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FINALPROJECTMOSFET

The document outlines calculations for surface potential versus channel length for a 30nm technology node, detailing parameters such as temperature, doping concentrations, and permittivity values. It includes complex equations for various voltage and capacitance calculations, as well as the derivation of key parameters like Vgs and beta values. The calculations are aimed at modeling semiconductor behavior in nanoscale devices.

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12 views

FINALPROJECTMOSFET

The document outlines calculations for surface potential versus channel length for a 30nm technology node, detailing parameters such as temperature, doping concentrations, and permittivity values. It includes complex equations for various voltage and capacitance calculations, as well as the derivation of key parameters like Vgs and beta values. The calculations are aimed at modeling semiconductor behavior in nanoscale devices.

Uploaded by

arup
Copyright
© © All Rights Reserved
We take content rights seriously. If you suspect this is your content, claim it here.
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% Surface potential v/s channel length plots for 30nm technology node

%initial values for first plot: K= boltzman constant,T=room


%temp=300k,Na=acceptor Conc.,Np=donor conc.,ni=intrinsic carrier conc,Eg=band
%gap,PerSi=Permitivity of Silicon,PerOx=Permitivity of oxide
K=1.38*10^-23;T=300;ni=1.5*10^10;q=1.6*10^-19;Eg=1.1;
PerSi=11.8*8.854*10^-14;PerOx=3.9*8.85*10^-14;Vsb=0.1;Vgsf=0;Vgsb=0;
Vgbf=0;Vgbb=0;Np=1.7*10^18;Lp=6*10^-7;Na=4*10^17;
phiM1=4.5;phiM2=4.4;
%for 30 nm technology tox=oxide thickness ,xj=junction depth
L=40*10^-7;tox=1.5*10^-7;xj=12*10^-7;L1=15*10^-7;Vds=0.2;
Vdb=Vds+Vsb;phit=(K*T)/q;phis=(4.15+ Eg/2+phit*(log(Na/ni)));
VfbfP=-Eg/2-phit*(log(Np/ni));VfbbP=-Eg/2-phit*(log(Np/ni));
Vbi=Eg/2+phit*(log(Na/ni));phifN=phit*(log(Na/ni));
Vfbf1=(phiM1-phis)/q;
Vfbb1=(phiM1-phis)/q;
Vfbf2=(phiM2-phis)/q;
Vfbb2=(phiM2-phis)/q;
VfbfP1=(VfbfP-Vfbf1);
VfbbP1=(VfbbP-Vfbb1);
VfbfP2=(VfbfP-Vfbf2);
VfbbP2=(VfbbP-Vfbb2);
Cox=PerOx/tox;
gammaP=(sqrt(2*q*PerSi*Np))/Cox;
gammaA=(sqrt(2*q*PerSi*Na))/Cox;
SiS1=((-gammaP/2)+sqrt(((gammaP^2)/4)+(Vgbf-VfbfP1)-(Vgbb-VfbbP1)))^2;
SiS2=((-gammaP/2)+sqrt(((gammaP^2)/4)+(Vgbf-VfbfP)-(Vgbb-VfbbP)))^2;
SiS3=((-gammaA/2)+sqrt(((gammaA^2)/4)+(Vgbf-Vfbf1)-(Vgbb-Vfbb1)))^2;
SiS4=((-gammaP/2)+sqrt(((gammaP^2)/4)+(Vgbf-VfbfP2)-(Vgbb-VfbbP2)))^2;
Vgsf1=Vgsf+Vsb-VfbfP1; Vgsf2=Vgsf+Vsb-VfbfP;
Vgsf3=Vgsf+Vsb-Vfbf1; Vgsf4=Vgsf+Vsb-Vfbf2;
Vgsf5=Vgsf+Vsb-VfbfP; Vgsf6=Vgsf+Vsb-VfbfP2;
Vgsb1=Vgsb+Vsb-VfbbP1; Vgsb2=Vgsb+Vsb-VfbbP;
Vgsb3=Vgsb+Vsb-Vfbb1; Vgsb4=Vgsb+Vsb-Vfbb2;
Vgsb5=Vgsb+Vsb-VfbbP; Vgsb6=Vgsb+Vsb-VfbbP2;

Vgs1=Vgsf1-Vgsb1; Vgs2=Vgsf2-Vgsb2;
Vgs3=Vgsf3-Vgsb3; Vgs4=Vgsf4-Vgsb4;
Vgs5=Vgsf5-Vgsb5; Vgs6=Vgsf6-Vgsb6;

V1=Vbi+Vsb; V7=Vbi+Vdb;
xrs=(sqrt((2*PerSi*(V1))/(q*Np)));
xrd=(sqrt((2*PerSi*(V7))/(q*Np)));
cps=4*V1/Vbi;cpd=4*V7/Vbi;
xc=L*xrs/(xrs+xrd);
x1=0;x2=Lp;
y1=(xj+sqrt((2*PerSi*V1)/(q*Np)))/cps;
y2=sqrt((2*PerSi*SiS1)/(q*Np));
a1=(sqrt(y2)-sqrt(y1)) / (x2-x1);
b1=((x2*sqrt(y1))-(x1*sqrt(y2))) / (x2-x1);
t1=log(a1*x1+b1);t2=log(a1*x2+b1);
d1=sqrt((1/4)+Cox/(PerSi*(a1^2)));
beta1=(q*Np) / (2*PerSi*a1^2-Cox);

1
t111=t1:(-1)*10^-2:t2;
x111=(exp(t111)-b1)/a1;
x3=x2;x4=xc;y3=y2;y4=sqrt((2*PerSi*SiS2)/(q*Np));
a2=(sqrt(y4)-sqrt(y3)) / (x4-x3);
b2=((x4*sqrt(y3))-(x3*sqrt(y4))) / (x4-x3);
t3=log(a2*x3+b2);t4=log(a2*x4+b2);
d2=sqrt((1/4)+Cox/(PerSi*(a2^2)));
beta2=(q*Np) / (2*PerSi*a2^2-Cox);
t222=t3:(-1)*10^-2:t4;
x222=(exp(t222)-b2)/a2;
x5=x4;x6=L1;
y5=y4;
y6=sqrt((2*PerSi*SiS3)/(q*Na));
a3=(sqrt(y6)-sqrt(y5)) / (x6-x5);
b3=((x6*sqrt(y5))-(x5*sqrt(y6))) / (x6-x5);
t5=log(a3*x5+b3);t6=log(a3*x6+b3);
d3=sqrt((1/4)+Cox/(PerSi*(a3^2)));
beta3=(q*Na) / (2*PerSi*a3^2-Cox);
t333=t5:(-1)*10^-2:t6;
x333=(exp(t333)-b3)/a3;
x7=x6;x8=L-xc;y7=y6;
y8=sqrt((2*PerSi*SiS2)/(q*Np));
a4=(sqrt(y8)-sqrt(y7)) / (x8-x7);
b4=((x8*sqrt(y7))-(x7*sqrt(y8))) / (x8-x7);
t7=log(a4*x7+b4);t8=log(a4*x8+b4);
d4=sqrt((1/4)+Cox/(PerSi*(a4^2)));
beta4=(q*Na) / (2*PerSi*a4^2-Cox);
t444=t7:(1)*10^-2:t8;
x444=(exp(t444)-b4)/a4;
x9=x8;x10=L-Lp;y9=y8;
y10=sqrt((2*PerSi*SiS4)/(q*Np));
a5=(sqrt(y10)-sqrt(y9)) / (x10-x9);
b5=((x10*sqrt(y9))-(x9*sqrt(y10))) / (x10-x9);
t9=log(a5*x9+b5);t10=log(a5*x10+b5);
d5=sqrt((1/4)+Cox/(PerSi*(a5^2)));

beta5=(q*Np) / (2*PerSi*a5^2-Cox);
t555=t9:(1)*10^-2:t10;
x555=(exp(t555)-b5)/a5;
%region 6 calculation of a6,b6,d6,beta6
x11=x10;x12=L;y11=y10;
y12=(xj+sqrt((2*PerSi*V7)/(q*Np)))/cpd;
a6=(sqrt(y12)-sqrt(y11)) / (x12-x11);
b6=((x12*sqrt(y11))-(x11*sqrt(y12))) / (x12-x11);
t11=log(a6*x11+b6);t12=log(a6*x12+b6);
d6=sqrt((1/4)+Cox/(PerSi*(a6^2)));
beta6=(q*Np) / (2*PerSi*a6^2-Cox);
t666=t11:(1)*10^-2:t12;
x666=(exp(t666)-b6)/a6;
%calculation of A1,A2,A3,A4 and from that calculation of V2,V3,V4,V5
A1 = (V1-Vgs1-beta1*exp(2*t1)) * (csch((d1*t2)-(d1*t1))) * (d1*a1*exp((-t2-
t1)/2));
A1 = A1 - ((Vgs2+beta2*exp(2*t4)) * (csch((d2*t4)-(d2*t3)))* (d2*a2*exp((-t3-
t4)/2)));

2
A1 = A1 + ((Vgs2+beta2*exp(2*t3)) * ((d2*a2*coth((d2*t4)-(d2*t3))-
(a2/2)))*(exp(-t3))) + 2*a2*beta2*exp(t3);
A1 = A1 + ((Vgs1+beta1*exp(2*t2)) * ((d1*a1*coth((d1*t2)-
(d1*t1))+(a1/2)))*(exp(-t2))) - 2*a1*beta1*exp(t2);
A2 = -(Vgs3+beta3*exp(2*t6)) * (csch((d3*t6)-(d3*t5))) * (d3*a3*exp((-t5-
t6)/2));
A2 = A2 + ((Vgs3+beta3*exp(2*t5)) * (d3*a3*coth((d3*t6)-(d3*t5))-(a3/2)) *
(exp(-t5))) ;
A2 = A2 + ((Vgs2+beta2*exp(2*t4)) * ((d2*a2*coth((d2*t4)-(d2*t3))+(a2/2)) *
exp(-t4))) + 2*a3*beta3*exp(t5);
A2 = A2 - ((Vgs2+beta2*exp(2*t3)) * (csch((d2*t4)-(d2*t3))) * (d2*a2*exp((-t4-
t3)/2))) - 2*a2*beta2*exp(t4);
a11 = (d1*a1*(coth((d1*t2)-(d1*t1)))+(a1/2))*(exp(-t2))+(d2*a2*(coth((d2*t4)-
(d2*t3)))-(a1/2))*(exp(-t3));
a12=-(csch((d2*t4)-(d2*t3)))*(d2*a2*exp((-t3-t4)/2));a21=a12;
a22 = ((d2*a2*coth((d2*t4)-(d2*t3))+(a2/2))*(exp(-t4)))+((d3*a3*(coth((d3*t6)-
(d3*t5)))-(a3/2))*(exp(-t5)));
a23=(-1)*(csch((d3*t6)-(d3*t5)))*(d3*a3*exp((-t5-t6)/2));
a32=a23;
a33 = ((d3*a3*coth((d3*t6)-(d3*t5))+(a3/2))*(exp(-t6)))+((d4*a4*(coth((d4*t8)-
(d4*t7)))-(a4/2))*(exp(-t7)));
a13=0;
a14=0;
a24=0;
a31=0;
a41=0;
a42=0;
a15=0;
a51=0;
a25=0;
a52=0;
a35=0;
a53=0;
a34=-(csch((d4*t8)-(d4*t7)))*(d4*a4*exp((-t7-t8)/2));
a43=a34;
a44=((d4*a4*coth((d4*t8)-(d4*t7))+(a4/2))*(exp(-t8)))+((d5*a5*(coth((d5*t10)-
(d5*t9)))-(a5/2))*(exp(-t9)));
a45=-(csch((d5*t10)-(d5*t9)))*(d5*a5*exp((-t9-t10)/2));
a54=a45;
a55=((d5*a5*coth((d5*t10)-(d5*t9))+(a5/2))*(exp(-
t10)))+((d6*a6*(coth((d6*t12)-(d6*t11)))-(a6/2))*(exp(-t11)));
A3 = -(Vgs4+beta4*exp(2*t8)) * (csch((d4*t8)-(d4*t7))) * (d4*a4*exp((-t7-
t8)/2));
A3 = A3 + ((Vgs4+beta4*exp(2*t7)) * (d4*a4*coth((d4*t8)-(d4*t7))-(a4/2)) *
(exp(-t7))) ;
A3 = A3 - ((Vgs3+beta3*exp(2*t5)) * (csch((d3*t6)-(d3*t5))) * (d3*a3*exp((-t5-
t6)/2))) + 2*a4*beta4*exp(t7);
A3 = A3 + ((Vgs3+beta3*exp(2*t6)) * (d3*a3*coth((d3*t6)-(d3*t5))+(a3/2)) *
(exp(-t6))) - 2*a3*beta3*exp(t6);
A4 = -(Vgs5+beta5*exp(2*t10)) * (csch((d5*t10)-(d5*t9))) * (d5*a5*exp((-t10-
t9)/2));
A4 = A4 + ((Vgs5+beta5*exp(2*t9)) * ((d5*a5*coth((d5*t10)-(d5*t9))-(a5/2)))
*(exp(-t9)));

3
A4 = A4 + ((Vgs4+beta4*exp(2*t8)) * ((d4*a4*coth((d4*t8)-(d4*t7))+(a4/2)))
*(exp(-t8))) + 2*a5*beta5*exp(t9);
A4 = A4 - ((Vgs4+beta4*exp(2*t7)) * (csch((d4*t8)-(d4*t7))) * (d4*a4*exp((-t8-
t7)/2))) - 2*a4*beta4*exp(t8);
A5 = (V7-Vgs6-beta6*exp(2*t12)) * (csch((d6*t12)-(d6*t11))) * (d6*a6*exp((-
t11-t12)/2));
A5 = A5 + ((Vgs6+beta6*exp(2*t11)) * ((d6*a6*coth((d6*t12)-(d6*t11))-(a6/2)))
*(exp(-t11)));
A5 = A5 + ((Vgs5+beta5*exp(2*t10)) * ((d5*a5*coth((d5*t10)-(d5*t9))+(a5/2)))
*(exp(-t10))) + 2*a6*beta6*exp(t11);
A5 = A5 - ((Vgs5+beta5*exp(2*t9)) * (csch((d5*t10)-(d5*t9))) * (d5*a5*exp((-
t9-t10)/2))) - 2*a5*beta5*exp(t10);
delta=det([a11 a12 a13 a14 a15;a21 a22 a23 a24 a25;a31 a32 a33 a34 a35;a41 a42
a43 a44 a45;a51 a52 a53 a54 a55]);
V2 = det([a11 a12 a13 a14 a15;a21 a22 a23 a24 a25;a31 a32 a33 a34 a35;a41 a42
a43 a44 a45;a51 a52 a53 a54 a55]) / delta;
V3 = det([a11 A1 a13 a14 a15;a21 a22 a23 a24 a25;a31 A3 a33 a34 a35;a41 A4 a43
a44 a45;a51 a52 a53 a54 a55]) / delta;
V4 = det([a11 a12 A1 a14 a15;a21 a22 a23 a24 a25;a31 a32 A3 a34 a35;a41 a42 A4
a44 a45; a51 a52 A5 a54 a55]) / delta;
V5 = det([a11 a12 a13 A1 a15;a21 a22 a23 a24 a25;a31 a32 a33 A3 a35;a41 a42
a43 a44 a45;a51 a52 a53 A5 a55]) / delta;
V6 = det([a11 a12 a13 a14 A1;a21 a22 a23 a24 a25;a31 a32 a33 a34 A3;a41 a42
a43 a44 a45;a51 a52 a53 a54 a55]) / delta;
k1=(1/(sinh((d1*t2)-(d1*t1))));
k2=(V2-Vgs1-(beta1*exp(2*t2)));
k3=sinh((d1*t111)-(d1*t1));
k4=exp((t111-t2)/2);
k5=V1-Vgs1-beta1*(exp(2*t1));
k6=exp((t111-t1)/2);
k7=sinh((d1*t111)-(d1*t2));
Sis_1=k1*(k2*k4.*k3-k5*k6.*k7)+ beta1*exp(2*t111)+Vgs1 ;
% in region 2 surface potential given by Sis2
k1=(1/(sinh((d2*t4)-(d2*t3))));
k2=(V3-Vgs2-(beta2*exp(2*t4)));
k3=sinh((d2*t222)-(d2*t3));
k4=exp((t222-t4)/2);
k5=V2-Vgs2-beta2*(exp(2*t3));
k6=exp((t222-t3)/2);
k7=sinh((d2*t222)-(d2*t4));
Sis_2=k1*(k2*k4.*k3-k5*k6.*k7)+ beta2*exp(2*t222)+Vgs2;
% in region 3 surface potential given by Sis3
k1=(1/(sinh((d3*t6)-(d3*t5))));
k2=(V4-Vgs3-(beta3*exp(2*t6)));
k3=sinh((d3*t333)-(d3*t5));
k4=exp((t333-t6)/2);
k5=V3-Vgs3-beta3*(exp(2*t5));
k6=exp((t333-t5)/2);
k7=sinh((d3*t333)-(d3*t6));
Sis_3=k1*(k2*k4.*k3-k5*k6.*k7)+ beta3*exp(2*t333)+Vgs3;
% in region 4 surface potential given by Sis4
k1=(1/(sinh((d4*t8)-(d4*t7))));
k2=(V5-Vgs4-(beta4*exp(2*t8)));
k3=sinh((d4*t444)-(d4*t7));

4
k4=exp((t444-t8)/2);
k5=V4-Vgs4-beta4*(exp(2*t7));
k6=exp((t444-t7)/2);
k7=sinh((d4*t444)-(d4*t8));
Sis_4=k1*(k2*k4.*k3-k5*k6.*k7)+ beta4*exp(2*t444)+Vgs4;
% in region 5 surface potential given by Sis5
k1=(1/(sinh((d5*t10)-(d5*t9))));
k2=(V6-Vgs5-(beta5*exp(2*t10)));
k3=sinh((d5*t555)-(d5*t9));
k4=exp((t555-t10)/2);
k5=V5-Vgs5-beta5*(exp(2*t9));
k6=exp((t555-t9)/2);
k7=sinh((d5*t555)-(d5*t10));
Sis_5=k1*(k2*k4.*k3-k5*k6.*k7)+ beta5*exp(2*t555)+Vgs5;
% in region 6 surface potential given by Sis6
k1=(1/(sinh((d6*t12)-(d6*t11))));
k2=(V7-Vgs6-(beta6*exp(2*t12)));
k3=sinh((d6*t666)-(d6*t11));
k4=exp((t666-t12)/2);
k5=V6-Vgs6-beta6*(exp(2*t11));
k6=exp((t666-t11)/2);
k7=sinh((d6*t666)-(d6*t12));
Sis_6=k1*(k2*k4.*k3-k5*k6.*k7)+ beta6*exp(2*t666)+Vgs6;
% Sis01 is the surface potential for all
%Six region i.e equal to Sis1+Sis2+Sis3+Sis4+Sis5+Sis6 for the first plot
%x01 is the x axis for first plot.
x01=[x111 x222 x333 x444 x555 x666];
Sis01=[Sis_1 Sis_2 Sis_3 Sis_4 Sis_5 Sis_6];
Sis01=Sis01-phit*(log(Na/ni));
% Surface potential v/s channel length plots fo30nm technology node
%initial values for first plot: K=boltzman constant,T=room
%temp=300k,Na=acceptor Conc.,Np=donor conc.,ni=intrinsic carrier conc,Eg=band
%gap,PerSi=Permitivity of Silicon,PerOx=Permitivity of oxide
K=1.38*10^-23;T=300;ni=1.5*10^10;
q=1.6*10^-19;Eg=1.1;PerSi=11.8*8.854*10^-14;PerOx=3.9*8.85*10^-14;
Vsb=0.1;Vgsf=0;Vgsb=0;Vgbf=0;Vgbb=0;Np=1.2*10^18;Lp=6*10^-7;Na=4*10^17;
phiM1=5.25;phiM2=3.5;
%for 30 nm technology tox=oxide thickness ,xj=junction depth
L=30*10^-7;tox=2*10^-7;xj=12*10^-7;L1=15*10^-7;
Vds=0.5;
%calculation of values which will be same for all six regions
%phit=KT/q=thermal voltage, phif=fermi potential, Vfb=flat band
%voltage,Cox=oxide
%capacitance,Vbi=built in potential ,cps=curve fitting parameter by DESIS
%for source,cpd=curve fitting parameter for drain by DESIS for first plot.
Vdb=Vds+Vsb;
phit=(K*T)/q;phis=(4.15+ Eg/2+phit*(log(Na/ni)));
VfbfP=-Eg/2-phit*(log(Np/ni));
VfbbP=-Eg/2-phit*(log(Np/ni));
Vbi=Eg/2+phit*(log(Na/ni));
phifN=phit*(log(Na/ni));
Vfbf1=(phiM1-phis)/q;
Vfbb1=(phiM1-phis)/q;
Vfbf2=(phiM2-phis)/q;

5
Vfbb2=(phiM2-phis)/q;
VfbfP1=(VfbfP-Vfbf1);
VfbbP1=(VfbbP-Vfbb1);
VfbfP2=(VfbfP-Vfbf2);
VfbbP2=(VfbbP-Vfbb2);
Cox=PerOx/tox;
gammaP=(sqrt(2*q*PerSi*Np))/Cox;
gammaA=(sqrt(2*q*PerSi*Na))/Cox;
SiS1=((-gammaP/2)+sqrt(((gammaP^2)/4)+(Vgbf-VfbfP1)-(Vgbb-VfbbP1)))^2;
SiS2=((-gammaP/2)+sqrt(((gammaP^2)/4)+(Vgbf-VfbfP)-(Vgbb-VfbbP)))^2;
SiS3=((-gammaA/2)+sqrt(((gammaA^2)/4)+(Vgbf-Vfbf1)-(Vgbb-Vfbb1)))^2;
SiS4=((-gammaP/2)+sqrt(((gammaP^2)/4)+(Vgbf-VfbfP2)-(Vgbb-VfbbP2)))^2;
Vgsf1=Vgsf+Vsb-VfbfP1; Vgsf2=Vgsf+Vsb-VfbfP;
Vgsf3=Vgsf+Vsb-Vfbf1; Vgsf4=Vgsf+Vsb-Vfbf2;
Vgsf5=Vgsf+Vsb-VfbfP; Vgsf6=Vgsf+Vsb-VfbfP2;
Vgsb1=Vgsb+Vsb-VfbbP1; Vgsb2=Vgsb+Vsb-VfbbP;
Vgsb3=Vgsb+Vsb-Vfbb1; Vgsb4=Vgsb+Vsb-Vfbb2;
Vgsb5=Vgsb+Vsb-VfbbP; Vgsb6=Vgsb+Vsb-VfbbP2;
Vgs1=Vgsf1-Vgsb1; Vgs2=Vgsf2-Vgsb2;
Vgs3=Vgsf3-Vgsb3; Vgs4=Vgsf4-Vgsb4;
Vgs5=Vgsf5-Vgsb5; Vgs6=Vgsf6-Vgsb6;
V1=Vbi+Vsb; V7=Vbi+Vdb;
xrs=(sqrt((2*PerSi*(V1))/(q*Np)));
xrd=(sqrt((2*PerSi*(V7))/(q*Np)));
cps=4*V1/Vbi;cpd=4*V7/Vbi;
xc=L*xrs/(xrs+xrd);
%region 1 calculation of a1,b1,d1,beta1
x1=0;x2=Lp;
y1=(xj+sqrt((2*PerSi*V1)/(q*Np)))/cps;
y2=sqrt((2*PerSi*SiS1)/(q*Np));
a1=(sqrt(y2)-sqrt(y1)) / (x2-x1);
b1=((x2*sqrt(y1))-(x1*sqrt(y2))) / (x2-x1);
t1=log(a1*x1+b1);t2=log(a1*x2+b1);
d1=sqrt((1/4)+Cox/(PerSi*(a1^2)));
beta1=(q*Np) / (2*PerSi*a1^2-Cox);
t111=t1:(-1)*10^-2:t2;
x111=(exp(t111)-b1)/a1;
%region 2 calculation of a2,b2,d2,beta2
x3=x2;x4=xc;
y3=y2
y4=sqrt((2*PerSi*SiS2)/(q*Np));
a2=(sqrt(y4)-sqrt(y3)) / (x4-x3);
b2=((x4*sqrt(y3))-(x3*sqrt(y4))) / (x4-x3);
t3=log(a2*x3+b2);t4=log(a2*x4+b2);
d2=sqrt((1/4)+Cox/(PerSi*(a2^2)));
beta2=(q*Np) / (2*PerSi*a2^2-Cox);
t222=t3:(-1)*10^-2:t4;
x222=(exp(t222)-b2)/a2;
%region 3 calculation of a3,b3,d3,beta3
x5=x4;x6=L1;y5=y4;
y6=sqrt((2*PerSi*SiS3)/(q*Na));
a3=(sqrt(y6)-sqrt(y5)) / (x6-x5);
b3=((x6*sqrt(y5))-(x5*sqrt(y6))) / (x6-x5);
t5=log(a3*x5+b3);t6=log(a3*x6+b3);

6
d3=sqrt((1/4)+Cox/(PerSi*(a3^2)));
beta3=(q*Na) / (2*PerSi*a3^2-Cox);
t333=t5:(-1)*10^-2:t6;
x333=(exp(t333)-b3)/a3;
%region 4 calculation of a4,b4,d4,beta4
x7=x6;x8=L-xc;
y7=y6;
y8=sqrt((2*PerSi*SiS2)/(q*Np));
a4=(sqrt(y8)-sqrt(y7)) / (x8-x7);
b4=((x8*sqrt(y7))-(x7*sqrt(y8))) / (x8-x7);
t7=log(a4*x7+b4);t8=log(a4*x8+b4);
d4=sqrt((1/4)+Cox/(PerSi*(a4^2)));
beta4=(q*Na) / (2*PerSi*a4^2-Cox);
t444=t7:(1)*10^-2:t8;
x444=(exp(t444)-b4)/a4;
%region 5 calculation of a5,b5,d5,beta5
x9=x8;x10=L-Lp;
y9=y8;
y10=sqrt((2*PerSi*SiS4)/(q*Np));
a5=(sqrt(y10)-sqrt(y9)) / (x10-x9);
b5=((x10*sqrt(y9))-(x9*sqrt(y10))) / (x10-x9);
t9=log(a5*x9+b5);t10=log(a5*x10+b5);
d5=sqrt((1/4)+Cox/(PerSi*(a5^2)));
beta5=(q*Np) / (2*PerSi*a5^2-Cox);
t555=t9:(1)*10^-2:t10;
x555=(exp(t555)-b5)/a5;
%region 6 calculation of a6,b6,d6,beta6
x11=x10;x12=L;
y11=y10;
y12=(xj+sqrt((2*PerSi*V7)/(q*Np)))/cpd;
a6=(sqrt(y12)-sqrt(y11)) / (x12-x11);
b6=((x12*sqrt(y11))-(x11*sqrt(y12))) / (x12-x11);
t11=log(a6*x11+b6);t12=log(a6*x12+b6);
d6=sqrt((1/4)+Cox/(PerSi*(a6^2)));
beta6=(q*Np) / (2*PerSi*a6^2-Cox);
t666=t11:(1)*10^-2:t12;
x666=(exp(t666)-b6)/a6;
%calculation of A1,A2,A3,A4 and from that calculation of V2,V3,V4,V5
A1 = (V1-Vgs1-beta1*exp(2*t1)) * (csch((d1*t2)-(d1*t1))) * (d1*a1*exp((-t2-
t1)/2));
A1 = A1 - ((Vgs2+beta2*exp(2*t4)) * (csch((d2*t4)-(d2*t3)))* (d2*a2*exp((-
t3-4)/2)));
A1 = A1 + ((Vgs2+beta2*exp(2*t3)) * ((d2*a2*coth((d2*t4)-(d2*t3))-(a2/2)))
*(exp(-t3))) + 2*a2*beta2*exp(t3);
A1 = A1 + ((Vgs1+beta1*exp(2*t2)) * ((d1*a1*coth((d1*t2)-(d1*t1))+(a1/2)))
*(exp(-t2))) - 2*a1*beta1*exp(t2);
A2 = -(Vgs3+beta3*exp(2*t6)) * (csch((d3*t6)-(d3*t5))) * (d3*a3*exp((-t5-
t6)/2));
A2 = A2 + ((Vgs3+beta3*exp(2*t5)) * (d3*a3*coth((d3*t6)-(d3*t5))-(a3/2)) *
(exp(-t5))) ;
A2 = A2 + ((Vgs2+beta2*exp(2*t4)) * ((d2*a2*coth((d2*t4)-(d2*t3))+(a2/2)) *
exp(-t4))) + 2*a3*beta3*exp(t5);
A2 = A2 - ((Vgs2+beta2*exp(2*t3)) * (csch((d2*t4)-(d2*t3))) * (d2*a2*exp((-t4-
t3)/2))) - 2*a2*beta2*exp(t4);

7
a11 = (d1*a1*(coth((d1*t2)-(d1*t1)))+(a1/2))*(exp(-t2))+(d2*a2*(coth((d2*t4)-
(d2*t3)))-(a1/2))*(exp(-t3));
a12=-(csch((d2*t4)-(d2*t3)))*(d2*a2*exp((-t3-t4)/2));a21=a12;
a22 = ((d2*a2*coth((d2*t4)-(d2*t3))+(a2/2))*(exp(-t4)))+((d3*a3*(coth((d3*t6)-
(d3*t5)))-(a3/2))*(exp(-t5)));
a23=(-1)*(csch((d3*t6)-(d3*t5)))*(d3*a3*exp((-t5-t6)/2));
a32=a23;
a33 = ((d3*a3*coth((d3*t6)-(d3*t5))+(a3/2))*(exp(-t6)))+((d4*a4*(coth((d4*t8)-
(d4*t7)))-(a4/2))*(exp(-t7)));
a13=0;
a14=0;
a24=0;
a31=0;
a41=0;
a42=0;
a15=0;
a51=0;
a25=0;
a52=0;
a35=0;
a53=0;
a34=-(csch((d4*t8)-(d4*t7)))*(d4*a4*exp((-t7-t8)/2));
a43=a34;
a44=((d4*a4*coth((d4*t8)-(d4*t7))+(a4/2))*(exp(-t8)))+((d5*a5*(coth((d5*t10)-
(d5*t9)))-(a5/2))*(exp(-t9)));
a45=-(csch((d5*t10)-(d5*t9)))*(d5*a5*exp((-t9-t10)/2));
a54=a45;
a55=((d5*a5*coth((d5*t10)-(d5*t9))+(a5/2))*(exp(-
t10)))+((d6*a6*(coth((d6*t12)-(d6*t11)))-(a6/2))*(exp(-t11)));
A3 = -(Vgs4+beta4*exp(2*t8)) * (csch((d4*t8)-(d4*t7))) * (d4*a4*exp((-t7-
t8)/2));
A3 = A3 + ((Vgs4+beta4*exp(2*t7)) * (d4*a4*coth((d4*t8)-(d4*t7))-(a4/2)) *
(exp(-t7))) ;
A3 = A3 - ((Vgs3+beta3*exp(2*t5)) * (csch((d3*t6)-(d3*t5))) * (d3*a3*exp((-t5-
t6)/2))) + 2*a4*beta4*exp(t7);
A3 = A3 + ((Vgs3+beta3*exp(2*t6)) * (d3*a3*coth((d3*t6)-(d3*t5))+(a3/2)) *
(exp(-t6))) - 2*a3*beta3*exp(t6);
A4 = -(Vgs5+beta5*exp(2*t10)) * (csch((d5*t10)-(d5*t9))) * (d5*a5*exp((-t10-
t9)/2));
A4 = A4 + ((Vgs5+beta5*exp(2*t9)) * ((d5*a5*coth((d5*t10)-(d5*t9))-(a5/2)))
*(exp(-t9)));
A4 = A4 + ((Vgs4+beta4*exp(2*t8)) * ((d4*a4*coth((d4*t8)-(d4*t7))+(a4/2)))
*(exp(-t8))) + 2*a5*beta5*exp(t9);
A4 = A4 - ((Vgs4+beta4*exp(2*t7)) * (csch((d4*t8)-(d4*t7))) * (d4*a4*exp((-t8-
t7)/2))) - 2*a4*beta4*exp(t8);
A5 = (V7-Vgs6-beta6*exp(2*t12)) * (csch((d6*t12)-(d6*t11))) * (d6*a6*exp((-
t11-t12)/2));
A5 = A5 + ((Vgs6+beta6*exp(2*t11)) * ((d6*a6*coth((d6*t12)-(d6*t11))-(a6/2)))
*(exp(-t11)));
A5 = A5 + ((Vgs5+beta5*exp(2*t10)) * ((d5*a5*coth((d5*t10)-(d5*t9))+(a5/2)))
*(exp(-t10))) + 2*a6*beta6*exp(t11);
A5 = A5 - ((Vgs5+beta5*exp(2*t9)) * (csch((d5*t10)-(d5*t9))) * (d5*a5*exp((-
t9-t10)/2))) - 2*a5*beta5*exp(t10);

8
delta=det([a11 a12 a13 a14 a15;a21 a22 a23 a24 a25;a31 a32 a33 a34 a35;a41 a42
a43 a44 a45;a51 a52 a53 a54 a55;]);
V2 = det([A1 a12 a13 a14 a15;A2 a22 a23 a24 a25;A3 a32 a33 a34 a35;A4 a42 a43
a44 a45;A5 a52 a53 a54 a55;])/ delta;
V3 = det([a11 A1 a13 a14 a15;a21 A2 a23 a24 a25;a31 A3 a33 a34 a35;a41 A4 a43
a44 a45;a51 A5 a53 a54 a55;]) / delta;
V4 = det([a11 a12 A1 a14 a15;a21 a22 A2 a24 a25;a31 a32 A3 a34 a35;a41 a42 A4
a44 a45;a51 a52 A5 a54 a55;]) / delta;
V5 = det([a11 a12 a13 A1 a15;a21 a22 a23 A2 a25;a31 a32 a33 A3 a35;a41 a42 a43
A4 a45;a51 a52 a53 A5 a55;]) / delta;
V6 = det([a11 a12 a13 a14 A1;a21 a22 a23 a24 A2;a31 a32 a33 a34 A3;a41 a42 a43
a44 A4;a51 a52 a53 a54 A5;]) / delta;
% in region 1 surface potential given by Sis1
k1=(1/(sinh((d1*t2)-(d1*t1))));
k2=(V2-Vgs1-(beta1*exp(2*t2)));
k3=sinh((d1*t111)-(d1*t1));
k4=exp((t111-t2)/2);
k5=V1-Vgs1-beta1*(exp(2*t1));
k6=exp((t111-t1)/2);
k7=sinh((d1*t111)-(d1*t2));
Sis_1=k1*(k2*k4.*k3-k5*k6.*k7)+ beta1*exp(2*t111)+Vgs1 ;
% in region 2 surface potential given by Sis2
k1=(1/(sinh((d2*t4)-(d2*t3))));
k2=(V3-Vgs2-(beta2*exp(2*t4)));
k3=sinh((d2*t222)-(d2*t3));
k4=exp((t222-t4)/2);
k5=V2-Vgs2-beta2*(exp(2*t3));
k6=exp((t222-t3)/2);
k7=sinh((d2*t222)-(d2*t4));
Sis_2=k1*(k2*k4.*k3-k5*k6.*k7)+ beta2*exp(2*t222)+Vgs2;
% in region 3 surface potential given by Sis3
k1=(1/(sinh((d3*t6)-(d3*t5))));
k2=(V4-Vgs3-(beta3*exp(2*t6)));
k3=sinh((d3*t333)-(d3*t5));
k4=exp((t333-t6)/2);
k5=V3-Vgs3-beta3*(exp(2*t5));
k6=exp((t333-t5)/2);
k7=sinh((d3*t333)-(d3*t6));
Sis_3=k1*(k2*k4.*k3-k5*k6.*k7)+ beta3*exp(2*t333)+Vgs3;
% in region 4 surface potential given by Sis4
k1=(1/(sinh((d4*t8)-(d4*t7))));
k2=(V5-Vgs4-(beta4*exp(2*t8)));
k3=sinh((d4*t444)-(d4*t7));
k4=exp((t444-t8)/2);
k5=V4-Vgs4-beta4*(exp(2*t7));
k6=exp((t444-t7)/2);
k7=sinh((d4*t444)-(d4*t8));
Sis_4=k1*(k2*k4.*k3-k5*k6.*k7)+ beta4*exp(2*t444)+Vgs4;
% in region 5 surface potential given by Sis5
k1=(1/(sinh((d5*t10)-(d5*t9))));
k2=(V6-Vgs5-(beta5*exp(2*t10)));
k3=sinh((d5*t555)-(d5*t9));
k4=exp((t555-t10)/2);
k5=V5-Vgs5-beta5*(exp(2*t9));

9
k6=exp((t555-t9)/2);
k7=sinh((d5*t555)-(d5*t10));
Sis_5=k1*(k2*k4.*k3-k5*k6.*k7)+ beta5*exp(2*t555)+Vgs5;
% in region 6 surface potential given by Sis6
k1=(1/(sinh((d6*t12)-(d6*t11))));
k2=(V7-Vgs6-(beta6*exp(2*t12)));
k3=sinh((d6*t666)-(d6*t11));
k4=exp((t666-t12)/2);
k5=V6-Vgs6-beta6*(exp(2*t11));
k6=exp((t666-t11)/2);
k7=sinh((d6*t666)-(d6*t12));
Sis_6=k1*(k2*k4.*k3-k5*k6.*k7)+ beta6*exp(2*t666)+Vgs6;
% Sis02 is the surface potential for all
%three region i.e equal to Sis1+Sis2+Sis3+Sis4+Sis5+Sis6 for the first plot
%x01 is the x axis for first plot.
x01=[x111 x222 x333 x444 x555 x666];
Sis01=[Sis_1 Sis_2 Sis_3 Sis_4 Sis_5 Sis_6];
Sis01=Sis01-phit*(log(Na/ni));
arp=plot(x01,Sis01,'r');
xlabel('channel length')
ylabel('Surface potential')
grid on
legend([arp],'Vds = 0.2V, L=40nm, tox = 1.5nm');

y3 =

6.0540e-07

10
Published with MATLAB® R2022a

11

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