Dynacal Permeation Devices

Part Numbering System

Next

Contents
Use the Next button to go through the presentation page by page,
or go directly to any topic below by clicking on its title.
Contents
Perm Index

Returns to this page

Returns to the main permeation device index
Topics
What is a permeation tube? How does it work?
Types of Dynacal permeation devices
Wafer devices
Tubular devices
Diffusion vials
How are part numbers determined?

1XX XXX XXXX XXXX XXXX

Part number format

1 23

1 Dynacal
2 Type of device page 1 2 3 4
3 Certification
4 Permeation rate determining factor
Determining factor breakdown for wafer device
Nine most common wafer devices
5 Permeant gas designation page 1 2
6 Special device designation page 1 2
7 Certification, special range or accuracy
Part number examples 1 2 3
Special formulas page 1 2 3
Estimate permeation rate at unknown temperature
Tolerance chart page 1 2
Diffusion Vial part number format

Next

Back

Contents

Perm Index

What is a permeation tube? How does it work?

A permeation tube is a sealed permeable membrane
containing solid, liquid or liquefiable gases that permeate
through the walls of the membrane at a constant rate.

The device is maintained at a constant temperature to

establish constant vapor pressure inside the device. This
results in an equilibrium between liquid/solid and the vapor
phase of the chemical compound. The vapor escapes
through the walls of the permeable membrane at a
constant rate as long as the set point temperature is
maintained. A measured flow of an inert gas such as
nitrogen, helium, argon etc. is passed through the
permeation chamber where the device is housed to capture
and mix with the vapor resulting in known volumetric
concentration in ppm/ppb. By varying the dilution flow rate
one is able to generate a wide range of concentrations
using a single device.

Next

Back

Contents

Perm Index

Types of Dynacal permeation devices

Wafer

F Wafer
90 F3
60 F3
50 F3
40 F3
30 F3

STD

STD #10

Tubular

Diffusion Vial

T Wafer

50 T3
40 T3
30 T3
30 T4

HE

HE #2

LE

LE #2

LE #3

XLT

XLT

SILICON

XLT #2
STD
STD #10
STD #19

XLT #3

LE #2

Next

NYLON

Back

STD
STD #10
STD #19
LE #3
Contents

Perm Index

Wafer devices

A wafer device is a type of permeation device

that uses a metal reservoir and a circular TFE

or FEP permeable membrane

Wafer devices have an active length of 4.6 cm

and an outer diameter of 1.6 cm

Designed to allow very low permeation rates

Available with or without certification
An example of a wafer type
30T4:
30 Wall thickness, in thousandths of an inch
T TFE (Permeable membrane)
4 Diameter of cap bore measured in
sixteenths of an inch
Next

Back

Contents

Perm Index

Tubular devices

Dynacal tubular devices are primarily made out

of different types of PTFE permeable membranes
of varying wall thickness. They are available in
active lengths of 0.5 to 20 cm long.

Each device is custom sized to generate the

required mass per unit time to match the
concentration range requirements of a specific
application.

Typical permeation rates range from 5 ng/min to

50,000 ng/min for a single device.

Available with or without certification.

Next

Back

Contents

Perm Index

Diffusion vials
A diffusion vial is a Pyrex reservoir attached
to a Pyrex stem having a fixed bore size. The
reservoir is filled with the liquid or solid
material of interest. When maintained at a
constant temperature, the material establishes
a two phase equilibrium between the
solid/liquid and gas phase where the gas
diffuses through the bore of the stem. By
varying the stem length and the bore size, one
is able to vary the permeation rate at a set
point temperature.

Pyrex is a registered trademark of Corning Glass

Next

Back

Contents

Perm Index

How are part numbers determined?

There is a logical progression to each part
number, once you understand the basic
formula. Each number in the sequence
represents a specific aspect of the device:
for example, the type of tubing, the active
length of the tube, or the chemical being
used.

1XX XXX XXXX XXXX XXXX

123

Next

Back

Contents

Perm Index

Part number format

1XX XXX XXXX XXXX XXXX

123

1.
2.
3.
4.

Dynacal
Type of device (ref: Tech Note 1002)
Certification (ref: Tech Note 1002)
Permeable area
Tubular: Active Length in mm (range: 0.5 cm to 20.0 cm)
Wafer:
Wall thickness (0.030 0.090)

5. Chemical number (ref: Rate Table & Price Sheet)

6. Special device designation (may not apply to all devices)
7. Certification, special range or special accuracy
(i.e.: C, U or S)
Next

Back

Contents

Perm Index

Dynacal
#1 in part number format

1XX XXX XXXX XXXX XXXX

12 3

The first digit of all Dynacal devices will be

designated as 1.

Next

Back

Contents

Perm Index

Type of Device
#2 in part number format general

1XX XXX XXXX XXXX XXXX

12 3

0 Tubular Device

High Emission

1 Tubular Device

Standard Emission

2 Tubular Device

Low Emission

3 Tubular Device

Special

4 Wafer Device
5 Wafer Device

Special

7 XLT Device

Standard Emission

8 XLT Device

Special

Next

Back

Contents

Perm Index

Type of Device (contd 1)

#2 in part number format - specific

1XX XXX XXXX XXXX XXXX

12 3

Tube

Numerical representation in P/N

Tube designation

STD

N/A

STD #10

10

STD #19

T33

HE

N/A

HE #2

T56

LE

N/A

LE #2

F56

LE #3

F59

Next

Back

Contents

Perm Index

Type of Device (contd 2)

#2 in part number format - specific

1XX XXX XXXX XXXX XXXX

12 3

Tube

Numerical representation in P/N

Tube designation

Silicon

S56

Nylon

N43

XLT

10, T33

XLT #2

F56

XLT #3

F33, 10, T33, F59

Reference Technical Note 1002, page 5

Next

Back

Contents

Perm Index

Type of Device (contd 3)

1XX XXX XXXX XXXX XXXX

#2 in part number format - specific

12 3

Wafer Device numerical representation

Valco

N/A

Valco high capacity

VH

Valco old style

OS

Monitor Labs

ML

CSI-MELOY

ME

Philips 9700

Threaded cap (Beckman)

TH (BK)

Next

Back

Contents

Perm Index

Certification
#3 in part number format

1XX XXX XXXX XXXX XXXX

12 3

0 Uncertified
1 Tubular high range (>500 ng/min)
2 Tubular mid range (101-500 ng/min)
3 Tubular low range (20-100 ng/min)
4

Wafer high range (>100 ng/min)

Wafer low range (20-100 ng/min)

6 Tubular or Wafer ultra low range (5-19 ng/min)

7 Special temperatures, ranges, or accuracies
Note1: 1-6 represent certification at 30C only.
Note2: Third digit remains 7 for all temperatures above 30C
for all rates..

Next

Back

Contents

Perm Index

Permeation Rate Determining Factor

#4 in part number format

1XX XXX XXXX XXXX XXXX

12 3

001 to 200 Active tube length in mm

(Formula: required rate/per cm rate)

5--

Wafer device with T wafer

6--

Wafer device with F wafer

7--

Waver device with special wafer

-y-

Wafer thickness (.0y)

--z

Wafer diameter (z/16)

Next

Back

Contents

Perm Index

Determining Factor Breakdown for Wafer Device

1XX XXX XXXX XXXX XXXX

#4 in part number format - specific

12 3

Each device is then represented in the part number

by a three digit code.

X X X
a

a Represents the type of tubing. 5 TFE , 6- FEP

b Represents the wall thickness of the tube
(range of 3-9)
c Represents the diameter of the cap bore in 16th of
an inch. (range of 3 or 4)
Next

Back

Contents

Perm Index

Nine Most Common Wafer Devices

Perm Rate
Ratio

Part Number

Wafer Device Type

14X-534-XXXX

30T4 (.03 thick x 4/16 dia T wafer)

1.0

533

30T3 (.03 thick x 3/16 dia T wafer)

0.60

543

40T3 (.04 thick x 3/16 dia T wafer)

0.40

553

50T3 (.05 thick x 3/16 dia T wafer)

0.23

633

30F3 (.03 thick x 3/16 dia F wafer)

0.14

643

40F3 (.04 thick x 3/16 dia F wafer)

0.11

653

50F3 (.05 thick x 3/16 dia F wafer)

0.07

663

60F3 (.06 thick x 3/16 dia F wafer)

0.05

693

90F3 (.09 thick x 3/16 dia F wafer)

0.03

Reference Technical Note 1002, Table 2

Next

Back

Contents

Perm Index

Permeant Gas Designation

#5 in part number format

1XX XXX XXXX XXXX XXXX

12 3

0001-0199

Inorganic compounds

0200-0499

Organo-metallic compounds

0500-1999

Hydrocarbons

2000-3999

Hydrocarbons containing oxygen

4000-4999

Hydrocarbons containing halogen

5000-5999

Hydrocarbons containing nitrogen

6000-6999

Hydrocarbons containing sulfur

7000-9999

Other organic compounds

Next

Back

Contents

Perm Index

Permeant Gas Designation (contd)

#5 in part number format - Examples

1XX XXX XXXX XXXX XXXX

12 3

Chemical or Gas Grouping

Designation

Chemical or Gas

Inorganic compounds

0110

Hydrogen Sulfide

Organo-metallic compounds

0330

Dimethyl Mercury

Hydrocarbons

0505

Pentane-N

Hydrocarbons containing oxygen

2300

Formaldehyde

Hydrocarbons containing halogen

4201

Dichloromethane

Hydrocarbons containing nitrogen

5000

Methyl Amine

Hydrocarbons containing sulfur

6301

Dimethyl Disulfide

Other organic compounds

7600

Carbonyl Sulfide

Next

Back

Contents

Perm Index

Special Device Designation

#6 in part number format

1XX XXX XXXX XXXX XXXX

12 3

Tube Type

Tube Designation

STD #10

10

STD #19

T33

HE #2

T56

LE #2

F56

LE #3

F59

CSI-MELOY

ME

Silicon

S56

Nylon

N43

XLT

10, T33

XLT #2

F56

XLT #3

F33, 10, T33, F59

Next

Back

Contents

Perm Index

Special Device Designation (contd)

1XX XXX XXXX XXXX XXXX

#6 in part number format

12 3

Wafer Device

Special Designation

Valco High Capacity

VH

Monitor Lab 8500

ML

Monitor Labs 8850

MLRA

Philips 9700

Threaded Cap (Beckman)

TH (BK)

Specials

OS, VH, LW

Next

Back

Contents

Perm Index

Certification, Special Range or Accuracy

#7 in part number format

1XX XXX XXXX XXXX XXXX

12 3

C Certified followed by temperature in C.

(i.e.: C30 or C45)

U Uncertified followed by temperature in C.

(i.e.: U30 or U50)

S Special certification, special range or

special accuracy

Next

Back

Contents

Perm Index

Part Number Example #1

1XX XXX XXXX XXXX XXXX

Sulfur Dioxide
12 3
4
standard permeation tube,
with the rate of 5000 ng/min, certified at 35C.

117-083-0082-C35
1. 1
Dynacal
2. 1
Tubular Device Standard Emission tube
3. 7
Special temperatures, ranges, or accuracies
(customer request unit to be certified at a
temperature other than 30C)
4. 083 Active tube length in mm (8.3 cm). Active length
is
calculated using active length formula
5. 0082 Chemical compound designation for Sulfur
dioxide
6. N/A for this part number
7. C35 Certified at 35C
Next

Back

Contents

Perm Index

Part Number Example #2

1XX XXX XXXX XXXX XXXX

Sulfur dioxide,
12 3
4
5
low emission permeation tube,
with the rate of 450 ng/min , certified at 30C.

122-013-0082-F56-C30
1. 1

Dynacal

2. 2

Tubular Device Low Emission

3. 2

Tubular mid range (101-500 ng/min)

4. 013 Active tube length in mm (1.3 cm)

5. 0082 Sulfur dioxide numeric representation
6. F56 LE #2, Low Emission Tube
7. C30 Certified at 30C

Next

Back

Contents

Perm Index

Part Number Example #3

Nitrogen oxide
wafer device, Valco Style,
certified at 40C

1XX XXX XXXX XXXX XXXX

12 3

147-553-0081-C40
1. 1

Dynacal

2. 4

Wafer device

3. 7

Special temperatures, ranges, or accuracies

4. 553 50T3 (.05 thick x 3/16 dia T wafer)

5. 0081 Nitrogen dioxide numeric representation
6. N/A for this part
7. C40 Certified at 40C

Next

Back

Contents

Perm Index

Special Formulas

Active Length (mm) = Required Rate (ng/min) /Per cm Rate

(answer will be in cm)

Total Rate (ng/min) = Active Length x Per cm Rate

Tubular Devices
For rates:
>500 ng/min

Accuracy = +/- 2%

101-500 ng/min

Accuracy = +/- 2% or +/- 5 ng/min

Whichever is greater

20-100 ng/min

Accuracy = Rate x 5% or +/- 2 ng/min

Whichever is greater

5-19 ng/min

Accuracy = +/- 10%

Next

Back

Contents

Perm Index

Special Formulas (contd)

Wafer Devices
For rates:
>100 ng/min

Accuracy = Rate x 5%

20-100 ng/min

Accuracy = Rate x 5% or +/- 2 ng/min

Whichever is greater

5-19 ng/min

Accuracy = Rate x 10%

Next

Back

Contents

Perm Index

Special Formulas to find the following:

P Permeation rate (ng/min)
F Flow rate (cc/min or 1pm)
C Concentration (ppm or ppb)
K Molar constant = 24.46/molecular wt. of compound
P = (F x C) / K
F = (P x K) / C
C = (P x K) / F

Next

Back

Contents

Perm Index

Estimate permeation rate at unknown temperature

log P1 = log P0 + (T1-T0)

Log = Base 10
P1 = Perm rate (ng/min) at new temperature (C)
P0 = Perm rate (ng/min) at known temperature
T1 =

New temperature (C)

T0 =

Known temperature (C)

Temperature coefficient

(C)

Note: Before exposing device to higher

temperatures, end user must consult VICI Metronics
to obtain information on maximum temperature
settings.
Next

Back

Contents

Perm Index

Tolerance Chart
Device

OD
(cm)

HE

0.98

STD/STD #10 0.64

STD #19

0.64

LE (Capsule)

0.98

LE #2

0.98

Rate Range

Act Length

(+/-)

>100 +/- 15%

20 to 100 +/- 25%
5 to 19 +/- 50%
>100 +/- 10%
20 to 100 +/- 25%
5 to 19 +/- 50%
>100 +/- 15%
20 to 100 +/- 25%
5 to 19 +/- 50%
>100 +/- 25%
5 to 100 +/- 50%
>100 +/- 10%
20 to 100 +/- 20%
5 to 19 +/- 50%

(cm)

0.5 to 20

0.5 to 20

0.5 to 20

1 or 2
0.5 to 20

Next

Back

Contents

Perm Index

Tolerance Chart (contd)

Device

OD
(cm)

Rate Range

Act Length

(+/-)

(cm)

LE #3

0.98

>100 +/- 15%

20 to 100 +/- 20%
5 to 19 +/- 50%

0.5 to 20

Silicon

0.98

>100 +/- 15%

20 to 100 +/- 25%
5 to 19 +/- 50%

0.5 to 10

Nylon

0.98

>100 +/- 15%

20 to 100 +/- 25%
5 to 19 +/- 50%

0.5 to 20

All Wafer
Devices

1.6

20 to 100 +/- 25%

5 to 19 +/- 50%

4.6

Next

Back

Contents

Perm Index

Diffusion Vial Part Number Format

19X - XXXX XXX/X - S

1 2

1. 19 = Diffusion Vial
2. Bore size
3. Chemical number
4. Certification designation
5. Special designation

Next

Back

Contents

Perm Index