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The document outlines principles of ellipsometry, focusing on thin dielectric layers and their interaction with light waves. It includes tasks related to calculating spatial phases, transmission and reflection amplitudes using Fresnel coefficients for both s- and p-polarised light. The document also references key literature for further understanding of spectroscopic ellipsometry.

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6 views

Assignment3 (2)

The document outlines principles of ellipsometry, focusing on thin dielectric layers and their interaction with light waves. It includes tasks related to calculating spatial phases, transmission and reflection amplitudes using Fresnel coefficients for both s- and p-polarised light. The document also references key literature for further understanding of spectroscopic ellipsometry.

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historiasdecrimenes34
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CÉSAR A.

HERREÑO-FIERRO
Principios de Elipsometrı́a Assignment 3 2019/10/04
Espectroscópica Thin film layers - Fresnel Coefficients
[email protected]

1 Part I
Consider a thin dielectric layer of thickness d and refractive index n, surrounded by a homogeneous environ-
ment of refractive index n0 , as shown in Fig. 1. The film is illuminated from the top side by a light wave of
unitary amplitude (i.e. E0 = 1 V/m) and angular frequency ω, at a incident angle θ0 .

Figure 1: Dielectric thin film

1.1 Task 1
Compute the spatial phase introduced into the wave function as the light wave goes through the thin film.
For this, decompose the wave vector into parallel- and perpendicular-to-the-interface (x- and z-) components,
respectively, and take into account the Snell law to relate the parallel-to-the-interface components of the wave
vectors in each medium.

1.2 Task 2
Let β the spatial phase computed in Task 1 and show that the amplitude of the transmitted wave to the bottom
side of the environment is given by t0,1 t1,0 exp −iβ, where ti,j denotes the transmission Fresnel coefficient
from medium i to medium j, given by

2ni cos θi
ti,j = , (1)
ni cos θi + nj cos θj

for s-polarised light, and


2ni cos θj
ti,j = , (2)
ni cos θj + nj cos θi
for p-polarised light.

2 Part II
Note that the light wave suffers multiple reflections inside the thin film, so that the total reflected wave
from the thin film is a superposition of the reflected wave in the first interface (primary wave), plus multiple
transmitted waves from the thin film to the top side of the environment (Fig.2).

1
Figure 2: Multiple reflections in the thin film

2.1 Task 3
Show that the total transmitted and reflected amplitudes in the thin film are respectively given by the infinite
series
2 4
t = t0,1 t1,0 exp −iβ + t0,1 t1,0 r1,0 exp −3iβ + t0,1 t1,0 r1,0 exp −5iβ + ... (3)
and
3
r = r0,1 + t0,1 t1,0 r1,0 exp −2iβ + t0,1 t1,0 r1,0 exp −4iβ + ... (4)
where ti,j is given by (1) for s-modes and (2) for p-modes, and ri,j is given by

ni cos θi − nj cos θj
ri,j = , (5)
ni cos θi + nj cos θj

for s-polarised light, and


ni cos θj − nj cos θi
ri,j = , (6)
ni cos θj + nj cos θi
for p-polarised light.

2.2 Task 4
Demonstrate that t and r can be written as follows:
r0,1 + r1,0 exp −2iβ
r = (7)
1 + r0,1 r1,0 exp −2iβ
t0,1 t1,0 exp −iβ
t = , (8)
1 + r0,1 r1,0 exp −2iβ

where ti,j and ri,j are given, respectively, by (1) and (5) for s-polarised modes, and (2) and (6) for p-polarised
modes.
Further help can be found in [1, 2].

References
[1] F UJIWARA , H. Spectroscopic ellipsometry: principles and applications. John Wiley & Sons, 2007.
[2] T OMPKINS , H., AND I RENE , E. A. Handbook of ellipsometry. William Andrew, 2005.

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