IWAKI

PNEUMATIC
DRIVE BELLOWS
PUMPS

F
 For high purity chemical handling applications in
semiconductor processing applications
The F-Series includes pneumatic drive bellows pumps that are designed for use in the semiconductor
manufacturing processes.
Iwaki introduced the first designs over 20 years ago and has continually developed new products to keep up
with rapidly changing market needs.
With over 20 different models available the quality and performance of our products has made them the
preferred solution by device manufactures all over the world.
Their quality and performance are recognized and highly rated by device manufacturers all over the world.

We offer not only pump solutions, but also accessories including controllers, dampeners, and liquid chemical
supply systems that have been developed to compliment a comprehensive portfolio of quality equipment
for wet process and surface preparation applications.

Main materials
Max. discharge capacity (L/min) Max. supplied air pressure (MPa) Model Max. air consumption (NL/min) Temperature range (˚C)
PTFE PFA
100 0.5 FS-H 1210 5-180
100 0.7 FS-N 1495 5-60
Guideline
80 for pump selection 0.5 FW 820 10-100
40 0.5 FW-H 480 10-180
Main materials
Max. discharge capacity (L/min) 22 0.3 FF 180 5-100
Max. supplied air pressure (MPa) Model Max. air consumption (NL/min) Temperature range (˚C)
40 0.2 FF-H 200 20-180 PTFE PFA
100 40 0.4
0.5 FS-H
FA 200 1210 5-100 5-180
100
*Please check the specifications of each pump 0.7 for liquid temperatureFS-N
and maximum supply air pressure.1495 5-60
80 0.5 FW 820 10-100
40 0.5 FW-H 480 10-180
22 0.3 FF 180 5-100
40 0.2 FF-H 200 20-180
40 0.4 FA 200 5-100
*Please check the specifications of each pump for liquid temperature and maximum supply air pressure.

Application Usable Usable depend on condition Usable Usable depend on condition

Model FS-H FS-N FW FW-H FF FF-H FA CFD

Cleaning(Batch process)
Wafer wet-bench
Cleaning(Single wafer)

Chemical supply equipment Usable Usable depend on condition

Mixed-liquid circulation/Transfer
CMP process Model FS-H FS-N FW FW-H FF FF-H FA CFD
Cleaning
Cleaning(Batch process)
Chemical
Wafer repleshing equipment
wet-bench
Cleaning(Single wafer)
*Liquid temperature conditions vary depending on the pump specifications.
Chemical supply equipment
1
Mixed-liquid circulation/Transfer
 Pneumatic drive bellows pumps F

Example of installation
Chemical supply equipment (Constant pressure control)

Dampener
PDA-H1/PDA-WB
PD-H1/PD-H

Circuration pump
F series

PIC
Filter
Tank PFC unit

Switching valve
Compressed
air source
External ON/OFF Pressure signal output (DC4-20mA)
External setting signal (DC4-20mA) Solenoid valve synchronous output (contact)
Electro-pneumatic
Regulator Supply/circulation switching Error output (contact)
Power supply: AC100V Leak alarm
Filter Regulator

CMP slurry supply equipment

Filling up various chemical liquids

DIW Acid Alkali pH adjustment,

Electromagnetic
metering pump
Undiluted solution supply EHN-R

Dampener
PDA-H1/PDA-WB
PD-H1/PD-H

Feeding tank
Transfer/circulation pump
for diluted solution
Regulating tank F series
To individual lines
Pump Controller
FDC-1

Pump controller & Pump driver Pump controller & Pump driver
FDC-1 & FD-1/FD-2/FD-3
Alarm output
User
equipment
Proximity switch External signal

Filter

Dampener

Washing tank

Circuration pump
F series
QEV QEV
Regulator

Switching Electro-pneumatic Compressed air source

EXH EXH
valve Regulator

Wafer wet-bench

Filter

PLC
Chemical replenishing
system
CFD-1T-B
Dampener
PD-H

Sulfuric acid,
hydrochioric acid, Washing tank
hydrofluoric acid,
ammonia Pump Controller
Supply tank at ambient Circuration pump FDC-1
FS,FW

2
 FS-H Series

A small, lightweight and cost

effective solution

FS-30HT

Using a higher stroke rate (240 spm maximum) has resulted in a

reduction in size, weight and cost as well as reduced pulsation.
Note: The maximum stroke rates are dependent on model and
application; please refer to the specification table for details. Construction and materials

All liquid contact components are constructed of high purity Sylinder head(Non-wetted)
fluoroesin materials. The exterior of the units are also coated in AL+4F coating
Pump head
fluoroesin so that no metallic components are exposed. FS-H PTFE(Tube is made of PFA.)

pumps also utilize our own shaft seal design (patent pending)
resulting in a marked reduction in particle generation.

The pumps are rated for liquid temperatures ranging from

5 - 180 °C with discharge pressure to 0.45 MPa. Applications
include wet process circulation and CMP processes, as well as
chemical distribution feed systems.
Bellows
Valve case Valve PTFE
The FS-H body design eliminates the need for periodic PTFE PTFE
tightening of the stud bolts. External access to the proximity
sensors results in reduced maintenance and down time.

The pump uses a proximity sensor drive system which

opens/closes an external air solenoid valve providing easy
performance control capabilities that are compatible with a
variety of controller options.

Pump identification

FS - 15 H T1 - 01
Special specification
Series code Without code : Standard specificaion
Iwaki pneumatic drive bellows pump 01 : Special specification (01,02 ...)
FS series Sealing structure of pump head/bellows
T1 : Tube connection
Pump size (suction opening / discharge opening) / Bellows separation type
T2 : Tube connection
15 : Max. discharge capacity 15L/min
(suction opening / discharge opening) / Welded one-piece structure
30 : Max. discharge capacity 30L/min
60 : Max. discharge capacity 55L/min Liquid temperature
H : High-pressure specification(5 -180˚C)

3
 Pneumatic drive bellows pumps F

Specification
Model FS-15HT1/T2 FS-30HT1/T2 FS-60HT1/T2
Max. discharge capacity L/min 15 30 55
Air supply pressure range MPa 0.15 – 0.5 0.15 – 0.3 0.15 – 0.2 0.15 – 0.5 0.15 – 0.3 0.15 – 0.2 0.15 – 0.5 0.15 – 0.3 0.15 – 0.2
Liquid temperature range ˚C 5 – 50 51 – 100 101 – 180 5 – 50 51 – 100 101 – 180 5 – 50 51 – 100 101 – 180
Max. air consumption NL/min 200 160 110 370 280 170 670 440 300
Max. stroke speed* spm 240 220 200
Pump connection size 1/2" PFA tube ø19xø16mm PFA tube ø25xø22mm PFA tube
Supply air connection size Rc1/4 Rc3/8
Ambient temperature ˚C 0 – 40
Drive system By proximity switch
*180 spm maximum with feed air pressures between 0.3 and 0.5 MPa.
Note: Max. discharge capacity shows when pumping clear water at 20˚C.

Perfomance curves

H-Q
FS-15HT1/T2 FS-60HT1/2 Air consumption
0.45 0.45 900
0.5MPa Supplied air pressure Supplied air pressure
0.40 0.5MPa 200 0.40 0.5MPa 800

0.35 0.35 0.4MPa 700

Discharge pressure MPa

Discharge pressure MPa

0.4MPa 0.5MPa
Air consumption NL/min

Air consumption NL/min

0.4MPa
0.30 0.3MPa 150 0.30 600
0.4MPa
0.25 0.25 0.3MPa 600
0.3MPa 0.3MPa
0.20 0.2MPa 100 0.20 400
0.15MPa 0.2MPa 0.2MPa
0.15 0.15 300
0.2MPa 0.15MPa
0.10 50 0.10 0.15MPa 200
0.15MPa
0.05 0.05 100

0 0 0
2 4 6 8 10 12 14 16 10 20 30 40 50 60
Capacity L/min Capacity L/min

FS-30HT1/T2
0.45
0.5MPa Supplied air pressure
0.40 0.5MPa 400

0.35
Discharge pressure MPa

0.4MPa
Air consumption NL/min

0.4MPa
0.30 300
0.3MPa
0.25 0.3MPa
0.20 200
0.2MPa
0.15 0.2MPa
0.15MPa
0.10 0.15MPa 100

0.05

0 0
5 10 15 20 25 30 35
Capacity L/min

Dimentions in mm

c
(100)

Model W L H a b c d e f g h
FS-15HT1/T2 315 120 166 213 77 15.5 96 10 8 144 84
H

(g)

FS-30HT1/T2 390 151 208 272 93 23 115 10 9 180 105

h
b

FS-60HT1/T2 441 194 251 317 107 27 152 12 11 224 127

a e
W d
(100) L

4
 FS-100HT-2
Flow and temperature
capabilities offer improved
process efficiencies

Maximum flow rate of up to 100 L/min with 180˚C liquid.

This allows delivery of CARO (SPM) or H3PO4 at a flow rate 1.8
Construction and materials
times higher than our existing pumps (55 L/min).

Higher flow rates improve cleaning efficiency and removal Sylinder head(Non-wetted)
AL+4F coating
of containments during wafer processing. Cleaning times Bellows
are also reduced in systems with multiple processing lines. PTFE

In addition to the use of fluoroplastic wet ends (PTFE and

PFA), a fluorine coating on the pump’s outer surfaces offers
the best resistance to vapors from acid, alkali and hydrogen
peroxide chemistries used in semiconductor manufacturing.

Optimization of design has resultind in reduced weight of

about 15% of our existing 80-100L models making installa- Valve Valve case
PTFE PTFE
tion and replacement work easier. Pump head
PTFE

The model adopts a sensor drive system that switches the

solenoid valve using the proximity switch built into the
pump. A leak sensor is also included as standard equipment.

Pump identification

FS - 100 H T2 - 01
Special specification
Series code Without code : Standard specificaion
Iwaki pneumatic drive bellows pump 01 : Special specification (01,02 ...)
FS series Sealing structure of pump head/bellows
T2 : Tube connection
(suction opening / discharge opening) / Welded one-piece structure
Pump size
100 : Max. discharge capacity 100L/min

Liquid temperature
H : High-pressure specification(10 -180˚C)

5
 Pneumatic drive bellows pumps F

Specification
Model FS-100HT2
Max. discharge capacity L/min 100
Air supply pressure range MPa 0.15 - 0.5 0.15 - 0.4 0.15 - 0.3
Liquid temperature range ºC 10 - 100 101 - 140 141 - 180
Max. air consumption NL/min 1210
Max. stroke speed spm 120
Pump connection size 1-1/4” fittings (SUPER 300-type PILLAR FITTINGS manufactured by Nippon Pillar Packaging Co., Ltd.)
Supply air connection size Rc 1/2
Allowable ambient temperature ºC 0 - 60
Drive system By proximity switch
Note: Max. discharge capacity shows when pumping clear water at 20˚C.

Perfomance curves

H-Q
FS-100HT2 Air consumption
2000
0.50
Supplied air pressure
1800
0.5MPa
0.40 1600
Discharge pressure MPa

Air consumption NL/min

0.4MPa 1400
0.5MPa
0.30 1200
0.3MPa 0.4MPa
1000
0.3MPa
0.20 800
0.2MPa
600
0.1MPa 0.2MPa
0.10 0.1MPa 400
200

0 0
10 20 30 40 50 60 70 80 90 100 110 120
Capacity L/min

Dimentions in mm
(81)
279.5
129.5

448 185
562 302

6
 FS-N Series

Max 100L/min. High flow

design for chemical distribution
applications

Perfectly suited to high flow & pressure chemical distribution FS-100NF

requirements.
Construction and materials
The high stroke rate (Max 200 SPM:FS-80NT) provides for
a compact, lightweight and lower cost option without FS-80NT Tube
PFA Sylinder head(Non-wetted)
sacrificing flow and pressure capability. Bellows
AL+4F coating
PTFE

All liquid contact materials are made of high purity

fluororesin resulting in contamination-free construction. Our
unique patented shaft seal (FS- 80NT...PAT.) also dramatically
reduces particle generation.

The pump utilizes a built in proximity sensor driven control

system to switch an external air solenoid valve. Leak sensors Valve
are also included as standard equipment. PTFE
Pump head
PTFE
Seal welded pump head and bellows eliminate leakage. FS-100NF
Sylinder head(Non-wetted)
Flange tube AL+4F coating
PTFE
Flange
SUS304

Bellows Valve case

PTFE PTFE
Valve Pump head
PTFE PTFE

Pump identification

FS - 8 0 N T - 01
Special specification
Series code
Iwaki pneumatic drive bellows pumps
FS series
Pump connection
Pump size T : Tube connection (FS-80N standard)
80 : Max. discharge capacity 80 L/min F : Flange connection (FS-100N standard)
100 : Max. discharge capacity 100 L/min
Liquid temperature
N : 5 - 60 ºC
7
 Pneumatic drive bellows pumps F

Specification
Model FS-80NT FS-100NF
Max. discharge capacity L/min 80 100
Air supply pressure range MPa 0.25 - 0.5 0.5 - 0.6 0.6 - 0.7 0.2 - 0.7
Liquid temperature range ˚C 5 - 60 5 - 50
Max. air consumption NL/min 1029 938 787 1495
Max. stroke speed spm 200 150 110 100
Self-priming height limit 1 m on more 1 m on more
Pump connection size 1” PFA tube 25A Flange
Wet-end materials PTFE, PFA PTFE,PFA
Supplied air connection size Rc3/8 Rc1/2
Ambient temperature ˚C 0 - 40
Drive system By proximity switch
Note: Max. discharge capacity shows when pumping clear water at 20˚C.

Perfomance curves

H-Q
FS-80NT FS-100NF Air consumption
0.70 Supplied air pressure 1400 0.70 1800
Supplied air pressure
0.686MPa 0.686MPa 1600
0.60 1200 0.60 0.686MPa
0.588MPa 0.490MPa 1400
0.588MPa
Discharge pressure MPa

Discharge pressure MPa

0.588MPa
Air consumption NL/min

Air consumption NL/min

0.50 1000 0.50
0.490MPa 0.588MPa 0.490MPa 1200
0.392MPa 0.490MPa
0.686MPa
0.40 800 0.40 1000
0.392MPa 0.392MPa
0.294MPa 0.392MPa
0.30 600 0.30 0.294MPa 800
0.294MPa 0.294MPa
600
0.20 0.196MPa 0.196MPa 400 0.20
0.196MPa 0.196MPa 400
0.10 200 0.10 200

0 0 0 0
10 20 30 40 50 60 70 80 90 100 10 20 30 40 50 60 70 80 90 100 110 120
Capacity L/min Capacity L/min

Dimentions in mm

27 30
FS-80NT FS-100NF
(100)

344.5
287

317
251

158.5
127

119.5
106

11

317 12 475 13
441 152 612 185
(100) 194 (61) 240

8
 FW/FW-H Series

Robust bellows design provides

for high pressure capability
and extended service life

The use of a thick bellows increases the pumps discharge

FW-20HT2
pressure rating to as high as 0.45 MPa maximum.
In addition, the bellows have three to four times longer
service life than a diaphragm. This results lower case a
substantially reduced downtime.
Construction and materials
This design is commonly used for chemical feed, the FW
series can be used in high pressure and medium temperature
Sylinder head(Non-wetted)
(10 - 100 °C) cleaning systems as well as for the circulation of AL+4F coating

CMP slurry liquids. The FW-H with its higher temperature Valve case
PTFE
capability ( 10 - 180 °C) is ideal for chemical circulation in
wafer cleaning applications.

Easily adaptable fitting capability, the internally formed PFA

suction and discharge tubes prevent the accumulation of
particles.

When connected to a special controller, the discharge can be Bellows Pump head
monitored and controlled easily. PTFE
Valve PTFE(Tube:PFA)
PTFE

The pump utilizes a built in proximity sensor driven control

system to switch an external air solenoid valve. Leak sensors
are also included as standard equipment.

Pump identification

FW - 20 H T1 - 01
Special specification
Series code Without code : Standard specificaion
Iwaki pneumatic drive bellows pump 01 : Special specification (01,02 ...)
FW series Sealing structure of pump head/bellows
T1 : Tube connection
Pump size (suction opening / discharge opening) / Bellows separation type
20 : Max. discharge capacity 20L/min T2 : Tube connection
40 : Max. discharge capacity 40L/min (suction opening / discharge opening) / Welded one-piece structure
80 : Max. discharge capacity 80L/min Liquid temperature
Without code : Medium-pressure specification(10 -100˚C)
H : High-pressure specification(10 -180˚C)

9
 Pneumatic drive bellows pumps F

Specification
Model FW-20 FW-40 FW-80 FW-20H FW-40H
Max. discharge capacity L/min 20 40 80 20 40
Air supply pressure range MPa 0.2 - 0.5 0.2 - 0.5 0.15 - 0.3 0.15 - 0.2 0.2 - 0.5 0.15 - 0.3 0.15 - 0.2
Liquid temperature range ˚C 10 - 100 10 - 100 10 - 80 10 - 100 101-150 151-180 10 -100 101-150 151-180
Max. air consumption NL/min 330 480 820 330 200 140 480 300 220
Max. stroke speed spm 120 80 80 20 80
Pump connection size ø19×φ16mm ø25×ø22mm ø19×ø16mm ø25×ø22mm
PFA tube PFA tube PFA tube PFA tube
Supplied air connection size Rc1/4 Rc3/8 Rc1/2 Rc1/4 Rc3/8
Ambient temperature ˚C 0 - 40
Drive system By proximity switch
Note: Max. discharge capacity shows when pumping clear water at 20˚C.

Perfomance curves

H-Q
FW-20/20H FW-80 Air consumption
0.45 320 0.45 900
Supplied air pressure
Supplied air pressure 0.5MPa 0.5MPa
0.40 0.40 800
0.5MPa 280
0.35 0.35 700
Discharge pressure MPa

0.5MPa 0.4MPa
Air consumption NL/min

Air consumption NL/min

0.4MPa
Discharge pressure MPa

240
0.30 0.30 600
0.4MPa 0.4MPa
0.25 200 0.25 500
0.3MPa
0.3MPa 0.3MPa
0.20 160 0.20 400
0.3MPa
0.15 0.2MPa 0.15 0.2MPa 300
120 0.2MPa
0.10 0.10 200
0.2MPa
80
0.05 0.05 100

0 40 0
5 10 15 20 25 30 20 40 60 80 100
Capacity L/min Capacity L/min

FW-40/40H
0.45
Supplied air pressure
0.5MPa
0.40 640

0.35 560
Discharge pressure MPa

0.4MPa
Air consumption NL/min

0.30 480
0.5MPa
0.25 400
0.3MPa 0.4MPa
0.20 320
0.3MPa
0.15 240
0.2MPa 0.2MPa
0.10 160

0.05 80
0
10 20 30 40 50
Capacity L/min

Dimentions in mm

G
(100)

Model A (B) C D E F G H I J
D
C

FW-20/20H 347 458 218 221 105 140 22 90 112 182

FW-40/40H
I

435 542 240 250 143 183 25.5 102 130 220
H

FW-80 464 600 302 317 185 240 27 119.5 158.5 317
A E
(B) 10 (100) F

10
 FF/FF-H Series

Energy efficient design

consumes less air
The FF series is designed for use with medium temperature
liquids (Al cylinder type: 5 to 100˚C, PVC cylinder type: 5 to 50˚C)
and the FF-H series is designed for temperatures ranging from
FF-20HT
20 to 180˚.

All liquid contact components are constructed of high purity

fluoroesin materials with no metal or elastomers. The bellows
are welded to the center eliminating leaks associated with
heat cycles. The efficient design minimizes dead air volume Construction and materials
surrounding the bellows to minimize air consumption.
Valve case
Shaft packing is easily accessible externally, no need to Pump head
PTFE
PTFE(Tube:PFA)
disassemble the pump for replacement.

Suction and discharge fluid connections are PFA tubes and for
FF models PFA tubes with special fittings are available.

The pump utilizes a built in proximity sensor driven control

system to switch an external air solenoid valve. Leak sensors are
also included as standard equipment. Valve
Bellows PFA
PTFE
Sylinder head(Non-wetted)
AL+4F coating

Pump identification

FF - 20 B T1 - 01
Special specification
Series code Without code : Standard specificaion
Iwaki pneumatic drive bellows pump 01 : Special specification (01,02 ...)
FF : Medium-pressure specification(5 -100˚C) Pump connection method (suction/discharge)
T1 : Tube connection

Pump size Cylinder material

10 : Max. discharge capacity 10L/min B : AL+4F coating
20 : Max. discharge capacity 20L/min C : PVC

FF - 20 H T - 01
Special specification
Series code Without code : Standard specificaion
Iwaki pneumatic drive bellows pump 01 : Special specification (01,02 ...)
FF-H : Medium-pressure specification(5 -100˚C)
Pump connection method (suction/discharge)
T : Tube connection
Pump size
20 : Max. discharge capacity 20L/min
40 : Max. discharge capacity 40L/min

11
 Pneumatic drive bellows pumps F

Specification
Model FF-10BT/CT1 FF-20BT/CT1 FF-20HT FF-40HT1
Max. discharge capacity L/min 10 22 20 40
Air supply pressure range MPa 0.15- 0.3 0.15 - 0.2
Liquid temperature range ˚C B type : 5-100 C type : 5 - 50* 20 -180
Max. air consumption NL/min 90 180 150 200
Max. stroke speed. spm 120 120 80
Pump connection size 1/2" PFA tube 3/4" PFA tube 3/4" PFA tube ø25 x ø22mm PFA tube
Supplied air connection size Rc1/4 Rc1/4 Rc3/8
Ambient temperature ˚C 0-40
Drive system By proximity switch
* The cylinder of the "B" type is made of aluminum and tetrafluororesin and that of the "C" type is of PVC.
Note: Max. discharge capacity shows when pumping clear water at 20˚C.

Perfomance curves

H-Q
FF-10B/C FF-20H Air consumption
0.30 120 0.16 160
Supplied air pressure Supplied air pressure
0.3MPa 0.2MPa 0.2MPa
0.14 140
0.25 100
0.3MPa
0.12 120
Air consumption NL/min
Discharge pressure MPa

80

Air consumption NL/min

0.20 0.15MPa 0.15MPa
Discharge pressure MPa

0.2MPa 0.10 100

0.2MPa
0.15 60 0.08 80
0.15MPa
0.15MPa 0.06 60
0.10 40
0.04 40
0.05 20
0.02 20

0 0
2 4 6 8 10 12 14 5 10 15 20 25 30
Capacity L/min Capacity L/min
H-Q
FF-20B/C FF-40H Air consumption
0.40 200 0.20 250
Supplied air pressure
0.18 0.2MPa
0.35 0.3MPa 0.2MPa
0.16 200
0.30 150 0.15MPa
Air consumption NL/min

Supplied air pressure

Discharge pressure MPa

0.14
Air consumption NL/min

0.3MPa
Discharge pressure MPa

0.25
0.12 150
0.2MPa 0.15MPa
0.20 100 0.10
0.2MPa 0.15MPa
0.08 100
0.15
0.15MPa
0.06
0.10 50
0.04 50
0.05 0.02

0 0
5 10 15 20 25 10 20 30 40 50
Capacity L/min Capacity L/min

Dimentions in mm
G
(100)

Model A (B) C D E F G H I J

FF-10 266 361 188 191 84 114 14.5 82 97 154

D
C

FF-20/20H 288 400 218 221 105 140 20 91/80 112 182
I
H

FF-40H 431 533 240 250 143 183 23.5 97 130 220
A E
(B) 10 (100) F

12
 FA Series

Designs for circulating

moderate temperature fluids

FA-2
FA-40VEW
There are two standard models available In the FA series; the
FA-2E, a horizontal type for lower flow requirements and the
FA-40VEW, a vertical type for a higher flow rates. A typical
application for the FA-2E is in aspray system for single wafer
processing while the FA-40VEW is suitable for batch cleaning of
200/300 mm wafers. Construction and materials

FA-2 FA-40VEW
The FA-40VEW is designed for a long service life and uses a
robust bellows design suitable for continuous operation at higher cover(Non-wetted)
discharge pressures. AL+4F coating
Valve case
PFA
Discharge rates can be easily monitored and controlled when Valve Bellows
PFA
used with a dedicated controller Pump head
PTFE

PTFE

The pump utilizes a built in proximity sensor driven control sys-

Valve case
tem to switch an external air solenoid valve. Leak sensors are also PTFE
included as standard equipment. Bellows Valve
PTFE PFA
cover(Non-wetted)
Pump head
AL+4F coating
PTFE

Pump identification

FA - 2 E1 - 01
Special specification
Series code Without code : Standard specificaion
Iwaki pneumatic drive bellows pump 01 : Special specification (01,02 ...)
FA series
Pump drive system
FA-2
Pump size -1 : Air pulse timer switching valve system+Electrodes
2 : Max. discharge capacity 2L/min E-1 : Controller system+Electrodes
40 : Max. discharge capacity 40L/min FA-40
VEW : Controller system+Electrodes
Pump head and bellows welded into one piece
Electrodes : Leak detector

13
 Pneumatic drive bellows pumps F

Specification
Model FA-2E-1 FA-40VEW
Max. discharge capacity L/min 2 40
Max. supplied air pressure MPa 0.4
Liquid temperature range ˚C 5 -100
Max. air consumption NL/min 50 200
Max. stroke speed spm 150 80
Pump connection size Rc1/8 Rc1
Supplied air connection size Rc1/4 Rc3/8
Ambient temperature ˚C 0 - 40
Drive system By proximity switch
Note: Max. discharge capacity shows when pumping clear water at 20˚C.

Perfomance curves

H-Q
0.36
FA-2 FA-40VEW Air consumption
0.4MPa Supplied air pressure 0.45
0.4MPa
0.32 40 0.40 0.4MPa Supplied air pressure 400
0.28 0.35
Air consumption NL/min

0.4MPa
Discharge pressure MPa

Air consumption NL/min

Discharge pressure MPa

0.3MPa 0.3MPa
0.24 30 0.30 300
0.3MPa
0.3MPa
0.20 0.25
0.2MPa 0.2MPa 0.2MPa
0.16 20 0.20 200
0.15MPa 0.15MPa
0.12 0.2MPa 0.15
0.08 0.10 0.1MPa
10 0.1MPa 100

0.04 0.05

0 0
0.5 1.0 1.5 2.0 2.5 10 20 30 40 50 60
Capacity L/min Capacity L/min

Dimentions in mm

φ233
FA-2 FA-40VEW
(150)

(96) 51
545

(460)
102
51

274

6 50
4×M6
88

149 102
(192) 184 220
240 4×φ18

14
 Option
Dampener
The Installation of a dampener on the discharge side of the pump will reduce pulsation and prevent particle
release through filters as well as from pipe vibration.

Pulse dampeners PD-H(for wet use) Pulse dampeners PD-H1

For the FS-H only FF FF-H FA

A low cost and compact dampener. No automatic pressure adjustment.

Liquid inside the bellows can be eas- The PD-H1 is a medium-pressure

ily drained. design for use with FF, FF-H and FA
pumps.
A leak sensor is included as
a standard. * Models with leak sensors are available through special
order.

Specification
Model PD-15H PD-30H PD-60H Automatic dampeners PDA-H1/WB/W
Applicable pumps FS-15HT1/T2 FS-30HT1/T2 FS-60HT1/T2
FS-H FW FW-H FF FF-H FA
Max. supplied air pressure MPa 5 -100 101-180 5 -100 101-180 5 -100 101-180
Liquid temperature range ˚C 0.3 0.2 0.3 0.2 0.3 0.2
Automatic pressure adjustment minimizes
Supply air pressure range MPa 0.15-0.3 0.15-0.2 0.15-0.3 0.15-0.2 0.15-0.3 0.15-0.2
Pulsation pressure range* MPa 0.04 or less
downtime, eliminates manual
1/2" 3/4" φ25×φ22mm adjustments.
Connection size PFA tube PFA tube PFA tube
Supply air connection size Rc1/8
Wet-end materials PTFE , PFA
Liquid inside the bellows can be easily
*Liquid viscosity should be 50mPa•s or below. drained. (PDA-WB/W model)
Note : The damper cannot be used at a pressure above the level specified for the pump.

The PDA-H1 is a medium pressure

Example of installation design for use with the FF, FF-H,
and FA pumps. The PDA-WB is a high-pressure design
suitable for use with the FW, FW-H, and FS-H pumps.
Filter
Typical applications include drug delivery and dispensing.
Dampener
The PDA-WB/W includes a leak sensor as standard. (For
the PDA-H1, a leak sensor is available through special
Circulation pump
FS series
order.)
Washing tank
Regulator

For the PDA-WB/W, only the specified liquid pipe joint

can fit the model. Please contact us before use to check if
Switching Regulator Compressed
valve air source your joint is applicable.

Automatic dampeners PDA-100WBN

For the FS-100NF only

Automatic pressure adjustment

minimizes downtime, eliminates
manual adjustments.

Dampener pressure is automatically

adjusted to the minimum pulse pressure
even if the pump discharge load changes
due to a clogged filter. The unit prevents particles being
released from the filter and the pimping vibration.

A leak sensor is included as a standard.

15
 Pneumatic drive bellows pumps F

Specification
Model PDA/PD-10H1 PDA/PD-20H1 PDA/PD-40H1
Applicable pumps FF-10B/CT1 FF-20B/CT1 FA-40VEW
FF-20HT FF-40HT1
Liquid temperature range ˚C 20 -180
Max. supplied air pressure MPa 0.3 0.4
Pulsation pressure range MPa 0.04 or less
Connection size 1/2" 3/4" ø25×ø22mm
PFA tube PFA tube PFA tube
Supply air connection size Rc1/4
Wet-end materials PTFE, PFA

Model PDA-20WB/W PDA-40WB/W PDA-80WB/W

Applicable pumps FW-20/FW-20H/ FW-40/FW-40H/ FW-80
FS-15/FS-30 FS-60
Liquid temperature range ˚C 10 -100 101-150 151-180 10 - 80
Max. supplied air pressure MPa 0.5 0.3 0.2 0.5
Pulsation pressure range MPa 0.06 or less
Connection size ø19 x ø16mm ø25 x ø22mm
PFA tube PFA tube
Supply air connection size Rc1/4
Wet-end materials PTFE, PFA
Note 1: The damper cannot be used at a pressure above the level specified for the pump.
Note 2: The range of pulse pressures depends on conditions of usage. For further information, please call us.
Note 3: For the PDA-WB, some joints are not applicable. Please contact us for details.

Model PDA-100WBN
Applicable pumps FS-100NF
Max. supplied air pressure MPa 5 - 60
Liquid temperature range ˚C 0.7
Supply air pressure range MPa 0.2 - 0.7
Pulsation pressure range* MPa 0.15 or less
Connection size 25A
Supply air connection size Rc 1/4
Wet-end materials PTFE
*Liquid viscosity should be 50mPa•s or below.
Note 1: The max. liquid pressure is obtained when a discharge line is shut off.
Note 2: Contact us for the special damper for the FS-80NT.

16
 Quick Exhaust Valve Pump Controller/Driver
When installed on the air exhaust lines at the pump the exhaust The external solenoid valve is switched in response to signals
valve will help to reduce pulsation and prevent particle release from the built-in proximity sensors on each side of the bellows
from the filter as well as from pipe vibration. to ensure reliable operation of the pump. Two controller op-
tions are available along with one driver option.

QEV Pump controller FDC-1

FS-H FS-N FA FW FW-H FF FF-H

Quick exhaust valves should be installed
between the pump and the external sole- The pump discharge rate can be
noid valve. This helps to prevent corrosion monitored and maintained
of the solenoid valve from return air. It also at a constant level by
reduces exhaust resistance to allow the connecting an electric air
bellows to move smoothly through each regulator (optional) to the
cycle. pump air supply line. This enables stable flow and
filtering even when the discharge load varies due to lncreased
Specification filter resistance. In addition, the service life of the bellows will
Connection size Applicable pumps
be maximized because the difference between its internal
Model
QEV-8V Rc1/4 FW-20/20H, FF-10/20/20H, FA-2, FS-15/30 and external pressures is kept to a minimum.
QEV-10V Rc3/8 FW-40/40H, FF-40H, FA-40, FS-60/80N
*Please contact us for quick exhaust valves for FS-100HT and the FS-100NF. The controller can monitor the flow rate, the number of
strokes, and the total count.

The unit operates either in the AUTO mode using external

signals or in the MANU mode for manual control.

The flow rate can be set at two different values as desired.

In addition to the sensor mode using the proximity sensors,

the timer mode is included as a standard feature. This
enables continued pump operation in the timer mode in case
of the failure of a proximity sensor.

The unit is equipped with various alarm displays and output

functions, including leak alarm and a pump malfunction
alarm.

Specifications
General specification Power source DC24V ±10%
Power consumption 24VA max.
Ambient temperature 0 – 50˚C
Working atmosphere Without corrosive gas in surrounding areas
Input specification Start, No-voltage contact or open collector
Alarm reset Voltage ON: 3V maximum
Voltage OFF: 18V maximum
Output specification Leak alarm Output form: NPN open collector
(external output) Pump malfunction alarm Switching capacity: DC24V 0.4A
Life alarm
First alarm
Dimensions in mm W158 x D152 x H48

17
 Pneumatic drive bellows pumps F

Chemical replenishing system

CFD-1T-B

With a resolution of up to 1.0mL/

shot fine dispense volumes can
be achieved
The resolution of the CFD-1T-B has been greatly improved compared to our
existing models. The minimum flow of 1mL/shot offers greater accuracy in
chemical condensation control that is required in the wafer cleaning process.
The CFD-1T-B always feeds the correct quantity of chemical without overshot
eliminating excess liquid wastage. In addition, the anti-siphon mechanism
prevents unintentional siphoning.

The fluoroplastic wet end (PTFE, PFA, PCTFE) is capable of handling strong
acids, alkalines and hydrogen peroxide, typical chemicals required for
semiconductor processing. PTFE, PFA, PP, PVC external parts and PTFE
coated screws provide additional protection against chemical attack from
harsh environments.
Construction and materials
Adjustment of the stroke length to give between 1.0-2.7mL/shot is simple by
removal of the bottom cover (Factory default is 1.0mL/shot). Fitting
OUT
PTFE

Every unit is equipped with a leakage sensor to immediately detect a leak. Tube
PFA
Valve gasket
Ball valve PTFE
*An 8 mL/shot type is also available. Please contact us for more information. PTFE
Valve seat Valve guide
PCTFE PTFE
Valve case
PTFE Pump head
PTFE
Bellows
PTFE

IN Fitting
PTFE

Specifications Dimentions in mm
Application Chemical replenishing
Discharge capacity mL/shot 1mL/shot
(50)

Max. discharge pressure MPa 0.05MPa

Liquid temperature range ˚C 20 - 60˚C
Max.stroke speed spm 30spm
Pump Max. supply air pressure 0.15 - 0.3MPa
MPa
(272)
155

specification
Max. air consumption NL/min 2.5NL/min
(50)

Wet end materials PTFE, PFA, PCTFE

Liquid port bore 1/4”PFA tube (6.35×4.35)
Supply air port bore Rc1/8
67

Weight kg 1.1kg
Model Transmission type micro photo sensor
Power voltage 5 - 24V DC±10% 77 (36)
55
Photosensor Output mode NPN transistor open collector
specification
Allowable current 50mA or below
40
59

Cord 5m PVC four-core cable (Outer dia.5.2mm)

with 0.5 - round teminal
*Please request a separate drawing for external dimensions.

18
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Caution for safety use: Actual pumps may differ from the photos.
Specifications and dimensions are subject to change without prior notice.
Before use of pump, read instruction manual carefully to use the product correctly. For further details please contact us.
Our products and/or parts of products fall in the category of goods contained in control list of international regime for export control.
Legal attention related to export. Please be reminded that export license could be required when products are exported due to export control regulations of countries.

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