TonyPlot

User’s Manual

Silvaco, Inc.

4701 Patrick Henry Drive, Bldg. 2 February 16, 2018

Santa Clara, CA 95054

Phone: (408) 567-1000

Web: www.silvaco.com
 Introducing TonyPlot

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 Introducing TonyPlot

Table of Contents
1. Introducing TonyPlot .............................................................................................................. 11

1.1 What is TonyPlot ............................................................................................................ 12

1.2 Examining Data .............................................................................................................. 12

1.3 Online Help ..................................................................................................................... 13

1.4 Terminology .................................................................................................................... 13

2. Using TonyPlot ....................................................................................................................... 14

2.1 Starting TonyPlot ............................................................................................................ 15

2.1.1 Command Line Options .......................................................................................... 16

2.2 The Base Window ........................................................................................................... 17

2.2.1 File Menu ................................................................................................................ 18

2.2.2 Edit Menu................................................................................................................ 19

2.2.3 View Menu .............................................................................................................. 21

2.2.4 Tools Menu ............................................................................................................. 24

2.2.5 Production Menu ..................................................................................................... 25

2.2.6 Window Menu ......................................................................................................... 27

2.2.7 Help Menu .............................................................................................................. 27

2.3 Plot Control ..................................................................................................................... 28

2.3.1 Plot Selection .......................................................................................................... 28

2.3.2 Pointer Zooming (1D/2D) ....................................................................................... 29

2.3.3 Key Commands ....................................................................................................... 29

2.3.4 3D RSM & VWF Plot Control ................................................................................ 29

2.4 Legends ........................................................................................................................... 30

2.4.1 Legend Types .......................................................................................................... 30

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2.4.2 Positioning Legend Boxes ....................................................................................... 30

2.4.3 Legend Drawing Styles ........................................................................................... 31

2.5 Annotation ...................................................................................................................... 31

2.5.1 Titles ....................................................................................................................... 32

2.5.2 Show ....................................................................................................................... 33

2.5.3 Range ...................................................................................................................... 33

2.5.4 Statistics Plots ......................................................................................................... 33

2.5.5 Axis Labels ............................................................................................................. 34

2.5.6 Footers .................................................................................................................... 34

2.5.7 Special Characters ................................................................................................... 34

2.6 Exporting Images ............................................................................................................ 34

2.7 Tools ............................................................................................................................... 35

2.7.1 Object Browser ....................................................................................................... 35

2.7.2 Cut Line .................................................................................................................. 36

2.7.3 Cut Plane ................................................................................................................. 39

2.7.4 Markers ................................................................................................................... 42

2.7.5 Probe ....................................................................................................................... 43

2.7.6 Ruler........................................................................................................................ 45

2.7.7 Labels ...................................................................................................................... 48

2.7.8 Movie ...................................................................................................................... 51

2.7.9 HP4145 ................................................................................................................... 53

2.7.10 Integrate .................................................................................................................. 54

2.7.11 Poisson Solver ......................................................................................................... 56

2.7.12 Tracers .................................................................................................................... 58

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2.8 Functions ......................................................................................................................... 60

2.8.1 Use Of Functions..................................................................................................... 61

2.8.2 Defining Functions .................................................................................................. 62

2.8.3 Plotting .................................................................................................................... 62

2.8.4 Function Macros...................................................................................................... 63

2.8.5 Function Syntax ...................................................................................................... 63

3. 2D Mesh Plot Display ............................................................................................................. 66

3.1 Overview......................................................................................................................... 67

3.2 Regions ........................................................................................................................... 68

3.3 Contours .......................................................................................................................... 69

3.4 Vectors ............................................................................................................................ 71

3.5 Light Rays ....................................................................................................................... 73

3.6 Junction ........................................................................................................................... 75

3.7 3D ................................................................................................................................... 75

3.8 Lines ............................................................................................................................... 76

3.9 Transforms ...................................................................................................................... 77

4. 3D Mesh Plot Display ............................................................................................................. 79

4.1 Overview......................................................................................................................... 80

4.2 Mesh Options .................................................................................................................. 80

4.3 Contours .......................................................................................................................... 81

4.3.1 Limit Settings .......................................................................................................... 82

4.3.2 Legend Settings ....................................................................................................... 83

4.4 Isosurfaces ...................................................................................................................... 83

4.5 Rays ................................................................................................................................ 84

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4.6 Vectors ............................................................................................................................ 85

4.7 Save As Surfaces ............................................................................................................. 86

5. XY Graph Display .................................................................................................................. 87

5.1 Overview......................................................................................................................... 88

5.2 Cartesian Graphs ............................................................................................................. 89

5.3 Polar Charts ..................................................................................................................... 90

5.4 Smith Charts ................................................................................................................... 90

5.5 Transforms ...................................................................................................................... 90

5.6 Save As ........................................................................................................................... 91

6. Cross Section Display ............................................................................................................. 93

6.1 Cross Section Display ..................................................................................................... 94

6.2 Save As ........................................................................................................................... 95

7. RSM Display .......................................................................................................................... 96

7.1 Overview......................................................................................................................... 97

7.2 1D RSM Graphs .............................................................................................................. 98

7.3 2D RSM Contours ........................................................................................................... 99

7.4 3D RSM Surfaces............................................................................................................ 99

8. Statistics Display ................................................................................................................... 101

8.1 Overview....................................................................................................................... 102

8.2 Histograms .................................................................................................................... 103

8.3 Pie Charts ...................................................................................................................... 104

8.4 Scatter Plot .................................................................................................................... 104

8.5 Box Plot ........................................................................................................................ 104

8.6 Sunray Plot .................................................................................................................... 104

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9. VWF Display ........................................................................................................................ 106

9.1 Overview....................................................................................................................... 107

9.2 1D VWF Graphs ........................................................................................................... 108

9.3 2D VWF Contours ........................................................................................................ 109

9.4 3D VWF Surfaces ......................................................................................................... 110

10. Overlays ............................................................................................................................ 111

10.1 Overview....................................................................................................................... 112

10.2 Making an Overlay........................................................................................................ 112

10.3 Splitting an Overlay ...................................................................................................... 113

10.4 Overlay Control ............................................................................................................ 113

10.5 Overlay Display ............................................................................................................ 114

10.6 Identifying Data ............................................................................................................ 114

10.7 Level Names ................................................................................................................. 114

10.8 Cutlines ......................................................................................................................... 115

10.9 Preferences .................................................................................................................... 115

11. Legacy VWF Production Mode ........................................................................................ 116

11.1 Overview....................................................................................................................... 117

11.2 Enabling Production Mode............................................................................................ 117

11.3 The Production Mode Dialog ........................................................................................ 117

11.3.1 Interactive RSM Control ....................................................................................... 118

11.3.2 Failure Analysis .................................................................................................... 120

11.3.3 Calibration ............................................................................................................. 122

11.3.4 Synthesis ............................................................................................................... 124

11.3.5 Yield Analysis ....................................................................................................... 126

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11.3.6 Input Parameter Ranges......................................................................................... 128

11.3.7 Input Distributions ................................................................................................ 130

11.3.8 SPC Limits ............................................................................................................ 131

11.3.9 Experimental Results............................................................................................. 133

11.3.10 Optimizer Setup .................................................................................................... 134

11.3.11 ASA Setup ............................................................................................................ 135

12. Preferences ........................................................................................................................ 137

12.1 Overview....................................................................................................................... 138

12.2 Manage Preferences ...................................................................................................... 138

12.2.1 Exporting Preferences ........................................................................................... 139

12.2.2 Importing Preferences ........................................................................................... 140

12.2.3 Factory Settings ..................................................................................................... 141

12.2.4 Recent Files ........................................................................................................... 142

12.3 Application.................................................................................................................... 142

12.3.1 Toolbars ................................................................................................................ 142

12.3.2 Shortcuts ............................................................................................................... 143

12.4 Rendering ...................................................................................................................... 144

12.4.1 Colors .................................................................................................................... 144

12.4.2 Fonts...................................................................................................................... 145

12.5 Settings ......................................................................................................................... 146

12.5.1 1D/2D Draw .......................................................................................................... 146

12.5.2 1D/2D Plot ............................................................................................................ 148

12.5.3 General .................................................................................................................. 149

12.5.4 Legends ................................................................................................................. 150

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12.5.5 Tools ..................................................................................................................... 152

12.6 Sequence ....................................................................................................................... 153

12.6.1 Colors .................................................................................................................... 153

12.6.2 Lines...................................................................................................................... 154

12.6.3 Marks .................................................................................................................... 155

12.7 Viewing ......................................................................................................................... 156

12.7.1 Axis ....................................................................................................................... 156

12.7.2 Camera .................................................................................................................. 157

12.7.3 Lights .................................................................................................................... 158

12.7.4 Materials ............................................................................................................... 159

12.7.5 Structure ................................................................................................................ 160

13. Appendix A Data Files ...................................................................................................... 162

13.1 User Data Files .............................................................................................................. 163

13.1.1 Data Format........................................................................................................... 163

13.1.2 Examples ............................................................................................................... 164

13.1.3 Display .................................................................................................................. 165

13.2 Set Files ........................................................................................................................ 165

13.2.1 Creating ................................................................................................................. 165

13.2.2 Loading ................................................................................................................. 166

13.3 TonyPlot Spreadsheet Files ........................................................................................... 166

13.3.1 Loading TonyPlot spreadsheet Files ...................................................................... 166

13.3.2 Data Format........................................................................................................... 167

13.3.3 Examples ............................................................................................................... 168

14. Appendix B Models and Algorithms ................................................................................. 169

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14.1 Introduction ................................................................................................................... 170

14.2 Physical Models ............................................................................................................ 170

14.3 Concentration Dependent Mobility ............................................................................... 171

14.4 Field Dependent Mobility Model .................................................................................. 172

14.5 Sheet Resistance Calculation......................................................................................... 173

14.6 Threshold Voltage Calculation ...................................................................................... 174

14.7 Breakdown Voltage Calculation ................................................................................... 175

15. Appendix C Greek and Math Characters Supported by TonyPlot ..................................... 176

16. Index ................................................................................................................................. 179

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1. Introducing TonyPlot

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1.1 What is TonyPlot

TonyPlot (version 5) is a graphical post processing tool for use with all Silvaco TCAD
simulators and is an integral part of the TCAD Interactive Tools. TonyPlot can operate stand-
alone or along with other TCAD Interactive Tools, such as DeckBuild, VWF, or SPDB.

Users of earlier versions of TonyPlot or TonyPlot3D will find some of the functionality
familiar. This version has new some capabilities and a new user interface. The interfaces are
easier to use and the resulting display has improved. This version provides:

• Multiple file loading

• Plot comparison and overlay
• Movie function
• HP4145 emulator
• Cross section profile integration
• Poisson Solver
• Improved user interface and ease of use
• Improved cutline definition and creation
• Faster drawing
• New Structure file features
• User definable setup parameters and set files

1.2 Examining Data

TonyPlot can be used to examine several data files all at once, each in its own plot window.
You can combine these plot windows by “overlaying” the data sets so you can make direct
comparisons. Plots can be interactively added, deleted and duplicated, overlaid and separated.

Not only does TonyPlot allows you to display any data file produced by Silvaco tools, it also
provides extensive “tools” for examining these plots and the associated data. For example, you
can take cut-line or cut-plane slices through structures, integrate a curve to calculate an area,
or perform simple electrical simulations on 1D devices.

TonyPlot allows you to rescale, zoom, and pan plots. You can also add grids, customize axes,
and draw arbitrary labels on the data. All titles, marks, labels, ranges and so on are
automatically set to useful defaults but can all be explicitly set whenever necessary. The
appearance of all plots in TonyPlot can be customized. There are many “preferences” that can
be tailored to either suit your needs or the requirements to a particular set of data. See
Preferences for more information.

TonyPlot can also be used to study the output from the Silvaco process and device simulators
Atlas, Athena, Clever, Victory Process, Victory Device, Victory Mesh and Victory Cell.
TonyPlot can display regression models, response surfaces, scatter plots, histograms, SPC
charts, pie charts, and more.

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1.3 Online Help

You can access TonyPlot’s online user’s manual. If the manual does not answer a particular
problem, then contact Silvaco ([email protected]). See Section 2.2.7 Help Menu for more
information.

1.4 Terminology
The following terminology is used throughout TonyPlot:

Table 1-1 TonyPlot Terminology

Terms Definition

Structure This is the set of data contained within a structure file (e.g., doping,
geometry, or bias points). One structure usually requires one plot but
sometimes two. The same structure can be reused in many plots.

Plot This is one drawing. A plot can be of one or more structures but cannot exist
without a structure. Several plots can show the same structure, which allows
the data to be simultaneously examined from two different angles. TonyPlot
can display many kinds of plots, each with its own distinct preferences.

Selected Plot Not all plots need be operated on at once. A subset of plots is defined by
selecting required plots. Selected plots are indicated by an orange triangle in
the top right corner of the subwindow.

View This is the collection of plots in the main window. This term refers to all
plots, selected or not.

Subwindow This is the area where a plot is shown. Each plot has a unique subwindow,
and each subwindow can only show one plot. You can modify the
arrangement of subwindows within the view.

Display Each plot has a display setting, which is the set of parameters that defines
how to draw the structures in the plot.

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2. Using TonyPlot

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2.1 Starting TonyPlot

TonyPlot can be started independently from a UNIX or Windows command prompt, or from
other simulator tools such as DeckBuild or SPDB. In the case of the simulator tools, starting
TonyPlot is accomplished by selecting the respective command button. The TonyPlot Base
Window (Figure 2-1) appears if files are not immediately loaded when started.

Figure 2-1 TonyPlot Base Window

To start TonyPlot at the UNIX or Windows command prompt enter:

% tonyplot

This starts TonyPlot with no data file loaded and with all options set to their default values.
To load files at the same time TonyPlot starts, just specify the filenames on the command line.
TonyPlot figures out the types of files and displays the data accordingly.

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2.1.1 Command Line Options

When started from a command prompt, TonyPlot supports the following command line
options:

Table 2-1 Command Line Options

Command Line Option Description

-ccd Allows the overlay of results of the DeckBuild extract

max.conc.file output on 2D mesh plots. This is used
in the CCD analysis to determine the potential
maximum/minimum.

-help Displays a list of all command line options that TonyPlot

recognizes.

-mtitle <maintitle> Overrides the default plot main title and set it to maintitle
instead. Use single quotes around <maintitle> if you
wish to use spaces. All files loaded so far (all that precede
this option on the command line) are affected.

-ttitle <subtitle> Overrides the default plot subtitle and set it to subtitle
instead. Use single quotes around <subtitle> if you
wish to use spaces. All files loaded so far (all that precede
this option on the command line) are affected

-nosplash Disables the TonyPlot splash screen.

-nosipc Disables inter-process communication.

-overlay Instructs TonyPlot to overlay all files after the overlay flag.

-set <file> Instructs TonyPlot to load the set filename and restore the
display to the condition that TonyPlot was in when that set
file was created. The set file is applied to all files loaded at
that point. In other words, all files that preceded this option
on the command lines. Files given after this option on the
command line are not affected.

-glinfo Displays information about the OpenGL graphics context.

-measured <file> Loads measured data from <file>.

-jpg <file> Renders all plots to <file> in JPEG format.

-png <file> Renders all plots to <file> in PNG format.

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Command Line Option Description

-geom <width>x<height> Sets the plot area geometry to width x height.

-noexit Causes TonyPlot to not exit after use of the -jpg or -png
flags.

-cuboid_level <level> Plot mesh boxes for the specified level.

-resolution_level <level> Plot the Cartesian mesh inside the mesh boxes.

-resolution_style [1|2|4] Set the mesh boxes line style.

-cut <file> Export a cutplane to <file> (3D only).

-plane [XY|XZ|YZ] Set the cutplane to specified coordinate plane (3D only).

-start <value> Sets the cutplane start value (3D only).

-stop <value> Sets the cutplane stop value (3D only).

-step <value> Sets the cutplane step value (3D only).

-project_vectors [true|false] Project the cutplane vector quantities (3D only).

2.1.1.1 Loading Examples

To load two Atlas log files temp340.log and temp450.log and display the graphs overlaid
in a single plot, enter:

% tonyplot -overlay temp340.log temp450.log

To load a structure file called meshX.str and set its display to a previous set up stored in
mx.setx and then load a file containing IV data in user data format, enter:

% tonyplot meshX.str -set mx.setx iv.data

Note: TonyPlot version 5 and later uses the newer .setx XML file format, but is still able to
read the older, legacy .set files. See section 13.2 Set Files for more information.

2.2 The Base Window

The TonyPlot Base Window contains the area where all plots are displayed. When there are
no plots to display (e.g., when no files have been loaded), a banner page will appear. Along

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the top of the Base Window is the main menu bar that has the basic control menus for
TonyPlot, and the toolbar that displays icons for commonly used actions. Each of these menus
are further explained in the following sections.

2.2.1 File Menu

This menu allows you to access file control operations. These operations consist of loading
structures, overlaying structures, saving data, set file control, image export, printing,
production mode, structure information, and exiting from TonyPlot.

Table 2-2 File Menu

Item Description

This action is used to load structures and data files.

Open…

This can be used to overlay structures onto the current plot.

Overlay…

This allows you to create data files from plots. TonyPlot supports saving from
Cross Section plots, XY GRAPH plots, and 3D Mesh plots.
Save As…

Loads a Set File from disk. The Set File specifies user applied attributes, such as
contour drawing for a given plot.
Load Set File…

Saves a Set File to disk. The Set File specifies user applied attributes, such as
contour drawing for a given plot.
Save Set File…

The Export Image dialog is used to save plots to the system clipboard, or to image
files on disk.
Export Image…

This allows you to print the currently selected plots, one per page. You can print
on a large variety of paper sizes at full printer resolution.

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Item Description

Print…

When used with VWF, TonyPlot provides powerful Production Mode

capabilities. Once you select this option, these features remain active.
Production Mode

This displays information about the current plot, such as bias info and region info.
If no plot is currently displayed, TonyPlot will display information about the
OpenGL display context provided by the graphics card driver.
Info

Recent Files This displays a list of recently opened files. Select a file from the list to load it.

This removes all plots, structures and subwindows, and quits TonyPlot.

Exit

2.2.2 Edit Menu

The Edit menu provides control over the current view using operations that affect groups of
plots as described below. Some items on this menu may be inactive (grayed out). This occurs
when the operation is not applicable to the current group of selected plots.

Table 2-3 Edit Menu

Item Description

This will undo the last action taken, reverting the plot to its previous state.

Undo

This will redo the last action that was undone.

Redo

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Item Description

This will undo all previous actions, leaving the plot the same as when it was
first loaded.
Undo All

This will redo all edits that had previously been undone.

Redo All

This will overlay all currently selected plots. Note that the plots must be of the
same type to overlay, such as all Mesh 2D, or all XY Graph.
Make Overlay

This will split the currently selected overlay plots back into their original base
plots.
Split Overlay

This requires you to have at least two compatible plots selected. When chosen,
this option will create a new plot of the differences in the selected plots.
Plot Difference

This can be used to delete certain selected objects from the scene, such as
Rulers or Isosurfaces. Applies to 3D Mesh plots only.
Delete

Sets the visibility of the selected region to hidden. Applies to 3D Mesh plots
only.
Hide

Sets the visibility of the selected region to shown. Applies to 3D Mesh plots
only.
Show

Sets the opacity of the selected region to opaque. Applies to 3D Mesh plots
only.
Opaque

Sets the opacity of the selected region to transparent. Applies to 3D Mesh plots
only.
Transparent

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Item Description

Functions allow you to further customize the output that can be produced and
to extend the amount of data that can be plotted without needing further
simulation runs and large data files. TonyPlot allows you to create functions
Functions… for use with XY Graph or 2D Mesh plots. See Section 2.8 Functions for more
information.

This function gives you the ability to shift one or more curves in an XY Graph
plot. You can shift the curve on both the X and Y axes.
Shift Coordinates…

This function allows you to perform mathematical operations between

multiple selected 2D Mesh quantities. The meshes must be identical to
perform an operation.
Transform 2D Mesh…

This function allows you to perform mathematical operations between

multiple selected XY Graph curves.
Transform XYG…

The Preferences dialog is used to customize and manage TonyPlot’s many

preference settings. See Preferences for more information.
Preferences…

2.2.3 View Menu

The View menu provides control over selected plots. The items on the menu can operate on
many selected plots of the same type. If plots of different types are selected, only those with
the same type as the first selected plot are affected.

Table 2-4 View Menu

Item Description

Selecting this action returns the structure to its initial location and size.

Zoom Full

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Item Description

Selecting this action performs an incremental zoom in on the structure.

Zoom In

Selecting this action performs an incremental zoom out on the structure.

Zoom Out

Selecting this action performs anisotropic scaling of the axes such that the axis
aligned bounding box of the structure becomes a unit cube.
Normalize

This allows you to specify plot parameters that are independent on the data and
which do not fall into the category of display settings. For example, titles and axis
ranges.
Annotation…

This allows you to change the names assigned to overlay plots. See Overlays for
details about overlays.
Level Names…

The Show From option has six sub-options: Top, Bottom, Front, Back, Left, and
Right. Each of these sub-options moves the view point to display the structure
Show From from the selected position.

Show regions as solid (filled) areas.

Solid

Show only the mesh lines of regions.

Meshed

Show only the sharp edges of regions.

Edges

This is a combination of Solid and Meshed modes.

Solid and Meshed

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Item Description

Show only the vertices of regions.

Point Cloud

Show regions using the color assigned to the region material.

Materials

Show regions using a color assigned to each region in the data.

Regions

Shows regions in colors representing a selected Quantity value.

Contours

Shows surfaces that represent points of a constant value within the data.

Isosurfaces

Shows ray traces within the data.

Rays

Shows arrows representing vector quantities with the data.

Vectors

Opens the Display dialog for 1D/2D Plots or 3D Mesh Plots. See 2D Mesh Plot
Display or 3D Mesh Plot Display for more information.
Display…

Moves focus to the next plot subwindow.

Next Page

Moves focus to the previous plot subwindow.

Previous Page

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2.2.4 Tools Menu

As well as displaying information contained in structures, TonyPlot can examine that
information in a variety of ways. Each method of examining the data is called a Tool. The
Tools menu shows all the tools available. The Tools menu may show some unavailable items.
This is because the tool cannot be applied to the current set of selected plots. For example, the
HP4145 Emulator tool only works with Graph plots so it is unavailable if no Graph plot
exists and is selected. The following provides brief descriptions of the tools.

Table 2-5 Tools Menu

Item Description

The Cut Line tool is used to create 1D cross section plots from arbitrary positions
within a 2D structure.
Cut Line…

The Cut Plane tool is used to create 2D slices through a 3D structure. The
resulting slices can be viewed as 2D mesh plots (see 2D Mesh Plot Display), or
used as inputs to a 2D device simulator such as Atlas.
Cut Plane…

The Object Browser provides a quick way of setting many different properties
that define how a plot is drawn. Selecting this item will toggle the Object
Browser state between shown and hidden.
Object Browser…

The Markers tool is used to create labels or markers on a 3D mesh plot. A marker
consists of a small dot at a specified (X, Y, Z) coordinate, a line, and a text label.
Markers…

The Probe tool can be used to examine the geometry and impurity data of a 2D
or 3D Mesh.
Probe…

The Ruler tool can be used on any type of plot. It provides coordinate geometry
information of any line drawn over a structure.
Ruler…

Labels are used to add arbitrary notes and informative text to any plot. These
labels can be drawn with leader arrows or can be free standing.
Labels…

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Item Description

The Movie tool allows you to combine a group of plots into an animated
sequence, which can be viewed in playback like a slideshow.
Movie…

The HP4145 Emulator is available for any Graph plot. Only one plot, however,
can be used with the emulator at any one time.
HP-4145…

The Integrate tool is used to measure the area under a single plot curve or the
area between two curves.
Integrate…

The Poisson Solver performs an electrical simulation with the 1D structure, and
calculates profiles for a set of electrical quantities.
Poisson Solver…

Tracers are used to illustrate the path of vector fields within 2D Mesh structures.
They are drawn as small markers, which can be positioned anywhere inside a
vector field, and are then animated by TonyPlot to show field strength and
Tracers…
direction.

2.2.5 Production Menu

This menu becomes available when you use TonyPlot with VWF and you enable the
Production Mode. It contains two groups of options. The first group is a list of all the main
Production Mode features. The second group allows direct access to some parameter editing
dialogs used in Production Mode. See Legacy VWF Production Mode for a full description
of these advanced topics.

Table 2-6 Production Menu

Item Description

Interactive… This allows interactive user control over regression model parameters to
study the effects on the response surface.

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Item Description

Failure Analysis… Failure Analysis predicts the most likely cause of failure in a production
situation, given the characteristics of the input parameters and the failed
condition.

Calibration… The Calibration tool is used to calibrate model parameters. This tool will
vary model parameters to best fit a set of measured data points.

Synthesis… After a set of outputs required from a production environment is given, this
feature calculates the best set of inputs that should be used to achieve that
goal.

Yield Analysis… Yield Analysis is used to predict the characteristics of output yield from a
production situation from known experimental data.

Input Parameter Ranges… As RSM data is loaded into TonyPlot, a record is kept of the greatest range
of each input parameter.The range and nominal value of any input can be
changed by using the Input Parameter Ranges dialog.

Input Distributions… As RSMs are loaded into TonyPlot, a default distribution is assigned to
each one. Using this data, TonyPlot can simulate real-life input values by
sampling data with the given distribution parameters. To alter the
distributions for any input, use the Input Distribution dialog.

SPC Limits… Each output parameter used in Production mode has a set of Statistical
Process Control (SPC) parameters, which can be used to monitor the value
of some measured value. The SPC Limits dialog can be used to add or
modify SPC Limit values for any output.

Experimental Results… Each output parameter modeled by an RSM has an associated experimental
value that was measured when the process input parameters were set to
their nominal values. Experimental Results is used if no experimental
value is given for an output, or if one needs to be changed.

Measured Data… Loads a file containing measured point information.

Optimizer Setup… The Synthesis mode of the Production dialog provides two synthesis
methods. One method is the Levenberg-Marquardt optimizer. The
parameters for the Levenberg-Marquardt optimizer can be changed in the
Optimizer Setup dialog.

ASA Setup… The parameters for Adaptive Simulated Annealing (ASA) can be changed
in the ASA Setup dialog.

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2.2.6 Window Menu

The Window menu provides access to window related functions, such as duplicating, closing,
and tile management.

Table 2-7 Window Menu

Item Description

Creates duplicate copies of the selected plots.

Duplicate

Closes the selected plots and discards the data from memory.

Close

Selects all plots.

Select All

Tile Vertically Arrange the plot subwindows as vertical tiles.

Tile Horizontally Arrange the plot subwindows as horizontal tiles.

Stack Stack the plot subwindows to maximize the viewing area for the first plot.

Thumb Stack Stack the plot subwindows and display thumbnail images for navigation between
plots.

2.2.7 Help Menu

The Help menu provides access to the online assistance available in TonyPlot.

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Table 2-8 Help Menu

Item Description

This shows the latest TonyPlot user’s manual in PDF format.

TonyPlot Help

This shows the latest TonyPlot release notes in PDF format.

Release Notes

This shows a dialog notice displaying the version number of the program and its
component libraries.
About TonyPlot

2.3 Plot Control

Each plot has an associated group of parameters, collectively known as a display setting, that
determine how to draw the plot in its subwindow. These parameters are independent from the
structure(s) that are represented in the plot, so you can apply them to a number of other
structures to make data comparison easier. A plot is controlled using a combination of the
following techniques.

• Plot Selection
• Pointer Zooming
• Key Commands
• Command Stream
• Plot Menu

2.3.1 Plot Selection

To control plots and change their display parameters, select one or more plots. When the view
consists of only one plot, it is always selected. When the view consists of multiple plots, you
must select those to be used. To select a single plot, click on the plot using either the left or
middle mouse button. To select additional plots, hold the Ctrl key while clicking either the left
or middle mouse buttons. Alternatively, all the plots can be selected at once by selecting
Window→Select All.

When multiple plots are selected, the plots that are currently selected are indicated with an
orange triangular earmark in the top right corner of the plot. The first selected plot, or focus
plot, is indicated by a thin blue border around the plot.

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2.3.2 Pointer Zooming (1D/2D)

To zoom in on a specific portion of a plot, you can use a method known as pointer zooming.
By dragging the pointer across the plot, a dynamic box can be drawn around the area of
interest. If you hold down the Shift key while dragging the mouse, you can also move the start
point of the rectangle.

When you release the mouse button, the plot will be redrawn so that the area within the box
fills the whole subwindow.

Note: All selected plots of the same type are zoomed in by the same relative coordinate of the
zoom rectangle.

2.3.3 Key Commands

Key commands are available for some plot control. Point at a plot with the mouse and press
one of the following keys:

• B (bias) display bias information for structure from device simulation.

• G (grid toggle) turns the axis grid on or off.
• H (help) display a list of these key commands.
• J (junk data) prints a list of all “junk data” attached to the plot structures.
• R (region data) prints all attached region data for all structures in the plot.
• V (value label) adds a spot height value label to contour plot (RSM 2D plots only)

2.3.4 3D RSM & VWF Plot Control

3D RSM and VWF plots can be rotated and scaled, but cannot be zoomed.

To rotate an RSM or VWF 3D plot, hold down the left mouse button and drag the pointer left
and right over the plot. A wire-frame bounding cube will be drawn around the plot and rotates
as the mouse is moved. Position this cube to the desired viewing angle, and release the mouse
button. The plot is redrawn from the new view point.

To scale an RSM or VWF 3D plot, hold down the Shift key and the left mouse button. Then,
drag the pointer up and down over the plot. A wire-frame bounding cube is drawn around the
plot and grows or shrinks as the mouse is moved. Scale this cube to the desired size, and
release the mouse button. The plot is redrawn at the new size.

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2.4 Legends
Data is of little use without a legend to explain its meaning. TonyPlot uses legends in a variety
of situations to explain how the information in a plot is being represented. Each legend is
drawn in a default position in a plot that does not overlap with any other legend. You can
change these default positions, if necessary. You can also drag legends to any location in the
window. In an overlay plot, a legend applies to all levels, since the data displayed on each
level is the same. An overlay plot also has its own “level” legend to indicate the different
levels in the plot.

2.4.1 Legend Types

• Contours: This indicates the value range for a given color when using filled contours.
This legend also indicates the value of a color when using line contours. Up to three of
these legends may appear at once, since a 2D plot may contain up to three sets of contours.
Contour legends show only whole integer values when the quantity is contoured on a log
scale.
• Regions: This can be displayed on 2D mesh plots and Cross section plots. The region
legend shows region-to-color relationships. Usually, the regions are represented by the
materials that they are made of and the legend shows these materials and their colors.
• Graphs: Whenever graph lines are drawn, there is a graph legend. This indicates the
different quantities shown by each graph line. These appear, for example, in XY Graph
plots and Cross Section plots.
• Vectors: This indicates the size of arrows and magnitudes that they represent: largest,
smallest, and halfway between. You can judge the magnitude of other arrows by
comparing to this legend.
• Levels: To distinguish data between levels in an overlay plot, a level legend appears
whenever there is more than one level. These show the level-to-color relationship for that
plot. By default, overlay levels are distinguished by the name of the file that was used to
create each level. You can change these names to any other name.

2.4.2 Positioning Legend Boxes

There are two ways to position legend boxes. The first method uses the Legend Options
category of the Preferences dialog. This shows a list of all the types of legends mentioned
above. There are six possible default locations. Optionally, you may use the middle mouse
button to drag the legend to the desired location.

The default locations are set up in such a way that there are no overlapping legends. When
choosing new default locations, be aware of the possibility of overlapping legend boxes. The
settings can be saved as the default settings to be used between sessions.

The second method is to position legend boxes manually. To do this, point to a legend box on
a selected plot. Then, drag the mouse while holding down the middle button. This allows you

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to drag the legend box to any position in the window.

2.4.3 Legend Drawing Styles

There are some TonyPlot preferences that control how to draw legends. These are described
in Preferences but are briefly described here.

• Legend type: This can be transparent or opaque. Transparent legends allow you to see the
plot underneath. Opaque legends overwrite the plot underneath them.

• Function label: When a function is plotted, it can be indicated on the appropriate legend
with either its name or its definition. For example, if Function 1 has been set up as
log(current/10) and you choose Name, the legend will display “Function 1”. If you
choose Definition, the legend will display “log(current/10)”.

2.5 Annotation
The Annotation dialog (Figure 2-2) allows you to specify plot parameters that are independent
on the data, which do not fall into the category of display settings. These are features such as
titles and axis ranges. The titles, axis labels and footers can use Greek characters and math
symbols via special tags. See Appendix C Greek and Math Characters for more information.
The features of a plot that are independent from the type of plot are called annotation features.
To access this dialog, select View→Annotation....

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Figure 2-2 Annotation Dialog

2.5.1 Titles
Each 1D or 2D plot has two titles. TonyPlot assigns these titles by default. You can change
them if required. The current main title and current subtitle are displayed in their respective
text fields on the dialog. You can change the titles without having to redraw the plot(s)

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completely by changing the title and pressing the Apply button. This leaves all other items as
is and only the titles are redrawn on the selected set of plots.

Note: If you select Specify, you can change the titles. If Auto is selected, titles cannot be
changed. This allows you to change more than one plot with the Annotation dialog without the
titles on all plots ending up the same.

2.5.2 Show
This item controls features that appear around the edge of the plot. The icons represent, from
left to right, X axis ticks and numbers, Y axis ticks and numbers, grid, X axis label, Y axis
label, and zero lines. The large buttons can be used to invert the plot. For example, reverse the
positive and negative directions of the X or Y axis.

2.5.3 Range
The default ranges on the X and Y axes are calculated to ensure that all of the data from all
structures in the plot can be seen. You can change these values. Selecting Specify rather than
Auto enables the axis control items, allowing you to enter the minimum and maximum values,
as well as the division and number of ticks per division.

When the axis ranges are specifically set and applied to multiple selected plots, all plots are
scaled the same. This allows easy plot comparison of similar data.

2.5.4 Statistics Plots

Some statistics plots do not have the regular range controls as described above. Instead, the
controls allow you to enter user-specified “bin values”, which are used when calculating data
distributions.

When you select a statistics plot and summon the Annotation plot, the range controls include
a choice to allow you to select Auto bins (automatically determined by TonyPlot according to
the data range) or to specify the bin values. When you choose Specify, use the min and max
text fields to enter the minimum and maximum bin values. Then, enter the Number of bins to
be used between these limits. TonyPlot adds each bin value to the scrolling list when you press
the Apply button.

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2.5.5 Axis Labels

The X axis and Y axis labels can be modified. These are only updated on the plot when the
Apply button is clicked on. Once an axis label has been set this way, it is always shown, even
if the quantity represented on the axis is changed. To return to the normal axis label, erase the
user-specified label from this field and click on Apply again.

Note: Cross Section plots generated by the Cutline tool will display an automatic x axis label
if none is entered manually. This automatic title is provided by TonyPlot according to the type
of cutline x axis desired (see Preferences).

2.5.6 Footers
Any 1D or 2D plot can have footer subtitles in the left or right or both corners. No footers are
drawn by default. You can add them with these text fields in this dialog.

2.5.7 Special Characters

Titles, axis labels and footers of 1D and 2D plots may all contain “special characters” if
needed. These allow alternative letters and symbols to be drawn, such as Greek letters, and
superscript numbers.

2.6 Exporting Images

The Export Image dialog (Figure 2-3) is used to save plots to the system clipboard, or to image
files on disk. It allows you to export all currently selected plots, all plots (discrete) or all plots
(composite). If you have more than one plot selected, or have selected “All plots (discrete)”
in the Export drop-down menu, image output files will have an index attached to them, such
as export-1.png, export-2.png, export-3.png, depending on the number of plots
selected.

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Figure 2-3 Export Image Dialog

2.7 Tools
As well as displaying information contained in structures, TonyPlot can examine that
information in a variety of ways. Each method of examining the data is called a Tool.

2.7.1 Object Browser

The Object Browser provides a quick way of setting many different properties that define
how a plot is drawn. Selecting Tools→Object Browser… will toggle the Object Browser
state between shown and hidden. Hiding the Object Browser will allow the plot subwindows
to occupy more screen area.

The Object Browser displays the configurable objects of a plot as a hierarchical tree. When
an object is selected, that object’s properties are displayed as Property, Value pairs in the
table below. Each Value can be edited, and any changes are immediately updated in the plot
drawing.

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Figure 2-4 Object Browser

2.7.2 Cut Line

The Cut Line tool is used on 2D Mesh plots only. It is used to create 1D cross section plots
from arbitrary positions within a 2D structure. The Cut Line tool also has the ability to move
cut lines through a device and watch the profile move and shift as the cut line position updates.
The Cut Line tool also allows these sequences to be combined into a Movie.

The Cut Line tool dialog (Figure 2-5) consists of the following items:

Create: The top section provides different choices for creating cut lines. These choices are
free, vertical, horizontal, chained, interface, and keyboard. Each of these is described below.

• Select: The center portion allows you to choose any cut plane created for manipulation.
This includes shifting and movie making of the cutline.
• Movie: The movie section (displayed when the Make movie button is clicked on) is used
to make a movie from a cut line by repeatedly moving its position.

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Shift Position: You can move a cut plane once created by using these controls, which are
displayed when you click on this button.

Figure 2-5 Cut Line Dialog

2.7.2.1 Creating a Cutline

To create a cut line, select one of the Create options and follow the actions specific to the
mode to define the cross-section.

Note: While dragging, holding down the Shift key causes the start point to move as well as
the end point.

• Free: To define a free cut line, drag the mouse over the source plot to define a line through
the mesh. Releasing the mouse button creates the cross section.
• Vertical: Same as free but dragging is restricted to a vertical direction. Release the mouse
button to create the cross section.
• Horizontal: Same as free but dragging is restricted to a horizontal direction. Release the
mouse button to create the cross section.
• Chained: To create a chained cut line, click on the mouse left button in various places to
create a polygon of chain line segments. To erase to last point placed, use Shift + Left
Click. Press the Return key to create the cross section.
• Interface: To create this type of cut line, click on the mouse left button to place two points
on any interface (region boundary). Use Shift + Left Click to erase to last point placed.
Press Return to see the portion of the interface along which the cross section is calculated.

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If the portion is wrong, press to try other routes. When ready to create to cross section,
press the Return key once more.
• Keyboard: To create a new cut line with exact start and end coordinates, enter the start
and end points into the text fields supplied and click on Create. This creates the new cross
section from the line so defined.

2.7.2.2 Creating From Multiple Plots

If you select more than one mesh plot when a creating cut line, a cross section will be
calculated for each of them, and will generate the appropriate number of new plots. If you
make a cut line from an overlaid mesh plot, the cut line plot generated is also an overlay plot
with each level showing the cut line profile from each level in the mesh plot.

2.7.2.3 Cross Section

The cross section created displays the profile of the quantity that was contoured on the mesh,
or shows a default profile if no contours were drawn. You can control this new plot just like
any other cross section plot. All the quantities that were present in the mesh are also available
in the cross section.

Default titles show the mesh data file from which the cut was made, and show the start and
end positions of the line.

Interface cut lines create an overlay plot from a single mesh plot. Each level in the overlay
represents profiles from one of the materials present at the interface. For example, an interface
cut line taken along an oxide/silicon interface creates an overlay cross section with one level
showing profiles in oxide and the other level showing profiles in silicon.

Any other type of cut line produces an overlay cross section if the source plot was an overlay
plot. In this case, the new cross section contains one level for each level in the mesh plot. For
example, if two meshes alpha and beta are overlaid and a cut line taken, the new cross section
plot contains two levels. The first level contains profiles from alpha. The second level shows
profiles from beta.

2.7.2.4 Deleting
To delete a cut line, delete the cross-section plot. This removes the cutline from the mesh from
which it was created if still present in the view.

2.7.2.5 Shifting
To shift any created cut line (except interface cut lines), click on the Shift Position button. By
using the directional arrows on the Cut Line tool dialog, the cut line position is moved up,
down, left or right.

The amount moved is shown in the Delta text fields, which can be modified. To use the shift

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feature, select the mesh plot that contains the cut line.

2.7.2.6 Movies
You can create a cut line movie automatically from the Cut Line Tool dialog. It is created
simply by moving the cut line position many times and sequencing the resulting cross sections.
To create a movie, define the step size and number of steps, and define whether to move the
cross section horizontally or vertically. Note that this does not move the actual position of the
cut line on the plot as shifting does. To use the movie feature, select the mesh plot that contains
the cut line.

2.7.3 Cut Plane

The cutplane tool is used to create 2D slices through a 3D structure. The resulting slices can
be viewed as 2D mesh plots (see 2D Mesh Plot Display), or used as inputs to a 2D device
simulator such as Atlas.

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Figure 2-6 Cutplane Dialog

2.7.3.1 Creating a Cutplane

The Cutplane Dialog is shown in Figure 2-6. Using the tabbed controls, the slicing plane can
be expressed as a position on one of the coordinate planes, by pan-pitch-elevation, or by
specifying three points on the plane.

• Coordinate Planes: Allows slicing in the XY, XZ and YZ planes. The position line-edit
and slider controls specify the absolute position along the axis normal to the chosen plane.
• Pan/Pitch/Elevation: The pan and pitch angles are used to orient a normal to the plane,
and the elevation specifies a relative distance along the normal.
• 3-Points: Three points can be used to specify the slicing plane. The entered coordinates
must be unique and must not be collinear.

While positioning the cutplane, you can monitor the positioning continuously as it changes or
update it after it has been moved. To do this, toggle the Interactive Drag. When Interactive

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Drag is checked, the cutplane preview will update continuously when the slider controls are
adjusted.

Note: When a structure has many mesh vertices, selecting Interactive Drag can cause the
controls to lag and become unresponsive while TonyPlot repeatedly re-computes the 2D slice.

2.7.3.2 Options
TonyPlot allows you to control how 3D vector quantities are sliced onto the 2D cutplane.
When Project Vector Quantities is checked, vector quantities are mapped onto the XY plane.

The top half of the dialog shows the various settings to adjust the cutplane, while the bottom
half shows a preview of the extracted cutplane.

2.7.3.3 Axes Settings

The orientation of the axes on the 2D cutplane can be adjusted using the Axes Settings.
Checking Reverse X inverts the X-axis. Likewise, Reverse Y inverts the Y-axis, and
Swap X-Y swaps the X- and Y-axes.

2.7.3.4 Export Slice

Clicking the Slice… button brings up the Export Slice dialog shown in Figure 2-7. Using the
Export Settings, the 2D cutplane slice can be displayed in a new plot subwindow and/or saved
to a file on disk.

The controls in the Slice Settings area optionally allow multiple, uniformly spaced, cutplane
slices to be created in a single action. The resulting slices will all be parallel to the slice defined
in the Cutplane Dialog.

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Figure 2-7 Export Slice Dialog

2.7.4 Markers
The Markers tool is used to create labels or markers on a 3D mesh plot. A marker consists of
a small dot at a specified (X, Y, Z) coordinate, a line, and a text label. The positions of the line
end point and the label are determined automatically by projecting a ray from the center of the
structure, through the marker coordinate.

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Figure 2-8 Markers Dialog

2.7.5 Probe
The Probe tool allows you to probe information about any point within a 2D or 3D Mesh.

2.7.5.1 2D Mesh
The Probe tool for 2D Meshes provides both geometry and impurity data and can be used to
find specified structural features. This can be useful for debugging simulator output as well as
for general use. To use the Probe, select one or more 2D Mesh plots and choose
Tools→Probe…. Click anywhere within a structure to activate the probe. A crosshair marker
indicated the last position clicked. Measurements are then displayed in the Probe dialog box
as shown in Figure 2-9.

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Figure 2-9 Probe Dialog

• Probe Coordinates: The panel at the top of the tool dialog box shows the position where
the probe was last placed.
• Geometry Info: The second panel shows information about the triangle in which the
probe was positioned. The internal index is given for the triangle itself and for each of its
three vertices. The actual coordinates of the corners are also displayed.

2.7.5.2 3D Mesh
The Probe tool for 3D Meshes provides both geometry and impurity data. To probe a point,
click on the Probe button in the Toolbar, or select Tools→Probe..., then click on the point
you wish to examine. When you click on the structure, a probe marker sphere appears at the
selected location on the structure. The Probe View (Figure 2-10) is then updated with the
relevant information. If Snap is checked, the probe position is snapped to that of the mesh
vertex nearest to the point that was clicked.

The Probe View will display the probe marker sphere and the picked element (tetrahedron,
prism, triangle or quad), with node identifiers drawn at each of the vertices. For each node,
quantity values are displayed. The exact position of the probe is also shown with its material
and region identification. The ellipsis button on the Position line allows a probe position to be
manually entered, for precise positioning at a point of interest.

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Figure 2-10 Probe View Dialog

2.7.6 Ruler
The Ruler tool can be used on any type of plot. It provides coordinate geometry information
of any line drawn over a structure.

2.7.6.1 1D and 2D
To use the Ruler (Figure 2-11), select the plots in which measurements are to be taken and
choose Tools→Ruler.... This item is only active when at least one plot is selected.

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Figure 2-11 Ruler Dialog

The ruler position is defined by dragging the pointer across the plot to define a box and line.
Holding the Shift key down while dragging the pointer moves the start and the end points of
the ruler. The Ruler dialog shows the following information:

• Start: The coordinate of the start of the ruler.

• End: The coordinate of the end of the ruler.
• Delta: The vertical and horizontal distances between the start and end points.
• Intercept: The intercept point on the X and Y axes. The terms X axis and Y axis refer to
the lines y=0 and x=0 respectively, and not the axes along plot edges.
• Length: The distance from the start point to the end point.
• Angle: The angle of the end point taken from the start point. 0 is towards positive X, -90
is negative Y, +90 towards positive Y, and ±180 is towards negative X.
• Slope: The gradient of the ruler line.
• Inv. Slope: The inverse gradient (1 / slope).
• Type: Two types of ruler are available. The default ruler is called a “temporary” ruler
because once the mouse button is release, the lines are removed from the plot (but the
values remain displayed in the Tool dialog). A “permanent” ruler, however, remains in the
plot. The temporary ruler lines are drawn in the plot window, and some of the values from
the dialog are also added at relevant places. This permanent ruler remains on the plot until
you place the ruler once more. Switching the ruler type back to “temporary” also removes

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a permanent ruler.

To return to normal use of the plot window, close the Ruler dialog.

2.7.6.2 3D
The Ruler Dialog for 3D Mesh Plots (Figure 2-12) is used to obtain information about
quantities within a 3D mesh structure. To use the ruler, first select Tools→Ruler.... Press and
hold the CTRL key and the left mouse button where you wish to start. Then, drag the mouse
and release the button where you wish to stop.

The Start and End XYZ positions with the difference between each respective pair, Delta,
displayed. The length of the line, Length, is also shown. Any quantity values present in the
structure are also displayed for the Start and End points, along with their difference.

Rulers can be made permanent by setting the Anchor ruler switch. To anchor a ruler, check
the Anchor Ruler box before you draw the ruler. A ruler identifier will be created. You can
anchor multiple rulers in a structure, each of which will have a unique identifier. You can
delete each ruler separately or all at once.

If Snap to vertex is checked, TonyPlot will snap the start and end points to the mesh vertex
nearest to the mouse pointer when the ruler is placed. If Snap to vertex is unchecked, the start
and end points will be interpolated.

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Figure 2-12 Ruler Dialog (3D)

2.7.7 Labels
Labels are used to add arbitrary notes and informative text to any 1D or 2D plot. For 3D plots,
see the Markers tool. Labels can be drawn with leader arrows or can be free standing. The
Labels dialog (Figure 2-13) is used to add, change, and delete these labels. To access this
dialog, select Plot→Labels. As with the Annotation dialog, the Labels dialog is the same for
all plot types. The difference, however, is that only the first selected plot is affected. Each plot
has a list of labels associated with it. Each label has a position in the plot to which it belongs.
The labels that belong to the selected plot are shown in the list on the Labels dialog. Labels
can use Greek characters and math symbols via special tags. See Appendix C Greek and Math
Characters for more information.

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Figure 2-13 Labels Dialog

The following describes each of the items on the dialog.

• List of labels: This list contains all the labels that have been defined for the selected plot.
• Label: This shows the text of the selected label and is used to enter new text when creating
or changing a label.
• Arrow: Checking this box will add an arrowhead to the end of the label leader line.
• Create: Clicking on this button creates a new label with the text shown in the Label text
field. If the field is empty, the new label is created with its text set to New label. The label
attributes are set from the state of the attribute items (e.g., arrow and size). You can have
more than one label with identical text.
• Update: This replaces the selected label with new text or attributes or both. Use to change
the label attributes, such as color and size.
• Delete: Clicking on this button deletes the label that is selected in the list. The label is
removed from the plot if it has been placed.
• Text Size: This controls the size of the letters in the label. Three sizes are possible: Small,
Medium, and Large.
• Text Direction: This determines the direction of the text. The normal choice is Right,
which draws regular text. Up and Down draw text rotated by 90° upwards or downwards.
• Line: When placing a label with a leader line, the leader line can be forced to snap to
angles of 45°. This is a “constrained” leader line. A “Free” leader line can be drawn at any

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angle.
• Color: A color palette is provided for selection of the label color. This is used for both the
text and the leader line.

2.7.7.1 Placing Labels

Labels are placed on the selected plot in one of two ways. One, by clicking to place a simple
text-only label. Two, by dragging to place a label with leader line (see Figure 2-14).

Figure 2-14 Plot with Labels Added

If a leader label is being placed, the start of the drag is where the text will appear, and the end
of the drag will be the end of leader. In other words, the position to which the leader points.
As with any drag operation, holding down the Shift key moves the start and the end points of
the drag. When the drag is done, the label text is positioned correctly relative to the direction
of the leader line. For example, if the leader points down and to the right, the text will be
placed so that the leader starts from the bottom right corner of the text.

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If you place a simple text-only label, the cursor indicates how the text is positioned by pointing
to a corner. For example, if the cursor points up and right, the text will be placed so that the
clicked point is in the bottom left of the text. You can change the cursor to obtain different
alignments by pressing the P key on the keyboard. Four positions are available.

To move a label, repeat the placing procedure.

2.7.7.2 Special Labels

In some cases, TonyPlot generates labels automatically. If text appears on a plot, it is usually
a label placed by TonyPlot that can be controlled with the regular label dialog as explained
above. Some examples of special labels are:

• Integration Tool: This tool (see Integrate) adds a label to show the integrated x-range and
area. Although placed in a default position, you can customize the label attributes with the
Labels dialog.
• 2D RSM Plots: Pressing the ‘V’ key in a 2D RSM plot adds a spot height label to the plot.
The label can be moved but the height does not change, so the label value would then be
invalid.
• Electrode Names: 2D Mesh structures from Athena or Atlas can contain electrode
information. When electrode names are plotted, they appear as labels. By default, they are
positioned over the appropriate electrode but can be moved if desired.

2.7.8 Movie
The Movie tool allows you to combine a group of plots into an animated sequence, which can
be viewed in playback like a slideshow. To create a movie, you must select the slides. To do
this, create a group of plots in the main TonyPlot view, select this group, and choose Movie....
This item is active when you select at least two plots. You will notice a delay while TonyPlot
creates the movie sequence. When complete, the Movie dialog (Figure 2-15) appears, showing
the first frame of the movie and a group of control items.

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Figure 2-15 Movie Dialog

You can change the size of Movie dialog. This is explained in Preferences. The control items
are:

• Video controls: The five play buttons perform the following functions: rewind to first
frame, play backwards, stop at current frame, play forwards, and skip to last frame.
• Repeat: This is the item marked with a looping arrow. This repeats playback in an endless
cycle in the direction determined by the play button pressed.
• Speed: Three playback speeds are available. To see playback speed, select the new speed
and press a play button.
• Export: This item allows you to export the current movie as an animated GIF.

Note: Only one Movie tool can be displayed at once.

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TonyPlot can create automatic movie sequences from cutlines without repetitive use of the
Cutline and Movie tools.

2.7.9 HP4145
The HP4145 Emulator is available for any graph plot. Only one plot, however, can be used
with the emulator at any one time. When you select this option (Tools→HP4145), the first
selected graph plot changes to mimic the output of the HP4145. The HP4145 dialog (Figure
2-16) appears containing controls that resemble the functions of the HP4145.

Figure 2-16 HP4145 Dialog

The controls of the HP4145 dialog are:

• Cursors: The control section allows manipulation of cursors represented as plus-sign

shaped crosshairs. The buttons allow you to create new cursors, to delete existing ones, to

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select between existing cursors (the current cursor is shown in bold), and to toggle the size
of the current cursor between small and full screen. The four directional buttons move the
current cursor. The central button moves the current cursor directly to the marker
• Marker: The marker can be moved along its current graph line by moving the dial. To
move the dial counterclockwise, click at the left half of the button. To move the dial
clockwise, clicking at the right half of the button. Skip moves the marker from one curve
to the next, cycling back to the first curve when the last one has been reached.
• Options: Several options can be accessed from the middle panel. Line 1 and Line 2
toggles a line that joins the marker and cursor. Various geometry information about the
lines is displayed on the dialog and on the legend. Reticule toggles the plot grid (the same
grid that is shown using the Annotation dialog). Legend toggles the HP4145 legend. OK
closes the HP4145 emulator and restores the plot to normal.
• Information: The lower panel gives position information for the marker and current
cursor, and geometry information for both lines.

2.7.10 Integrate
The Integrate tool (Figure 2-17) allows you to measure the area under a single plot curve or
the area between two curves. The X interval over which the area is calculated can be set by
positioning marker lines at certain locations along the X axis. The Integration tool works with
both XY Graph and Cross Section plots.

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Figure 2-17 Integrate Dialog

2.7.10.1 Features
This list shows all the points of interest on the curve in the plot used. It shows all minima and
maxima, as well as the start and end X values and positions of all material interfaces. The
marker lines, which are used to define the X interval for the integration, can be moved to any
of these features, using the arrow buttons or by using the mouse. You can also use the mouse
pointer to add more features. See Plot Control for more information.

2.7.10.2 Options
You can toggle some options when using the Integrate tool. The following options appear in
a line under the scrolling list.

• Draw area fills the area under/between the curve(s) with a hatched pattern when turned
on. If turned off, no area is drawn, but it is still calculated.
• Absolute value uses positive areas only, taking the absolute value of all Y axis values. If
turned off, areas below the Y=0 line have a negative area.
• Use log of Y calculates the area using log values of Y, rather than the true linear value.
This option is independent of the method used to draw the Y-axis. In other words, you can
draw a curve on a log Y-axis scale but calculate the area on a linear scale.
• Convert X um to cm converts from microns to centimeters. X-axis quantities are
sometimes plotted in microns (e.g., cross section plots). Y-axis quantities are often given

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in terms of cm or cm3. Use this option to calculate the area with the X-axis values
converted from microns to cm.
• Results continually displays the current area and interval on the right.
• Line control positions the two lines that specify the interval used for area calculation.
These lines can be moved with the buttons marked with left and right arrows. The lines
can be placed at any of the features that are shown in the list. You can move a line directly
to any feature by choosing either Move RED line to selected or Move BLUE line to
selected from the list. This causes the appropriate line to move to the feature currently
selected in the list.
• Add Label creates a label in the plot with the integral information. Pressing the button
multiple times updates the label with the latest Real and Interval values.

2.7.10.3 Using the Mouse and Pointer

The mouse pointer can be used to move either of the marker lines, and to add new features at
any point along the X-axis. To move a line, click anywhere near one of the lines and drag the
mouse. The line moves to the feature nearest to the pointer position. This method allows you
to “pick up” a line, move it to a new position, and put it back down.

You can also create new features. To do this, hold down the Shift key and repeat the procedure
above. This time, the marker line can be moved to any X location. When you release the mouse
button, add a new feature at the current line position and move the line to it.

2.7.11 Poisson Solver

The Poisson Solver (Figure 2-18) performs an electrical simulation with the 1D structure, and
calculates profiles for a set of electrical quantities.

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Figure 2-18 Poisson Solver Dialog

The following controls are available:

• Layers and bias: The Poisson Solver dialog shows a scrolling list of all electrical layers
within a structure. The layers are areas of the same material. Silicon areas are divided up
into n-type and p-type silicon. Along with each layer is shown a bias (in Volts), which is
applied to that layer, when the solver is used.
• Marker: The Marker control can be used to move the marker arrow from one layer to the
next. The marker arrow is used to select layers for applying an external bias.
• Setup...: Click on this button to open the Poisson Solver options panel. These options
control the solver.
• Solve: Click on this button to perform the simulation with the current options and biases.

When the solution is complete, a plot of potential is displayed. Other solutions can be plotted
by using the Plot display dialog. The following list of quantities solved is:

• Electron QFL
• Hole QFL
• Electron density
• Hole density
• Intrinsic conc. (nio)

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• Potential
• Electron (e-) Mobility
• Hole (h+) Mobility
• Electric Field
• Electrical Conductivity

The Poisson Solver tool provides a built-in 1D electrical solver, which can be used to perform
basic simulations of 1D structures. When it is used, the display of the first selected 1D plot
shows all electrical “layers” in the structure and one profile (usually “net doping”). An arrow
is drawn at the first layer.

2.7.11.1 Applying A Bias To A Layer

To apply an external bias to any layer, move the marker to any layer that is not an insulator.
This can be done either with the left and right buttons on the dialog, or by using the mouse
pointer to “drag” the arrow into a layer.

The current layer is selected in the scrolling list on the dialog. The bias can then be specified
by typing the value into the field marked Bias on the dialog. Press Return to update the list.
For p-type silicon, the bias is converted to a negative value automatically, and to a positive
value for n-type. When you set all the desired biases, initiate the solver by clicking on the
Solve button.

2.7.11.2 Setup Panel

To access the Poisson Solver Setup panel, click on the Setup... button on the Poisson Solver
dialog. The following controls are available:

• Display Solved Quantities: This list shows all the quantities that the solver calculates.
Only the ones selected, however, are displayed when the solution in complete. All other
quantities can be accessed later from the Plot Display dialog. If other quantities are to be
displayed automatically, choose them here. More than one can be selected. This does not
affect which quantities are calculated, only the ones that are displayed by default.
• Temperature: This specifies the temperature to be used for the simulation or use the
automatic default.
• FE Mobility: This activates the field effect mobility option for the simulation.
• Work function: Enter a specific work function with this option or use the default value.
• SOI Device: This simulates a device with Silicon On Insulator (SOI) structure layers.

2.7.12 Tracers
Tracers are used to illustrate the path of vector fields within 2D Mesh structures. They are

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drawn as small markers, which can be positioned anywhere inside a vector field, and are then
animated by TonyPlot to show field strength and direction. The Tracers dialog (Figure 2-19)
is used to control the positioning and animation of the markers.

Figure 2-19 Tracers Dialog

• Quantity: This selects the vector quantity that the tracers should follow. These are the
same quantities that are shown on the Vectors dialog (accessed from the Plot Display
dialog), but the vectors do not have to be displayed for the tracers to work.
• Tracers placed: This indicates the number of tracers that have been placed on the plot,
and the number of tracers available.
• Animation control: Three video-like controls are provided to control the animation of the
markers. These controls do the following: return all markers to their starting points, starts
the markers, and stops them at their current positions.
• Speed: There are three speeds available for the animation: Slow, Medium, and Fast. To
change the speed while the markers are moving, press Speed again.
• Calculate: When you have placed all the markers you wish to animate, click on the
Calculate button. TonyPlot then traces out the path of each marker. Progress is reported
in the lower left corner of the main TonyPlot frame. When all the paths have been
calculated, the markers can be animated. Markers can be placed anywhere within a vector
field by clicking at the position where you want a marker to start. The counter on the dialog
indicates how many have been placed. To remove a marker, press the Shift key and click
near to the marker to remove. The one nearest the pointer is erased, and if its path has been
drawn that too is erased.
• Setup...: Press this button to see the small panel of setup options available in the Tracers
tool. See the following section.

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2.7.12.1 Setup
Clicking on the Setup... button to reveal the options panel on the Tracer tool dialog

• Color: All markers placed use the currently selected color. Different markers can have
different colors by changing the color for each marker placed. Tracer path lines are drawn
in the same color as the marker that follows it.
• Max. jump: This value controls the “granularity” of the path calculation. Higher numbers
reduce the calculation time but give only approximate paths with long jumps. Smaller
numbers produce more accurate paths but take longer to calculate.
• Lines: When turned on, lines are drawn along the tracer paths as the paths are calculated.
If turned off, the path is not shown but the tracers still follow the same route.
• Cycle: Three cycle modes are available which control the action of markers when they
reach the ends of their paths. The first choice stops all tracers as soon as one tracer reached
the end. The second choice stops each marker as it reaches the end of its own path. The
third choice makes each tracer move in a loop, returning to its start point each time it
reaches the end.

2.8 Functions
Functions allow you to further customize the output that can be produced and to extend the
amount of data that can be plotted without needing further simulation runs and large data files.
TonyPlot allows you to create functions for use with XY Graph or 2D Mesh plots. It also uses
an advanced mathematical parser to calculate function results from math expressions.

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Figure 2-20 Functions Dialog

2.8.1 Use Of Functions

To use functions, first define a function in terms of quantity names (e.g. Boron, Drain bias,
and Temperature), constants, and operators. Then, plot the function in the desired plot, by
selecting the function name in the quantities list in either the XY Graph or Contours dialog.
Using scientific notation in functions (e.g. le23) requires the mantissa to have a decimal point
(e.g. 1.0e23), otherwise it does not work.

The Functions dialog can be displayed from the main Edit menu. It can also be displayed from
the buttons marked Functions... that appears in the XY Graph Display dialog, and the
Contours dialog.

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2.8.2 Defining Functions

The Functions dialog is split into two sections. The top section allows function macros to be
set up. The lower section is where the functions are defined. You can define two types of
functions.

• Graph functions: These are used on XY Graph plots only and are defined in terms of graph
(electrical) quantities.
• Impurity functions: These functions can be used in Mesh plots and Cross Section plots
only and are defined in terms of impurities.

It is possible to nest functions by including the name of one function as a variable in another.

2.8.3 Plotting
When choosing a function to plot, TonyPlot evaluates the results of the function at each data
point and stores these values in the data attached to each plot level. Then, the function can be
drawn along with any other quantity also selected.

2.8.3.1 Example
Suppose a Master file contains values for the four dopant impurities boron, arsenic,
phosphorus and antimony. We can use a function to compute the net doping by entering the
following as Function 1.

boron – arsenic – phosphorus - antimony

Most plots of net doping, however, are shown on log scales (this is the default for TonyPlot)
so you need to calculate the log of this sum. Make sure the total is positive beforehand, so use
abs() to get the absolute value:

log10(abs(boron – arsenic – phosphorus - antimony))

The data for each dopant, however, is not useful below values of around 1e12. TonyPlot
usually does not show values below this level. But with a function, it cannot tell that this is
needed.

Therefore, use the max() operator to keep the function result within a useful range:

max(log10(abs(boron – arsenic – phosphorus - antimony)), 12)

Simplify this expression by splitting into two functions and nesting one inside the other, as

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follows:

Function 1 = boron – arsenic – phosphorous - antimony

Function 2 = max(log10(abs(Function 1)), 12)

Now plot Function 2 on a Mesh or Cross Section plot. It will show the profile of Net Doping
(clipped at 1e12).

2.8.4 Function Macros

To allow further simplification of functions, the macro section is provided on the Functions
dialog. It can be used to store common functions and identify them with an easy to remember
name. You can use the following options to modify macros.

• Function Macros: This shows all the macro names currently known to TonyPlot.
• Macro Name: Shows the name of the macro.
• Macro Definition: Shows the definition of the macro.
• Add: To create a new macro, click this button, then enter a new name and definition for
the macro. The new name appears in the list. If the name already exists, the old definition
is replaced.
• Delete: This deletes the macro that is currently selected in the name list.

The macro names can then be used in any function as though the whole definition had been
typed.

For example, in the Net doping example, we could add a macro called net_dop and in the
definition window, enter:

max(log10(abs(boron – arsenic – phosphorus - antimony)), 12)

Then, we could define an Impurity Function to simply be net_dop.

This makes the function definitions easier to read and allows useful names to be added to the
plot legend.

All macros can be saved to a defaults file for use any time TonyPlot is used. Two buttons on
the dialog allow defaults to be saved and loaded at any time.

2.8.5 Function Syntax

Functions are constructed just like normal math expressions, but with names of quantities from
data files used as variable names. Functions can be built with the following operators:

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Table 2-9 Function Operators

a + b a plus b

a – b a minus b

a / b a divided by b

a * b a multiplied by b

a ^ b a to the power of b

-a negative a

abs(a) absolute value of a

log(a) natural log (base e) of a

exp(a) inverse natural log of a (e ^ a)

log10(a) log base 10 of a

sqrt(a) square root of a

sin(a) sine of a (a in radians)

cos(a) cosine of a (a in radians)

tan(a) tangent of a (a in radians)

asin(a) arcsine of a

acos(a) arccosine of a

atan(a) arctangent of a

sinh(a) hyperbolic sine of a

cosh(a) hyperbolic cosine of a

mag(a, b) magnitude of vector [a, b]

hypot(a, b) hypotenuse of a and b (same as mag(a, b))

max(a, b) maximum of a and b

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min(a, b) minimum of a and b

dydx(a, b) derivative of a with respect to b

Normal operator precedence is obeyed.

Expressions can use parentheses to change the operator precedence where needed.

If an expression contains an error, this is reported when the function is plotted. Invalid values
are for the most part plotted as zero, except for log(), which uses the value predefined in the
property called Log Zero. If a function does contain an error, TonyPlot displays a notice box
informing you of the type of error encountered. A syntax error causes all function values to be
zero. An evaluation error causes just the offending data points to be zero.

The derivative function dydx can take any two variables. It also accepts distance to represent
the x value. For example, a vertical cutline dydx(boron, distance) would give the
derivative of boron concentration against depth.

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3. 2D Mesh Plot Display

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3.1 Overview
If the View→Display… menu action is selected while a 2D Mesh plot is selected, the 2D
Mesh Display dialog is shown (Figure 3-1). It shows the current display settings for the first
selected 2D Mesh plot. When the settings on the display dialog are applied, all selected 2D
Mesh plots are affected. In this way it is easy to apply global changes to similar plots in the
view. The dialog shows the features that can be displayed in 2D Mesh plots.

Figure 3-1 2D Mesh Display Dialog

The icons shown on the 2D Mesh Display dialog are described in Table 3-1.

Table 3-1 2D Mesh Display Modes

The triangular mesh used in the simulation.

Mesh

Sides of triangles classified as region edges.

Edges

All material regions in the structure.

Regions

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Color plotting of impurity values.

Contours

Representation of vectored impurities.

Vectors

Light beam and ray information.

Light

Metallurgical junctions in the semiconductor regions.

Junctions

Regions defined as being electrodes.

Electrodes

Adds elevation to a plot so that 3D surface is plotted.

3D

Adds lines dates to plots for ionization integrals or Monte Carlo ion implant.

Lines

Some of these features have further control dialogs, which can be accessed from the Define
button. The features that have detailed control are: Regions, Contours, Vectors, Light,
Junctions, 3D, and Lines.

3.2 Regions
There are several ways that TonyPlot can display mesh regions. The Regions dialog (Figure
3-2), is accessed by pressing the Regions icon, and then selecting Define→Regions.

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Figure 3-2 Regions Dialog

The first choice controls the way in which regions are drawn. The following options are:

• Solid fills the region area with color.

• Lines draws the region outlines only.
• Lines/Points draws the region outlines and marks the points defining the region border.

The second choice determines the parameter used when determining the regions color. The
first two options are always available: Material and Region. If you choose Material, the color
represents the material of the region (e.g., silicon or oxide) and the region legend shows the
material names. If you choose Region, then each region has its own unique color and the
legend shows the name of each region. If the data contains further region information (e.g.,
workfunction and phase), then these are also available, and the legend shows the values of
these parameters in each region. Any regions that are one-dimensional (e.g., substrate
electrodes) are drawn as thick lines, since they do not enclose a complete area.

3.3 Contours
Contouring is the most commonly used method for visualizing data on two dimensional
meshes. The contouring facilities in TonyPlot provide sufficient control for obtaining any
desired plot. Both contour plots and fringe plots (filled contours) are available with material
naming and range control to limit the plot to a restricted subset of the data. Each plot can have
up to three sets of contours displayed at once. This makes it possible to view more than one
quantity simultaneously, either all filled but in different material regions, or all lines over all
materials or any other combination. Of course, if all three sets are filled sets and all are plotted
over the same materials, only the third set (the last one to be drawn) will be visible. If lines
and filled sets are combined, the filled set should come before the line set.

TonyPlot selects a default quantity whenever possible. This allows contours to be plotted
without the need to use the Contours dialog (Figure 3-3).

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Figure 3-3 Contours Dialog

Just select contours from the Mesh Display dialog, and plot them by clicking on the Apply
button. The Contours dialog appears if you select contours on the 2D Mesh dialog and then
select Define→Contours. The dialog is divided into subsections, as follows:

• Set number: This subsection shows which set is currently being edited. Set 2 will only be
plotted if set 1 is plotted, and set 3 will only be plotted if set 2 is plotted. To plot a set, the
quantity (see below) must be anything other than None.
• Quantity: Choose the quantity to be contoured. If the range items (see below) are set to
Auto, the corresponding minimum and maximum text fields are updated to show the range
of the new quantity. If None is selected, the current contour set will not be plotted. One of
two functions may also be chosen. Functions are defined from the Functions dialog (see
Section 2.8 Functions).
• Materials: The part of the structure on which contours are drawn can be limited to regions
of a certain material. If no materials are selected in the list, this is treated as all being
selected (the default). If you do not plot the contours on any material, set the Quantity to
None.

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• Range: The group of items on the right part of the dialog control the range of the data
through which contours are plotted. The maximum (top item), minimum (middle item),
and interval or number of steps (bottom item) can be set or left to automatic defaults. The
default minimum and maximum values are the minimum and maximum values of the data
in the structure(s). The default number of steps is the same as the number of colors in the
current color set.
• Drawing style: Selecting the pencil creates line contours, while the paintbrush creates
filled contours (fringe plot). If you plot filled contours, you can add optional outlines by
selecting the Outline icon, which is to the right of the paintbrush. TonyPlot provides
several color sets which can be used for contour plotting. If the contour range is determined
by the number of steps (Num: selected), the number updates to match the number of colors
available in the color set when one is selected.
• Level widths: If you set the drawing style to line contour, this option forces overlaid plots
to use a different line width for each level.
• Legend title: The legend title can either be set automatically by TonyPlot (set to Auto),
or manually entered to create a custom title (set to Specify). An automatic title consists of
the name of the quantity plotted, with units if appropriate. A custom title is created by
entering the desired text into the text field supplied. This title is used on the contour legend
for this contour set.
• Functions: Click on this button to display the Functions dialog. This dialog can be used
to define the functions of the original quantities that can be selected from the choice of
Quantities.

3.4 Vectors
Vectors can be plotted for standard (the default) or user-defined vector quantities. TonyPlot
automatically detects the standard quantities made of an X component and a Y component.
They are shown in the Quantity pulldown menu. To create a vector made of unrelated X and
Y quantities, select the Custom option.

Vectors are represented on the plot by arrows. The direction of the arrow shows orientation of
the vector. The color or length of the arrow or both shows the magnitude of the vector. The
Vectors dialog (Figure 3-4) will appear if you choose Vectors on the Mesh 2D display dialog.

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Figure 3-4 Vectors Dialog

The items on the dialog are as follows:

• Components: This option controls whether to draw standard or user-defined vector

quantities.
• Quantity: All quantities of the structure that are standard vector quantities are shown in
this pulldown menu. This menu is only active when the Components option is set to
Standard. The list of quantities includes the two functions defined in the Functions dialog.
See Section 2.8 Functions for more information.
• Component X: This menu is active only when the Components option is set to Custom.
It is used to assign a quantity to the X component of the user-defined vector.
• Component Y: This menu is active only when the Components option is set to Custom.
It is used to assign a quantity to the Y component of the user-defined vector.
• Materials: The part of the structure on which vectors are drawn can be limited to regions
of a certain material. If no materials are selected in the list, then it is treated as all being

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selected (the default). If you do not plot the vectors in any materials, set the Quantity or
Component X/Y to None.
• Range: The range items on the right-hand side of the dialog control the sizes of the vector
arrows drawn. The longest arrow matches the vector with the greatest magnitude, and the
shortest arrow matches the smallest magnitude. If the smaller length is specified as zero,
then the lengths of the draw arrow are directly proportional to the vector magnitude.
• Regions: The part of the structure on which vectors are drawn can be limited to the
specified region. If no regions are selected in the list, then it is treated as all being selected
(the default).
• Colors: This specifies the color sets for the arrows. These are the same color sets that are
used on the Contours dialog.
• Use Linear Interpolation: If you check this option, you can interpolate vectors onto a
cartesian grid. This can be useful if the vectors are particularly dense.
• Functions: This displays the Functions dialog used to define the two functions you can
select in the Quantity pulldown menu.

3.5 Light Rays

If a structure contains light ray information, the Light dialog can be used to display that data
in a number of ways. Light information consists of a number of Beams, and each beam is
comprised of a series of Rays. A ray is a section of a beam between reflections and refractions.
For example, if a beam originates from outside a structure, enters the structure (is refracted),
travels to the bottom of the structure (gets reflected), and then moves back to the top of the
structure, it consists of three rays. The Light dialog (Figure 3-5) appears if you choose Light
on the 2D Mesh plot dialog.

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Figure 3-5 Light Rays Dialog

The items in the dialog are:

• Beam: When beams are present in the structure, they are shown as selectable numbers on
this item. Any of the beams can be shown at once by selected the required beam numbers.
If no light information is present in the structure, the option None is shown to show that
there are no beams.
• Materials: The part of the structure on which light beams are drawn can be limited to
regions of a certain material. If no materials are selected in the list, this is treated as all
being selected (the default). If the beams should not be plotted on any material, deselect
all beam numbers.
• Show as: There are two ways to show light beams. One way as lines that show the path of
the beam. Another way solid areas that also show the width of the beam. Choose the
required option with this item.
• Color function: The light beam rays can be colored in a variety of ways. Wavelength
colors the rays to match the wavelength. Wavelengths in the ultra-violet region and shorter
are shown as dark purple. Wavelength in the infra-red region and longer are shown as dark
red. Power assigns a color from the chosen color set dependent on the beam intensity.
Beam number assigns one color to each beam. Reflection Index assigns the color of a
ray according to the number of times it has been reflected.
• Colors: This allows you to choose a color set. These are the same as those available on
the Contour and Vector dialogs.
• Maximum reflection: This can be used to limit the number of rays drawn. Only rays that
have been reflected this many times or less are drawn.

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3.6 Junction
You can plot depletion region edges from device simulations (Figure 3-6) and metallurgical
junctions. Depletion factor is the value of the ratio of majority carriers to doping used to
determine the depletion region edge.

Figure 3-6 Junctions Dialog

3.7 3D
A 2D structure that can be contoured can also be elevated by choosing the 3D option and
defining some parameters in this dialog.

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Figure 3-7 3D Dialog

• Elevation: Any quantity can be chosen as the elevation. The height of the surface at any
point is proportional to the value of the elevation quantity.
• Show: There are number of optional items that can be drawn on a 3D plot, and each is
described by a small icon on the Show item. Choose the ones desired from this list.
• View: The view projection can be one of two choices: Parallel or Perspective.
• Log: You can select whether to log each of the axes individually.

3.8 Lines
You can overlay lines onto a 2D plot using the Lines dialog (Figure 3-8). This is used to show
static field lines on ion implant tracks.

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Figure 3-8 Lines Dialog

The icon buttons control the drawing of the Lines and pseudo Contours. The icon buttons are
described in Table 3-2.

Table 3-2 Lines Dialog Icon Buttons

Draw lines using the range of colors selected in the

Line/Contour Colors control.

Lines

Draw pseudo contours between the lines.

Contours

Draw lines and contours.

Lines and Contours

3.9 Transforms
The Transform 2D Mesh dialog (Figure 3-9) allows mathematical operations to be performed
between multiple selected 2D Mesh quantities. For example, you can add the voltages from
two different structures.

Note: The meshes must be identical to perform an operation.

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Figure 3-9 Transform 2D Mesh Dialog

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4. 3D Mesh Plot Display

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4.1 Overview
A variety of 3D Mesh Plot features are controlled using the 3D Display dialog. This is accessed
by selecting View→Display… when a 3D Mesh Plot is selected.

4.2 Mesh Options

The Mesh Options dialog configures the appearance of the mesh of the structure. The available
mesh options are:

• Face: Draws the mesh for the region surfaces only.

• Element: Draws the mesh for all region volume elements.
• Volume: Draws the mesh for all region volume elements, clipping the mesh data to be
contained within a defined cylindrical volume.

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Figure 4-1 Mesh Options

4.3 Contours
The Contour Display Mode is shown in Figure 4-2. Contours are shown as a colorization of
the exterior faces of the structure regions.

The Quantity option box holds all the quantities present in the data set. Choose one of these
quantities to use for contouring.

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Figure 4-2 Display Mode: Contours

4.3.1 Limit Settings

The controls in the Limits section of the dialog set the data range used in the contours. If Min
or Max is set to Use default, TonyPlot will extract the data range from the structure for the
selected Quantity. You can use the Choose From control to change the materials used in the
computation of the contours. The options are:

• All Materials All nodes in the structure are used to determine the data range.
• Outline Materials Only nodes in the checked materials in the Outlined Materials list are
used.
• Selected Objects The data range is computed from the list of selected objects in the scene.

The limits can also be set manually by unchecking the Use default controls and specifying the

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Min and Max values directly.

4.3.2 Legend Settings

The controls in the Legend section control how the contours are drawn on the region faces.
When Type is set to Continuous, the contour colors will be smoothly interpolated between
the reference colors of the legend. Setting Type to Stepped will produce a finite number of
discrete color bands to use across the data range. The Palette and No. of Colors are also
available to further change the appearance of the legend.

The quantity values can either be plotted with either a linear or logarithmic scale. When the
Mapping is Linear, the values are directly mapped to the legend's colors. When the mapping
is Logarithmic, the log10 is taken before the mapping occurs. If Use default is checked,
TonyPlot will chose the mapping automatically based on the selected contour Quantity.

4.4 Isosurfaces
The Isosurface Display Mode (Figure 4-3) is used to show surfaces of constant value
throughout a 3D structure. The Quantity controls which impurity is used in the computation.
The value of an isosurface must be within the data range (Min, Max) of the selected Quantity
and can be set using the Value text field, or using the slider control. To view an isosurface,
you can either turn on the Preview isosurface or select the Create button. Once created, the
isosurface will appear in the isosurface list. To delete one or more isosurfaces, select them in
the list and then click Delete. You can use the Draw mode control to change the appearance
of all the isosurfaces at once.

To obtain the junction surface for Net Doping, click the Junction button.

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Figure 4-3 Display Mode: Isosurfaces

4.5 Rays
When a 3D Mesh structure is opened that contains ray traces, the rays display mode is
automatically selected, and the rays are displayed in the plot. The Display Mode: Rays panel
(Figure 4-4) shows a summary of the ray trace data in tabular format.

By default, the ray traces are colored according to the wavelength of each trace. Wavelengths
in the infra-red region are displayed as a dark red color, while ultra-violet wavelengths are
displayed as dark purple.

The properties of the ray trace display can be examined and edited using the Object Browser
(see Section 2.7.1 Object Browser). In this way, rays of specific wavelengths can be displayed
or hidden as needed. The ray display can be turned off entirely by unchecking the View→Rays
menu item.

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Figure 4-4 Display Mode: Rays

4.6 Vectors
When a 3D structure contains vector data, you can use Vectors feature to visualize their
directions and magnitudes. The vectors are interpolated and sampled on a uniform axis-aligned
grid. Figure 4-5 shows the Display Mode: Vectors panel.

To display a set of vectors, use the Quantity combo box to select a vector quantity. The
number of samples along each axis can be set using the respective boxes for X, Y, and Z. The
Drawing Settings controls are used to scale the relative length and radius of the displayed
vectors. Press the Create button to create the vector set. Once created, the vector set will
appear in the samples list. To delete one or more vector sets, select them in the list and then
click Delete.

Note: Creating a vector set may take a few moments if the structure contains many vertices
and/or many samples are requested.

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Figure 4-5 Display Mode: Vectors

4.7 Save As Surfaces

3D Meshes can be saved as surfaces-only structures by selecting File→Save As…. Surfaces-
only structures contain mesh data only at the outer surfaces of the regions. Any data points
internal to the regions are discarded. The resulting surfaces-only structure file can have a much
smaller file size than the original full structure, and consequently can be much faster to load
and display, while still retaining the same outer appearance. However, it is important to note
that cut plane slices through a surfaces-only structure will yield only an outline.

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5. XY Graph Display

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5.1 Overview
The XY Graph Plot dialog (see Figure 5-1) shows the current display settings for the first
selected graph plot. When the settings on the display dialog are applied, all selected graph
plots are affected. This permits much easier application of global changes to similar plots in
the view. The XY Graph Plot dialog contains all the controls needed for complete control of
graph plots.

Figure 5-1 Graph Plot Dialog

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• Show: This allows you to select (Points/Lines) the way lines are drawn on the graph.
• Type: This specifies the type of graph that is to be drawn. The options represent Cartesian
graphs, polar plots, and Smith charts. The data that is plotted is mapped onto axes of the
chosen type. If the data is in a format that matches the type chosen (e.g. [r, theta] pairs for
polar plots), then selecting the Convert Data button tells TonyPlot to transform the
coordinates before plotting them.
• Display CIE Overlay: This displays a diagram of the CIE 1931 color space.
• Functions: This displays the Functions dialog, which can be used to define the functions
that can be selected from the choice of Quantities. Functions can be plotted on any axis.
The type of graph chosen will affect the controls on the remainder of the XY Graph
Display dialog.

5.2 Cartesian Graphs

Scales

Since only one quantity can be plotted on the x-axis, there is an item to select a linear or log
(base 10) x-axis. Choose the one desired. For the y-axis, more than one quantity can be plotted.
If all of them are to be on a linear scale, choose Linear for the y1 scale. Choose Log if they
are all to be log. Choose Use Mixed Y Axes if both linear and log quantities are to be plotted
on the y-axis.

X Quantity

One quantity can be chosen for plotting on the x-axis. All quantities available in all selected
plots appear in this list. If one of the plots does not have data for the chosen quantity, nothing
is drawn.

Y Quantities

Any number of quantities can be chosen for plotting on the y-axis. All quantities available in
all selected plots appear in two lists. The Y1 Scale controls whether the Y Quantities 1 list is
linear or log. The Y2 Scale similarly controls the Y Quantities 2 list. The Y Quantities 2 list
is only available if Use Mixed Y Axes is selected.

A context menu attached to each list (accessed by clicking the right mouse button over the list)
makes list control a little easier. There are options to move selections from one list to the other,
and for rapidly selecting, deselecting and locating choices in the lists.

Group

When Cartesian data is plotted that contains different groups of data sets for the same y
quantity, this item can be used to specify which quantity divides the y value into its distinct
groups. For example, a structure may contain data to show several plots of drain current against
drain voltage for different values of gate voltage. In this case, the x-axis would be set to “drain
voltage”, the y-axis to “drain current” and the Group item to “gate voltage”. The plot would
show one curve of Id vs. Vd for each value of Vg.

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5.3 Polar Charts

When the graph type is Polar, four subpanels are shown. Each subpanel can be used to display
quantities. In other words, up to four polar curves can be plotted.

Two quantities are used to specify each curve. By default, the quantities real and imaginary
are used when the data is not converted. If the data is to be converted, the quantities R (radius)
and A (angle) are used. The data should only be converted if it appears in (r, theta) form in the
structure. When quantities are present that TonyPlot recognizes as being usually displayed on
polar charts, TonyPlot tries to automatically select an “i” (or “A”) quantity whenever you
choose an “r” (or “R”) quantity.

The real or radius quantity can be logged before plotting, and the angle quantity can be
specified in terms of degrees or radians. Choose the setting which corresponds to the data in
the structure.

There are some options to control the polar chart drawn. The chart can be drawn proportionally
(e.g., concentric circles appear as circles, even if the plot window is not square) and radial
labels can be shown in degrees (radians is the default). The radial lines can be drawn at various
intervals. Choose the interval desired from the item marked Radials.

5.4 Smith Charts

When the graph type is Smith, four subpanels are shown. Each subpanel can be used to display
quantities. In other words, up to four Smith curves can be plotted. This is basically the same
as Polar charts described previously.

Two quantities are used to specify each curve. By default, the quantities real and imaginary
are used when the data is not converted. If the data is to be converted, the quantities R and X
are used. The data should only be converted if it appears in R, X form in the structure.

When quantities are present that TonyPlot recognizes displayed on Smith charts, TonyPlot
tries to select an “i” (or “X”) quantity whenever you choose an “r” (or “R”) quantity. There
are some options to control the Smith chart drawn. The chart can be drawn proportionally
(e.g., concentric circles appear as circles, even if the plot window is not square), and axis arms
can be drawn in all four Smith quadrants (only the first quadrant is shown by default).

5.5 Transforms
The Transform XYG dialog is accessed by selecting Edit→Transform XYG…. This dialog
allows mathematical operations to be performed between multiple selected XY Graph curves.

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Figure 5-2 Transform XYG Dialog

5.6 Save As
XY Graph plots can be saved to Silvaco Standard Format (.str), TonyPlot User Data
(.dat), Spayn Data File (.dat), Neural Net I/O File (.net), Spice Raw File (.raw) and
Comma Separated Values File (.csv).

Note: To obtain a .csv file from a .str file, first use an extract command in DeckBuild to obtain
a (.dat) file, then save this data from TonyPlot as a .csv.

To save data, choose one plot that you wish to write to a file and select File→Save As. The
Save As dialog will then appear. Select the option desired. To name the file to be created,
enter a base name and a file extension. One file is created for each overlay level in the plot.
For example, if you export a three level plot, the basename is hello, the extension is dat,

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and the following three files will be created.

hello1.dat

hello2.dat

hello3.dat

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6. Cross Section Display

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6.1 Cross Section Display

The Cross Section dialog (Figure 6-1) shows the current display settings for the first selected
Cross Section plot. See Section 2.7.2 Cut Line for details on how to generate Cross Section
plots. When the settings on the display dialog are applied, all selected Cross Section plots are
affected. This permits much easier application of global changes to similar plots in the view.
The Cross Section dialog contains all the controls needed for complete control of Cross
Section plots.

Figure 6-1 Cross Section Dialog

The following items can be specified:

• Quantity: This specifies quantities to be plotted. Any number of quantities can be plotted.
One of two functions can also be chosen. These functions are defined from the Functions
dialog. See Section 2.8 Functions for more information.
• Options: This allows you to add mesh, interfaces, and materials to the plot. These options
are represented by the three icons in the top right of the dialog. To add any of these features
to the plot, select the corresponding icon. The icons underneath control the way lines are
drawn on the graph.

The icons allow you to draw points or line or both segments.

• Axis Scales: Each quantity that you can plot on a Cross Section plot has a default flag,
which TonyPlot uses to determine whether to use a Linear or Log y-axis. If you plot linear
and log quantities simultaneously, two y-axes will be drawn. One to show all log
quantities, and the other to show all linear.
• Functions: Click on this button to display the Functions dialog. This dialog can be used
to define the functions that can be selected from the choice of Quantities. See Section
2.8 Functions for more information.

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The type of y axis drawn depends on the quantities being plotted. If log scale quantities are
drawn, such as Net Doping, then TonyPlot draws a true log scale axis. If linear quantities are
drawn, such as Potential, a normal linear axis is drawn. If a mix of the types of quantities are
drawn, TonyPlot draws both types of axis: the log axis that appears on the left side of the
subwindow, and the linear axis that appears on the right. When reading values from the curve,
be sure to use the correct scale.

For dopants, the log axis shows values below 1e12. You can change this value in the Plot
Options panel of the Preferences dialog (see Preferences).

6.2 Save As
Cross Section plots can be saved to Silvaco Standard Format (.str) and TonyPlot User Data
(.dat). To save data, choose one plot that you wish to write to a file and select File→Save
As. The Save As dialog will then appear. To name the file to be created, enter a base name
and a file extension. One file is created for each overlay level in the plot. For example, if you
export a three level plot, the basename is hello, the extension is dat, and the following three
files will be created.

hello1.dat

hello2.dat

hello3.dat

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7. RSM Display

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7.1 Overview
The RSM Plot display dialog allows you to control the display of the Response Surface Model
(RSM) inputs and outputs. RSM plots can be drawn in one of three modes: 1D graphs, 2D
contours, or 3D surfaces.

Figure 7-1 RSM Dialog

To draw any RSM plot, TonyPlot “samples” the input(s) a number of times to calculate values
for the output. The number of samples taken (which are always regularly spaced) is determined
by the setting of the Density item. Higher densities generate more points, creating smoother
curves or surfaces, but take longer to compute. Low density plots are quick to calculate and

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draw, but provide only “approximate” plots.

For total control of RSM plots and access to a selection of analysis tools, enable the VWF
Production Mode. A description of these features can be found in VWF Production Mode.
Without Production Mode, the benefit of RSM plots is greatly reduced.

7.2 1D RSM Graphs

When you plot RSMs in the 1D mode, you can select any one input for the x- axis, and you
can select any output(s) for the y-axis. All RSMs that contain both the input and output are
plotted.

Show

There are several ways to display data on 1D RSM plots. These are selected from the row of
icons near the top of the control panel.

• Points/Lines: draw points and line segments at or between sampled points,

to draw the curve. SPC limits can be added to the plot, if this information is available for
the outputs being plotted.

• activates the Valid X Range marker, showing the range of the input that is valid
for the model used. The drawn range can be extended in certain cases to values outside the
valid range.

• represents Measured Points, which are plotted if measured data was passed with
the RSM.

• normalizes all outputs to a range between 0 and 1, for easier comparison of different
models.

• activates a crosshair, which can be used to track x- and y-coordinates along the
curve.
• X Quantity: Any input parameter can be chosen for plotting on the x-axis. In addition,
values of this input can be plotted on a log scale.
• Y Quantities(s): Any output parameters can be chosen for plotting on the Y axis. There
are two lists: one for outputs to be plotted on a linear axis, and one for a log axis. Any
combination of the two can be used.

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7.3 2D RSM Contours

In the 2D mode, RSM plots show how outputs vary with respect to two independent input
parameters. You can specify the way to draw contours the same way contours are drawn in
regular 2D Mesh plots from Atlas or Athena.

X and Y Quantities

You must choose two inputs for contour plots: one for the x-axis and one for the y-axis. The
inputs chosen must be different. Each of these can be plotted on a log scale if desired.

Z Quantity

The Z Quantity cannot be chosen (it is always the RSM output parameter that is plotted). But
you can specify a linear or log scale for the Z axis.

Contour Type

Contours can be drawn as lines or filled areas, and filled areas can be outlined. There are a
number of color sets that can be used to create the contours. All these options are controlled
with the items in the lower left corner of the control panel.

Mesh

Next to the icons for controlling the contour types is an icon that draws the “sample mesh” on
top of the contour plot. This mesh shows the points where outputs were calculated to generate
the plot. A triangular mesh is created from these points to draw contours.

Projection

This is not used in the 2D mode. See 3D RSM Surfaces for an explanation.

Output Range

The range over which contours drawn can be selected as one of two options. The first option
is to use the highest and lowest output values over the sampled input range. This ensures all
contour colors are drawn on the plot. The second option is to use to absolute range of the
model output, which can be a greater range than that plotted.

7.4 3D RSM Surfaces

When you choose the 3D mode, TonyPlot draws an RSM as a three-dimensional surface with
contours drawn according to surface “height”. Control over the display of these plots is the
same as described above for 2D plots, except that projection may also be specified. Projection
allows you to choose either parallel or perspective projections when the 3D surface is
displayed.

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Note: These 3D plots can be rotated and scaled (but not zoomed). See Plot Control for details
on 3D rotation and scaling.

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8. Statistics Display

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8.1 Overview
Whenever statistics plots are present, the Statistics Plot Display dialog can be used to alter
the way the data is displayed. These Statistics Plots are often generated from Production Mode
tools (see VWF Production Mode).

Figure 8-1 Statistics Dialog

Statistics plots can be one of several distinct types. These are Histogram, Pie Chart, Scatter
Plot, Box Plot, and Sunray Plot. The current type is shown at the top of the dialog. To change
the type, select it from the Type menu. For each type, a different set of control appears beneath,
on the lower portion of the dialog.

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8.2 Histograms
X Axis

You can plot one or more quantities on a histogram plot. Choose the quantities desired from
the scrolling list to the right.

Stack

When you plot more than one quantity, the stack item selects the method used for showing
each one on the same axis. You can stack the bars for each quantity vertically on top of each
other or horizontally next to each other.

Fit

This item allows you to plot a best-guess distribution curve over the data. TonyPlot uses the
range, mean and standard deviation of the data to generate a distribution curve of the chosen
type.

Show

The icons along the bottom control what items can be drawn on a histogram plot.

Table 8-1 Histogram Plot Controls

Draws from one bar to the next.

Lines

Draws a standard histogram. This is the default option.

Solid Bars

Shows the distribution of all the data points.

Jitter Plot

Shows the total number of data points over the X axis range.

Cumulative Curve

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Drawn when RSM output quantities are plotted on the histogram. See SPC
Limits for more information.

SPC Limits

8.3 Pie Charts

Controlling of pie charts is simple. Just select the quantities to be displayed from the list, and
a pie will be drawn for each of them. To remove a slice from each pie, enter the number of the
slice into the text field labeled Remove Slice. A value of zero means “remove no slice”.

8.4 Scatter Plot

Scatter plots show distributions of data in an x-y graph. By selecting various parameters for
the X and Y axes, you can see the correlation of parameters graphically.

X Axis

Choose one quantity to be plotted along the X axis.

Y Axis

Choose one or more quantities to be plotted along the Y axis.

8.5 Box Plot

Box plots are used to examine the overall structure of the data. Use the list to select the
quantities to be plotted, and a box will be drawn for each one. You can display the boxes
horizontally or vertically. When they displayed horizontally, you can add a jitter plot. A jitter
plot shows the distribution of all the data points for each box.

8.6 Sunray Plot

Sunray plots show data values distributed around a central point with the distance of each
point from the center proportional to the data value. This yields a star or hedgehog-like plot.

Select the quantities to be plotted from the scrolling list, and a sunray plot will be drawn for

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each one. The icons along the bottom control how to draw the sunray plots. These are
circumference lines, radial lines, and a bounding circle whose radius is the maximum data
value.

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9. VWF Display

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9.1 Overview
The VWF Plot dialog (see Figure 9-1) shows the current display settings for the first selected
VWF plot. When the settings on the display dialog are applied, all selected VWF plots are
affected. This permits much easier application of global changes to similar plots in the view.
VWF plots can be drawn in one of three modes: 1D graphs, 2D contours, or 3D surfaces.
The VWF Plot dialog contains all the controls needed for complete control of VWF plots.

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Figure 9-1 VWF Plot Dialog

9.2 1D VWF Graphs

Show

There are different ways to display data on 1D VWF plots. These are selected from the row of
icons near the top of the control panel.

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• Points/Lines: draw points and line segments at or between sampled points,

to draw the curve.
• X Quantity: Any input parameter can be chosen for plotting on the X axis. In addition,
values of this input can be plotted on a log scale.
• Y Quantities: Any output parameter can be chosen for plotting on the Y axis. By default,
inputs are hidden, but can be enabled as well by unchecking the Hide Inputs In Y
Quantities check box. There are two lists: one for outputs to be plotted on a linear axis,
and one for a log axis.

9.3 2D VWF Contours

In the 2D mode, VWF plots show how outputs vary with respect to two independent input
parameters. You can specify the way to draw contours the same way contours are drawn in
regular 2D Mesh plots from Atlas or Athena.

X and Y Quantities

You must choose two inputs for contour plots: one for the X axis and one for the Y axis. The
inputs chosen must be different. Each of these can be plotted on a log scale if desired.

Z Quantity

You must choose an output for the Z/Contour quantity. You can specify a linear or log scale
for the Z quantity.

Contour Type

Contours can be drawn as lines or filled areas, and filled areas can be outlined. There are a
number of color sets that can be used to create the contours. All these options are controlled
with the items in the lower left corner of the control panel.

Mesh

Next to the icons for controlling the contour types is an icon that draws the “sample mesh” on
top of the contour plot. This mesh shows the points where outputs were calculated to generate
the plot. A triangular mesh is created from these points to draw contours.

Projection

This is not used in the 2D mode. See 3D RSM Surfaces for an explanation.

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9.4 3D VWF Surfaces

When you choose the 3D mode, TonyPlot draws a VWF plot as a three-dimensional surface
with contours drawn according to surface “height”. Control over the display of these plots is
the same as described above for 2D plots, except that projection may also be specified.
Projection allows you to choose either parallel or perspective projections when the 3D surface
is displayed.

Note: These 3D VWF plots can be rotated and scaled (but not zoomed). See Plot Control for
details on 3D rotation and scaling.

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10. Overlays

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10.1 Overview
One of TonyPlot’s most useful features is the ability to directly compare different sets of
structure data. This not only means loading several output files at once and looking at each
one in the same view, but also overlaying the data sets in the same plot subwindow.

When different files are overlaid, the plot is called an overlay plot, and has some characteristics
not shown by normal plots. Each structure is drawn on a separate level in an overlay plot, and
the levels are transparently stacked upon one another. Each level uses the same axes and
display settings, so that the data can be readily compared. Obviously, each level must be of
the same plot type (2D Mesh, Cross Section or XY Graph).

10.2 Making an Overlay

There are two ways to create overlay plots. One way is if the files to be overlaid are already
loaded into TonyPlot (each in its own plot subwindow), select the plots to be overlaid (at least
two must be selected) and select Edit→Make Overlay. A new plot is created containing one
level for each plot selected. Another way is if data that is to be overlaid is not loaded, the new
files can be overlaid onto an existing plot as they are loaded. To do this, select
File→Overlay… and use the Overlay dialog (Figure 10-1), or the –overlay option if
loading from the command line.

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Figure 10-1 Overlay Dialog

10.3 Splitting an Overlay

An overlay plot can be broken down into separate single-level plots by choosing the
Edit→Split Overlay. The overlay plot to be split must be selected when this option is chosen.
One new plot will be created for each level in the overlay.

10.4 Overlay Control

Overlay plots are controlled just like any other plot. It is still a single plot even though several
structures are displayed within it. Controls such as zooming, key commands, or labeling are
still possible as though only one structure were present.

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10.5 Overlay Display

Plot display for an overlay plot is the same as for a normal plot, except that multiple data sets
are affected. All the data sets (i.e., every level) is displayed according to one common display
setting. It is impossible, for example, to show contours in one level and vectors in another.
Since each level must be of the same plot type, the dialog used to change the display settings
are the same as described for normal plots.

Some levels may not be plotted if the display settings include quantities or options that are not
present in the data for that level. The display dialogs, however, shows all quantities from all
levels. For example, one level may contain boron and another level just arsenic. The
display dialog shows both boron and arsenic. If you only choose boron, only the first
level will be drawn.

10.6 Identifying Data

Data from separate levels can be identified by the overlay legend. This legend indicates which
profile or graph line corresponds to a certain data file. The quantities plotted are identified
with the same legend used in single-level plots. Each level is shown in a different color, (line
type for monochrome screens) and each quantity with a different mark type. The colors used
are determined by the current set of Sequence colors. See Preferences to determine how to set
these colors.

Mesh plots, when overlaid, use the same color for each level. Because of the large amounts of
information that can be portrayed in a 2D Mesh plot, the number of levels is limited to three.
For XY Graph and Cross Section plots, there is no practical limit.

10.7 Level Names

Each level in an overlay is named from the file from which its data was taken. If needed, these
names can be changed with the Level names dialog. Choose View→Level Names... to display
this dialog.

To change the name of a level, first select the old name from the scrolling list. Then, enter a
new name into the text field labeled Name and click on the Apply button. The plot updates to
show the new names.

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Figure 10-2 Level Names Dialog

10.8 Cutlines
When the Cutline tool is used on an overlay 2D Mesh plot, a section is taken from each level.
TonyPlot automatically overlays each of these when it creates the new cross section plot.

10.9 Preferences
There are some TonyPlot preferences that apply to overlays. These are accessed by choosing
1D/2D Plot from the Preferences dialog. Although explained in the Preferences, they are
briefly described here.

• Creating: When creating overlays from existing plots, TonyPlot just creates a new plot.
The old plots remain in the view. If you choose the Deletes originals, however, the plots
that made up the overlay will be deleted when you create the overlay.

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11. Legacy VWF Production

Mode

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11.1 Overview
TonyPlot provides the graphics to examine and interact with response surface models (RSMs)
in one, two or three dimensions. These RSMs can be examined with a selection of Production
Mode features, such as Failure Analysis, Disposition, and Synthesis. This section discusses
the advanced Production Mode features available.

An RSM consists of a “response parameter”, sometimes called an “output” or simply “model”,

and a number of “input parameters”. The output is calculated form the inputs according to the
RSM definition, which is passed from VWF to TonyPlot.

RSM plots are displayed as either simple XY Graph plots, where the model is plotted against
the variation of one input, or as 2D or 3D contour plots, where the model is plotted against
two inputs. In all cases, inputs not plotted are held at fixed values, although you can set these
fixed values.

Controlling RSM plots is described RSM Display. See those pages for an explanation of how
to draw RSM graphs, contours and surface plots.

11.2 Enabling Production Mode

There are three ways to enable the RSM graphics in TonyPlot. The simplest way is to let
TonyPlot do it automatically: whenever an RSM plot is loaded, the Production Mode is
started. The second way is to choose File→Production Mode. The third way is to do it via
Spayn/VWF. In VWF, select Tools→Spayn to load a worksheet into Spayn. From Spayn, use
Tools Regression to create the RSM and then start TonyPlot (see the VWF and Spayn User
Manuals for further details).

When Production Mode is enabled, the Production menu (between the Tools and Help
menus) becomes active.

This menu allows access to each of these Production Mode features (Interactive control,
Failure Analysis, Calibration, Synthesis and Yield Analysis) as well as some parameter
editing dialogs (e.g., Input range, SPC limits). Choosing any of the main features displays the
Production dialog in the appropriate mode. Selecting one of the editing dialogs displays that
dialog.

11.3 The Production Mode Dialog

By selecting an option from the main Production menu, the Production Mode dialog
appears. This dialog shows all the RSM input and output parameters currently in use, and
allows the selection of some advanced features. The dialog can be set to one of five “modes”
(Interactive control, Failure Analysis, Calibration, Synthesis and Yield Analysis) by either
choosing the mode from the Production menu, or from the choice item at the top of the dialog.

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Below the mode selector is a panel whose contents depend on the mode currently selected. In
the Interactive mode, for example, it shows the current Process Name (if any) and a row of
four buttons for control of the input sliders.

The input sliders appear on the next panel down. Each input parameter in use is represented
as a slider/toggle combination. Inputs can be “selected” by pressing the toggle — it is grayed
out when not activated.

The dialog can show up to twenty-four inputs. You can expand or reduce size of the dialog to
show more or less sliders. The bottom of the dialog has the usual Cancel and OK buttons.

11.3.1 Interactive RSM Control

The Interactive mode is the basic use for the Production dialog. When set to this mode, the
mode control panel shows the current Process Name. This name can be changed if needed.
Under the process name are three buttons that control the input parameter sliders:

• Reset to nominal: Clicking on this button sets all slider positions to the nominal value
for each input. The nominal value is defined by the RSMs, but can be changed to any other
value with the Input Parameter Ranges dialog (see Input Parameter Ranges) or with the
next button.
• Store as nominals: Clicking on this button uses the current position of all selected input
sliders as a new nominal value for those inputs. You can also set nominal values from the
Input Parameter Ranges dialog.
• Fix Y Axis: When you toggle this option, the Y-axis ranges of the selected RSM plots
remain when you move the input sliders.

This allows interactive user control over regression model parameters to study the effects on
the response surface.

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Figure 11-1 VWF Production Mode Dialog showing Interactive

11.3.1.1 The Input Sliders

Any input slider that is selected can be dragged left and right to interactively change the current
value of that input. As the value changes, any selected RSM plots in the current view updates
to reflect these new values. Any selected RSM plot is updated as follows:

• Any 1D RSM plot that has the input plotted on the X-axis moves the crosshair along the
curve to match the changing X-axis value. If the input is not the X (or Y) quantity, the

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whole curve will be recomputed for the new value.

• Any 2D plot that doesn’t have the input as either the X or Y axis quantity is redrawn with
the contours recalculated for the new input value.
• Any 3D plot that doesn’t have the input as either the X or Y axis quantity is redrawn with
the contours and surface recalculated for the new input value.

Note: Since plots are updated interactively, it is usually preferable to set the RSM plot density
to “low”. This speeds up the calculations and greatly improves the response time.

This interactive control is available regardless of the current dialog mode. That is, sliders can
be dragged in any of the production modes, and plots are still updated interactively as
described in Interactive RSM Control.

11.3.2 Failure Analysis

The Failure Analysis feature can be used to predict which input parameter is the most likely
cause of an error in production. In other words, an output parameter or measurement that
exceeds the specification or design limits.

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Figure 11-2 VWF Production Mode Dialog with Failure Analysis selected

11.3.2.1 Setup
When the Production dialog is set to Failure Analysis, there is a list of all output parameters,
a text field for entry of “failed values” and START and STOP buttons. There is also a Method
item.

• Failed Values: For each output parameter, enter the failed value that was measured at the
production site. Press the Return key to submit this value to the list.
• Method: This controls the error tolerance method used in the failure analysis. Higher
orders are less error tolerant, lower orders are more tolerant.
• Select Inputs: From the set of input sliders, choose the ones to be used in the analysis.
TonyPlot tries to find which of these inputs is the most likely cause of failure in all the

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outputs. You must at least select two inputs because the algorithm compares relative
probabilities of failure cause.
• START: Click on this button to start the failure analysis. As each of the selected input
parameters are tested, its slider moves from the minimum to the maximum value. Once all
inputs have been tested, a plot of the results appears.
• STOP: Click on this button to stop the analysis at any time. All calculations are aborted,
and no result plot appears.

11.3.2.2 Result Plot

When you run the failure analysis, a histogram appears (which is a form of the general
TonyPlot Stat plot). The histogram shows the relative probabilities of each input being the
cause of the failed values.

Note: Each input is tested individually. The analysis tries to find the one single input that could
cause the specified failure in all outputs. The highest bars show inputs that are most likely to
have caused the failure(s).

TonyPlot also adds a set of labels to the plot. These labels indicate the values of each input
which would have generated the failed value, if that input had been the cause of the failure.

11.3.3 Calibration
The initial condition of the calibration function requires an overlaid display of the measured
and RSM data to be made. At this time, choose which parameters are to be varied to do the
calibration. Your choice is to set the process parameters to be fixed while the model parameters
are allowed to vary.

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Figure 11-3 VWF Production Mode Dialog with Calibration selected

11.3.3.1 Setup
To use the calibration tool for VWF, do the following:

1. Generate a Design of Experiments (DOE) employing the “Most Practical and the Most
Important” Process Parameters and the “Most Important” Calibration Parameters. Split
lots can be Orthogonal DOEs or Random DOEs.
2. Run the Simulation Split Lot in Parallel on MP machine.
3. Generate RSM for each Process Parameter.
4. Load the (Calibration Parameters and Processing Parameters) RSMs into TonyPlot.
5. Load in the measured data into the Production Tools. Production Tools will find values of

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Calibration Parameters that will best fit the measured data.

6. Save these RSMs for later use with Production Tools Yield Improvement Failure analysis.
7. Update the Calibration Coefficients for future use in future baseline input decks.

11.3.4 Synthesis
In Synthesis mode, TonyPlot tries to find a value for each selected input that produces a
desired set of outputs. Two algorithms are provided to perform this reverse calculation — a
“Levenberg- Marquardt” optimizer and a method known as Adaptive Simulated Annealing.

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Figure 11-4 VWF Production Mode Dialog with Synthesis selected

11.3.4.1 Setup
Before starting the synthesis calculations, you must set the desired output values. Use the text
field labeled Target Value to enter a desired value for the output currently selected in the list
on the left. Press the Return key to submit this value.

When all target values are entered correctly, select the desired method. There is a choice
between the Levenberg-Marquardt optimizer and Adaptive Simulated Annealing. Select
the method desired.

Select the input sliders that are to be used in the synthesis: not all of them need to be used.

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Unselected inputs will be fixed at their current values when the RSM computations use them.
Certain operational parameters specific to each synthesis method can be customized to help
obtain the required results. See Optimizer Setup or ASA Setup for further details.

Click on the START button to start the synthesis procedure. As the calculations progress, the
latest results achieved will be displayed in the Current value text field. A status message
describes the current state.

To abort the synthesis at any point, click on the STOP button. The procedure is cancelled and
reset.

11.3.4.2 Results
The inputs sliders changes as the synthesis calculations progress. When the procedure is
successful and complete, the input slider positions shows the values of the inputs needed to
produce the output value(s) that were specified in the list of targets.

11.3.5 Yield Analysis

Yield Analysis can predict the characteristics of output yield from a production situation from
known experimental data. TonyPlot generates large numbers of output measurements from a
statistical sample of many inputs. By specifying the probability distributions of each input
parameter, a total distribution of all outputs can be obtained.

The statistical distributions of input parameters are obtained in several ways. First, they can
be passed to TonyPlot along with the actual RSM data that uses the inputs. If none pass,
TonyPlot generates a default distribution. Finally, all input distributions can be specified using
the Input Distributions dialog (see Input Distributions).

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Figure 11-5 VWF Production Mode Dialog with Yield Analysis selected

11.3.5.1 Setup
The first thing to set up before running a Yield Analysis is the input distributions. The
scrolling list on the Production dialog shows the distribution types for each input.

To examine the distributions in detail, and possibly alter them, use the Input Distributions
dialog.

The number of samples taken by TonyPlot of each input parameter can be set to any value.
The default is 5000 samples. The more samples that are taken, the more accurate the results,

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but it takes longer to perform the analysis.

Click on the green START button to start the analysis. The number of samples taken is
continuously displayed next to the start and stop buttons. To abort the analysis at any time,
click on the STOP button.

When all samples have been taken, TonyPlot takes a few moments to collate the data it has
obtained, and then a histogram is plotted.

11.3.5.2 Results
The default result plot that Yield Analysis creates is a histogram showing the distribution of
the output parameter(s). This plot is an instance of a standard Statistics plot, and can be
manipulated further with the normal dialogs for Statistics plots.

The plot also contains data for all the input values that were used: these can also be plotted.
Use the Statistics plot Display dialog to select sets of data to be plotted, and the type of plot.
It is possible to draw pie charts, scattergrams, box plots, and other figures, to examine the data.
See Statistics Display for more information.

11.3.6 Input Parameter Ranges

As RSM data is loaded into TonyPlot, a record is kept of the greatest range of each input
parameter. Along with these minimum and maximum values, a “nominal” value is stored,
which represents the normal, or default, value of that input.

The range and nominal value of any input can be changed by using the Input Ranges dialog
(Figure 11-6).

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Figure 11-6 VWF Production Mode showing the Input Ranges Dialog

11.3.6.1 Control Items

The dialog shows a list of all inputs from all loaded RSMs, and shows the minimum,
maximum, and nominal values for each one. Underneath the list, the name and values for the
input currently selected are displayed: the values can be changed but the name cannot. Press
the Update button on each text field to submit new values to the list. TonyPlot makes sure
that the values are logical. In other words, the minimum is less than the maximum and the
nominal lies between them.

Once you made all the desired changes to the list, click on the Apply button. This will submit
these new values to TonyPlot. Any RSM plots are updated to use these new ranges and
nominal values.

11.3.6.2 Uses
The Input Parameter Ranges dialog affects the range over which values are taken for each
input when RSM outputs are computed. The sliders on the Production dialog reflect the
current range for each input.

Some models may only be valid for specific ranges of their inputs. Since it is possible to
exceed these ranges, there is a feature that allows the valid range to be identified on a 1D plot

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(see RSM Display for more information).

11.3.7 Input Distributions

As RSMs are loaded into TonyPlot, a default distribution is assigned to each one. This
distribution represents the statistical “spread” of values that would be obtained for this input
parameter in an experimental situation. Using this data, TonyPlot can simulate real-life input
values by sampling data with the given distribution parameters.

The default distribution given to each input is Gaussian with a mean value halfway between
the minimum and maximum value of that input. The standard deviation will be 10% of the
mean.

To alter the distributions for any input, use the Input Distributions dialog (Figure 11-7).

Figure 11-7 VWF Production Mode showing the Input Distributions Dialog

11.3.7.1 Control Items

The Input Distribution dialog shows a list of all inputs currently loaded and the type of
distribution for each one, along with its mean and standard deviation.

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Underneath the list, the values for the currently selected input are shown. The name of the
input is fixed and cannot be changed but the other items can. Press the Update button on the
Mean and Std. Dev text fields to submit changes to the list. If you select a new distribution
type, the list will update automatically.

When you made all the desired changes, click on Apply to commit the new values. If the
Production dialog is set to Yield Analysis mode, the new distribution types are shown in the
scrolling list.

To examine and alter the distributions graphically, press the View... button. This summons a
small window showing a histogram distribution of the selected parameter. Select other
parameters to view their distributions also. The sliders under the histogram can be used to
modify the mean and standard deviation of the parameter. Click on Apply to save the values
back to the original scrolling list.

11.3.7.2 Uses
Input distributions are used in Yield Analysis. When TonyPlot takes input samples, it uses
these distribution parameters to generate realistic values that may be found in a real-life
scenario. For accurate Yield Analysis results, each input distribution should be set up so that
it matches a closely as possible that found by experimentation.

11.3.8 SPC Limits

Each output parameter used in Production mode has a set of Statistical Process Control (SPC)
parameters, which can be used to monitor the value of some measured value. There are five
SPC limits:

• Upper spec limits (maximum values permitted)

• Lower spec limits (minimum values permitted)
• Upper control limits (ideal maximum)
• Lower control limits (ideal minimum)
• Center limit (ideal value)

These limits are abbreviated to USL, LSL, UCL, LCL, and CL respectively. Values for each
of these are sometimes passed to TonyPlot through the RSM data. If not, or if they need to be
modified, the SPC Limits dialog can be used to add or modify SPC Limit values for any
output. To display these values, select Production→SPC Limits and the SPC Limits dialog
will appear (Figure 11-8).

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Figure 11-8 VWF Production Mode showing the SPC Limits Dialog

11.3.8.1 Control Items

The scrolling list on the SPC Limits dialog shows all output parameters and the USL, UCL,
CL, LCL, and LSL values for each one. Underneath the list are five text fields where these
values can be changed. Use the scrolling list to select the output that is to be modified, and
enter new SPC values into text fields provided. Press the Update button in each text field to
submit changes to the list.

If an output parameter has no defined SPC limits, use the word None to indicate missing
values. To remove defined values, enter the word None into the text field and click on the
Return key. When you made all desired changes, click on the Apply button to store the new
values. Values in the list are not stored until the Apply button is clicked.

11.3.8.2 Uses
SPC Limits are used to monitor measured output values to ensure that these values stay within
predefined boundaries and generate some warning when the boundaries are crossed.

Outputs generated by RSMs in TonyPlot can be compared to SPC Limits in a similar way. If
these values are defined, the control lines can be added to any 1D RSM plot. See RSM Display
for details on how to add these SPC limits to a plot.

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11.3.9 Experimental Results

Each output parameter modeled by an RSM has an associated experimental value that was
measured when the process input parameters used in the model were set to their nominal
values. If no experimental value is given for an output, or one needs to be changed, select
Production→Experimental Results and the Experimental Results will appear (Figure 11-9).

Figure 11-9 VWF Production Mode showing the Experimental Results Dialog

11.3.9.1 Control Items

The dialog shows a scrolling list with a line for each output. Next to the name of each output
are four values: Experimental Result, Modeled Result, Error Delta, and Predicted Value.

• Experimental Result: This is the measured value. It can be set from information provided
by the RSM as it is passed from the VWF, or it can be added or modified later using the
text field.
• Modeled Result: As previously mentioned, the experimental result is measured when all
inputs are set to their nominal values. The modeled result shows the value that is calculated
by the RSM and is a measure of the accuracy of the model. It also used to make a first-
order error correction of the model.
• Error Delta: The error delta is the difference between the experimental measured value
and the modeled value when all inputs are nominal. The smaller this error, the more
accurate the model. This delta is used to error-correct the model.
• Predicted Value: This shows the modeled result after error-correction has been applied.
It is the same as the experimental results, to show that after error-correction, the model is

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more accurate (when the inputs are nominal).

To change the experimental result for any output, select the appropriate row from the list, enter
the new value in to the text field provided, and press the Update button. Once all new values
have been made, click on the Apply button to commit the changes.

11.3.9.2 Uses
A measured result for an output parameter allows TonyPlot to make a simple error correction
to a model of that parameter. The value shown as the “error delta” is added to values obtained
from a model to “shift” the response curve to a more accurate position. The nominal case is
used for this calibration (i.e. when all inputs are at their nominal vales), and the result applied
for all modeled values.

11.3.10 Optimizer Setup

The Synthesis mode of the Production dialog provides two synthesis methods. One method
is the Levenberg-Marquardt optimizer. The parameters for the optimizer can be changed in
the Optimizer Setup dialog (Figure 11-10). The available parameters and their default values
are:

• Max. no of iterations (100)

• Norm of gradient bound (1e-6)
• Sum of squares difference (1e-11)
• Marquardt initial value (0.1)
• Marquardt scale factor (2)
• Marquardt upper bound (1000)
• Switch (0.1)
• Maximum Jacobian (100)
• Maximum RMS error (1)
• Maximum average error (1)
• Maximum maximum error (1)
• Maximum iterations (4)
• Noise level (1e-18)
• Error ceiling (100)

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Figure 11-10 VWF Production Mode with Optimizer Setup selected

11.3.11 ASA Setup

The Synthesis mode of the Production dialog provides two synthesis methods. One method
is Adaptive Simulated Annealing (ASA). The parameters for ASA can be changed in the ASA
Setup dialog (Figure 11-11). The available parameters and their default values are:

• Limit acceptances (10000)

• Limit generated (99999)
• Cost precision (5%)
• Maximum cost repeat (1)
• Number cost samples (5)
• Cost parameter scale (1)

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• Temperature anneal scale (100)

• Testing frequency modulus (5)

Figure 11-11 VWF Production Mode with ASA Setup selected

ASA code is made available under terms of the GNU general public license for libraries. See
the file $SILVACO/etc/gnu_license for details about this license.

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12. Preferences

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12.1 Overview
TonyPlot has many preferences that you can set. You can alter these preferences to suit your
needs. All preferences can be viewed and modified using the Preferences dialog. To open the
preferences dialog, select Edit→Preferences….

12.2 Manage Preferences

The Preferences dialog can import and export settings. Figure 12-1 shows the Manage
Preferences settings in the Preferences dialog.

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Figure 12-1 Manage Preferences

12.2.1 Exporting Preferences

To export settings to a file (*.spf), click the Export button. The Export Preferences dialog will
then appear (Figure 12-2). This dialog has two parts: the name of the file to be exported and
the desired preferences to export. First, browse to the desired path and type a filename in the
dialog. Then, use the tree to expand and collapse the preferences to export. Checking the box
next to All checks all preferences boxes in the tree. Unchecking the box next to All unchecks
all preferences boxes. If the checkbox next to All has a gray background, some box or boxes
below were unchecked. Finally, click the Export button. The *.spf file is written with all
desired preferences. This file can be distributed to other users and then imported into TonyPlot
to acquire the preferences.

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Figure 12-2 Export Preferences Dialog

12.2.2 Importing Preferences

After settings are exported to a *.spf file, they may be imported into TonyPlot on any
computer. To import a preferences file, click the Import button on the Manage Settings
window of the Preferences dialog. The Import Preferences dialog will appear (Figure 12-3).
In this example in Figure 12-3, only the Materials from the preferences.spf preferences file
will import into the existing TonyPlot preferences. This makes it easy to pick and choose
which settings you may want to import from different preferences files. To import preferences
from multiple files, repeat the steps to import, checking only the preferences you want from
each specified file.

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Figure 12-3 Import Preferences Dialog

12.2.3 Factory Settings

To reset the preferences back to the original defaults, click the Factory Settings button. The
dialog in Figure 12-4 appears to confirm whether you want to reset to the default settings.

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Figure 12-4 Confirm Factory Settings Dialog

12.2.4 Recent Files

To clear the recent file menus from memory, press the Recent Files button, then click Yes on
the confirmation dialog.

12.3 Application
12.3.1 Toolbars
• Display large icons: This controls the size of the icons on the toolbar.
• Display text labels: This controls whether descriptive text is shown beneath the icons on
the toolbar.
• Display hints: This controls whether tool tips are displayed when you hover the mouse
cursor over an icon on the toolbar.
• Customize: Clicking this button displays a dialog that allows you to customize which
buttons are currently shown on the toolbar.

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Figure 12-5 Toolbars Settings

12.3.2 Shortcuts
• Assign: This customizes which keyboard shortcuts you use for any menu item. Select the
menu item you wish to customize. If there is a shortcut currently assigned to it, it will
appear in the Current Keys box. Press your new desired shortcut (e.g., Ctrl+A) and it will
appear in the Press new shortcut key box. It will also tell you if the shortcut is currently
being used for another menu item. Press the Assign button to assign the new shortcut to
the menu item.
• Remove: This removes the currently assigned keyboard shortcut from the current menu
item.
• Details: This gives an overview of all the currently assigned shortcuts.

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Figure 12-6 Shortcuts Settings

12.4 Rendering
12.4.1 Colors
This allows you to set the default colors for the foreground and background, as well as the
various parts of the structure being displayed.

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Figure 12-7 Rendering – Colors Settings

12.4.2 Fonts
This allows you to set the default font family used in TonyPlot.

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Figure 12-8 Rendering – Fonts Settings

12.5 Settings
12.5.1 1D/2D Draw
• Grid level: This controls whether the axis grid is drawn on top of the displayed structures or
underneath them. The axis grid is controlled from the Annotation dialog.
• Mesh level: This controls whether the simulation mesh is drawn on top of the displayed
structures or underneath them. The simulation mesh is controlled from the Display dialog for
either 2D Mesh plots or Cross Section plots.
• Mark frequency: For line plots, this controls the number of marks or points that are drawn
along the curve. 1 draws a mark at every data point, while any other value draws marks at the
specified frequency.
• Log axis numbers: When log axes are displayed on either Cross Section or XY Graph plots,
the way numbers are drawn depending on this item. The number 3 is used as an example.
• Linear axis numbers: When linear axes are displayed, the way the numbers are drawn can be

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 Preferences

controlled with this preference.

• Line widths: This group of controls sets the thickness of the lines used to draw Graph Lines,
Edges (2D Mesh, Cross Section), Vectors, Cutlines, Junctions, and Mask lines. 1 represents
normal thickness, with 2 to 4 representing increasingly thicker lines.
• Electrodes Drawn: When electrodes are drawn in mesh plots, TonyPlot indicates them by
using a hashing in the defined color for electrodes. If this property is set to With Names, then
the names of the electrodes (where defined) are also drawn at a point near to the actual
electrode region.
• Min Contour: This determines whether the minimum contour is displayed as transparent.

Figure 12-9 1D/2D Draw Settings

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12.5.2 1D/2D Plot

• XY plot ratio: This controls the relative scaling in the X and Y directions of the data. If To
Window is chosen the axes scale independently so that the whole window is occupied. If To
Data is chosen, the axes scale together so that the aspect ratio of the data is maintained. In this
mode, at least one of the axes span the subwindow.
• Snap Mode: This controls the snap mode when drag-zooming or using the ruler tool in
TonyPlot. It is turned off by default. You can choose to have TonyPlot snap to points on a 2D
Mesh, or to the edges of 2D structures.
• Creating Overlays: When creating overlays, this item either allows you to leave the original
plots in place (choose Leaves Originals) or delete them (choose Deletes Originals). If you
delete the originals, you can retrieve them by splitting the overlay. If they remain, splitting the
overlay duplicates the originals.
• Monitor Plots: This allows you to have TonyPlot monitor loaded files for any changes. If the
file changes, TonyPlot will reload it. You can change how often TonyPlot scans files for
changes.
• Anti-Alias Graphics: This controls whether TonyPlot uses anti-aliasing when drawing
graphics primitives.
• Duplicate: When a plot is duplicated, the display settings can be applied to the new plot. This
causes the new plot to look identical to the original. If you select Structure Only, it will use
a default display setting for the new plot.
• Contour Color Sets: Sets the default color palette used when contour plots are drawn.
• Default Number Of Contour Colors: Sets the default number of steps used when drawing
contour type plots.

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Figure 12-10 1D/2D Plot Settings

12.5.3 General
• Load/Save Dialog: If checked, TonyPlot will remember the last working directory used
in load and save dialogs.
• Quantity/Impurity Lists: This allows you to display quantities in dialogs such as the
Contours Dialog in alphabetical order or unsorted.
• Minimum doping: This either displays doping concentrations to their actual minimum
values (choose Actual) or to a specified value (choose Clip to) with the value in the text
field indicating the minimum value at which doping is clipped.
• Log of zero: When plotting results that involve the logarithm of zero (in any base),
TonyPlot uses this predefined number as the result. Zero is used by default.

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 Preferences

Figure 12-11 General Settings

12.5.4 Legends
Each legend position item provides eight options. If you select Off, then that legend will not
be drawn. If you select any of the six specific positions, the legend will be drawn in that
position in the plot. If the icon with the arrow is displayed, then the legend has been positioned
by hand and is in none of the six standard locations. For more information, see Legends.

• Contours: There are three contour legends: one for each set. There are three items to
control each one separately.
• Regions: This indicates the color used to distinguish each material region or region

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parameter in 1D and 2D Mesh plots.

• Graphs: The Line legend for any graph plot, showing line colors and mark types.
• Vectors: The vector legend for 2D Mesh plots.
• Levels: The level legend for overlay plots.
• Legend Type: This sets the ways the legends are drawn in plots. Transparent (the
default) allows the legend box to show the plot underneath. Opaque covers over any part
of the plot under the legend.
• Function Label: This determines whether functions appear on legends as names (e.g.,
Function 1) or as their definitions.

Figure 12-12 Legends Settings

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 Preferences

12.5.5 Tools
• Cutline X Axis: There are three methods for marking the X axis on cutline profiles. By
default, the X coordinate is relative to the start of the line, and so measures distance along
the line. If you select Absolute, the axis shows the X coordinate of the original mesh (if
the cutline is horizontal) or the Y coordinate (if the cutline is vertical). Cutlines that are
neither horizontal nor vertical show a Relative X axis. If you select Interface, the X axis
centers around the first material interface in the cross section. For example, the first
interface is at X=0. If no interface exists, a Relative X axis will be drawn.
• Probe Impurities: This controls how impurity values reported by the Probe tool are
shown. By default, true linear scale values are shown. Select Log of value to see the values
on a log scale.
• Panner Jump: When panning by using the arrow keys, this controls the amount of the
jump, given as a percentage of the screen width.
• Pointer Readout Precision: This controls the precision of the pointer readout in the status
bar.

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Figure 12-13 Tools Settings

12.6 Sequence
12.6.1 Colors
TonyPlot uses sequence colors whenever a group of items are plotted, and each needs its own
color. Examples are lines on items, such as Graph and Cross Section plots, regions, and levels.
The colors used are defined by the list of sequence colors indicated on this dialog. For
example, if the first color is red, the level one is Red, the first cross section profile is Red,
region 1 is Red, and so on. If you need more than twelve colors, the color sequence repeats at
one.

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Figure 12-14 Sequence – Colors Settings

12.6.2 Lines
Graph lines are represented by Lines and Marks. TonyPlot allows you to change the line type
of these graph lines. You can choose among Solid, Dash, Dot, Dash Dot, and Dash Dot Dot.

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Figure 12-15 Sequence – Lines Settings

12.6.3 Marks
Graph lines are represented by Lines and Marks. TonyPlot uses different mark types to
represent either quantities or levels. You can define these mark types in this dialog. The types
are: Cross, Circle, Plus, Triangle, Square, and Star. This dialog also allows you to change
the size and width of the marks.

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Figure 12-16 Sequence – Marks Settings

12.7 Viewing
12.7.1 Axis
• Appearance: Determines the initial visibility and 3D drawing mode of the axes. When the
3D Draw mode is set to Lines, the axes are initially drawn as thin lines. When it is set to
Cylinders, the axes are drawn using three dimensional cylinders and cones. The initial
appearance can be overridden for each plot by modifying the axis properties in the Object
Browser. For more information, see Section 2.7.1 Object Browser.

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 Preferences

Figure 12-17 Axis Settings

12.7.2 Camera
• Projection: This option controls whether 3D structures are drawn using a perspective or
orthographic view. The angle control sets the vertical field of view, measured in degrees.
• Scaling: Restricts scaling (zooming) to the selected objects axes.
• Coordinate System: When the coordinate system Selection is set to Auto, TonyPlot will
determine the orientation of the coordinate system by examining the source of the structure
data. This can be overridden by setting the Selection to User-Defined and picking either a
Right-handed or Left-handed convention.
• Depth Cue: This creates the illusion of fog within a 3D scene. Distant objects blend into
the fog more than near objects.

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 Preferences

Figure 12-18 Camera Settings

12.7.3 Lights
TonyPlot uses two directional light sources to illuminate 3D scenes. Each light source has the
following properties:

• State: This controls whether the light source is switched on or off.

• Color: Sets the color of the light source.
• Intensity: Sets the light source’s intensity (brightness)
• Latitude: Sets the latitudinal position of the light source in degrees. A latitude of 0 degrees
represents a position on the equator, and 90 degrees represents the north pole.

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 Preferences

• Longitude: Sets the longitudinal position of the light source in degrees. A longitude of 0
degrees represents a position closest to the observer, and 90 degrees represents the right-
hand side of the display.

Figure 12-19 Lights Settings

12.7.4 Materials
This allows you to customize the colors of materials. You can also choose if the material is
displayed on the materials legend or not.

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 Preferences

Figure 12-20 Materials Settings

12.7.5 Structure
• Contour Outlines: This sets whether or not stepped contours are drawn with an outline.
If Enabled is checked, the stepped contours are drawn an outline thickness set by Width.
• Materials: Show air determines whether or not the material “air” is drawn on the plot.
Show gas does the same for materials “gas” and “gas backside”.
• Other Settings: Mesh width sets the width (thickness) of lines drawn in Mesh views.

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 Preferences

Figure 12-21 Structure Settings

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 Appendix A Data Files

13. Appendix A Data Files

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 Appendix A Data Files

13.1 User Data Files

User data files are ASCII text files that can be loaded into TonyPlot and have an easy-to-read
format. This means that data from external sources can easily be read into TonyPlot. Those
who have their own sets of data already, maybe from other software packages or from
experimental results, find this format useful, since it allows you to apply the features of
TonyPlot to that data. You can also compare data files to other files types. This makes it simple
to compare simulation results from Silvaco simulators with data obtained from experiments.

13.1.1 Data Format

Data files should be constructed in the following manner.

<title line>
<r> <c> <t>
<title 1>
<title 2>
...
<title t>
<x11> <x12> ..... <x1c>
<x21> <x12> ..... <x2c>
<x31> <x12> ..... <x3c>
... ... ..... ...
<xr1> <xr2> ..... <xrc>

title line is a one line sequence of ASCII characters. No quotation marks should be used, but
spaces are fine. This is used as the main plot title, and must be present.

r is the number of rows in the file. This must be present, but can be set to zero, in which case
TonyPlot works out how many rows there are.

c is the number of columns. This must be present, but can be set to zero, in which case
TonyPlot works out how many columns there are.

t is the number of column titles. If not present, it defaults to zero (i.e., no titles).

title X is the title that is assigned to the data in column number X. These titles are optional,
but if given, the number of titles must match the t parameter in the second line.

xij is a data value, in row i, column j.

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Each column in the file represents data values for a certain quantity. If no titles are given, these
quantities assume default names User data 01 for the first column, User data 02 for
the second, and so on. The titles allow you to add more meaningful names.

13.1.2 Examples
The following are examples of some user data files and descriptions of each. These can be
entered into a text file and tested with TonyPlot, if needed.

13.1.2.1 Equation
This simple example plots a section of a curve of the equation y=sin(x). This type of file is
the simplest.

y = sin(x)
10 2
0.1 0.09983
0.2 0.19867
0.3 0.29552
0.4 0.38942
0.5 0.47943
0.6 0.56464
0.7 0.64422
0.8 0.71736
0.9 0.78333
1.0 0.84147

13.1.2.2 Transistor
This example contains information about an NMOS transistor. This example shows how
columns are named.

1.0 um NMOS Id/Vg

10 2 2
gate bias (V)
drain current (A)
0.0 1.0E-14
0.1 1.0E-13

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 Appendix A Data Files

0.2 1.0E-12
0.3 1.0E-11
0.4 1.0E-10
0.5 1.0E-09
0.6 1.0E-08
0.7 1.0E-07
0.8 5.0E-07
0.9 8.0E-07
1.0 8.9E-07

13.1.3 Display
User data files are treated in the same way as normal XY Graph plots in TonyPlot. This
display dialog for these plots is exactly the same as the Graph display dialog. In fact, once
loaded into TonyPlot, there is no difference between these two types of data at all.

13.2 Set Files

When a plot has been set up to display the desired set of information (e.g., using the display
dialogs, labels, annotation), it is possible to save this information into a .setx file so that the
display can be recreated automatically by TonyPlot. A .setx file contains XML-based
instructions that tell TonyPlot the steps needed to recreate the same display that was visible at
the time the set file was created. Therefore, when you load the same data file into TonyPlot
later, loading the .setx file avoids having to go through all the dialogs again.

Note: TonyPlot version 5 and later uses the newer .setx XML file format. You are still able to
read the older, legacy .set files, but you can only save to .setx. In addition, you now specify
one .setx file per plot.

13.2.1 Creating
To create a .setx file, choose File→Save Set File…. Move to the directory where the .setx file
is to be created, and enter the name of the desired file into the field marked File name. If the
file already exists, select it from the scrolling list (use the Filter to screen out undesired files
from the list). When you click on the Save button, the .setx file will be created. Confirmation
is required if the file is overwritten.

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13.2.2 Loading
To load a previously created .set or .setx file, locate the file by select the File→Load Set
File…. Then, click on the Open button and the view will update. You can also load .set or
.setx files from the command line with the -set option. If an error occurs when loading the
file, a warning notice appears.

Set files cannot record any actions you performed to create overlay plots, although they can
store setup information about the overlay itself.

Cross section plots that are generated using the Cutline tool can be created from the original
2D Mesh plot using .setx files. Therefore, you can save a view with a mesh and a cross section
and recreate it from the mesh alone. For example, suppose you load a mesh file called
pmos.str, creates a cutline cross section, and then save a set file called cut.setx. You
can then recreate the view with:

% tonyplot pmos.str -set cut.setx

The set file automatically takes a cutline from the PMOS mesh and display the cross section
plot as it appeared when the set file was created.

If you have two separate plots, each with its own saved .setx file, you would load it like this:

% tonyplot struct1.str -set struct1.setx struct2.str -set

struct2.setx

13.3 TonyPlot Spreadsheet Files

TonyPlot spreadsheet files are ASCII text files that can be loaded into TonyPlot and have an
easy-to-read, comma-separated format. This means that data from external sources can easily
be read into TonyPlot. You can also compare data files to other files types. This makes it
simple to compare simulation results from Silvaco simulators with data obtained from external
sources such as a spreadsheet.

13.3.1 Loading TonyPlot spreadsheet Files

TonyPlot automatically recognizes data files in this format. Therefore, it is unnecessary to use
any special command line options to load them.

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13.3.2 Data Format

Data files should be constructed in the following manner.

13.3.2.1 2D File
#spreadsheet
#columns,<second axis>
<columns num>,<chv1>,...<chvc>
<first axis>,<output>
<x11>,<x12>, ..... <x1c>
<x21>,<x22>, ..... <x2c>
<x31>,<x32>, ..... <x3c>
... ... ..... ...
<xr1>,<xr2>, ..... <xrc>

#spreadsheet is a required line, and tells tonyplot the type of information that follows.

#columns is required on the second line for 2D file types. The remainder of this line denotes
the second axis name.

columns num is the number of columns. This must be present. The values that follow on this
line are the column header values.

xij is a data value, in row i, column j.

13.3.2.2 1D File
#spreadsheet
<first axis>,<output>
<x11>,<x12>
<x21>,<x22>
<x31>,<x32>
... ...
<xr1>,<xr2>

#spreadsheet is a required line, and tells tonyplot the type of information that follows.

first axis is required on the second line for 1D file types, and denotes the first axis name.

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 Appendix A Data Files

output denotes the output name.

xij is a data value, in row i, column j.

13.3.3 Examples
The following are examples of some TonyPlot spreadsheet data files. These can be entered
into a text file and tested with TonyPlot, if needed.

13.3.3.1 1D Example
#spreadsheet
#time, temperature
0, 1000
0.5, 1100
1.0, 1200

13.3.3.2 2D Example
#spreadsheet
#columns, depth
3, 0, 0.1, 0.2
time, temperature
0, 1000, 1100, 900
0.5, 1100, 1200, 1000
1.0, 1200, 1300, 1100

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 Appendix B Models and Algorithms

14. Appendix B Models and

Algorithms

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 Appendix B Models and Algorithms

14.1 Introduction
Models and Algorithms used by one dimensional (1D) electrical solvers in DeckBuild and
TonyPlot.

Note: This appendix is intended to serve as a quick reference only. A detailed description of
the semiconductor device physical models is provided in the Atlas User’s Manual.

1D electrical solvers, available by using the extract command in DeckBuild or in TonyPlot,

are based on the iterative solution of the Poisson equation:

𝑑𝑖𝑣(𝜀∇Ψ) = 𝑞(𝑝 − 𝑛 + 𝑁𝐷+ − 𝑁𝐴− ) − 𝜌𝐹 14-1

where ψ is the potential, ε is the dielectrical permittivity, n and p are the electron and hole
concentrations, and ρF is the fixed charge.

QUICKBIP uses the continuity equations to calculate n and p:

1 14-2
𝑑𝑖𝑣 ⃗⃗⃗
𝐽𝑛 −𝑈𝑛 = 0
𝑞

1 14-3
𝑑𝑖𝑣𝐽⃗⃗⃗𝑝 − 𝑈𝑝 = 0
𝑞

Where:

⃗⃗⃗ 14-4
𝐽𝑛 = 𝑞𝜇𝑛 ⃗⃗⃗⃗
𝐸𝑛 ∙ 𝑛 + 𝑞𝐷𝑛 ∇𝑛

𝐽⃗⃗⃗𝑝 = 𝑞𝜇𝑝 ⃗⃗⃗⃗

𝐸𝑝 ∙ 𝑝 + 𝑞𝐷𝑝 ∇𝑝 14-5

𝑘𝑇 𝑘𝑇 14-6
𝐷𝑛 = 𝜇𝑛 , 𝐷𝑝 = 𝜇
𝑞 𝑞 𝑝

14.1.1 Physical Models

All electrical solvers take into account the following models and effects:

• Temperature dependence, such as kT/q or Eg

• Concentration-dependent mobility (with built-in temperature dependence)
• Field-dependent mobility (perpendicular field with built-in temperature dependence)
• Material work function (for MOS structures)
• Fixed interface charge

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14.2 Concentration Dependent Mobility

The concentration dependent mobilities for n and p respectively are:
∆𝜇𝑛 14-7
𝜇𝑛𝐷 = 𝜇𝑛𝑚𝑖𝑛 +
1 + 𝑁𝑡𝑜𝑡𝑎𝑙 ⁄𝑁𝑛𝑟𝑒𝑓

∆𝜇𝑝 14-8
𝜇𝑝𝐷 = 𝜇𝑝𝑚𝑖𝑛 +
1 + 𝑁𝑡𝑜𝑡𝑎𝑙 ⁄𝑁𝑝𝑟𝑒𝑓

Where:
𝑌 −0.57 14-9
𝜇𝑛𝑚𝑖𝑛 = 88 ∙ ( )
300

𝑌 −0.57 14-10
𝜇𝑝𝑚𝑖𝑛 = 54.3 ∙ ( )
300

𝑌 −2.33 14-11
∆𝜇𝑛 = 1252 ∙ ( )
300

𝑌 −2.33 14-12
∆𝜇𝑝 = 407 ∙ ( )
300

𝑌 2.456 14-13
𝑁𝑛𝑟𝑒𝑓 = 1.432 ∙ 1017 ( )
300

𝑌 2.456 14-14
𝑁𝑝𝑟𝑒𝑓 = 2.67 ∙ 1017 ( )
300

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 Appendix B Models and Algorithms

14.3 Field Dependent Mobility Model

The field dependent mobilities for n and p respectively are:
𝜇𝑛𝐷 14-15
𝜇𝑛 =
√1 + 1.54 ∙ 10−5 ∙𝐸

𝜇𝑝𝐷 14-16
𝜇𝑝 =
√1 + 5.35 ∙ 10−5 ∙𝐸

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14.4 Sheet Resistance Calculation

After solving the Poisson equation, the sheet resistance for each semiconductor layer is
estimated using:
𝑥𝑟𝑖𝑔ℎ𝑡
𝑑𝑥 14-17
𝑅𝑠ℎ = ∫
𝑥𝑙𝑒𝑓𝑡 𝑞𝜇𝑛 ∙ 𝑛 + 𝑞𝜇𝑝 ∙ 𝑝

xleft and xright are determined by the p-n junction locations and the semiconductor material
boundaries.

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 Appendix B Models and Algorithms

14.5 Threshold Voltage Calculation

Threshold voltage calculation is based on the calculated sheet resistance. In MOS mode (1D
vt extraction), the solver will calculate threshold voltage automatically. First, the conductance
of the channel region will be calculated for each gate voltage applied. If an NMOSFET
structure is assumed, then:
𝑥𝑖𝑛𝑣
(𝑞𝜇𝑛 ) 14-18
𝑔(𝑉𝑔 ) = ∫ ⁄
𝑛𝑑𝑥
𝑂

O corresponds to the oxide-silicon interface and xinv is the boundary of the inversion layer.
Threshold voltage will be determined using the g(Vg) curve as an intersection with the Vg axis
of the straight line drawn through two points on the g(Vg) curve, corresponding to the
maximum slope region shown below.

g(Vg)

“maximum slope” line

Vth Vg

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 Appendix B Models and Algorithms

14.6 Breakdown Voltage Calculation

Breakdown voltage calculation is based on estimation of ionization integrals for electrons and
holes. Breakdown is determined by the condition that one of the integrals is greater than 1.
The ionization rates are calculated using the following equations (See the Selberherr model in
the Atlas User’s Manual):
𝐵𝑁 𝐵𝐸𝑇𝐴𝑁 14-19
𝛼𝑛 = 𝐴𝑁 ∙ 𝑒𝑥𝑝 [− ( ) ]
𝐸

𝐵𝑃 𝐵𝐸𝑇𝐴𝑃 14-20
𝛼𝑝 = 𝐴𝑃 ∙ 𝑒𝑥𝑝 [− ( ) ]
𝐸

where:

AN = AN1 if E < EGRAN AN = AN2 if E > EGRAN

AP = AP1 if E < EGRAN AP = AP2 if E > EGRAN
BN = BN1 if E < EGRAN BN = BN2 if E > EGRAN
BP = BP1 if E < EGRAN BP = BP2 if E > EGRAN

The values of the parameters ANI, AN2, AP1, AP2, BN1, BN2, BP1, BP2, BETAN, BETAP, EGRAN
are user-definable (through the extract command or pop-up menu). Their default values
are:

AN1=7.03e5 cm-1
AN2=7.03e5 cm-1
BN1=1.231e6 V/cm
BN2=1.231e6 V/cm
AP1=6.71e5 cm-1
AP2=1.582e6 cm-1
BP1=1.693e6 V/cm
BP2=2.036e6 V/cm
BETAN=1.0 (unitless)
BETAP=1.0 (unitless)
EGRAN=4e5 V/cm

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 Appendix C Greek and Math Characters

15. Appendix C Greek and

Math Characters

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 Appendix C Greek and Math Characters

Table 15-1 Greek and Math Characters

Character Tag Character Tag Character Tag

α <alpha> Δ <Delta> ∃ <exist>

β <beta> Ε <Epsilon> ∅ <empty>

γ <gamma> Ζ <Zeta> ∇ <nabla>

δ <delta> Η <Eta> ∈ <isin>

ε <epsilon> Θ <Theta> ∉ <notin>

ζ <zeta> Ι <Iota> ∏ <prod>

η <eta> Κ <Kappa> ∑ <sum>

θ <theta> Λ <Lambda> √ <radic>

ι <iota> Μ <Mu> ∞ <infin>

κ <kappa> Ν <Nu> ∧ <and>

λ <lambda> Ξ <Xi> ∨ <or>

μ <mu> Ο <Omicron> ∩ <cap>

ν <nu> Π <Pi> ∪ <cup>

ξ <xi> Ρ <Rho> ∫ <int>

ο <omicron> Σ <Sigma> ≈ <asymp>

π <pi> Τ <Tau> ≠ <ne>

ρ <rho> Υ <Upsilon> ≡ <equiv>

σ <sigma> Φ <Phi> ≤ <le>

τ <tau> Χ <Chi> ≥ <ge>

υ <upsilon> Ψ <Psi> ⊂ <subset>

φ <phi> Ω <Omega> ⊃ <supset>

χ <chi> Å <Angstrom> ° <deg>

<psi> ¬ <not> × <times>

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 Appendix C Greek and Math Characters

Character Tag Character Tag Character Tag

ω <omega> ± <plusmn> ⌊ <lfloor>

å <angstrom> · <middot> ⌋ <rfloor>

Α <Alpha> → <rarr> ⌈ <lceil>

Β <Beta> ∀ <forall> ⌉ <rceil>

Γ <Gamma> ∂ <part>

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 Index

16. Index
2

2D Mesh Plot Display .............................................................................................................................................. 66

3D Mesh Plot Display .............................................................................................................................................. 79

Adaptive Simulated Annealing .............................................................................................................................. 125

Base Window.......................................................................................................................................................... 17

Edit Menu .......................................................................................................................................................... 19

File Menu ........................................................................................................................................................... 18

Help Menu ......................................................................................................................................................... 27

Production Menu ............................................................................................................................................... 25

Tools Menu ........................................................................................................................................................ 24

View Menu ......................................................................................................................................................... 21

Window Menu ................................................................................................................................................... 27

Breakdown Voltage Calculation ............................................................................................................................ 175

Calculation

Breakdown Voltage .......................................................................................................................................... 175

Sheet Resistance .............................................................................................................................................. 173

Threshold Voltage ............................................................................................................................................ 174

Command Line Options .......................................................................................................................................... 16

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 Index

Concentration Dependent Mobility ...................................................................................................................... 171

Cross Section Display .............................................................................................................................................. 93

Field Dependent Mobility Model .......................................................................................................................... 172

Functions

Defining.............................................................................................................................................................. 62

Macros ............................................................................................................................................................... 63

Operators ........................................................................................................................................................... 63

Syntax ................................................................................................................................................................ 63

Use Of ................................................................................................................................................................ 61

Isosurfaces ............................................................................................................................................................. 83

Legacy VWF Production Mode .............................................................................................................................. 116

ASA Setup......................................................................................................................................................... 135

Calibration........................................................................................................................................................ 122

Dialog ............................................................................................................................................................... 117

Enabling ........................................................................................................................................................... 117

Experimental Results ........................................................................................................................................ 133

Failure Analysis ................................................................................................................................................ 120

Input Distributions ........................................................................................................................................... 130

Input Parameter Ranges ................................................................................................................................... 128

Input Sliders ..................................................................................................................................................... 119

Optimizer Setup ............................................................................................................................................... 134

RSM Control ..................................................................................................................................................... 118

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SPC Limits ......................................................................................................................................................... 131

Synthesis .......................................................................................................................................................... 124

Yield Analysis.................................................................................................................................................... 126

Legends

Drawing Styles .................................................................................................................................................... 31

Positioning ......................................................................................................................................................... 30

Types.................................................................................................................................................................. 30

Object Browser ....................................................................................................................................................... 35

Overlays ............................................................................................................................................................... 111

Controlling ....................................................................................................................................................... 113

Creating ........................................................................................................................................................... 112

Cutlines ............................................................................................................................................................ 115

Display ............................................................................................................................................................. 114

Identifying Data ................................................................................................................................................ 114

Level Names ..................................................................................................................................................... 114

Preferences ...................................................................................................................................................... 115

Splitting ............................................................................................................................................................ 113

Physical Models .................................................................................................................................................... 170

Preferences .......................................................................................................................................................... 137

1D/2D Draw ..................................................................................................................................................... 146

1D/2D Plot ....................................................................................................................................................... 148

Axis .................................................................................................................................................................. 156

Camera............................................................................................................................................................. 157

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Colors ............................................................................................................................................................... 144

Exporting .......................................................................................................................................................... 139

Factory Settings ................................................................................................................................................ 141

Fonts ................................................................................................................................................................ 145

General ............................................................................................................................................................ 149

Importing ......................................................................................................................................................... 140

Legends ............................................................................................................................................................ 150

Materials .......................................................................................................................................................... 159

Recent Files ...................................................................................................................................................... 142

Sequence Colors ............................................................................................................................................... 153

Sequence Lines ................................................................................................................................................. 154

Sequence Marks ............................................................................................................................................... 155

Shortcuts .......................................................................................................................................................... 143

Structure .......................................................................................................................................................... 160

Toolbars ........................................................................................................................................................... 142

Tools ................................................................................................................................................................ 152

Production Mode (Legacy) ..................................................................................... See Legacy VWF Production Mode

Response Surface Model ...................................................................................................................See RSM Display

RSM Display ............................................................................................................................................................ 96

1D Graphs .......................................................................................................................................................... 98

2D Contours ....................................................................................................................................................... 99

3D Surfaces ........................................................................................................................................................ 99

Set Files

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Creating ........................................................................................................................................................... 165

Loading ............................................................................................................................................................ 166

Sheet Resistance Calculation ................................................................................................................................ 173

Statistics Display ................................................................................................................................................... 101

Box Plot ............................................................................................................................................................ 104

Histograms ....................................................................................................................................................... 103

Pie Charts ......................................................................................................................................................... 104

Scatter Plot ...................................................................................................................................................... 104

Sunray Plot ....................................................................................................................................................... 104

Threshold Voltage Calculation .............................................................................................................................. 174

User Data Files

Data Format ..................................................................................................................................................... 163

Display ............................................................................................................................................................. 165

Examples .......................................................................................................................................................... 164

XYG Display ............................................................................................................................................................ 87

Cartesian Graphs ................................................................................................................................................ 89

Polar Charts ........................................................................................................................................................ 90

Smith Charts ....................................................................................................................................................... 90

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