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Process Instruments & Control: Mohamad Farhan Bin Mohd Fairoz 552213117073 Manometer Capacitance

The document discusses a capacitance manometer, which uses the change in capacitance between two metal plates separated by an insulator to measure pressure. A movable metal diaphragm acts as one of the plates. It has high accuracy, can measure very small pressure changes, and is widely used in semiconductor industry due to its corrosion resistance and accuracy.

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19 views

Process Instruments & Control: Mohamad Farhan Bin Mohd Fairoz 552213117073 Manometer Capacitance

The document discusses a capacitance manometer, which uses the change in capacitance between two metal plates separated by an insulator to measure pressure. A movable metal diaphragm acts as one of the plates. It has high accuracy, can measure very small pressure changes, and is widely used in semiconductor industry due to its corrosion resistance and accuracy.

Uploaded by

Ffmohamad NAd
Copyright
© © All Rights Reserved
We take content rights seriously. If you suspect this is your content, claim it here.
Available Formats
Download as PPTX, PDF, TXT or read online on Scribd
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PROCESS INSTRUMENTS & CONTROL

MOHAMAD FARHAN BIN MOHD FAIROZ


552213117073
MANOMETER CAPACITANCE
CAPACITANCE MANOMETER

•P R I N C I P L E
•M O S T A P P L I E D T O L O W P R E S S U R E S ( A B S ,
DIFFERENTIAL AND GAUGE)
•M A D E - T W O M E T A L P L A T E S S E P A R A T E D B Y
AN INSULATOR
•S T O R E E L E C T R I C C H A R G E W H E N O N E P L A T E
IS GIVEN NEGATIVE CHARGE
•C O N N E C T E D A C C I R C U I T - C H A N G E S O U T P U T
AS THE PLATES ARE MOVED CLOSER
TOGETHER OR FARTHER APART
•M O V A B L E ( B A C K & F O R T H ) M E T A L
DIAPHRAGM BE USED AS ONE PLATE IN A
CAPACITOR
OPERATION
operates by measuring the change in
electrical capacitance that results from the
movement of a sensing diaphragm relative
to some fixed capacitance electrodes
Advantages
•T H E GREAT ADVANTAGES OF A CAPACITANCE GAUGE
IS ITS ABILITY TO DETECT EXTREMELY

SMALL DIAPHRAGM MOVEMENTS.

• ACCURACY IS TYPICALLY 0.25 TO 0.5% OF READING.


THIN DIAPHRAGMS CAN MEASURE DOWN TO 10-5 TORR, WHILE
THICKER DIAPHRAGMS CAN MEASURE IN THE LOW VACUUM TO
ATMOSPHERIC RANGE.

• WIDELY USED IN THE SEMICONDUCTOR


INDUSTRY, BECAUSE ITS INCONEL BODY AND DIAPHRAGM

ARE SUITABLE FOR THE CORROSIVE SERVICES OF


THIS INDUSTRY. THEY ARE ALSO FAVORED BECAUSE OF
THEIR HIGH ACCURACY AND IMMUNITY
TO CONTAMINATION.

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