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Praktikum Analisis Instrumentasi: Sem-Edx

SEM-EDX is an instrument that uses scanning electron microscopy and energy dispersive X-ray spectroscopy to analyze samples. SEM allows examination of surface structure at magnifications up to 1,000,000x. EDX detects the elemental composition of the sample. The instrument has two operation modes for conductive and non-conductive samples. EDX can detect elements from beryllium to uranium. SEM-EDX has applications in analyzing topography, morphology, and elemental composition of samples like hair, crystals, and materials.

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414 views25 pages

Praktikum Analisis Instrumentasi: Sem-Edx

SEM-EDX is an instrument that uses scanning electron microscopy and energy dispersive X-ray spectroscopy to analyze samples. SEM allows examination of surface structure at magnifications up to 1,000,000x. EDX detects the elemental composition of the sample. The instrument has two operation modes for conductive and non-conductive samples. EDX can detect elements from beryllium to uranium. SEM-EDX has applications in analyzing topography, morphology, and elemental composition of samples like hair, crystals, and materials.

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QurrotaA'yun
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Praktikum

Analisis Instrumentasi
SEM-EDX

Oleh :
Kelompok 01
Agus Jalaludin [110332421020]
Ahmad Khozin A [120332421466]
Ahmad Rizal M[120332421496]
Aldila Putri I [120332421488]
Arina Hidayati [120332421484]
Prinsip SEM-EDX

SEM (Scanning Electron Microscopy) adalah
peralatan untuk menguji/melihat struktur
permukaan sampel dengan perbesaran
sampai dengan 1.000.000 x

Hasil deteksi SEM : gambar


Hasil deteksi EDX : grafik
SEM-EDX

Peralatan ini memiliki 2 modus operasional, Low
Vacum (untuk sampel non-konduktif) dan High
Vacum (untuk sampel konduktif).

Alat ini dilengkapi EDAX yaitu alat yang dapat


digunakan untuk menguji kandungan unsur pada
bahan yang dilihat struktur permukaannya.

Kandungan unsur yang dapat diuji mulai dari


Berilium s/d Uranium.
sem
A

scanning electron microsc
ope
is a machine comprised
of an electron generating
component called the gun,
a column through which
the electron beam travels,
a series of lenses to shape
the electron beam, the
sample chamber at the
base, and a series of
pumps to keep the system
under vacuum.

An SEM is essentially a high magnification microscope, which uses a
focussed scanned electron beam to produce images of the sample,
both top-down and, with the necessary sample preparation, cross-
sections. The primary electron beam interacts with the sample in a
number of key ways:

1. Primary electrons generate low energy secondary electrons, which


tend to emphasise the topographic nature of the specimen.
2. Primary electrons can be backscattered which produces images
with a high degree of atomic number (Z) contrast.
3. Ionized atoms can relax by electron shell-to-shell transitions, which
lead to either X-ray emission or Auger electron ejection. The X-rays
emitted are characteristic of the elements in the top few m of the
sample and are measured by the EDX detector.
Prinsip EDX (Energy Dispersive
System (X-Ray Spectrometer)
EDS / EDX)

useful for interpretation and evaluation of energy


dispersive spectra.
The energy dispersive system for photon detection
has in general a silicon semiconductor detector with
a high impedance zone which is radiation-sensitive.
Both, the detector and the field-effect transistor of
the first stage of preamplifier are cooled to get an
optimum of energy-resolution.
Shifts of peak positions

toward smaller energies
are possible with
energies of less than 300
eV. Here the energy
dispersiv detector (EDX)
becomes non-linear.

If the detector is not coaxially
aligned to the point of X-ray
emission and main electron
source (electron focus in Electron
Microscope), the electron trap
can 'suck in' the specimen-
scattered electrons. This is also
with wrong work distance from
specimen surface to pole piece
(wrong 'EDX working distance'), if
the electron trap is wrongly
mounted at he EDX-detector (The
direction of the magnetic field is
responsible and important!).
Instrumentasi SEM-EDX

Instrumentasi SEM
Tipe : FEI-Inspect S50
tempat sampel

Instrumentasi SEM
Tipe : FEI-Inspect S50

Sumber gambar diperoleh dari kamera IR dalam


Menyiapkan sampel

1. Membersihkan sampel

2. Melekatkan sampel pada double-side
tape karbon
3. Menempatkan sampel pada holder
4. Sampel yang belum konduktif, dilapisi
dengan Au atau Pt
5. Sampel diletakkan di ruang vakum
6. Ukuran sample holder: 12 mm atau 25
mm
7. Jumlah sampel yang dianalisis bisa 7-
16 sampel, tidak boleh sampel cair
(lemak atau minyak)
8. Holder bisa dicuci dengan alkohol
Elektron gun

Lensa magnetik

Ruang vakum

Instrumentasi EDX
Tipe : PAN lytical


Contoh Hasil EDX

Aplikasi SEM-EDX

Contoh Aplikasi Topografi

SAMPEL RAMBUT
Contoh Aplikasi Topografi
SAMPEL KRISTAL

Contoh Aplikasi Morfologi

Contoh Aplikasi Komposisi

Kelebihan SEM

Terima Kasih

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