Pressure

Freescale Semiconductor MPX5010

Rev 12, 09/2009

Integrated Silicon Pressure Sensor MPX5010

On-Chip Signal Conditioned, MPXV5010
Temperature Compensated and MPVZ5010
Calibrated Series
0 to 10 kPa (0 to 1.45 psi)
The MPxx5010 series piezoresistive transducers are state-of-the-art
(0 to 1019.78 mm H2O)
monolithic silicon pressure sensors designed for a wide range of applications,
0.2 to 4.7 V Output
but particularly those employing a microcontroller or microprocessor with A/D
inputs. This transducer combines advanced micromachining techniques,
thin-film metallization, and bipolar processing to provide an accurate, high Application Examples
level analog output signal that is proportional to the applied pressure. The • Hospital Beds
axial port has been modified to accommodate industrial grade tubing. • HVAC
Features • Respiratory Systems
• Process Control
• 5.0% Maximum Error over 0° to 85°C
• Washing Machine Water Level
• Ideally Suited for Microprocessor or Microcontroller-Based Systems
Measurement (Reference AN1950)
• Durable Epoxy Unibody and Thermoplastic (PPS) Surface Mount Package
• Ideally Suited for Microprocessor or
• Temperature Compensated over -40° to +125°C Microcontroller-Based Systems
• Patented Silicon Shear Stress Strain Gauge • Appliance Liquid Level and Pressure
• Available in Differential and Gauge Configurations Measurement
• Available in Surface Mount (SMT) or Through-hole (DIP) Configurations

ORDERING INFORMATION
# of Ports Pressure Type Device
Device Name Case No.
None Single Dual Gauge Differential Absolute Marking
Unibody Package (MPX5010 Series)
MPX5010DP 867C • • MPX5010DP
MPX5010GP 867B • • MPX5010GP
MPX5010GS 867E • • MPX5010D
MPX5010GSX 867F • • MPX5010D
Small Outline Package (MPXV5010 Series)
MPXV5010DP 1351 • • MPXV5010DP
MPXV5010G6U 482 • • MPXV5010G
MPXV5010GC6T1 482A • • MPXV5010G
MPXV5010GC6U 482A • • MPXV5010G
MPXV5010GC7U 482C • • MPXV5010G
MPXV5010GP 1369 • • MPXV5010GP
Small Outline Package (Media Resistant Gel) (MPVZ5010 Series)
MPVZ5010G6U 482 • • MPVZ5010G
MPVZ5010G6T1 482 • • MPVZ5010G
MPVZ5010G7U 482B • • MPVZ5010G
MPVZ5010GW6U 1735 • • MZ5010GW
MPVZ5010GW7U 1560 • • MZ5010GW

© Freescale Semiconductor, Inc., 2007-2009. All rights reserved.

 Pressure

SMALL OUTLINE PACKAGES SURFACE MOUNT

MPXV5010GC6U/C6T1 MPXV5010G6U, MPXV5010DP MPXV5010GP MPVZ5010GW6U

CASE 482A-01 MPVZ5010G6U/T1 CASE 1351-01 CASE 1369-01 CASE 1735-01
CASE 482-01

SMALL OUTLINE PACKAGES THROUGH-HOLE

MPVZ5010G7U MPXV5010GC7U MPVZ5010GW7U

CASE 482B-03 CASE 482C-03 CASE 1560-02

UNIBODY PACKAGES

MPX5010GP MPX5010DP MPX5010GS MPX5010GSX

CASE 867B-04 CASE 867C-05 CASE 867E-03 CASE 867F-03

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 Pressure
Operating Characteristics

Table 1. Operating Characteristics (VS = 5.0 Vdc, TA = 25°C unless otherwise noted, P1 > P2. Decoupling circuit shown in
Figure 3 required to meet specification.)

Characteristic Symbol Min Typ Max Unit

Pressure Range POP 0 — 10 kPa

1019.78 mm H2O

Supply Voltage(1) VS 4.75 5.0 5.25 Vdc

Supply Current Io — 5.0 10 mAdc

Minimum Pressure Offset(2) (0 to 85°C) Voff 0 0.2 0.425 Vdc

@ VS = 5.0 Volts

Full Scale Output(3) (0 to 85°C) VFSO 4.475 4.7 4.925 Vdc

@ VS = 5.0 Volts

Full Scale Span(4) (0 to 85°C) VFSS 4.275 4.5 4.725 Vdc

@ VS = 5.0 Volts

Accuracy(5) (0 to 85°C) — — — ±5.0 %VFSS

Sensitivity V/P — 450 — mV/mm

4.413 mV/mm H2O

Response Time(6) tR — 1.0 — ms

Output Source Current at Full Scale Output IO+ — 0.1 — mAdc

Warm-Up Time(7) — — 20 — ms

Offset Stability(8) — — ±0.5 — %VFSS

1. Device is ratiometric within this specified excitation range.

2. Offset (Voff) is defined as the output voltage at the minimum rated pressure.
3. Full Scale Output (VFSO) is defined as the output voltage at the maximum or full rated pressure.
4. Full Scale Span (VFSS) is defined as the algebraic difference between the output voltage at full rated pressure and the output voltage at the
minimum rated pressure.
5. Accuracy (error budget) consists of the following:
Linearity: Output deviation from a straight line relationship with pressure over the specified pressure range.
Temperature Hysteresis:Output deviation at any temperature within the operating temperature range, after the temperature is cycled to and
from the minimum or maximum operating temperature points, with zero differential pressure applied.
Pressure Hysteresis:Output deviation at any pressure within the specified range, when this pressure is cycled to and from the minimum or
maximum rated pressure, at 25°C.
TcSpan: Output deviation over the temperature range of 0° to 85°C, relative to 25°C.
TcOffset:Output deviation with minimum rated pressure applied, over the temperature range of 0° to 85°C, relative to 25°C.
Variation from Nominal:The variation from nominal values, for Offset or Full Scale Span, as a percent of VFSS, at 25°C.
6. Response Time is defined as the time for the incremental change in the output to go from 10% to 90% of its final value when subjected to a
specified step change in pressure.
7. Warm-up Time is defined as the time required for the product to meet the specified output voltage after the Pressure has been stabilized.
8. Offset Stability is the product's output deviation when subjected to 1000 hours of Pulsed Pressure, Temperature Cycling with Bias Test.

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 Pressure
Maximum Ratings
Table 2. Maximum Ratings(1)
Rating Symbol Value Unit

Maximum Pressure (P1 > P2) Pmax 40 kPa

Storage Temperature Tstg –40 to +125 °C

Operating Temperature TA –40 to +125 °C

1. Exposure beyond the specified limits may cause permanent damage or degradation to the device.

Figure 1 shows a block diagram of the internal circuitry integrated on a pressure sensor chip.

VS
2 (SOP)
3 (Unibody)

Thin Film Gain Stage #2

Temperature and
Sensing Ground Vout 1 (Unibody)
Compensation
Element 4 (SOP)
and Reference
Gain Stage #1 Shift Circuitry

2 (Unibody) Pins 1 and 5 through 8 are NO CONNECTS

3 (SOP) for small outline package.
GND Pins 4, 5, and 6 are NO CONNECTS for
unibody package.

Figure 1. Fully Integrated Pressure Sensor Schematic

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 Pressure
ON-CHIP TEMPERATURE COMPENSATION AND CALIBRATION

The performance over temperature is achieved by other than dry air, may have adverse effects on sensor
integrating the shear-stress strain gauge, temperature performance and long-term reliability. Contact the factory for
compensation, calibration and signal conditioning circuitry information regarding media compatibility in your application.
onto a single monolithic chip. Figure 4 shows the recommended decoupling circuit for
Figure 3 illustrates the Differential or Gauge configuration interfacing the integrated sensor to the A/D input of a
in the basic chip carrier (Case 482). A fluorosilicone gel microprocessor or microcontroller. Proper decoupling of the
isolates the die surface and wire bonds from the environment, power supply is recommended.
while allowing the pressure signal to be transmitted to the Figure 5 shows the sensor output signal relative to
sensor diaphragm. pressure input. Typical, minimum, and maximum output
The MPxx5010G series pressure sensor operating curves are shown for operation over a temperature range of
characteristics, and internal reliability and qualification tests 0° to 85°C using the decoupling circuit shown in Figure 4. The
are based on use of dry air as the pressure media. Media, output will saturate outside of the specified pressure range.

Fluoro Silicone Stainless

Gel Die Coat Die Steel Cap +5 V

P1
Thermoplastic OUTPUT
Wire Bond Case Vout
Vs
Lead
IPS
Frame

1.0 μF 0.01 μF GND 470 pF

P2
Differential Sensing Die Bond
Element

Figure 2. Cross-Sectional Diagram SOP Figure 3. Recommended Power Supply Decoupling

(not to scale) and Output Filtering
(For additional output filtering, please refer to
Application Note AN1646.)

5.0
Transfer Function (kPa):
Vout = VS × (0.09 × P + 0.04) ± 5.0% VFSS
4.0 VS = 5.0 Vdc
TEMP = 0 to 85°C

3.0
Output (V)

MAX TYPICAL
2.0

MIN
1.0

0
0 2.0 4.0 6.0 8.0 10
Differential Pressure (kPa)

Figure 4. Output vs. Pressure Differential

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 Pressure

Transfer Function

Nominal Transfer Value: Vout = VS x (0.09 x P + 0.04)

± (Pressure Error x Temp. Factor x 0.09 x VS)
VS = 5.0 V ± 0.25 Vdc

Temperature Error Band

4.0

Temp Multiplier
3.0
–40 3
Temperature 0 to 85 1
Error 2.0 +125 3
Factor
1.0

0.0
–40 –20 0 20 40 60 80 100 120 140
Temperature in °C

NOTE: The Temperature Multiplier is a linear response from 0° to –40°C and from 85° to 125°C.

Pressure Error Band

0.5
0.4
0.3
0.2
Pressure 0.1 Pressure (kPa)
Error 0
(kPa) 0 1 2 3 4 5 6 7 8 9 10
–0.1
–0.2
–0.3
–0.4
–0.5

Pressure Error (Max)

0 to 10 (kPa) ±0.5 (kPa)

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 Pressure
PRESSURE (P1)/VACUUM (P2) SIDE IDENTIFICATION TABLE
Freescale designates the two sides of the pressure sensor sensor is designed to operate with positive differential
as the Pressure (P1) side and the Vacuum (P2) side. The pressure applied, P1 > P2.
Pressure (P1) side is the side containing fluorosilicone gel The Pressure (P1) side may be identified by using the
which protects the die from harsh media. The MPX pressure table below:

Pressure (P1)
Part Number Case Type
Side Identifier

MPX5010DP 867C Side with Part Marking

MPX5010GP 867B Side with Port Attached

MPX5010GS 867E Side with Port Attached

MPX5010GSX 867F Side with Port Attached

MPXV5010G6U 482 Stainless Steel Cap

MPXV5010GC6U/6T1 482A Side with Port Attached

MPXV5010GC7U 482C Side with Port Attached

MPXV5010GP 1369 Side with Port Attached

MPXV5010DP 1351 Side with Part Marking

MPVZ5010G6U/6T1 482 Stainless Steel Cap

MPVZ5010G7U 482B Stainless Steel Cap

MPVZ5010GW6U 1735 Vertical Port Attached

MPVZ5010GW7U 1560 Vertical Port Attached

MINIMUM RECOMMENDED FOOTPRINT FOR SURFACE MOUNTED APPLICATIONS

Surface mount board layout is a critical portion of the total footprint, the packages will self align when subjected to a
design. The footprint for the surface mount packages must be solder reflow process. It is always recommended to design
the correct size to ensure proper solder connection interface boards with a solder mask layer to avoid bridging and
between the board and the package. With the correct shorting between solder pads.

0.100 TYP 8X
0.660 2.54
16.76

0.060 TYP 8X
1.52 0.300
7.62

0.100 TYP 8X inch

2.54 mm SCALE 2:1

Figure 5. SOP Footprint (Case 482)

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 Pressure
PACKAGE DIMENSIONS

-A-
D 8 PL
4 0.25 (0.010) M T B S A S
5 NOTES:
1. DIMENSIONING AND TOLERANCING PER ANSI
Y14.5M, 1982.
2. CONTROLLING DIMENSION: INCH.
-B- 3. DIMENSION A AND B DO NOT INCLUDE MOLD
PROTRUSION.
G 4. MAXIMUM MOLD PROTRUSION 0.15 (0.006).
8 5. ALL VERTICAL SURFACES 5˚ TYPICAL DRAFT.
1
INCHES MILLIMETERS
S DIM MIN MAX MIN MAX
A 0.415 0.425 10.54 10.79
B 0.415 0.425 10.54 10.79
C 0.212 0.230 5.38 5.84
N D 0.038 0.042 0.96 1.07
G 0.100 BSC 2.54 BSC
H 0.002 0.010 0.05 0.25
J 0.009 0.011 0.23 0.28
C H
K 0.061 0.071 1.55 1.80
J
-T- M 0˚ 7˚ 0˚ 7˚
N 0.405 0.415 10.29 10.54
PIN 1 IDENTIFIER SEATING S 0.709 0.725 18.01 18.41
PLANE
K M

CASE 482-01
ISSUE O
SMALL OUTLINE PACKAGE

–A– D 8 PL NOTES:
1. DIMENSIONING AND TOLERANCING PER ANSI
4 0.25 (0.010) M T B S A S Y14.5M, 1982.
5 2. CONTROLLING DIMENSION: INCH.
3. DIMENSION A AND B DO NOT INCLUDE MOLD
PROTRUSION.
N –B– 4. MAXIMUM MOLD PROTRUSION 0.15 (0.006).
5. ALL VERTICAL SURFACES 5_ TYPICAL DRAFT.
G
8 INCHES MILLIMETERS
1 DIM MIN MAX MIN MAX
A 0.415 0.425 10.54 10.79
B 0.415 0.425 10.54 10.79
S C 0.500 0.520 12.70 13.21
W D 0.038 0.042 0.96 1.07
G 0.100 BSC 2.54 BSC
H 0.002 0.010 0.05 0.25
J 0.009 0.011 0.23 0.28
V K 0.061 0.071 1.55 1.80
M 0_ 7_ 0_ 7_
N 0.444 0.448 11.28 11.38
C S 0.709 0.725 18.01 18.41
V 0.245 0.255 6.22 6.48
H W 0.115 0.125 2.92 3.17
J
–T–
PIN 1 IDENTIFIER SEATING
M PLANE
K

CASE 482A-0
ISSUE A
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 Pressure
PACKAGE DIMENSIONS

-A-
NOTES:
4 1. DIMENSIONING AND TOLERANCING PER
5 ANSI Y14.5M, 1982.
2. CONTROLLING DIMENSION: INCH.
3. DIMENSION A AND B DO NOT INCLUDE
-B- MOLD PROTRUSION.
4. MAXIMUM MOLD PROTRUSION 0.15 (0.006).
G 5. ALL VERTICAL SURFACES 5˚ TYPICAL DRAFT.
8 6. DIMENSION S TO CENTER OF LEAD WHEN
1 D 8 PL
FORMED PARALLEL.
0.25 (0.010) M T B S A S
INCHES MILLIMETERS
DIM MIN MAX MIN MAX
DETAIL X A 0.415 0.425 10.54 10.79
S
B 0.415 0.425 10.54 10.79
C 0.210 0.220 5.33 5.59
PIN 1 IDENTIFIER D 0.026 0.034 0.66 0.864
N
G 0.100 BSC 2.54 BSC
J 0.009 0.011 0.23 0.28
K 0.100 0.120 2.54 3.05
C M 0˚ 15˚ 0˚ 15˚
SEATING N 0.405 0.415 10.29 10.54
-T- PLANE S 0.540 0.560 13.72 14.22
K
M
J
DETAIL X

CASE 482B-03
ISSUE B
SMALL OUTLINE PACKAGE

NOTES:
1. DIMENSIONING AND TOLERANCING PER ANSI
–A– Y14.5M, 1982.
2. CONTROLLING DIMENSION: INCH.
4 3. DIMENSION A AND B DO NOT INCLUDE MOLD
5 PROTRUSION.
4. MAXIMUM MOLD PROTRUSION 0.15 (0.006).
5. ALL VERTICAL SURFACES 5_ TYPICAL DRAFT.
N –B– 6. DIMENSION S TO CENTER OF LEAD WHEN
FORMED PARALLEL.
D 8 PL
G
8 0.25 (0.010) M T B S A S INCHES MILLIMETERS
1 DIM MIN MAX MIN MAX
DETAIL X A 0.415 0.425 10.54 10.79
B 0.415 0.425 10.54 10.79
S C 0.500 0.520 12.70 13.21
W D 0.026 0.034 0.66 0.864
G 0.100 BSC 2.54 BSC
J 0.009 0.011 0.23 0.28
K 0.100 0.120 2.54 3.05
V PIN 1 M 0_ 15 _ 0_ 15 _
IDENTIFIER N 0.444 0.448 11.28 11.38
S 0.540 0.560 13.72 14.22
C V 0.245 0.255 6.22 6.48
W 0.115 0.125 2.92 3.17

SEATING
–T– PLANE
K
M
J
DETAIL X

CASE 482C-03
ISSUE B
SMALL OUTLINE PACKAGE

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 Pressure
PACKAGE DIMENSIONS

C
R NOTES:
1. DIMENSIONING AND TOLERANCING PER ANSI
POSITIVE PRESSURE
(P1) Y14.5M, 1982.
M 2. CONTROLLING DIMENSION: INCH.
3. DIMENSION –A– IS INCLUSIVE OF THE MOLD
STOP RING. MOLD STOP RING NOT TO EXCEED
B –A– 16.00 (0.630).

INCHES MILLIMETERS
N DIM MIN MAX MIN MAX
PIN 1
L A 0.595 0.630 15.11 16.00
1 2 3 4 5 6
B 0.514 0.534 13.06 13.56
SEATING –T–
PLANE C 0.200 0.220 5.08 5.59
D 0.027 0.033 0.68 0.84
F 0.048 0.064 1.22 1.63
J G G 0.100 BSC 2.54 BSC
S F J 0.014 0.016 0.36 0.40
D 6 PL L 0.695 0.725 17.65 18.42
M 30 _NOM 30 _NOM
0.136 (0.005) M T A M
N 0.475 0.495 12.07 12.57
R 0.430 0.450 10.92 11.43
S 0.090 0.105 2.29 2.66
STYLE 1: STYLE 2: STYLE 3:
PIN 1. VOUT PIN 1. OPEN PIN 1. OPEN
2. GROUND 2. GROUND 2. GROUND
3. VCC 3. –VOUT 3. +VOUT
4. V1 4. VSUPPLY 4. +VSUPPLY
5. V2 5. +VOUT 5. –VOUT
6. VEX 6. OPEN 6. OPEN

CASE 867-08
ISSUE N
UNIBODY PACKAGE

-T- NOTES:
C A 1. DIMENSIONING AND TOLERANCING PER
ANSI Y14.5M, 1982.
E U -Q- 2. CONTROLLING DIMENSION: INCH.

INCHES MILLIMETERS
DIM MIN MAX MIN MAX
A 1.080 1.120 27.43 28.45
B 0.740 0.760 18.80 19.30
C 0.630 0.650 16.00 16.51
N D 0.027 0.033 0.68 0.84
V B E 0.160 0.180 4.06 4.57
F 0.048 0.064 1.22 1.63
R G 0.100 BSC 2.54 BSC
J 0.014 0.016 0.36 0.41
PORT #1 PIN 1 K 0.220 0.240 5.59 6.10
POSITIVE N 0.070 0.080 1.78 2.03
PRESSURE -P-
(P1) P 0.150 0.160 3.81 4.06
0.25 (0.010) M T Q M 6 5 4 3 2 1
Q 0.150 0.160 3.81 4.06
S R 0.440 0.460 11.18 11.68
S 0.695 0.725 17.65 18.42
K U 0.840 0.860 21.34 21.84
V 0.182 0.194 4.62 4.93
J D 6 PL
G STYLE 1:
0.13 (0.005) M T P S Q S PIN 1. VOUT
2. GROUND
F 3. VCC
4. V1
5. V2
6. VEX

CASE 867F-03
ISSUE D
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MPX5010
Rev. 12
09/2009