US 20170322052A1

( 19) United States

(12) Patent Application Publication (10) Pub. No.: US 2017Nov
/0322052 A1
PAUL et al. . 9 , 2017 (43) Pub . Date :
(54 ) MAGNETORESISTIVE WHEATSTONE Publication Classification
MEASURING BRIDGE AND ANGLE SENSOR (51) GOID
Int. CI.5 / 16
HAVING AT LEAST TWO SUCH (2006 .01 )
MEASURING BRIDGES (52 ) U .S . CI.
??? ............ GOID 5 / 16 ( 2013 .01)
(71 ) Applicant: SENSITEC GMBH , Lahnau (DE ) (57 ) ABSTRACT
(72 ) Inventors: Johannes PAUL , Mainz (DE ); Golzar A magnetoresistive Wheatstone bridge includes two bridge
ALAVI, Stuttgart (DE ); Tsung - I YIN , branches connected in parallel between a supply potential
Frankfurt (DE ) Vb , wherein two series -connected resistor arrangements R1
and R3 or R2 and R4 are arranged in each bridge branch with
an interposed measuring potential Vout. The resistor
(21) Appl. No.: 15 /528, 464 arrangements of the two bridge branches are situated diago
nally opposite one another and at least two magnetoresistive
(22 ) PCT Filed : Nov. 24 , 2015 resistor arrangements have a magnetically sensitive pre
ferred direction . The preferred directions of diagonally
(86 ) PCT No.: PCT/EP2015 /077571 opposing resistor arrangements of the bridge branches R1
and R4 or R2 and R3 differ by an angle other than 0° or 180°.
$ 371 (c )(1), An angle sensor includes at least two of the Wheatstone
( 2 ) Date : May 19 , 2017 bridges offset by a predefined angle for determining an
angular orientation of a magnetic field by a sine bridge and
( 30 ) Foreign Application Priority Data a cosine bridge . The measuring bridge reduces harmonics
and optimizes resistance values, improving the accuracy of
Nov. 24 , 2014 (DE) ..................... 10 2014 117 160 .8 a phase -angle sensor signal and the sensor resolution .

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US 2017 /0322052 A1 Nov. 9 , 2017

MAGNETORESISTIVE WHEATSTONE obtain a phase -shifted signal with AMR , two bridges are
MEASURING BRIDGE AND ANGLE SENSOR used , which are rotated for example by 45° relative to one
HAVING AT LEAST TWO SUCH another
MEASURING BRIDGES [0009 ] GMR and TMR (giant magnetoresistance effect
[ 0001] The invention relates to a magnetoresistive Wheat and tunnel magnetoresistance effect ) resistors have a resis
stone bridge and a magnetoresistive angle sensor for mea tance dependence which correlates with the angle between
suring the angular orientation of a magnetic field , which the direction of magnetisation of the free layers and the
comprises at least one Wheatstone bridge , preferably two or direction of magnetisation of the pinned layers . The peri
more Wheatstone bridges offset by a predefined angle odicity of the magnetic field direction dependence amounts
according to the teaching of claim 1.
?? to 360° in the case of TMR and /or GMR resistors . The
[ 0002 ] To this end , the two parallel- connected bridge pinned layer comprises a magnetic premagnetisation as
branches of the Wheatstone bridge , which are also known as pinning direction , which defines a preferred direction . The
half-bridges, each comprise two series - connected magne free layer and pinned layer are magnetic layers which are
toresistive resistor arrangements R1 and R3 or R2 and R4 . separated by a non -magnetic layer, in the case of TMR a thin
The resistor arrangements R1, R4 and R2, R3 of the two insulator, for example A1,0z or Mgo , and in the case of
bridge branches are each situated diagonally opposite one GMR a thin , conductive layer, for example Cu or Ru. The
another and the resistor arrangements R1, R2 or R3, R4 of free layer is configured such that its direction of magneti
the two bridge branches are situated in pairs opposite one sation follows the external field , while the pinned layer is
another . Each resistor arrangement comprises a magnetically configured such that its direction of magnetisation as far as
sensitive preferred direction , which may also be known as a possible remains stable when an external field is applied .
sensitivity direction , in which a magnetic field is measurable [0010 ] AMR -, TMR- or GMR -based resistors in Wheat
with a maximum possible sensitivity . stone bridges , which have a definable preferred direction for
[0003 ] The invention allows improved angle detection detection of a rotating magnetic field , may be used for the
accuracy by means of a magnetic angle sensor. purposes of the invention since all these types of magne
toresistive resistors have a magnetoresistive preferred direc
FIELD OF THE INVENTION tion in which a change in the magnitude of an external
magnetic field brings about a maximally large change in
[0004 ] Magnetoresistance effects are all effects which resistance , i. e . in which the highest magnetoresistive sensi
describe the change in the electrical resistance of a material tivity prevails . In a Wheatstone bridge this preferred direc
caused by application of an external magnetic field . Mag tion may be defined in process engineering on production of
netoresistance effects which have a preferred direction in the sensor layout at chip level or by an electrical and/or
respect of the vectorial direction of a magnetic field to be magnetic configuration .
measured are in particular the anisotropic magnetoresistance [0011] FIG . 1 shows a typical Wheatstone bridge of GMR
effect (AMR effect), the giant magnetoresistance effect or TMR -sensors, which comprises opposing , i.e. antiparal
(GMR effect), the CMR effect, and the TMR effect. lel, preferred directions in the individual bridge branches .
[0005 ] In the prior art, magnetoresistive angle sensors are The four magnetoresistive bridge resistors have an identical
frequently configured as a Wheatstone bridge, wherein the nominal resistance magnitude and form two bridge branches
samemagnetoresistive resistance materials are used in each with series- connected bridge resistor arrangements R1 and
bridge branch , these differing from one another only in their R3 and bridge resistor arrangements R2 and R4 parallel
shape or magnetic orientation . Through this arrangement, thereto , which lie between the supply potential difference
temperature independence of the output signal is achieved , Vb . As a rule , a bridge resistor arrangement corresponds to
since the temperature -dependent change in resistance in an individual bridge resistor; however a bridge resistor
each bridge branch is identical and thus a temperature arrangement may also comprise two or more individual
related change does not have any effect on a sensor signal. series or parallel bridge resistors. The output voltage Vout
[ 0006 ] To obtain unambiguous angle information , two may be tapped at the centre taps between the bridge branches
Wheatstone bridges are typically necessary which have their R1/R3 or R2/R4. The arrows shown may for example
magnetic sensitivity direction in different orientations rela indicate the pinning direction of GMR - or TMR - resistors
tive to one another. For example , the two bridges are rotated and thus identify the magnetoresistive preferred direction
by 90° and a sine function and a cosine function are obtained thereof. All the bridge resistors of a bridge resistor arrange
in the bridge output in the event of a magnetic field to be ment have an identical magnetic preferred direction . In the
detected rotating by the angle of rotation 0 . These two case of TMR - or GMR - resistors , the resistance is at its
signals are used to calculate an unambiguous angular posi minimum when the free layer and pinning layer are mag
tion 0 , for example by means of the ARCTAN function . In netised in the same direction and at its maximum in the case
cases of different angular offsets of the two bridges, an of antiparallel magnetisation . The bridge resistor arrange
unambiguous angular orientation of a magnetic field to be ments of a bridge branch have antiparallel preferred direc
detected may likewise be calculated using suitable trigono tions and the diagonally situated bridge resistor arrange
metric functions. ments of the two bridge branches have identical preferred
[0007 ] AMR (anisotropic magnetoresistance effect) resis directions, i.e . R1 and R4 have the same preferred direction
tors have a resistance dependence which correlates with the and R2 and R3 have a preferred direction offset by 180°
angle between current direction and direction of magneti therefrom . An external magnetic field oriented in the pre
sation , since the periodicity amount to 180° in the case of ferred direction of the bridge resistor arrangements R2, R3
AMR . brings about resistance minimisation in resistors R2 and R3
[0008 ] An AMR bridge for angle measurement therefore and a resistance maximisation in resistors R1 and R4 , so
contains magnetoresistive strips in different directions . To resulting in a maximum or minimum output signal Vout.
US 2017 /0322052 A1 Nov. 9 , 2017

[ 0012] Angle measurement accuracy is greater, the more The overall preferred direction of the measuring bridge is
sinusoidal are the output signals of the Wheatstone bridge thereby modified towards an angle a / 2, as represented by the
used for detection of the magnetic field angle , i. e . the more vector diagram in FIG . 2 . As shown in the vector diagram of
a change in measurement voltage of the bridge tap behaves FIG . 2 , in each bridge resistor arrangement R11 -R12 , R21
sinusoidally similarly to the angular rotation in the case of R22 , R31 -R32 and R41 - R42 of the overall measuring
an assumed rotation of an external magnetic field to be bridge , which is composed in each case of a series circuit of
detected . It is desired that identical nominal resistance two sub - resistors RX1-RX2 with different magnetic field
magnitudes and behaviour of the bridge resistors R1 to R4 sensitive preferred directions, a preferred direction Rres of
result in an output voltage Vout= A :Vb . cos ( ) with a scaling the bridge branch results , which corresponds to the direction
factor A dependent on the resistance behaviour of the of the bisector a / 2 of the deviation angle a of the two
measuring bridge, wherein is directed as the angle of the resistors RX1-RX2. Since all the bridge resistors have the
external magnetic field relative to the preferred direction , samepreferred direction in the positive or negative direction
indicated by the arrows, of the magnetoresistive bridge in the upper or lower half-bridge branch , the overall sensi
resistors R2 , R3 or with a 180° offset relative to the resistors tivity direction of the overall bridge points in the direction
R1, R4 . However, a pure sine or cosine function is only Rres. Diagonal bridge resistors have identical orientations of
seldom found in practice , as harmonics distort the sine and the preferred directions of the sub - resistors and of the
thus the ARCTAN -calculation may be erroneous , since it overall resistor.
requires a pure sine. [0018 ] It is feasible for each of these sub -resistors to be
[0013] Harmonics in the measurement voltage curve may subdivided again and to split further into two elements ,
be brought about by different effects , for example in that the whose pinning directions differ by an angle B . As a rule ,
rotating magnetic field is not uniform , for example due to further splitting takes place symmetrically in a positive and
induction , due to magnetic anisotropy of the resistance negative angular amount about the preferred angular direc
materials used , due to tolerances during assembly of sensor tion , such that the latter does not change any further. In this
and magnet or inaccuracies or incorrect orientations of pole way, the 180°/B harmonic may also be filtered . Splitting may
shoes or magnetic field conductive elements. be continued and thus theoretically any number of harmon
[ 0014 ] In the case ofGMR and TMR sensors, a significant ics may be filtered , wherein the number of further sub
contribution to harmonics is made by the not exactly stable resistors in each case increases by a factor of two and thus
position of the magnetisation of the reference layer or of the a large number of sub - resistors and a precise orientation and
pinning layer, which in practice is only a few nanometres identical resistance value are required .
thick . In practice, said layer has a tendency to rotate a little [0019] As previously , the harmonic filtering is applied
with the external field . The angle of rotation is the greater, within each bridge branch . Because each individual bridge
the stronger is the external field . This results in harmonics in branch filters the same number of harmonics, the bridge
the output signal. In particular, the second , third , fourth and voltage of these harmonics is also filtered . The number of
also the fifth harmonics are found in the output signal of the necessary pinning directions in one bridge doubles with each
Wheatstone bridge , which leads to measurement inaccura filter. Thus, there are 2 pinning directions in the original
cies. configuration without filter ( see FIG . 1 ). With a filter for one
[ 0015 ] There is therefore a need to improve harmonics in harmonic , there are then 4 pinning directions (see FIG . 2 ).
the angle measurement by means ofmagnetoresistive resis Each bridge branch requires at least four sensor elements ,
tor arrangements . i.e. sub-resistors . If two harmonics are filtered , a total of 8
pinning directions is obtained . Each bridge branch then
BACKGROUND OF THE INVENTION contains at least eight sensor elements. In this case , the
[0016 ] U . S. Pat. No. 6 ,633 ,462 B2 describes a concept for complete bridge requires at least 16 sensor elements . A
suppressing harmonics, in which a bridge resistor arrange sensor consisting of two bridges in this respect requires at
ment is formed of three sub -resistors, a central sub - resistor least 32 sensor elements .
of greatest resistance , the preferred direction of which lies in 10020 ] A further requirement of a high accuracy magne
the direction of the component to be measured , and two toresistive angle sensor results from the fact that the overall
sub - resistors of lower resistance , the preferred direction of resistance of the measuring bridge should on the one hand
which deviates from the preferred direction of the compo adopt a given value, in order to be optimally evaluated and
nent to be measured by an identical positive or negative to be able to influence a measurement current in a desired
angle respectively of 5° to 85°. In this way, any material region , and from the fact that the resistance value of each
anisotropy may be reduced and the sinusoidal curve of the individual bridge resistor arrangement in themagnetic field
measurement signal improved. Each bridge resistor arrange free state and the sub - resistors constituting this should adopt
menthas a preferred direction corresponding to the preferred nominally identical resistance values . With regard to manu
direction of the central sub - resistor, diagonally arranged facture , this can only be achieved in most cases with great
bridge resistors have identical preferred directions . difficulty or not at all, such that moreover the desired
[0017] In further prior art known from EP 2 455 720 A1, trigonometric curves of the measurement signals and opti
as shown in FIG . 2 , two sub -resistors RX1 and RX2 of a mal evaluation cannot be achieved . It is therefore desirable
bridge resistor arrangement RX , i. e . R11 and R12 of the to be able to influence each resistor arrangement and the
bridge resistor arrangement R1, are connected in series, their overall resistance of the measuring bridge during the manu
pinning directions and thus preferred directions being offset facturing process or subsequently , in order in particular to
by an angle a . In this way , the 180° / a harmonic is filtered . counter tolerances in manufacture . Diagonal bridge resistors
For instance , the third harmonic may be filtered at an offset are of identical configuration and a plurality of different
angle a = 60°. Through a concatenation of a plurality of pinning directions is required in order effectively to reduce
pinning directions, a plurality of harmonicsmay be filtered . harmonics .
US 2017 /0322052 A1 Nov. 9 , 2017

[0021] A disadvantage of the prior art is that filtering of art , which recites identity of the preferred directions of
harmonics by means of magnetoresistive resistor arrange obliquely opposing bridge resistors R1- R4 and R2-R3.
ments can only be achieved with high manufacturing com 10027 ] In one advantageous further development, mag
plexity . Furthermore , homogeneity of the resistance behav netic preferred directions of series - connected resistor
iour in particular of TMR - or GMR-based resistor arrangements R1 and R3 or R2 and R4 of each bridge branch
arrangements can be achieved only with difficulty , since the may be oriented antiparallel. The magnetic preferred direc
resistance values may be widely scattered during produc tions of two series - connected resistor arrangements R1 -R3 ,
tion. R2-R4 of each bridge branch are oriented antiparallel, i.e .
[ 0022] The object of the present invention is to propose a rotated by 180° . In this way ,maximum sensor sensitivity is
resistor arrangement for a magnetoresistive angle sensor achieved , and the resistors of each bridge branch may also
which achieves improved harmonic filtering and highly be arranged close together on a chip substrate and produced
precise angular resolution with reduced manufacturing effort with an antiparallel preferred direction .
and circuit complexity . [0028] In an advantageous further development, the pre
[0023 ] This object is achieved by an angle sensor accord ferred directions of the resistor arrangements R1 and R2 or
ing to the independent claims. Advantageous embodiments R3 and R4 situated opposite one another in pairs in the
of the invention constitute the subject matter of the sub bridge branches may be oriented antiparallel. The preferred
claims. direction of the respective neighbouring pairs of resistor
arrangements R1, R2 and R3 , R4 situated in the two bridge
SUMMARY OF THE INVENTION branches may be oriented antiparallel. In this case , the
preferred directions of the series resistor arrangements
[ 0024 ] The invention proposes a magnetoresistive Wheat R1-R3 and R2 -R4 are angled relative to one another , such
stone bridge which comprises two bridge branches con that the respective diagonally situated resistor arrangements
nected in parallel between a supply potential Vb , wherein R1-R4 and R2-R3 also have mutually angled preferred
two series -connected resistor arrangements R1 and R3 or R2 directions.
and R4 are arranged in each bridge branch with an inter [0029 ] If a measuring bridge is designed according to one
posed resultant differential voltage Vout. The resistor of the above -stated embodiments , the overall preferred
arrangements R1 and R4 or R2 and R3 of the two bridge direction may be determined by superposition of the vecto
branches are situated diagonally opposite one another and at rial preferred directions of diagonal resistor arrangements . A
least two magnetoresistive resistor arrangements R1, R2, preferred direction of one respective resistor arrangement of
R3, R4 have a magnetically sensitive preferred direction. each bridge branch may in each case lie on a 0° -main axis ,
The preferred directions of diagonally opposingmagnetore as defined for example in FIG . 1 in the measuring bridge
sistive resistor arrangements of the bridge branches R1 and 100 , and the preferred direction of the respective other,
R4 or R2 and R3 differ from one another by an angle other series - connected resistor arrangement of each bridge branch
than 0° or 180°. may be angled , preferably by a 30°, 36°, 45° or 60° -angle .
[0025 ] This invention therefore describes a method for A 60°-angle serves in filtering the 3rd harmonic , a value of
reducing the harmonics and achieving optimum resistance 45° in filtering the 4th harmonic , a value of 36° in filtering
values . In contrast to the prior art, harmonics are not the 5th harmonic and 30° in filtering of 6th harmonic . This
suppressed in the individual resistor arrangements , but results in a resultant preferred direction of the measuring
rather are suppressed via functional interaction of different bridge which is angled relative to the original 0° main axis .
magnetic preferred directions of all the bridge resistor This main axis may be regarded as a main axis of symmetry
arrangements throughout the measuring bridge . In this way, of the resistor arrangements on a chip substrate . According
the signal is improved and the resolution of the sensor is to the invention , the sensitivity direction differs from this
improved , wherein a smaller number of sub - resistors may be main axis . For manufacturing reasons it may be desired to
used . In the case of an angle sensor, angular accuracy may adjust the preferred direction in accordance with a geometric
be increased thereby . The filtering of harmonics of a mag specification on the chip substrate , for example parallel to
netoresistive resistance bridge is made possible by specify one substrate edge or along a structural element on the chip
ing the preferred directions Rres1 and Rres2 of the diago substrate , for example along a magnetic field direction of a
nally opposing resistor arrangements of the measuring compensating magnetic field which may be provided by an
bridge, wherein the overall sensitivity direction Rres results energised coil or conductor. For such an adjustment of a
from vector addition of preferred sub- directions Rres1 and preferred direction , the spatial arrangement of the overall
Rres 2 of diagonal resistor arrangements R2 and R3 or R1 measuring bridge on the chip substrate may be selected
and R4. The number and orientations of the magnetoresis accordingly . However, in order to achieve a desired pre
tive sub-resistors of each resistor arrangement in the two ferred direction , the preferred directions of all the resistor
bridge branches are determined by the harmonic filtering, arrangements may be rotated in the same direction even
the overall preferred direction being the resultant thereof. No irrespectively of the spatial position of the resistor arrange
bridge resistor arrangement has a preferred direction which ments of the measuring bridge on the chip substrate . It may
corresponds with the overall preferred orientation of the thus advantageously be possible to provide symmetrical
measuring bridge, and the resistor arrangements of the two angling of the preferred direction of all the resistor arrange
half-bridges have different individual preferred directions ments in positive and negative angular directions relative to
and preferred directions . the above -stated 0° main axis. Starting from an angle from
[0026 ] The preferred directions of the bridge resistors of which the overall preferred direction relative to 0° of a
one half-bridge do not determine an identically oriented measuring bridge known from the prior art differs , the two
orientation of the preferred directions of the bridge resistors angles of the preferred directions of respective diagonally
of the respective other half-bridge, in contrast to the prior opposing resistor arrangements R1 and R4 or R2 and R3
US 2017 /0322052 A1 Nov. 9 , 2017

may be rotated about the positive preferred direction angle directions offset relative to one another by an angle a2 or by
for R2 relative to 0° and the corresponding negative pre further angles, wherein the resultant preferred directions of
ferred direction angle for R3 relative to 0° and about this the two or more magnetoresistive resistors of diagonally
negative preferred direction angle for R1 and this positive opposing resistor arrangements of the bridge branches R1
preferred direction angle for R4 relative to 180°. Alterna and R4 or R2 and R3 differ from one another by an angle al,
tively, the two angles of the preferred directions of respec wherein preferably al =60° and a2= 30° or a2= 36°. In this
tive diagonally opposing resistor arrangements R1 and R4 or way , filtering of a plurality ofharmonic components may be
R2 and R3 may be rotated from the 0° main axis about this achieved by the provision of two or more sub - resistors with
positive preferred direction angle for R3 and negative pre different preferred directions, which may be directed accord
ferred direction angle for R2 relative to 0° and this negative ing to the harmonic to be filtered , in a resistor arrangement
preferred direction angle for R1 and this positive preferred RX of the measuring bridge. A value of 36° serves in
direction angle for R4 relative to 180°. If for example the particular in filtering a fifth harmonic .
preferred direction of the resistor arrangement R1 is oriented 10034 ] In one advantageous further development, at least
in a - 180° and R3 in a 0° direction , and the preferred in a resistor arrangement R1 , R2, R3 or R4 a trimming
direction ofR2 amounts to a and ofR4 to 180° + a , as shown resistor RXT may be series -connected which is preferably
in FIG . 3a, the result is an angle of the overall preferred selected so as to result in a resistance behaviour identical
direction Rres along an axis in the a / 2 direction . If the with regard to magnitude of the resistor arrangements R1,
preferred directions R1 are rotated in the 180° - a / 2 direc R2, R3 and R4 . In this way, it is possible to achieve identical
tion, R2 in the a / 2 direction , R3 in the - a /2 direction and R4 nominal values of the resistors and thus from the outset
in the 180° + a / 2 , the result is orientation of the overall trimming of the measuring bridge and a defined setting of
preferred direction once again along the 0° axis. Thus , in the the overall preferred direction . An “ on ” trimming resistor in
case of a spatial position of the resistor arrangements on a a trimming resistor arrangement on the one hand enables
chip substrate , harmonic filtering and freely selectable trimming of the resistance value of each resistor arrange
adjustment of the direction of the preferred direction may be ment , such that the nominal resistance valve of each resistor
achieved . In particular, a =60 may be selected . In this case, arrangement is identical. On the other hand , the introduction
irrespective of the spatial arrangement of the resistor of trimming resistors , during mass production of a plurality
arrangements on the chip substrate , the preferred direction of ofwafers on the chip substrates of which measuring bridges
the measuring bridge may be set which thus arises along a are built, makes it possible to adapt the resistance behaviour
midline of a mirror- symmetrical preferred direction distri of the measuring bridges of different wafers , such that
bution of the diagonal resistor arrangements . manufacturing quality may be made homogeneous within
(0030 In an advantageous further development, the resis each resistance bridge but also over a series of resistance
tance behaviour of each resistor arrangement R1, R2 , R3 and bridges . In the case of TMR - or GMR -technology in par
R4 may be identical in respect of magnitude at least in the ticular, resistance values may be scattered as a result of
magnetic field - free state . It is advantageous for the resis minuscule process variations, such that manufacturing - re
tance value of the sub -resistors R1X , R2X , R3X and R4X to lated differences may be corrected using trimming resistors .
be equal or identical and for the resistance value of the [0035 ] In one advantageous further development, the trim
bridge resistors to be equal, such that exact setting of the ming resistormay be a magnetoresistive resistor which has
overall preferred direction and accordingly precise calibra a trimming resistor preferred direction ; in particular the
tion of the measuring bridge is possible . trimming resistor may be a TMR -resistor. When producing
[0031 ] In one advantageous further development,themag TMR -chip substrates , processing may result in wide scat
netoresistive resistor arrangements may be AMR -, GMR -, or tering of the resistance behaviour, wherein the trimming
TMR- resistor arrangements , which are arranged on a chip resistors open up the possibility of achieving identical
substrate . The processing methods for producing such chip nominal behaviour of the resistor and thus trimming of the
substrates may be achieved inexpensively with great accu measuring bridge .
racy , wherein measuring bridge arrangements resulting [0036 ] In one advantageous further development, a trim
therefrom have a precisely definable preferred direction . ming resistor preferred direction may be oriented in the
[0032] It may be sufficient for just two diagonally oppos direction of a preferred direction of one resistor of the
ing resistor arrangements to comprise magnetoresistive resistor arrangement, in the direction of the resultant pre
resistors and for the other two resistor arrangements to ferred direction of the resistor arrangement in a bridge
represent ohmic resistors . In an advantageous further devel branch or in the direction of the overall preferred direction
opment, each resistor arrangement R1, R2 , R3, R4 may of the Wheatstone bridge. One trimming resistor RXT may
comprise a magnetoresistive resistor with a preferred direc be provided per bridge resistor arrangement RX , the pre
tion , wherein the preferred directions of diagonal opposing ferred direction of said trimming resistor RXTbeing situated
resistor arrangements of the bridge branches R1 and R4 or in the preferred direction of the bridge resistor RX of a
R2 and R3 differ by an angle a from one another, in bridge branch or the half-bridge RresX , or a trimming
particular by an angle a = 60° in the case of TMR - or resistor RT, the preferred direction ofwhich is situated in the
GMR - resistors or a = 30° or a = 36° in the case of AMR overall preferred direction Rres. The overall resistance of the
resistors . Thus , optimisation of the measuring bridge is measuring bridge may thus be adjusted and manufacturing
achieved and all the resistor arrangements may be produced related tolerances of the measuring bridge resistors, i.e . the
using the same production method and different preferred four resistor arrangements , may be compensated .
directions. [0037 ] In one advantageous further development, the trim
[0033 ] In one advantageous further development, each ming resistor may comprise a concatenation of at least two
resistor arrangement R1, R2, R3, R4 may comprise at least tunnel resistors between top electrodes and bottom elec
two magnetoresistive resistors RX1, RX2 with preferred trodes, wherein the trimming resistor may be adjustable by
US 2017 /0322052 A1 Nov. 9 , 2017

electrode interruption of the top electrode or of the bottom [0042 ] A person skilled in the art will expediently also
electrode . Top electrodes may also be short-circuited with consider the features individually and combine them into
one another, so as to modify the resistance value . Series or meaningful further combinations.
parallel connections of trimming resistors may thereby be [0043 ] In the figures :
formed , to adapt the resistance value and optionally the [0044 ] FIG . 1 shows a Wheatstone bridge of a prior art
preferred direction of a resistance bridge arrangement. In angle sensor ;
this way, a large number of trimming resistors may be [0045 ] FIG . 2 shows a Wheatstone bridge of a prior art
provided using methods used in any event in the manufac angle sensor;
turing method , so as to enable very fine trimming of the [0046 ] FIG . 3 shows a first embodiment of a Wheatstone
resistances. bridge for an angle sensor according to the invention ;
[0038 ] In one advantageous further development, the trim [0047 ] FIG . 4 shows a second embodiment of a Wheat
ming resistor may comprise a series and /or parallel connec stone bridge for an angle sensor according to the invention ;
tion of a plurality of trimming sub -resistors, in particular a 10048 ] FIG . 5 shows an error diagram for angle sensors
plurality of tunnel resistors, wherein the number of parallel when using various measuring bridge configurations;
branches and/ or series resistors of each parallel branch may [0049] FIG . 6 shows a chip layout of an embodiment of an
be adjustable . Trimming resistors may be constructed as angle sensor according to the invention ;
series and /or parallel connections of a plurality of identically [0050 ] FIG . 7 is a sectional representation of trimming
oriented sub -resistors , wherein these may be short -circuited resistors for use in an angle sensor according to the inven
or separated into a parallel branch , in order to reduce the tion ;
resistance value . Very fine adjustmentmay thus be achieved 10051 ] FIG . 8 is a plan view onto trimming resistors for
for precise trimming of a measuring bridge . use in an angle sensor according to the invention ;
[0039] In one associated aspect, an angle sensor is pro [0052 ] FIG . 9 shows third and fourth embodiments of a
posed which comprises at least two of the above -stated Wheatstone bridge for an angle sensor according to the
magnetoresistive Wheatstone bridges offset by a predefined invention ;
angle , in particular by 90°, for determining an angular [0053 ] FIG . 10 shows fifth and sixth embodiments of a
orientation of a magnetic field by means of a first and a Wheatstone bridge for an angle sensor according to the
second sensor bridge , in particular a sine bridge and a cosine invention ;
bridge . Three or more measuring bridges may also be 10054 ] FIG . 11 shows a seventh embodiment of a Wheat
included , which are in particular angled relative to one stone bridge for an angle sensor according to the invention ;
another in all three spatial directions, in order to produce a [0055 ] FIG . 12 shows an eighth embodiment of a Wheat
3D -magnetic field sensor. The angle determines a math stone bridge for an angle sensor according to the invention .
ematical relationship between the output signals of the [0056 ] Identical elements are denoted with the same ref
measuring bridge, in order to determine the orientation of an erence signs in the figures . The figures merely show
external magnetic field . In the case of 90° angling , a simple examples and should not be understood as being limiting .
ARCTAN - function of the two output values Vout may be [0057 ] The concept according to the invention is described
used to determine a measuring angle . below with reference to the figures, said concept managing
[ 0040 ] In one advantageous further development of the with fewer sensor elements than the designs known from the
angle sensor, sub - resistors RiX and R3X of the resistor prior art while demonstrating comparable and indeed supe
arrangements R1, R3 of the first bridge branch R1-R3may rior filter characteristics. A significant aspect is that filtering
be arranged spatially adjacently on a chip substrate , and is not completely provided in each individual bridge branch
sub - resistors R2X , R4X of the resistor arrangements R2 , R4 or in individual bridge resistor arrangements , but rather is
of the second bridge branch R2-R4 may be arranged spa distributed over the four resistor arrangements .
tially adjacently on the chip substrate . The first and second [0058] Hereinafter, the magnetoresistive resistor elements
bridge branches R1-R3 and R2 -R4 of each sensor bridge are considered to be pinnable resistors which , as with GMR
may be arranged diagonally relative to one another on the or TMR -resistors, have a magnetic preferred direction in the
chip substrate . Thus , the resistor groups of the two bridge pinning direction . In AMR-resistor types there is no pinning
branches are situated diagonally relative to one another and direction . The corresponding analogue to the pinning direc
adjacent to bridge branches of a measuring bridge advanta tion is here the strip direction which predetermines the
geously rotated by 90°. Thus, the resistor arrangements of a direction of current flow . Thus, the further explanations may
sine and a cosine bridge may be arranged compactly and be applied mutatis mutandis . In the case of AMR, half the
obliquely relative to one another in a 4 - quadrant grid . This angle magnitudes should typically be assumed .
results in a space - saving , low -offset design for an angle [0059] FIGS. 1 and 2 show magnetoresistive measuring
sensor. Due to the close spatial proximity of the resistor bridges 100 , 102 , which are known from the prior art and
arrangements of the measuring bridge, manufacturing - re have already been discussed in the introduction . Diagonally
lated scatter may be mutually compensated and high sensor arranged bridge resistors have identical magnetic preferred
accuracy achieved . directions, which are symbolised by an arrow , and in the
direction ofwhich the highest sensitivity and greater change
DRAWINGS in resistance is achieved on variation of an externalmagnetic
field . The preferred directions of the bridge resistors of a
10041] Further advantages are revealed by the present bridge branch are each rotated relative to one another by
description of the drawings . The drawings show exemplary 180° . Thus, harmonic filtering and linear) angle detection
embodiments of the invention . The drawings, description accuracy can only be achieved with major manufacturing
and claims contain numerous features in combination . effort and a large number of components and large chip size .
US 2017 /0322052 A1 Nov. 9 , 2017

[0060 ] FIGS. 3 and 4 each show two exemplary embodi superposition of the preferred directions of the diagonal
ments of magnetoresistive Wheatstone bridges for use in an resistor arrangements R3 and R2. The same filtering is also
angle sensor of the invention . FIG . 3a and FIG . 3b show achieved , as shown in FIG . 3b , by resistor arrangements R1,
simple resistance bridges 10 . 1 and 10 .2 respectively, with an R2 or R3, R4 arranged adjacent in pairs of the two bridge
individual bridge resistor in each bridge resistor arrange branches having antiparallel preferred directions, and the
ment. The magnetoresistive resistor arrangements of bridge preferred directions within one bridge branch differing by
branches or a half-bridge , which are connected to the same the angle a . This therefore results in the sensitivity direction
outlet terminal connection Vout, each have an antiparallel Rres of the overall bridge 10 . 1 and 10 . 2 in the cases of FIGS .
pinning direction preferred direction . In FIG . 3a , R1 and R3 3a and 3b through vectorial superposition of the preferred
are connected in one bridge branch to a terminal connection directions of the diagonally opposing resistor arrangements
Vout and have an antiparallel pinning direction . R2 and R4 R3 and R2 . In contrast to the prior art, harmonic filtering
are likewise connected in one bridge branch to another takes place through interplay of the resistors of the two
terminal connection Vout and likewise have an antiparallel half-bridges , and not as is known in the prior art — within
pinning direction . Diagonal bridge resistors R1 and R4 or R3 just one bridge resistor
resistor.
and R2 have preferred directions which are rotated by an 10065 ] The arrangements according to the invention in
angle a relative to one another. This arrangement brings
about filtering of the bridge signals . In this case , the 180°/ a FIGS. 3a and 3b filter the n -te harmonic , wherein n = 180 / a .
harmonic is suppressed . In each bridge branch , the respec [0066 ] FIGS. 4a and 4b show exemplary embodiments of
tive resistor arrangements have an angular offset of 180°, a measuring bridge 12 . 1 or 12 .2 respectively, with which a
wherein mutually opposing resistor arrangements of each further harmonic may be filtered . This is achieved by each
bridge branch have an angular offset of 180° - a . The advan resistor arrangement R1 to R4 being subdivided into two
tage is obvious. To achieve a similar filter effect, this sub -resistors R11 , R12, . . . , R41 , R42 , wherein the pinning
harmonic filtering requires only half the number of sensor directions of the two sub -resistors RX1 and RX2 are at an
elements . angle a2 to one another. The preferred directions of diagonal
[0061 ] In FIG . 3a , the series -connected resistor arrange resistor arrangements are rotated by the angle al relative to
ments R1 and R3 of one half-bridge and R2 and R4 of the one another. This arrangement results in filtration of the
corresponding second half-bridge each have antiparallel harmonic 180 %al and the harmonic 180° /a2 . In FIG . 4a, in
preferred directions. The preferred directions of the resistor measuring bridge 12 . 1 the preferred directions ofthe respec
arrangements R1 and R2 and R3 and R4 are each rotated by tive upper and lower bridge resistor of each half -bridge ,
the angle a relative to one another. R1-R3 or R2-R4 , are oriented antiparallel by 180º and the
[0062 ] In contrast , FIG . 3b shows a measuring bridge 10 .2 preferred directions of diagonal resistor arrangements are
rotated by an angle al. In FIG . 4b , in measuring bridge 12 .2 ,
in which , in the series circuit of the resistor arrangements R1 the preferred directions of the resistor arrangements of each
and R3 of one half -bridge and R2 and R4 of the correspond bridge branch are rotated by al relative to one another,
ing second half-bridge, the preferred directions of the resis wherein resistor arrangements opposite one another in pairs
tor arrangements are each rotated by the angle a relative to of the two bridge branches are oriented antiparallel . The
one another. The preferred directions of the resistor arrange circuit configuration of measuring bridge 12 . 2 of FIG . 4b
ments R1 and R2 and R3 and R4 opposite one another in may be produced by swapping Vb and Vout from measuring
pairs are each oriented antiparallel relative to one another. bridge 11 . 1 of FIG . 4a . The advantage of this arrangement
With regard to circuitry, the measuring bridge 10 . 1 shown in is again obvious. Two harmonics may be filtered , as pro
FIG . 3a may be converted into the measuring bridge 10 . 2 vided by the design of FIG . 2 already known from the prior
shown in FIG . 3b by swapping the supply voltage and output art, but in contrast only 8 sensor elements are needed instead
voltage contacts Vb and Vout. of 16 , wherein in the prior art all preferred directions and the
[0063] FIG . 3a and FIG . 3b show , by way of vector filtering action must be present within each bridge resistor.
graphs, how the preferred directions or sensitivity directions The arrangement may be made smaller and simpler, so
Rres of the overall bridge 10 .1 or 10 .2 respectively may be reducing costs. Each resistor arrangement comprises only
determined . Vectorial superposition of the preferred direc some of the possible preferred directions.
tions of R3 and R2, the diagonally opposing resistor arrange
ments, produces a resultant vector Rres which is directed [0067] The vector diagrams of FIGS. 4a , 4b are graphical
parallel to the sensitive axis , i.e . in the preferred direction of representations of how the sensitive axis (overall preferred
the resistance bridges . The resistance bridge has the highest direction ) Rres of the overall bridge 12. 1 or 12 .2 respec
sensitivity along this bridge , wherein harmonics are sup tively is obtained . Since the two bridge resistors in each
pressed half -bridge are of identical construction and display the
[ 0064 ] Each resistor arrangement of a half-bridge R1, R3 same behaviour with regard to magnitude, but with the
and R2, R4 has a preferred direction , i. e . an axis of sensi angles of the preferred directions rotated in each case by
tivity, wherein the overall preferred direction Rres of the 180° and the two half-bridges have different preferred
half -bridge does not correspond , as it does in the prior art, directions , the overall preferred direction Rres is obtained by
to the preferred direction of each individual resistor arrange superposition of the preferred directions of the two half
ment, but rather arises in a direction a / 2 of the orientation bridges Rres1 and Rres2 as interplay of the two half -bridges
of the preferred directions of diagonal resistor arrangements for the overall bridge .
which differ from one another by a . If the half-bridges are [0068 ] The resultant preferred direction angle al /2 + Q2 /2
interconnected as in FIG . 3a , such that in the half- bridge the is obtained very simply by means of vector algebra , as the
preferred directions are each identically oriented but have appended vector diagram of the preferred directions of the
antiparallel preferred directions, an overall preferred direc - individual magnetoresistive resistors shows, and can be
tion Rres of the overall bridge is achieved through vectorial expressed mathematically by :
US 2017 /0322052 A1 Nov. 9 , 2017
7

thereof of the individual measuring bridges varies in accor

al + a2
2
( sin (al) + sin (a2) + sin (al + a2)
- = arctan -
dance with the depictions in FIG . 4b relative to FIG . 4a .
1 + cos(al) + cos (a2) + cos(al + a2) [0071 ] The essential point of the exemplary embodiments
ofmagnetoresistive bridge configurations for use in an angle
[ 0069 ] FIG . 5 shows simulated angular errors of a TMR sensor is that identicalbut antiparallel preferred directions of
angle sensor consisting of two measuring bridges for dif the two bridge resistors are present within one half -bridge ,
ferent flux densities, assuming an exciter signal affected by but the two half -bridges have differently oriented reference
harmonics . O - err is the angular error, i.e. the deviation of the directions, wherein these together result in the overall pre
error determined by the angle sensor from the actual angle ferred direction of the measuring bridge . In this way, har
0 . In this case , the angular error 0 -err was calculated with the monics may be effectively suppressed with a reduced num
assumption that the phase of cosine and sine is exactly 90°, ber of bridge resistors and a virtually perfect sine -/ cosine
the amplitudes of the two bridges are exactly identical and shaped output voltage curve may be achieved , since not
the offset of the two bridge signals is identical at zero . In the every preferred direction of a harmonic has to be modelled
case a = 0° , the error of a measuring bridge used in the prior in every resistor arrangement or every half-bridge .
art according to FIG . 1 is shown. a = 60° corresponds to the [0072 ] The above proposals are based on the fact that the
measuring bridge arrangement of FIG . 3 and al =60° and resistance value of each bridge resistor, which may in turn
a2 = 30° to themeasuring bridge arrangement of FIG . 4 . The be composed of a plurality of sub -resistors in series con
resultant error is caused by the harmonics in the measure nection , is ideally of identical magnitude . With regard to
ment set - up and in the movement of the direction of mag manufacture , this can only be achieved with difficulty , since
netisation of the reference layer. It is obvious that the filter the resistance values of the bridge resistors scatter. Likewise
concepts according to the invention function extremely well. with regard to manufacture , first of all a change in resistance ,
[0070 ] FIGS. 6a and 6b show chip layouts of an angle for example of a wafer, which is the same for all resistors
sensor 30. 1 or 30.2 respectively, which are each of identical may arise , which leads to a modified overall resistance of the
construction but may, as already explained with regard to measuring bridge , which is disadvantageous for integration
FIGS. 3a , 36 and 4a, 4b , be converted into one another by into evaluation electronics. It is therefore possible , through
swapping supply and measuring taps Vb , Vout. The angle the trimming resistors , to achieve both identical resistor
sensors 30 . 1 , 30 . 2 consist of two resistance bridges 40 , 42 arrangements within a measuring bridge and identical mea
rotated relative to one another by 90°, which are constructed suring bridge behaviour over a plurality of wafers.
according to the measuring bridges 12 . 1 , 12 . 2 shown in [0073 ] Therefore , effective harmonic filtering and high
FIGS. 4a and 4b . The angles are selected with al=60° and accuracy of angular resolution may be achieved with the
Q2 = B = 30° . The two Wheatstone bridges 40 , 42 serve to exemplary embodiments depicted in FIG . 4a, FIG . 4b and
determine a sine and a cosine component of a magnetic field FIG . 6a , FIG . 6b . However, a prerequisite is identical
and are arranged on a chip substrate 32. In this case , the behaviour with regard to magnitude of the resistance values
respective antiparallel resistor arrangements of a bridge in respect of a specified magnetisation in the preferred
branch R1, R3 40 - 1 and R2, R4 40 -2 and R1, R3 42 - 1 and direction . Only in this way can the bridge circuit be used for
R2 , R4 42- 2 of each resistance bridge 40 , 42 are arranged efficient harmonic filtering. In addition to the arrangement
spatially adjacent one another and the two branches of each with different pinning directions, it is therefore desirable and
bridge 40 , 42 are arranged diagonally relative to a centre advantageous for trimming resistors RT 50 to be provided ,
point of the chip layout on the substrate 32 . The bridge which make it possible to minimise non -identical resistance
branches of the two bridges 40 , 42 are thereby arranged distribution on a wafer or to make the resistances uniform
spatially adjacent one another on the chip substrate 32 . and achieve identical nominal values , or to trim the average
Provided on the left on the chip substrate 32 are pad resistance value on a wafer. Trimming resistors 50 may be
connections 34 of the sine bridge 40 , two pads for the connected in series or in parallel to a sub - resistor or a
voltage supply UBSIN and GNDSIN and two pads for the resistor arrangement, in order to adapt the overall resistance
differential bridge tap SIN + and SIN - . Similarly, on the value and optionally also the preferred direction .
right, the pads UBCOS and GNDCOS are provided for the [0074 ] Above all , in the case of TMR sensors a strongly
voltage supply and the pads COS+ and COS - for the centre scattering resistance distribution regularly arises on a chip
tap of the cosine bridge 42 . Thus, Vb1 SIN and Vb2 SIN substrate , since the slightest changes in barrier thickness
represent the supply voltage connections Vb , and Vout1 SIN , exhibit major changes in barrier resistance . Only with trim
Vout2 SIN represent the two contacts of the output terminal ming resistors 50 is it advantageously possible to build a
Vout, the same applying mutatis mutandis for the cosine sensor which may firstly be tightly specified with regard to
bridge 42 . TMR elements are located in the middle of the the resistance value ( for example average + 20 % ) and sec
angle sensor chip 30 . The TMR elements of the upper and ondly has a good angular accuracy.
lower bridge resistors 40- 1 or 40 -2 respectively are grouped 0075 ] If possible , trimming resistors 50 should have the
in dashed rectangles and belong to the sine-bridge 40 , the same characteristics as the actual magnetoresistive elements
lower and upper bridge resistors 42 - 1 , 42 - 2 in the dotted on the chip . In other words , the trimming resistors 50 should
rectangles belonging to the cosine bridge 42 . The elements also be AMR -, GMR - or TMR -elements , which may as
are thus assembled in squares. For the sine bridge 40 , the required be connected or suppressed .
existing pinning angles are indicated in each square with 10076 ] One possible way of configuring trimming resistors
regard to the 2D coordinate system represented top left and 50 is shown in FIGS. 7 and 8 . In FIG . 7 , 10 identical tunnel
the associated resistors are connected according to the resistors 54 are present in the form of 10 tunnel elements . In
bridge 12 of FIG . 4 . The angle sensor 30 . 2 of FIG . 6b may this case, the current is fed in via a top - electrode 52 and
be achieved by swapping the connections of Vb and Vout of flows through the tunnel element 54 into a bottom electrode
the angle sensor 30 .1 , wherein the circuit configuration 56 and then through a second tunnel element 54 back again
US 2017 /0322052 A1 Nov. 9 , 2017

into the top electrode 52 . Bottom electrode 56 and top series/bridge quadrant, then an accuracy of £50 % , +25 % or
electrode 52 are separated by an insulation layer. + 12 .5 % respectively is achieved by the trimming resistors
00771. FIG . 7a shows that the four left tunnel elements 54 50 . These accuracies are all unsatisfactory . Better trimming
do not contribute to the overall resistance RT, since the top technology is needed .
electrode 52 short - circuits the four tunnel elements 54 . It [0086 ] The technology which allowsboth trimmable resis
should be noted in this respect that the top electrode 52 tors and good filtering is composed advantageously of two
typically has a resistance which is lower by a factor 100 than (RX, RXT), three (RX1, RX2, RXT) or five (RX1, RX2,
that of the tunnel elements 54 . RX3, RX4, RXT) or more sub -resistors per bridge resistor
10078 ] If it is noted that the average resistance value of the arrangement R1, R2, R3 and R4.
tunnel elements is somewhat too low , for example using a 100871. FIG . 3 shows a measuring bridge 10 in which an
monitoring tool (CIPT or Current in Plane Tunnelling individual magnetoresistive ( sub -) resistor R1, R2 , R3, R4 is
method current field distribution measurement), the exter provided in each bridge resistor arrangement, with preferred
nal tunnel elements 54 may be connected by modifying the directions shown by arrows. The preferred directions of the
top electrode 52 in such a way that these two tunnel elements series - connected resistor arrangements of each bridge
54 become active . If it is then noted that the resistance of the branch point in antiparallel directions, wherein the two
trimming resistor RT is somewhat too high , for example by half-bridges have preferred directions angled relative to one
a monitoring CIPT method , further tunnel elements 54 may another.
be short- circuited . 10088 ] FIGS . 9a and 9b likewise show two alternative ,
[0079 ] The different shape of the top electrode 52 may be trimmed exemplary embodiments 14 and 16 , wherein in
obtained by different photolithographic masks. Different each bridge branch one trimming resistor RXT is addition
masks may be selected which model the different shape of ally provided per bridge resistor arrangement RX ( X denotes
the top electrode layer 54 . A pre -measurement which iden the position of the bridge resistor arrangement 1 , 2 , 3 or 4 ),
tifies which resistance value is present on the current wafer which trimming resistor leaves the preferred direction
is advantageous. According to this pre -measurement, it is unchanged either per branch or for the overall arrangement,
possible to select the suitable compensating mask , so that the and the individual resistance of the bridge resistor arrange
measuring bridge 10 , 12 , 14 , 16 , 18 or 20 ultimately reaches ment and the overall resistance of the half-bridge and the
the specified resistance value . overall bridge may be adjusted :
[0080] An even more precise arrangement of the trimming [0089 ] As is shown in the respective associated vector
resistors 50 is obtained from a parallel connection of tunnel diagrams, each trimming resistorRXT may be pinned in the
resistors 54 , as clarified in FIG . 8 . Two rows of in each case same preferred direction , as shown in FIG . 9a in the bridge
four tunnel resistors 54 are provided on the chip substrate , 14 , like the preferred direction of the fundamental bridge
which tunnel resistors may be adjusted into very precisely resistor R1, R2 , R3, R4, such that the preferred direction of
adjustable trimming resistance values R by electrode inter the bridge resistor is not modified per se . To this end ,
ruptions 60 or an electrode short- circuit. The following trimming resistors R1T (0° ), R2T (a ), R3T (0°) and R4T
trimming resistors 50 are obtained , from the top downwards: ( 180° - a ) are provided , which are oriented in the same
[0081] FIG . 8a depicts a parallel connection of in each direction as the other preferred direction of the bridge
case four series - connected tunnel resistors 54 . The resis resistor.
tance value RT of the trimming resistor is RT = 2r, wherein r [0090 ] Alternatively, as shown in the bridge 16 in FIG . 9b ,
corresponds to the resistance value of a tunnel resistor 54. each trimming resistor may also be oriented in the direction
[ 0082] FIG . 8b depicts a series connection of four tunnel of the desired preferred direction of the overall bridge , such
resistors 54, since the lower branch is disconnected by an that identically oriented trimming resistors RT + ( a /2 ) or
electrode interruption 60 . The trimming resistance value is trimming resistors RT - ( 180° - a /2 ) may be used with pre
RT = 4r. ferred directions rotated by 180º.
[0083] FIG . 8c depicts a trimming resistor 50 of the [0091 ] With regard to manufacture , and for the purpose of
magnitude RT = 4 /3r, since in the upper branch two tunnel simplified adjustment, the upper circuit variant is preferable ,
resistors 54 and in the lower branch four tunnel resistors 54 i.e. the trimming resistors preferably have a preferred direc
are series -connected . tion which corresponds to the overall preferred direction of
[ 0084 ] FIG . 8d shows a trimming resistor 50 of the mag the individual bridge resistor (depicted on the left in the
nitude RT = r ; in the upper and lower parallel branch in each following vector diagram ):
case two tunnel resistors 54 are series -connected .
[0085 ] If resistors are used in pairs in each half-bridge or [0092 ] If, as shown in FIG . 4 , a plurality of harmonics are
in each bridge resistor for the purpose of harmonic filtering, to be filtered , exemplary embodiments of circuit variants
as the prior art proposes and as the trigonometric formulae depicted in FIGS. 10a and 10b are obtained .
trivially stipulate , the trimming method has the major dis [0093 ] Here , the resistors RX1 and RX2 of each bridge
advantage that the changes in the top electrode have also to resistor X = 1 , 2 , 3 , 4 are arranged as in FIG . 4 . As a result of
take place in pairs . The two resistors R11 and R12 have to the angle a2 , the 180° /Q2 harmonic is filtered . These two
be modified identically , otherwise the harmonic filtering is resistors each for example comprise 8 , 16 or 32 tunnel
configured distortedly rather than correctly. This means that elements in series .
at least four tunnel elements 54 have to be added or 0094 ) In the configuration of a bridge 18 shown in FIG .
short-circuited . If a bridge branch consists of four different 10a , the trimming resistor RXT connected in between RX1
resistors with four different pinning directions (R11 , R12 , and RX2 is oriented precisely in the bisector between RX1
R13 , R14 ), as in FIG . 4 , 6 or 9 , at least 8 tunnel elements 54 and RX2. This is particularly favourable with regard to
have to be connected or short - circuited for this purpose . If production since subsequent resistors of the series connec
there are , for example , 16 or 32 or 64 elements 54 in tion require a change in preferred direction which does not
US 2017 /0322052 A1 Nov. 9 , 2017

differ very greatly from the preferred direction of the pre - relative to 180°, such that diagonal resistor arrangements are
ceding or subsequent preferred direction , so simplifying rotated by the angle a relative to one another. This gives rise
pinning adjustment. to the further possibility of suppressing harmonics . Prefer
[0095 ] Alternatively, all the trimming resistors RT + / – may ably, a = 60° may be selected . In the vector diagram below it
also , as shown in the configuration of the bridge 20 accord is apparent that the overall preferred direction Rres of the
ing to FIG . 10b , be arranged in the overall preferred direc measuring bridge 22.1 points in the direction of the 0° main
tion Rres ( a1 /2 + Q2 /2 ) or rotated by 180° thereto . In FIGS . axis, such that the preferred axis is already clearly visible in
10a and 10b , corresponding vector diagrams of the respec the chip layout.
tive upper circuit configuration of exemplary embodiments [0099 ] FIG . 11b shows a measuring bridge 22.2 which
show the configuration of the preferred direction Rres. results from the measuring bridge 22 .1 by swapping mea
[0096 ] As has already been noted further above , the vector suring tap Vout and supply contacts Vb . In this case , the two
diagram of the bridge 18 , in which each trimming resistor angles of the preferred directions of respective diagonally
RXT has a preferred direction in the overall preferred opposing resistor arrangements R1 and R4 or R2 and R3
direction RresX of the bridge resistor RX , composed of RX1 differ from the 0° axis, 180° or 0°, by the positive angle a /2
& RX2, in FIG . 10a is preferable , since with large resistance for R3 and the negative angle - a /2 for R2 relative to 0° and
tolerances it is both more simply possible , both with regard a negative angle - a / 2 for R1 and a positive angle a / 2 for R4
to manufacturing and theoretically , to adjust the individual relative to 180°. In this case too, the axis of the preferred
resistors . The preferred direction Rres X applies to the entire direction / sensitivity direction is oriented in the 0° main axis
half-bridge , since both bridge resistors are oriented antipar for equal resistance magnitudes of the resistor arrangements .
allel, and reinforce the preferred direction sensitivity. The [0100 ] FIGS. 12a and 12h depict further exemplary
circuit configuration according to FIG . 10b , in which each embodiments of a measuring bridge 24 . 1 and 24 .2 respec
trimming resistor RXT has a preferred direction in the tively . Each resistor arrangement comprises three sub -resis
preferred direction of the overall bridge 20 , it is preferable tors RX1, RX2 and RX3, wherein the middle sub -resistor
for the overall magnitude of the bridge resistor to be RX2 may preferably take the form of a trimming resistor ; the
modified , or if only slight resistance tolerances are to be other resistors may however also be trimming resistors .
compensated . Each resistor arrangement R1, R2, R3 and R4 thus com
[ 0097 ] A trimming resistor preferably consists of for prises three series -connected resistors, wherein the preferred
example four tunnel elements. As a result of the respective directions of the sub -resistors RX2 and RX3 differ from the
top electrode mask , it is possible to trim with a resolution of preferred direction RX1 by the angles a2 and al. The
just 2 tunnel elements . This makes it possible , in the case of preferred directions of the sub -resistors of diagonally oppos
16 , or 32 or 64 elements in series perbridge quadrant (bridge ing resistor arrangements differ in that the signs of the angle
resistor ), to adjust the resistance value with an accuracy of deviations a2 and al are reversed . The angles al, a2 for
12 .5 % , 6 . 25 % or 3 . 125 % respectively of the bridge resistor R2X and R1X differ in the positive direction , while those for
arrangement, without the harmonic filtering being impaired . R3X and R4X differ in the negative direction .
The same trimming resolution is also possible if four sub [0101] If the resultant preferred directions of the resistor
resistors R11, R12 , R14 , and R15 are provided , which are arrangements R1, R2, R3 and R4 of the measuring bridge
split by the angle al and by the angle a2. Once again , the 24 . 1 are considered , a preferred direction configuration
trimming resistor R13 is situated in the bisector of al and arises which is comparable with the measuring bridge 22.2
a2 . of FIG . 11b but, instead of just one harmonic, two harmonics
[0098 ] FIG . 11a and FIG . 11b show further embodiments may be filtered out . Resistor arrangements opposing one
22 . 1 and 22 . 2 respectively of measuring bridges . In the another in pairs have antiparallel preferred directions, while
measuring bridge 22.1 and 22.2 , the preferred directions of diagonally opposing resistor arrangements have preferred
all the resistor arrangements are rotated by the angle - a / 2 directions which differ from one another by a fixed angle . If
relative to those of the resistor arrangements of the measur a2 = a1/2 is selected , a2 of the measuring bridge 24 . 1
ing bridges 10. 1 and 10 . 2 of FIG . 3 ; otherwise measuring corresponds to the angle a / 2 of the measuring bridge 22 .2 .
bridge 22. 1 corresponds to measuring bridge 10 . 1 and Advantageously a2 = 30° and al = 60° are selected .
measuring bridge 22 .2 to measuring bridge 10 .2 . Thus , the [0102] The embodiment 24 . 2 of FIG . 12b corresponds to
preferred directions of all the resistor arrangements are the embodiment of FIG . 12a , except that the resistance value
rotated by the same angular amount, in order to achieve a of themiddle sub -resistor RX2 is selected to be twice that of
desired orientation of the angle of the overall preferred the sub - resistors RX1, RX3. If the preferred direction RX2
direction Rres of the measuring bridge . In this way, a is situated in the preferred direction of the respective resistor
preferred direction may be oriented independently of a given arrangement RX , i.e. a2 = a1/ 2 applies , an increase in the
spatial positioning of the resistor arrangements on a chip resistance value of RX2 stabilises the orientation of the
substrate . Assuming a main axis with 0° , which corresponds preferred direction of the resistor arrangement. In the vector
to an orientation of the preferred direction of the measuring diagram below , it is clear that the vector lengths of the
bridge 100 of the prior art according to FIG . 1 , in FIG . 11a . sub -resistors R22 and R32 are twice as long as the vector
the preferred direction of the resistor arrangements R1 and lengths of the other sub -resistors, and thus the vector ori
R3 of the measuring bridge 22 .1 is angled by the angle - a /2 entation Rres and the overall resistance behaviour dominate .
to the 0° or 180° axis. Furthermore , the two angles of the A change in resistance at the sub -resistors R22, R32 thus
preferred directions each of respective diagonally opposing does not in any way change the orientation of the preferred
resistor arrangements R1 and R4 or R2 and R3 differ from direction , but it does influence the overall resistance behav
the 0° main axis by a positive angle a /2 for R2 relative to iour of the measuring bridge
0° and negative angle - a /2 for R3 relative to 0° and by a [0103 ] In the invention , each resistor arrangement may
negative angle a / 2 for R1 and positive angle a / 2 for R4 comprise more than two or three sub -resistors with different
US 2017 /0322052 A1 Nov. 9 , 2017

preferred directions , such that a larger number ofharmonics 6 . Wheatstone bridge ( 10, 12 , 14 , 16 , 18 , 20 , 22 , 24)
may be filtered . Effective harmonic filtering is achieved by according to one of the preceding claims, characterised in
the interplay of the preferred directions of all the resistor that each resistor arrangement R1, R2, R3 , R4 comprises a
arrangements relative to one another. Harmonics may be magnetoresistive resistor with a preferred direction , wherein
effectively filtered with preferred directions of the sub the preferred directions of diagonal opposing resistor
resistors at 60°– 3rd harmonic number, 45° - 4th harmonic arrangements of the bridge branches R1 and R4 or R2 and
number, 36° – 5th harmonic number, 30° - 6th harmonic num R3 differ by an angle a from one another, in particular by an
ber , i.e . at [180 / (harmonic number) . angle a = 600.
7 . Wheatstone bridge (10 , 12 , 14 , 16 , 18 , 20 , 22 , 24 )
LIST OF REFERENCE NUMERALS according to one of preceding claims 1 to 5 , characterised in
[0104 ] 10 First embodiment of a Wheatstone bridge that each resistor arrangementR1, R2, R3, R4 comprises at
[0105 ] 12 Second embodiment of a Wheatstone bridge least two magnetoresistive resistors RX1, RX2 with pre
0106 ] 14 Third embodiment of a Wheatstone bridge ferred directions offset relative to one another by an angle a2
f0107 ]. 16 Fourth embodiment of a Wheatstone bridge or by further angles, wherein the resultant preferred direc
[0108 ] 18 Fifth embodiment of a Wheatstone bridge tions of diagonally opposing resistor arrangements of the
10109 ] 20 Sixth embodiment of a Wheatstone bridge bridge branches R1 and R4 or R2 and R3 differ from one
[0110 ] 22 Seventh embodiment of a Wheatstone bridge another by an angle al, wherein preferably al =60° and
[0111 ] 24 Eighth embodiment of a Wheatstone bridge a2 = 30° or a2 = 36º.
[0112 ] 30 Angle sensor 8. Wheatstone bridge (10, 12, 14 , 16 , 18 , 20 , 22 , 24 )
[0113 ] 32 Chip substrate according to one of the preceding claims, characterised in
101141 34 Contact pad that, at least in a resistor arrangement R1, R2, R3 or R4, a
[0115 ] 36 Conductor track trimming resistor (50 ) RXT is series -connected which is
[0116 ] 38 Magnetoresistive bridge resistor preferably selected so as to result in a resistance behaviour
[0117 ] 40 Sine bridge identical with regard to magnitude of the resistor arrange
[0118 ] 42 Cosine bridge ments R1, R2, R3 and R4.
01191 50 Trimming resistor 9 . Wheatstone bridge ( 10 , 12 , 14 , 16 , 18 , 20 , 22 , 24 )
10120 ] 52 Top electrode according to one of the preceding claims, characterised in
[0121 ] 54 Tunnel resistor/tunnel element that the trimming resistor (50 ) is a magnetoresistive resistor
0122 ] 56 Bottom electrode which has a trimming resistor preferred direction , in par
0123 ] 58 Insulation layer ticular is a TMR resistor.
[0124 ] 60 Electrode interruption 10 . Wheatstone bridge ( 10 , 12 , 14 , 16 , 18 , 20 , 22 , 24 )
10125 ] 100 Prior art Wheatstone bridge according to claim 9 , characterised in that the trimming
10126 ] 102 Prior art Wheatstone bridge resistor preferred direction may be oriented in the direction
1 . Magnetoresistive Wheatstone bridge ( 10 , 12 , 14 , 16 , of a preferred direction of one resistor of the resistor
arrangement, in the direction of the resultant preferred
18 , 20 , 22 , 24 ) comprising two bridge branches connected in
parallel between a supply potential Vb , two series- connected direction of the resistor arrangement or in the direction of the
resistor arrangements R1 and R3 or R2 and R4 being overall preferred direction of the Wheatstone bridge ( 10 , 12 ,
arranged in each bridge branch with an interposed measur 14 , 16 , 18 , 20 ).
ing potential Vout, and the resistor arrangements R1 and R4 11. Wheatstone bridge ( 10 , 12 , 14 , 16 , 18 , 20 , 22 , 24 )
or R2 and R3 of the two bridge branches being diagonally according to one of preceding claims 8 to 10 , characterised
opposite and at least two magnetoresistive resistor arrange in that the trimming resistor (50 ) may comprise a concat
ments R1, R2 , R3, R4 having a magnetically sensitive enation of at least two tunnel resistors (54 ) between top
preferred direction , characterised in that the preferred direc electrodes (52 ) and bottom electrodes (56 ), wherein the
tions of diagonally opposing magnetoresistive resistor trimming resistor (50) is adjustable by electrode interruption
arrangements of the bridge branches R1 and R4 or R2 and (60 ) or electrode short - circuit of the top electrode (52 ) or of
R3 differ from one another by an angle other than 0° or 180°. the bottom electrode (56 ) .
2. Wheatstone bridge ( 10 , 12, 14 , 16 , 18 , 20 , 22 , 24 ) 12 . Wheatstone bridge ( 10 , 12 , 14 , 16 , 18 , 20 , 22, 24 )
according to claim 1, characterised in that the preferred according to one of preceding claims 8 to 11 , characterised
directions of the series - connected resistor arrangements R1 in that the trimming resistor (50 ) comprises a series and /or
and R3 or R2 and R4 of each bridge branch are oriented parallel connection of a plurality of trimming sub -resistors ,
antiparallel. in particular a plurality of tunnel resistors (52 ), wherein the
3. Wheatstone bridge ( 10 , 12 , 14 , 16 , 18 , 20 , 22 , 24 ) number of parallel branches and /or series resistors of each
parallel branch is adjustable .
according to claim 1 , characterised in that the preferred
directions of the resistor arrangements R1 and R2 or R3 and 13 . Angle sensor ( 30 ), characterised in that the angle
R4 situated opposite one another in pairs in the bridge sensor ( 30 ) comprises at least two magnetoresistive Wheat
branches are oriented antiparallel. stone bridges ( 10 , 12 , 14 , 16 , 18 , 20 , 22 , 24 ) offset by a
4 . Wheatstone bridge (10 , 12 , 14 , 16 , 18 , 20 , 22 , 24 ) predefined angle , in particular by 90° , according to one of
according to one of the preceding claims, characterised in the above -stated claims, for determining an angular orien
that the resistance behaviour of each resistor arrangement tation of a magnetic field by means of a first and a second
R1, R2, R3, R4 is identical in respect of magnitude . sensor bridge (40, 42 ), in particular a sine bridge and a
5 . Angle sensor ( 30 ) according to one of the preceding cosine bridge.
claims, characterised in that the resistor arrangements are 14 . Angle sensor (30 ) according to claim 13, characterised
AMR , GMR , or TMR resistor arrangements , which are in that resistor arrangements RX1, RX2 of the first bridge
arranged on a chip substrate . branch R1-R3 (40 - 1, 42-1 ) of the first sensor bridge (40, 42 )
US 2017 /0322052 A1 Nov. 9 , 2017

and the second sensor bridge (42) are arranged spatially

adjacently on a chip substrate (32 ), and resistor arrange
ments RX1, RX2 of the second bridge branch R2-R4 (40 - 2 ,
42- 2 ) of the first sensor bridge ( 40 ) and of the second sensor
bridge (42 ) are arranged spatially adjacently on the chip
substrate (32 ), and the first and second bridge branches
R1-R3 and R2 -R4 ( 40 - 1 , 40 - 2 and 42 - 1 , 42- 2 ) are arranged
diagonally relative to one another on the chip substrate (32).
* * * * *