Vlsi technology
Vlsi technology
6.a) Explain the operation of Float zone crystal growing technique. Contrast CZ and float zone
crystal growing techniques.
M
b) Explain semiconductor material preparation. [6+4]
OR
7.a) Describe silicon dioxide layer uses.
b) What is the procedure to grow the MOS gate oxide? If a silicon wafer with specifications:
N – type, (100), 8 – 10 Ω is oxidised at 1100 0C for 800 A0 and 100 A0 thick gate oxidation.
Calculate the oxidation time. [5+5]
8.a) Explain formation of a doped region and junction by diffusion.
b) Explain drive – in oxidation. [5+5]
JN
OR
9.a) Explain CVD process in step wise.
b) Describe low pressure CVD systems. [5+5]
TU
10.a) Give NMOS layout design rules.
b) Give CMOS layout design rules. [5+5]
OR
11. a) Explain design of resistors in BiCMOS technology.
H
b) What are package functions? Discuss. [4+6]
U
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SE
D
25
-0
6-
20
19A
M