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Lecture-1-02082024

The document outlines the syllabus for the IC Fabrication Technology course (MEL G611) taught by Prof. Ramesha C K at BITS Pilani, covering topics such as solid-state physics, wafer preparation, epitaxy, oxidation, lithography, etching, and ion implantation. It includes details on lab assignments, quizzes, mid-semester, and comprehensive exams, along with their respective weightage and schedules. The introduction provides background motivation and objectives related to semiconductor electronics.

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Tanvi naik
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Download as PDF, TXT or read online on Scribd
3 views

Lecture-1-02082024

The document outlines the syllabus for the IC Fabrication Technology course (MEL G611) taught by Prof. Ramesha C K at BITS Pilani, covering topics such as solid-state physics, wafer preparation, epitaxy, oxidation, lithography, etching, and ion implantation. It includes details on lab assignments, quizzes, mid-semester, and comprehensive exams, along with their respective weightage and schedules. The introduction provides background motivation and objectives related to semiconductor electronics.

Uploaded by

Tanvi naik
Copyright
© © All Rights Reserved
Available Formats
Download as PDF, TXT or read online on Scribd
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IC Fabrication Technology

MEL G611
Lecture -1
02-08-2024

Prof. Ramesha C K
Chamber No. D 214
[email protected]
BITS Pilani, K K Birla Goa Campus
Lecture No Learning Objective Topics to be covered Reference Chap/Sec #

1-2 To introduce the subject Introduction and Overview Ch.1


3- 4 Basic Solid State Physics Crystal structure (Si, Ge, GaAS), defects, Sorab Ghandhi, Ch.1
directions, planes

5-8 To learn the art of wafer preparation Wafer preparation Ch. 1

9 Uses of epitaxial layers Epitaxy Ch.2


10-11 To learn the technology Epitaxial Reactor and Growth Ch. 2
12-13 The model of growth process Kinetics of growth Ch. 2
14-15 To learn the basic oxidation process Oxidation Ch. 3

16-17 Silicon dioxide as a mask against implant Silicon oxidation model Ch. 3

18-20 Techniques to fabricate chips Lithography Ch. 4


21-22 Removal of selected patterns Etching Ch. 5
23-24 To know about the equipments used for plasma Equipments for plasma etching Ch. 5
etching
25-26 To learn theoretical aspects of etching process Pattern Transfer and Selectivity Ch. 5

27-30 Vacuum coating of metal films Vacuum Science, Plasma and Physical Deposition Ch. 10
(Evaporation and Sputtering) Campbell’s book

31-34 Techniques of film deposition Chemical vapor deposition, Poly-Si and dielectric Ch. 6
deposition
35-36 Diffusion of impurity atoms in Si IC processing Diffusion Ch. 7

37-38 Ion implantation of dopant atoms Ion Implantation Ch. 8


39-40 To learn ion implantation technology Ion Implantation Equipment and Applications Ch. 8
Component Duration Weightage Date & Time Remarks

Lab Assignments 2 Hours/week 25% Continuous Open Book

Quizzes/Assignments 1 Hour 15% Quiz1: 03-Sep-2024 Open Book


Quiz2: 12-Nov-2024
Mid-Sem 1.5h 25% 9/10/24, Wednesday Closed Book
4:00 PM - 5:30 PM

Comprehensive Exam 3 hrs. 35% 16/12/24 (FN) Closed Book/Open


Book
Introduction

▪ Background and Motivation


▪ Course Purpose & Objectives
▪ Introduction to Semiconductor Electronics

BITS Pilani, K K Birla Goa Campus


IC Fabrication Steps

BITS Pilani, K K Birla Goa Campus


BITS Pilani, K K Birla Goa Campus
INTRODUCTION

BITS Pilani, K K Birla Goa Campus


Background to the Industry

BITS Pilani, K K Birla Goa Campus


IC Manufactured in the 1960s and
late 1980s

BITS Pilani, K K Birla Goa Campus


Intel 4004 Microprocessor

BITS Pilani, K K Birla Goa Campus


BITS Pilani, K K Birla Goa Campus
BITS Pilani, K K Birla Goa Campus
BITS Pilani, K K Birla Goa Campus
BITS Pilani, K K Birla Goa Campus
Lead microprocessors frequency doubles every 2 years

10000

1000 2X every 2 years


Frequency (Mhz)

P6
100
Pentium ® proc
486
10 8085 386
8086 286

1 8080
8008
4004
0.1
1970 1980 1990 2000 2010
Year
Courtesy, Intel
BITS Pilani, K K Birla Goa Campus
BITS Pilani, K K Birla Goa Campus
Electronic Devices

BITS Pilani, K K Birla Goa Campus


Today's Electronic Devices

BITS Pilani, K K Birla Goa Campus


Thank You

BITS Pilani, K K Birla Goa Campus

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