Maintenance and Repair Series 820 Instruction Manual

Flow Path Cleaning Model 822/824

Figure 4-1. Model 822/824 Flow Components

Inlet and Outlet Screens

1. Remove the transducer from the system.

2. Remove inlet and outlet fittings.

Caution!
When using toxic or cor-
rosive gases, purge the 3. Pull out the laminar flow element (LFE) holddowns.
unit thoroughly with inert
dry gas before discon-
necting from the gas line. 4. Replace or clean the inlet and outlet screens.

5. Re-assemble components. When the transducer is installed in

the system, leak test the connection.

6. To be within the original accuracy, calibrate the transducer (see

page 4-9).

4-14 IM-82
Series 820 Instruction Manual Chapter 4 Maintenance and Repair

Laminar Flow Element

The laminar flow element (LFE) is a precision flow divider which
diverts a preset amount of flow through the sensor tube. The par-
Caution! Removing ticular LFE used depends on the gas and flow range of the instru-
the LFE from the ment. To clean or inspect the LFE:
meter will change
your calibra- tion.
Do not remove 1. Remove the transducer from the system.
the LFE unless you are
prepared to re-calibrate 2. Remove the inlet and outlet fittings and inlet screen.
the instrument.

3. The LFE has a slightly tapered shape with the larger diameter
on the upstream (inlet) side. To remove, use a blunt object
which does not mar the flow channels to push the LFE from the
outlet side to the inlet side. A 3/8-inch (9 mm) nut driver works
well.

4. Clean the LFE using an alcohol-based solvent. Make sure to

carefully clean all active flow channels in the LFE.

5. Re-install the LFE making sure to press it in the correct dis-

tance as shown below.

6. Re-assemble remaining components. When the transducer is

installed in the system, leak test the connection. Re-zero the
transducer (see Chapter 3).

7. Calibrate the instrument (see page 4-9).

Figure 4-2. Correct LFE Position

IM-82 4-3
 Chapter 4 Maintenance and Repair Series 820 Instruction Manual

Flow Path Cleaning Model 826/827

Laminar Flow Element
The laminar flow element (LFE) is a precision flow divider which
diverts a preset amount of flow through the sensor tube. The par-
ticular LFE used depends on the gas and flow range of the instru-
Caution! Removing
the LFE from the ment. To clean or inspect the LFE:
meter will change
your calibra- tion. 1. Remove the transducer from the system.
Do not remove
the LFE unless you are 2. Remove the 6-32 hex nuts and washers. Remove the end caps. Note
prepared to re-calibrate
the instrument.
the position of the three (3) LFE elements.

3. To remove the LFE, use a blunt object which does not mar
the flow channels to push the LFE from the flow body.

4. Clean the LFE using a suitable solvent. Make sure to carefully

clean all active flow channels in the LFE.

5. Re-install the LFE making sure to position it with both ends

even with the transducer flow body.

6. Re-assemble remaining components. When the transducer is

installed in the system, leak test the connection. Re-zero the
transducer (see Chapter 3).

7. Perform a calibration (see page 4-9).

Figure 4-3. Model 826/827 Flow Components

4-4 IM-82
 Series 820 Instruction Manual Chapter 4 Maintenance and Repair

Flow Path Cleaning Model 822-S/824-S

Laminar Flow Element
The laminar flow element (LFE) is a precision flow divider which
diverts a preset amount of flow through the sensor tube. The LFE
is made of precision machined 316 stainless steel. The particular
LFE used depends on the gas and flow range of the instrument.
Should the LFE require cleaning or inspection due to deposition,
use the appropriate cleaning procedure which is specific to flow
body size.

Figure 4-4. Low Flow Transducer LFE Cleaning

Low Flow Transducers:
The LFE is accessed by unscrewing the main inlet fitting and re-
moving it from the flow body. The LFE is screwed into the inlet
fitting, which has been specially machined for this purpose. To
Caution! Removing access the components:
the LFE from the
meter will change
your calibra- tion. 1. Remove the transducer from the system.
Do not remove
the LFE unless you are 2. The inlet filter screen is held in place in the inlet fitting by the
prepared to re-calibrate LFE. Disassemble by holding the fitting steady with a wrench
the instrument.

.
and unscrewing the LFE with a medium flat-tipped screwdriv-
er.

3. Remove the LFE assembly taking care not to bend the inlet
screen. Inspect the sealing O-ring and replace if necessary. In-
spect the inlet screen and replace if corroded or damaged. Light
to medium particulate contamination can be cleaned by back
washing with a suitable solvent. Air dry thoroughly.

IM-82 4-5
 Chapter 4 Maintenance and Repair Series 820 Instruction Manual

4. Inspect the LFE for damage and replace if necessary. Remember

that removal or replacement of the LFE or inlet screen requires
transducer re-calibration.

5. Re-assemble components. When the transducer is installed in

the system, leak test the connection. Re-zero the transducer
(see Chapter 3).

6. To be within the original accuracy, calibrate the transducer (see

page 4-9).

Figure 4-5. Medium Flow Transducer LFE Cleaning

Caution! Removing
the LFE from the
Medium Flow Transducers:
meter will change
your calibra- tion.
Do not remove In the medium flow body, the LFE assembly consists of the honey-
the LFE unless you are comb laminar flow element, inlet screen, 0.63 inch long standoff,
prepared to re-calibrate
the instrument
two ranging washers, 2-1Ú4 inch long 4-40 screw and 4-40 nut.
Range changes in the honeycomb element are made with various
.

diameter ranging washers. To access the components:

1. Remove the unit from the system.

2. Access the LFE by unscrewing the four 10-32 socket head cap
screws from the inlet side of the flow body and remove the in-
let end cap. (Note the position of the screws, one has a shorter
length.)

3. Remove the LFE assembly taking care not to bend the inlet
screen. Inspect the sealing O-ring and replace if necessary. In-
spect the inlet screen and replace if corroded or damaged. Light
to medium particulate contamination can be cleaned by back
washing with a suitable solvent. Air dry thoroughly.

4-6 IM-82
 Series 820 Instruction Manual Chapter 4 Maintenance and Repair

4. Inspect the honeycomb element for damage and replace if ne-

cessary. Replacement of the LFE or inlet screen requires trans-
ducer re-calibration.

5. Re-assemble components. When the transducer is installed in

the system, leak test the connection.

6. To be within the original accuracy, calibrate the transducer (see

page 4-9).

Figure 4-6. High Flow Transducer LFE Cleaning

Caution! Removing
the LFE from the High Flow Transducers:
meter will change
your calibra- tion.
Do not remove
The high flow LFE is similar to the honeycomb element used in the
the LFE unless you are medium flow body but larger in diameter. The high flow body con-
prepared to re-calibrate sists of four parts: inlet tube, inlet cap, main flow body and end cap.
the instrument .
The inlet tube is only removed to inspect and replace the sealing O-
ring between the inlet tube and inlet cap. To access the components:

1. Remove the unit from the system.

2. To remove the inlet screen, remove the four 1⁄4-28 socket head
cap screws on the inlet side of the flow body and separate the
inlet cap from the main flow body.
3. Inspect the inlet screen for damage and corrosion and replace if
necessary. Light to medium particulate contamination can be
cleaned by back washing with a suitable solvent. Air dry thorough-
ly.
4. Inspect the sealing O-ring for damage and replace if necessary.
The inlet screen is mounted with the fine mesh side facing the in-
let.
5. To remove the LFE loosen and remove the four threaded rods
holding the end cap to the main flow body. Separate the end cap
from the main flow body and remove the LFE assembly. The LFE

IM-82 4-7
 Chapter 4 Maintenance and Repair Series 820 Instruction Manual

assembly consists of: 6-32 x 31⁄8 inch long screw, a #6 washer,

two ranging washers, honeycomb laminar flow element, LFE,
spacer, inlet filter, and 6-32 nut.
6. Inspect the honeycomb element for damage and replace if ne-
cessary. Replacement of the LFE or inlet screen requires trans-
ducer re-calibration.

7. Re-assemble components. When the transducer is installed in

the system, leak test the connection.

8. To be within the original accuracy, calibrate the transducer (see

page 4-9).

Sensor Cleaning and Inspection

Due to sensor design variations, the following sensor cleaning in-
structions are for Model 822-S/824-S only. All other transducer
models must be returned to the factory.

Sensor cleaning is accomplished by simply rodding out the sen-

sor with the Sensor Cleaning Stylette, part number “CKÓ availa-
ble from Sierra. A 0.028 inch diameter piano wire may also be
used.

To access the sensor for inspection or cleaning:

Caution! When usin g toxic or 1. Remove the transducer from the system. Remove the two sock-
corrosive gases, purge the unit et head access port plugs with a 1Ú4-inch Allen wrench. Visual-
thoroughly with inert dry gas
before disconnecting from the ly inspect the sensing ports and sensor.
gas line.
1. Use a hemostat or tweezers to
push the cleaning wire into the
downstream opening of the
sensor tube. Do not force the
cleaning wire, move it back and
forth–DO NOT TWIST OR
ROTATE.

2. Flush the sensor tube with a

non-residuous solvent compatible with the O-ring material. In
cases where solids are deposited in sensor, units should be
returned to factory for complete cleaning and re-calibration.

4-8 IM-82-E
 Series 820 Instruction Manual Chapter 4 Maintenance and Repair

3. Blow dry all parts with dry nitrogen and re-assemble. When the
transducer is installed in the system, leak test the connection.
Re-zero the transducer (see Chapter 3).

Transducer Calibration
Calibration of Sierra’s flow meters requires a calibration standard
of at least four times the accuracy of the transducer. Sierra’s Cal-
Caution! Bench Automated Primary Calibration System is the preferred me-
It is important that this
transducer be calibrated
thod of calibration and is used at the factory for all calibrations
only by qualified personnel. from 10 sccm up to 50 slpm. Most calibrations can be performed
with a digital voltmeter (DVM) or multimeter with 0.25% accuracy
and four digits, dry nitrogen and the K-factor tables included in this
manual. Flow meters require a metering valve for setting a constant
flow rate.

The following procedures are offered as guidelines for calibration.

It is always best to return the transducer to the factory for calibra-
tion. Calibration checks and minor adjustments to the zero and full
scale are made via the access ports in the enclosure. If the linearity
needs adjustment (when installing a different bypass to change the
range) skip Step 2 and Step 3. If linearity does not need adjust-
ment, complete only Steps 1 through 3.

Step 1. Warm Up
Plug in the unit to be calibrated and allow at least 30 minutes warm
up time before attempting any adjustments.
Step 2. Zero Adjust
Slide open the zero and span access doors. Connect a DVM or
multimeter to the transducer output pins. Adjust the zero potenti-
ometer for 0.0 volts (4 mA) at zero flow.
Step 3. Check Full Scale
Generate full scale flow using a metering valve in-line with the unit
under test. Compare the indicated flow rate with the flow standard
reading. If they agree to within ±10%, adjust the span po-
tentiometer for exact agreement. If the readings do not agree with-
in ±10%, attempt to determine the cause of disagreement. Possibil-
ities are:
• leaks in the system or in the transducer
• wrong or improper use of K-factor
• wrong or improper correction for temperature and pressure
• partially clogged or dirty sensor tube

IM-82 4-9
Chapter 4 Maintenance and Repair Series 820 Instruction Manual

• replacement of components in the flow path do not exactly

match the original parts
This completes transducer calibration. To adjust linearity, continue
with Step 4.

Step 4. Adjusting Linearity (see Figure 4-7)

First gain access to the printed circuit board inside the enclosure:
1. For units with the digital display, carefully rotate the display
until it hits the top plate. Slide the display’s two side panels up
and remove. Move the display aside taking care not to damage
the connecting cable.

2. Remove the two Phillips head screws from the top of the trans-
ducer enclosure. Remove the two Phillips head screws from the
back of the transducer enclosure. Pull the enclosure panels off.

3. Orient the transducer with the component side of the circuit

board facing you. Plug in the transducer and allow to warm up
for at least 30 minutes.

Step 5. Zero Adjust

Connect a DVM to the transducer output pins. Adjust the zero po-
tentiometer for 0.0 volts (4 mA) at zero flow.

Step 6. Calibrate 25%

Use the calibration standard to set a flow rate of 25% of full scale.
Adjust the span potentiometer R21 for 1.25 volts (8 mA) at the
output of the transducer.

Step 7. Calibrate 50%

Increase the flow rate to 50% of full scale. If the output is within
+0.05 V (0.2 mA), no adjustment is necessary. If the output is
beyond these limits, install a jumper block at J1 in the appropriate
position (see Figure 4-7). Adjust R25 for the proper reading.

Step 8. Calibrate 75% and 100%

Set the flow to 75% of full scale. If the output is outside the limits
set in Step 7, install a jumper block in J2 in the appropriate posi-
tion. Adjust R27 for the correct reading. Repeat this procedure for
100% flow using R29. Repeat Steps 6 through 8 at least one more
time.

4-10 IM-82
Series 820 Instruction Manual Chapter 4 Maintenance and Repair

Figure 4-7. Printed Circuit Board Component Locations

Transducer Troubleshooting
When you suspect that the transducer is not operating correctly,
there are a few simple checks that can be made before taking the
unit out of service:

1. Make certain that there are no leaks in the gas line.

2. Check that all cables are connected and are in good condition.

3. Verify that the power supply is in the correct range and

properly connected to the transducer.

4. Double check connector pin outs when replacing another man-

ufacturer’s transducer.

This information is provided to help locate the cause of a transduc-

er failure. It is not intended to be an all inclusive repair guide. For
most repairs, the unit should be returned to the factory for service.

IM-82 4-11
Chapter 4 Maintenance and Repair Series 820 Instruction Manual

Problem Possible Cause Solution

No output No power Plug in power supply Clean or
Inlet filter screen clogged replace screen Return to
Clogged sensor factory for cleaning* Return to
PCB defective factory for repair

Unit will not zero Gas leak Find and correct leaks
Application requires high pres- Re-zero transducer
sure and non-horizontal mounting (see Chapter 3)
PCB defective Return to factory for repair

Reads full scale Gas leak Find and correct leaks

with no flow Liquid present in system Check for liquid in flow path
Defective sensor Return to factory for repair

Output too high Incorrect calibration or K-factor Correct calibration/k-factor

Liquid present in system Check for liquid in flow path
Defective sensor Return to factory for repair

Out of calibration Dirty or clogged sensor Return to factory for cleaning*

Change in composition of gas See K-factory tables
Gas leak L FE dirty Inlet Find and correct leaks
filter screen clogged Clean LFE
Incorrect inlet conditions Clean or replace screen Re-
(1/2-inch size models) plumb transducer correctly
PCB defective (See Chapter 2)
Return to factory for repair
*Model 822-S/824-S see sensor cleaning instructions

4-12 IM-82
 Series 820 Instruction Manual Chapter 4 Maintenance and Repair

Returning Equipment to the Factory

Factory Calibration—All Models
Sierra Instruments maintains a fully-equipped calibration laboratory. All
measuring and test equipment used in the calibration of Sierra transducers
are traceable to NIST Standards. Sierra is ISO-9001 registered and con-
forms to the requirements of ANSI/NCSL-Z540 and ISO/IEC Guide 25.

Instructions for Returning Your Instrument for Service

The following information will help you return your instrument to Sierra
Instruments' Factory Service Center and will ensure that your order is
processed promptly. Prices may vary depending on the flow range, type of
gas and operating pressure of your unit. To request a rough estimate of the
pricing, contact your local Sierra Instruments distributor or contact one of
our offices directly. A detailed quote will be provided following a full
evaluation of your instrument.

Please follow these easy steps to return your instrument for fac-
tory service:
1. Obtain a Return Materials Authorization (RMA) number from the
Sierra Instruments website at
http://www.sierrainstruments.com/rma/login.php

2. If you require service beyond calibration, but do not know which

service(s) will be required, describe the symptoms as accurately as
possible on the RMA form..
3. Pack your instrument carefully. Use the original packaging and
Caution! foam or bubble wrap (packing peanuts NOT recommended) and
Always fully neutralize any include a copy of the RMA form (complete with Sierra supplied
toxic gas trapped in- side RMA number) with the unit(s).
the instrument before
removing it from the gas
line. 4. Ship the unit(s) to the following address:
Sierra Instrum ents, Inc.
Attention: Factory Service Center
5 Harris Court, Building L
Monterey, CA 93940 USA

IM-82 4-13
Chapter 4 Maintenance and Repair Series 820 Instruction Manual

CUSTOMER SERVICE AND SUPPORT INFORMATION:

Email Technical Support: [email protected]

Email Sales: [email protected]

FACTORY USA (Monterey, California)

TOLL FREE: 800-866-0200
PHONE: 831-373-0200
EMAIL: [email protected]

European Sales & Service Center (Egmond a/d Hoef, Netherlands)

PHONE: +31 72 5071400
EMAIL: [email protected]

Asia Sales & Service Center (Shanghai, Peoples Republic of China)

PHONE: + 86 21 5879 8521

SAFETY NOTE ABOUT PURGING

WARNING: When toxic or corrosive gases are used,
purge unit thoroughly with inert dry gas before discon-
necting from the gas line to prevent personnel from be-
ing injured when coming in contact with the instrument.
If an instrument used with a toxic or corrosive gas is re-
turned to the factory, a Material Safety Data Sheet
(MSDS) must be enclosed & attached to the outside of
the box to alert Sierra personnel of the potential hazard.
Also, make sure the inlet & outlet are solidly plugged off.

4-14 IM-82
Series 820 Instruction Manual Appendix A

Appendix A Conversion Formulas and Gas Tables

Conversion of Flow Rate to Other T and P Conditions
The flow rate of your transducer is referenced to certain “standard”
conditions of temperature and pressure. Unless otherwise specified
in your order, these standard conditions are 21 °C (70°F) and 760
mm of mercury (1 atmosphere). If you wish to convert to other
“standard” conditions or to find the “actual” conditions in the pipe
where your instrument is installed, use the following relationship:
P1 T2
Q2 = Q1 (1)
P2 T1

( )1 = The standard conditions under which your instrument

was calibrated,
( ) 2 = The new standard conditions or the actual temperature
and pressure conditions in the pipe,

Q1 = The gas mass flow rate referenced to the calibrated standard

conditions (sccm or slm),
Q2 = The gas mass flow rate referenced to the new standard or
actual conditions (sccm or slm—“S” means “standard,”
accm or alm—“A” means “actual”),
P= Absolute pressure (kg/cm2 or psia), and
T = Absolute temperature (°K or °R) (°K = °C + 273, °R = °F + 460).
Example 1: Changing “Standard” Conditions

If your transducer has a flow rate reading of 10.00 slm and was cali-
brated at standard conditions of 70°F (21°C) and 1 atmosphere (14.7
psia), and if you wish to convert this reading to standard conditions of
32°F (0°C) and 1 atmosphere, then you would use Equation (1) as
follows:
14.7 460 + 32
Q2 = (10.0) = 9.28 slm
14.7 460 + 70
The flow rate referenced to 0°C will be approximately 7% lower than
when referenced to standard conditions of 21 °C.

IM-82 A-1
Appendix A Series 820 Instruction Manual

Example 2: Finding the “Actual” Flow Rate

If the flow rate and calibrated standard conditions are as given in
Example 1 and you wish to find the actual flow rate at 100°F and
30 psig, then you would use Equation (1) as follows:

Calculating For a Single Gas

The following tables provide K-factors and thermodynamic prop-
erties of gases commonly used with mass flow meters and control-
lers. The purpose of these tables is two-fold:

1. Calibrating an “actual” gas with a reference gas. This is partic-

ularly useful if the actual gas is not a common gas or if it is
toxic, flammable, corrosive, etc.

2. Interpreting the reading of a flow meter or flow controller

which has been calibrated with a gas other than the actual gas.

In applying the tables, the following fundamental relationship is used:

Q1/Q2 = K1/K2 (1)

Where:

Q = The volumetric flow rate of the gas referenced to normal

conditions of 0°C and 760 mm Hg (sccm or slm),

K = The K-factor defined in equation (6),

( ) 1 = Refers to the “actual” gas, and

( ) 2 = Refers to the “reference” gas.

The K-factor is derived from the first law of thermodynamics ap-
plied to the sensor tube, as described in Chapter 1:

H = µC p T2
(2)

A-2 IM-82
Series 820 Instruction Manual Appendix A

Where:

H = The constant amount of heat applied to the sensor tube,

µ = The mass flow rate of the gas (gm/min)

Cp = The coefficient of specific heat of the gas (Cal/gm);

Cp is given in the Table (at 0°C),

ΔT = The temperature difference between the downstream and

upstream coils, and

N = A correction factor for the molecular structure of the gas

given by the following table:
Number of Atoms in the Gas Molecule N
Monatomic 1.040
Diatomic 1.000
Triatomic 0.941
Polyatomic 0.880

The mass flow rate, µ, can also be written as:

µ = ρQ (3)

Where:

ρ= The gas mass density at standard conditions (g/l); ρ is giv-

en in the tables (at 0°C, 760 mm Hg).

Furthermore, the temperature difference, ΔT, is proportional to the

output voltage, E, of the mass flow meter, or

ΔT = aE (4)
where:

a = a constant.
If we combine equations (3) and (4), insert them into equation (2),
and solve for Q, we get

Q = (bN/ρCp) (5)
where:
b = H/aE = a constant if the output voltage is constant.

IM-82 A-3
Appendix A Series 820 Instruction Manual

For our purposes, we want the ratio of the flow rate, Q1 , for an ac-
tual gas to the flow rate of a reference gas, Q2 , which will produce
the same output voltage in a particular mass flow meter or control-
ler. We get this by combining equations (1) and (5):

Q1 /Q2 = K1 /K2 = (N1 / ρ1 Cp1 )/(N2 /ρ2 CP2 ) (6)

Please note that the constant b cancels out. Equation (6) is the funda-
mental relationship used in the accompanying tables. For convenience,
the tables give “relative” K-factors, which are the ratios K1/K2, instead
of the K-factors themselves. In the tables, the relative K-factor is
Kactual/KN2 where the reference gas is the commonly used gas, nitro-
gen (N2). The remaining columns give Cp and p, enabling you to cal-
culate K1/K2 directly using Equation (6). In some instances, K1 /K2
from the tables may be different from that which you calculate direct-
ly. The value from the tables is preferred because in many cases it was
obtained by experiment. Sierra calibrates every transducer with prima-
ry standards using the actual gas or a molecular equivalent reference
gas. The calibration certificate accompanying the transducer cites the
reference gas used.
Example 1:
A transducer is calibrated for nitrogen (N2 ), and the flow rate is
1000 sccm for a 5.000 VDC output signal. The flow rate for carbon
dioxide at a 5.000 VDC output is:

QCO2 /QN2 = KCO2 /K N2 , or

QCO2 = (0.74/1.000)1000 = 740 sccm

Example 2:
A transducer is calibrated for hydrogen (H2), and the flow rate is
100 sccm for a 5.000 VDC output signal. The flow rate for nitrous
oxide (N2O) is found as follows:

QN2O/QH2 = K N2O/K H2, or

Q N2O = (0.71/1.01) 100 = 70.3 sccm
Note that the K -factors relative to nitrogen must be used in each case.
Example 3:

We want a transducer to be calibrated for use with dichlorosilane

(SiH2 Cl2 ) at a 100 sccm full scale flow. We wish to use the pre-
ferred reference gas Freon-14 (CF4 ). What flow of CF4 must we
generate to do the calibration?
QSiH2CL2 /QCF4 = K SiH2CL2 /K CF4

100/Q CF4 = 0.869

Q CF4 = 100/0.869 = 115 sccm

A-4 IM-82
Series 820 Instruction Manual Appendix A

Calculating Dual Gas Mixtures

Equation (6) is used for gas mixtures, but we must calculate N/ p Cp
for the mixture. The equivalent values of p, Cp, and N for a dual
gas mixture are given as follows:
The equivalent gas density is:

Where:

( )1 = Refers to gas #1, and

( )2 = Refers to gas #2
The equivalent specific heat is:

Cp = F1 Cp1 + F2 Cp2

Where:

The equivalency relationships for p, Cp, and N for mixtures of

more than two gases have a form similar to the dual-gas relation-
ship given above.
IMPORTANT NOTE ABOUT K-FACTORS:
Please note that if you have a transducer calibrated for a gas such
as methane and wish to use the K-factors to measure a gas such as
air, that the inaccuracy of the measurement can range from ±5 to
10%. The use of K-factors is, at best, only a rough approximation
and should not be used in applications that require a better than ±5
to 10% accuracy.
It should also be noted that certain gases, in similar “families,” will
work exceptionally well with K-factors; however, those instances
are only true when similar thermal properties of the gas
are present.

IM-82 A-5
Series 820 Instruction Manual Appendix A

Chemical K-factor Cp Density Elastomer* Nylon

Relative Corrosive
Actual Gas Symbol (Cal/g) (g/l) @ O-ring* Valve Compatible Gas
N2
0°C Limited
Seat Warranty

Acetylene C2H2 0.58 0.4036 1.162 Viton® Viton®

Air 1 0.24 1.293 Viton® Viton®
Allene (Propadiene) C3H4 0.43 0.352 1.787 KR
Ammonia NH3 0.73 0.492 0.76 NEO KR
Argon Ar 1.45 0.1244 1.782 Viton® Viton®
Arsine AsH3 0.67 0.1167 3.478 Viton® KR
Boron Trichloride BCl3 0.41 0.1279 5.227 KR KR YES
Boron Trifluoride BF3 0.51 0.1778 3.025 Viton® KR
Boron Tribromide Br3 0.38 0.0647 11.18 Viton® KR
Bromine Br2 0.81 0.0539 7.13 Viton® Viton® NO
Bromine Pentafluoride BrF5 0.26 0.1369 7.803 Viton® KR NO
Bromine Trifluoride BrF3 0.38 0.1161 6.108 Viton® KR NO
Bromotrifloromethane CBrF3 0.37 0.1113 6.644 Viton® Viton®
(Freon-13 B1)
1,3-Butadiene C4H6 0.32 0.3514 2.413 Viton® Viton®
Butane C4H10 0.26 0.4007 2.593 Viton® Viton®
1-Butane C4H8 0.3 0.3648 2.503 Viton® Viton®
2-Butane C4H8 CIS 0.324 0.336 2.503 Viton® Viton®
2-Butane C4H8 0.291 0.374 2.503 Viton® Viton®
TRANS
Carbon Dioxide CO2 0.74 0.2016 1.964 Viton® Viton®
Carbon Disulfide CS2 0.6 0.1428 3.397 Viton® Viton®
Carbon Monoxide CO 1 0.2488 1.25 Viton® Viton®
Carbon Tetrachloride CCl4 0.31 0.1655 6.86 Viton® KR NO
Carbon Tetra fluoride CF4 0.42 0.1654 3.926 Viton® Viton®
(Freon-14)
Carbonyl Fluoride COF2 0.54 0.171 2.945 Viton® Viton®
Carbonyl Sulfide COS 0.66 0.1651 2.68 Viton® Viton®
Chlorine CL2 0.86 0.114 3.163 Viton® KR NO YES
Chlorine Trifluoride CIF3 0.4 0.165 4.125 Viton® KR
Chlorodifluoromethane CHClF2 0.46 0.1544 3.858 Viton® KR
(Freon-22)
Chloroform CHCI3 0.39 0.1309 5.326 Viton® KR
Chloropentafluoroethane C2CIF5 0.24 0.164 6.892 Viton® KR
(Freon-115)
Chlorotrifluromethane CCIF3 0.38 0.153 4.66 Viton® KR
(Freon-13)
* If no O-ring material is specified then O-ring to be used is Viton
 Chemical K-factor Cp Density Elastomer* Nylon
Relative Corrosive
Actual Gas Symbol (Cal/g) (g/l) @ O-ring Valve Compatible Gas
N2
0°C Limited
Warranty
Seat
Cyanogen C2N2 0.61 0.2613 2.322 Viton® KR
Cyanogen Chloride CICN 0.61 0.1739 2.742 KR KR 800 Only
Cychlopropane C3H5 0.46 0.3177 1.877 Viton® KR
Deuterium D2 1 0.1722 1.799 Viton®
Diborane B2H6 0.44 0.508 1.235 Viton® KR
Dibromodifluoromethane CBr2F2 0.19 0.15 ATEX Viton® KR
Dibromethane 0.47 0.075 7.76 Viton® KR
Dichlorodifluoromethane CCI2F2 0.35 0.1432 5.395 Viton® KR
(Freon-12)
Dichlorofluoromethane CHCl2F 0.42 0.14 4.952 Viton® KR
(Freon-21)
Dichloromethylsilane (CH3) 2SiCl 2 0.25 0.1882 5.758 Viton® KR
Dichlorosilane SiH2Cl2 0.4 0.15 4.506 Viton® KR
Dichlorotetrafluoroethane C2Cl2F4 0.22 0.1604 7.626 Viton® KR
(Freon-114)
1,1-Difluoroethylene C2H2F2 0.43 0.224 2.857 Viton® KR
(Freon-1132A)
Dimethylamine (CH3) 2NH 0.37 0.366 2.011 Viton® KR
Dimethyl Ether (CH3) 2O 0.39 0.3414 2.055 Viton® KR
2,2-Dimethylpropane C3H12 0.22 0.3914 3.219 Viton® KR
Ethane C2H6 0.5 0.4097 1.342 Viton® Viton® NO
Ethanol C2H6O 0.39 0.3395 2.055 Viton® KR
EthylAcetylene C4H6 0.32 0.3513 2.413 Viton® KR
Ethyl Chloride C2H5CI 0.39 0.244 2.879 Viton® KR
Ethylene C2H4 0.6 ~.358 1.251 Viton® Viton®
Ethylene Oxide C2H4O 0.52 0.268 1.965 KR KR
Fluorine F2 0.98 0.1873 1.695 Viton® KR YES
Fluoroform (Freon-23) CHF3 0.5 0.176 3.127 Viton® KR NO
Freon-11 CCI3F 0.33 0.1357 6.129 Viton® KR NO
Freon-12 CCI2F2 0.35 0.1432 5.395 Viton® KR NO
Freon-13 CCIF3 0.38 0.153 4.66 Viton® KR NO
Freon-13 B1 CFrF3 0.37 0.1113 6.644 Viton® KR NO
Freon-14 CF4 0.42 0.1654 3.926 Viton® Viton® NO
Freon-21 CHCI2F 0.42 0.14 4.952 Viton® KR NO
Freon-22 CHCIF2 0.46 0.1544 3.858 Viton® KR NO
Freon-113 CCI2FCCIF2 0.2 0.161 8.36 Viton® KR NO
Freon-114 C2Cl2F4 0.22 0.16 7.626 Viton® KR NO
Freon-115 C2ClF5 0.24 0.164 6.892 Viton® KR NO
Freon-C318 C4F8 0.17 0.185 8.397 NEO NEO NO
 Chemical K-factor Cp Density Elastomer* Nylon
Relative Corrosive
Actual Gas Symbol (Cal/g) (g/l) @ O-ring Valve Compatible Gas
N2 0°C Limited
Seat Warranty

Germane GeH4 0.57 0.1404 3.418 Viton® Viton®

Germanium GeCL4 0.27 0.1071 9.565 Viton® KR
Tetrachloride
Helium He 1.454 1.241 0.1786 Viton® Viton®
Hexafluoroethane C2F6 0.24 0.1834 6.157 Viton® KR NO
(Freon-116)
Hexane C6H14 0.18 0.3968 3.845 Viton® KR
Hydrogen H2 1.01 3.419 0.0899 Viton® Viton®
Hydrogen Bromide HBr 1 0.0861 3.61 Viton® KR
Hydrogen Chloride HCl 1 0.1912 1.627 KR KR YES
Hydrogen Cyanide HCN 1.07 0.3171 1.206 Viton® KR
Hydrogen Fluoride HF 1 0.3479 0.893 KR KR YES
Hydrogen Iodide HI 1 0.0545 5.707 Viton® KR
Hydrogen Selenide H2Se 0.79 0.1025 3.613 Viton® KR
Hydrogen Sulfide H2S 0.8 0.2397 1.52 NEO KR
Iodine Pentafluoride IF5 0.25 0.1108 9.9 Viton® KR
Isobutane CH(CH3)3 0.27 0.3872 2.593 Viton® KR
Isobutylene C4H8 0.29 0.3701 2.503 Viton® KR
Krypton Kr 1.453 0.0593 3.739 Viton® Viton®
Methane CH4 0.72 0.5328 0.715 Viton® Viton®
Methanol CH3OH 0.58 0.3274 1.429 Viton® Viton®
Methyl Acetylene C3H4 0.43 0.3547 1.787 Viton® KR
Methyl Bromide CH3Br 0.58 0.1106 4.236 Viton® Viton®
Methyl Chloride CH3Cl 0.1926 2.253 Viton® KR
Methyl Fluoride CH3F 0.68 0.3221 1.518 Viton® KR
Methyl Mercaptan CH3SH 0.52 0.2459 2.146 Viton® KR
Methyl Trichlorosilane (CH3) SiCl3 0.25 0.164 6.669 Viton® KR

Molybdenum MoF6 0.21 0.1373 9.366 Viton® KR

Hexafluoride
Monoethylamine C2H5NH2 0.35 0.387 2.011 Viton® KR
Monomethylamine CH3NH2 0.51 0.4343 1.386 Viton® KR
Neon NE 1.46 0.245 0.9 Viton® Viton®
Nitric Oxide NO 0.99 0.2328 1.339 Viton® Viton® NO
Nitrogen N2 1 0.2485 1.25 Viton® Viton®
Nitrogen Dioxide NO2 0.74 0.1933 2.052 KR KR NO YES
Nitrogen Trifluoride NF3 0.48 0.1797 3.168 Viton® KR
Nitrosyl Chloride NOCl 0.61 0.1632 2.92 Viton® KR
Nitrous Oxide N2O 0.71 0.2088 1.964 Viton® Viton®
Octafluorocyclobutane C4F8 0.17 0.185 8.397 Viton® KR
(Freon-C318)
Oxygen Difluoride OF2 0.63 0.1917 2.406 Viton® Viton®
Oxygen O2 1 0.2193 1.427 Viton® Viton®
Ozone O3 0.446 0.3 2.144 Viton® Viton® NO
 Chemical K-factor Cp Density Elastomer* Nylon
Relative Corrosive
Actual Gas Symbol (Cal/g) (g/l) @ O-ring Valve Compatible Gas
N2
0°C Limited
Warranty
Seat
Pentaborane B5H9 0.26 0.38 2.816 Viton® KR
Pentane C5HI2 0.21 0.398 3.219 Viton® KR
Perchloryl Fluoride CIO3F 0.39 0.1514 4.571 Viton® KR
Perfluoropropane C3F8 0.174 0.197 8.388 Viton® KR
Phosgene COCl2 0.44 0.1394 4.418 Viton® KR
Phosphine PH3 0.76 0.2374 1.517 Viton® KR
Phosphorous Oxychloride POCl3 0.36 0.1324 6.843 Viton® KR
Phosphorous Pentafluoride PH5 0.3 0.161 5.62 Viton® KR
Phosphorous Trichloride PCl5 0.3 0.125 6.127 Viton® KR
Propane C3H8 0.36 0.3885 1.967 Viton® Viton®
Propylene C3H6 0.41 0.3541 1.877 Viton® Viton®
Silane SiH4 0.6 0.3189 1.433 Viton® KR
Silicon Tetrachloride SiCl4 0.28 0.127 7.58 Viton® KR
Silicon Tetrafluoride SiF4 0.35 0.1691 4.643 Viton® KR
Sulfur Dioxide SO2 0.69 0.1488 2.858 Viton® KR YES
Sulfur Hexafluoride SF6 0.26 0.1592 6.516 Viton® Viton®
Sulfuryl Fluoride SO2F2 0.39 0.1543 4.562 Viton® KR
Teos 0.09 KR KR YES
Tetrafluorahydrazine N2F4 0.32 0.182 4.64 Viton® KR
Trichlorofluormethane CCl3F 0.33 0.1357 6.129 Viton® KR
(Freon-11)
Trichlorisilane SiHCl3 0.33 0.138 6.043 Viton® KR
1,1,2-Trichloro-1,2,2 CCl 2FCClF2 0.2 0.161 8.36 Viton® KR
Trifluorethane (Freon-113) Viton® Viton®
Trisobutyl Aluminum (C4H9)Al 0.061 0.508 8.848 Viton® KR
Titanium Tetrachloride TiCl4 0.27 0.12 8.465 Viton® KR
Trichloro Ethylene C2HCl3 0.32 0.163 5.95 Viton® KR
Trimethylamine (CH3)3N 0.28 0.371 2.639 Viton® KR
Tungsten Hexasfuoride WF6 0.25 0.081 13.28 KR Teflon YES
Uranium Hexafluoride UF6 0.2 0.0888 15.7 Viton® KR
Vinyl Bromide CH2CHBr 0.46 0.1241 4.772 Viton® KR
Vinyl Chloride CH2CHCl 0.48 0.12054 2.788 Viton® KR
Xenon Xe 1.44 0.0378 5.858 Viton® Viton®
Series 820 Instruction Manual Appendix B

Appendix B 822/824 Product Specifications

Series 820 Instruction Manual Appendix C

Appendix C 822S/824S Product Specifications

Series 820 Instruction Manual Appendix D

Appendix D 826/827 Product Specifications