Introduction to Microfluidics and

Applications
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Fabrication Techniques for Microfluidics

Dr. Ravi Kumar Arun

Department of Chemical Engineering
[email protected]
  Microfabrication strategies aim at providing unique and
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increased functionality for sample-to-answer compact platforms
for intelligent systems design towards e.g., biological, medical or
chemical applications

 Fabrication techniques used for silicon-based microfluidic

devices are mostly based in Micro-Electro-Mechanical
Systems (MEMS) methods, which have dramatically
developed alongside semiconductor technology

Fabrication of a Y or T-shaped Microchannel Using PDMS

Stepwise Procedure:
1)Design the Master Mold: Use CAD software to design the Y or T-shaped microchannel pattern.
Print the design on a transparency mask or create a photomask for lithography.
2)Photolithography: Spin-coat a silicon wafer with SU-8 photoresist.
Expose the wafer to UV light through the mask to transfer the pattern.
Develop the wafer to remove unexposed photoresist, leaving the raised channel structure.
3)PDMS Replica Molding: Mix PDMS prepolymer and curing agent (typically 10:1 ratio).
Pour the mixture over the master mold and degas in a vacuum chamber to remove bubbles.
Cure at 60–80°C for 1–2 hours.
4)Peel Off PDMS Replica: Carefully peel the cured PDMS from the master mold.
5)Bonding: Treat the PDMS replica and a glass slide with oxygen plasma for 30–60 seconds.
Align and press the PDMS onto the glass to form a permanent seal.
5) Interfacing: Punch inlet/outlet holes for fluid connections.
Attach tubing for fluid delivery.
Illustration:
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(A) polydimethylsiloxane (PDMS) and (B) thermoset polyester

(TPE) devices by replica molding
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(C) embossing, (D) injection molding, and (E) laser ablation

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Fabrication methods for rigid substrates

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Microfabrication techniques for polymer based microfluidic

devices
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(A) polydimethylsiloxane (PDMS) and (B) thermoset polyester

(TPE) devices by replica molding
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(C) embossing, (D) injection molding, and (E) laser ablation

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Fabrication of Microfluidic Devices in Rigid Substrates:
Silicon/Glass
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Microfabrication of microfluidic devices in rigid substrates makes use of well established
techniques of semiconductor industry such as lithography, subtractive and/or
additive techniques (e.g., etching and thin-film deposition), to achieve few to hundreds of
micrometer devices on top or within the substrate
Lithography
o Lithography is the process used to transfer three-dimensional patterns onto a surface
Lithography steps:
(1) designing the pattern,
(2) (2) making the mask, CHL018P5E
(3) (3) coating the wafer,
(4) (4) exposing the photoresist,
(5) (5) developing the photoresist.
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Photoresist is a light-sensitive polymeric solution.

Negative PR (the regions exposed to light become insoluble in the
developer) originate m.f.s. up to 2 µm and spin-coated spreading
thickness from 1 to 3 µm (the photoresist film thickness is
determined by the spinning speed), while positive PR (the
regions exposed to light become soluble in the developer) has
m.f.s. of ∼1 µm for spreading thicknesses between 1.5 to 7 µm.
Lithography

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Subtractive Techniques for Pattern Transfer Microfabrication

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Wet Etching

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Dry Etching

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Additive Techniques for Pattern Transfer

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Subtractive Techniques for Pattern Transfer Microfabrication

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Wet Etching
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• Isotropic etch : surface material is removed uniformly in all
directions of the chemical structure.
• Anisotropic etch: the removal of surface material is dependent
on the crystalline structure orientation of the surface.

The etch rate in wet etching can be enhanced by tuning agitation and
temperature
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Fabrication Techniques for Paper-Based Microfluidic
Devices
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Design, Assembly and Packaging of Microfluidic
Devices
DOI: 10.1039/C7AY02177A
Materials Today: Proceedings 5 (2018) 16286–16292
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 * **Micropumping** refers to the controlled transport of small fluid volumes (nano- to microliters) within microfluidic systems using different actuation mechanisms to through
microchannels

* Micropumps are mainly classified into two categories: **mechanical** and **non-mechanical micropumps**.

* **Mechanical micropumps** have moving parts like membranes, valves, or rotors.

* **Diaphragm micropumps** operate by the repeated deflection of a membrane to create pressure differences. Examples include piezoelectric pumps and pneumatic pumps,
commonly used in drug delivery and analytical systems.
* **Peristaltic micropumps** use the sequential actuation of multiple membranes to create a peristaltic motion, like the PDMS pneumatic peristaltic pump, which is ideal for cell
culture perfusion and continuous flow analysis.
* **Rotary micropumps** rely on rotating elements to generate pressure differentials, such as micro gear pumps and centrifugal pumps, typically used in lab-on-a-disc platforms.

* **Non-mechanical micropumps** function without moving parts and depend on energy conversion methods.

* **Electroosmotic pumps** apply an electric field across channels to move fluid in bulk, useful in capillary electrophoresis and chemical synthesis.
* **Electrohydrodynamic pumps** generate flow through electric fields acting on fluid charges, as seen in ion-drag pumps for electronics cooling.
* **Thermal (bubble) micropumps** create fluid displacement by heating to form bubbles, a principle used in inkjet printer mechanisms for droplet dispensing.
* **Capillary pumps** use surface tension to drive fluid through hydrophilic microchannels, found in devices like lateral flow test strips and paper microfluidics for point-of-care
diagnostics.
* **Chemically powered pumps** drive fluid flow through gradients generated by chemical reactions, such as enzyme-catalyzed micropumps for self-powered microfluidic devices.
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Lab-on-a-chip applications

Microfluidic chip

test tubes

flask
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Diffusivity of water vapor in air at (25degree) approximately is 0.260 cm2/sec).

Pressure sat at 25 degree water= 3171.4725Pa
R=8.314m3.Pa.K-1.mol-1
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Viscous dissipation is 10,000× higher in the microchannel than in the minichannel for the same volumetric flow rate.

Microscale devices experience much greater resistance due to the ℎ^3 dependence — smaller heights drastically increase resistance.

Power requirements for pumping fluids in microchannels are significantly higher if flow rates are not scaled down.

Microdevices must often operate at much lower flow rates to manage energy loss and avoid excessive heating due to viscous dissipation.

For design of microfluidic devices, channel height must be chosen carefully to balance flow control and energy efficiency.
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