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Turbo Final

The document provides an overview of turbomolecular pumps, detailing their types, pressure ranges, operational principles, and applications in various fields such as mass spectrometry and semiconductor manufacturing. It discusses the advantages and disadvantages of turbomolecular pumps, including their high vacuum capabilities and potential for catastrophic failure. Additionally, it includes a historical context of the pump's development and references for further reading.

Uploaded by

Md. Faruk Hossain
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12 views

Turbo Final

The document provides an overview of turbomolecular pumps, detailing their types, pressure ranges, operational principles, and applications in various fields such as mass spectrometry and semiconductor manufacturing. It discusses the advantages and disadvantages of turbomolecular pumps, including their high vacuum capabilities and potential for catastrophic failure. Additionally, it includes a historical context of the pump's development and references for further reading.

Uploaded by

Md. Faruk Hossain
Copyright
© © All Rights Reserved
We take content rights seriously. If you suspect this is your content, claim it here.
Available Formats
Download as PPTX, PDF, TXT or read online on Scribd
You are on page 1/ 20

Heaven’s Light is Our Guide

Rajshahi University of Engineering & Technology


Department of Physics

Turbomolecular Pump

Presented by Md. Faruk Hossain


Master of Philosophy (M. Phil.) Student
Department of Physics
Rajshahi University of Engineering &
Technology
Rajshahi-6204, Bangladesh

1
Outline
 Vacuum and vacuum pump  Applications
 Types of vacuum pumps  Schematic diagram
 Pressure ranges  Rotor - stator assembly
Variation of Parameters with Pressure  Structure
 Pressure equivalents  Operation
 Why is vacuum needed?  Advantages
 History turbomolecular pump  Disadvantages
 What is turbomolecular pump?  References

2
3
Types of Vacuum Pumps

1 2 3

1. Mechanical Pumps: atmospheric – 10-2 Torr


2. Sorption (Adsorption) Pumps: atmospheric – 10 -3 Torr
3. Molecular Drag Pumps: 1 – 10-2 Torr
4. Turbomolecular Pump: 10-2 – 10-8 Torr
5. Diffusion Pump: 10-3 – 10-7 Torr
6. Cryo Pump: 10-3 – 10-8 Torr

4 5 6 4
Pressure Ranges

Range Pressure

Rough (Low) Vacuum 1 to 10 -3 Torr


Medium Vacuum 10-3 to 10-5 Torr
High Vacuum 10 -6 to 10 -8 Torr
Ultra High Vacuum Less than 10 -8 Torr

5
Variation of Parameters with Pressure

Degree of Gas Density Mean Free Path Time / ML


Vacuum (molecules m-3 ) (m) (s)

Low 3 x 1022 5 x 10-5 10-6


Medium 3 x 1019 5 x 10-2 10-3
High 3 x 1016 50 1
Ultra High 3 x 1012 5 x 105 104

Maximum attainable mean free path for turbomolecular


pump is 50 m

6
Pressure Equivalents
Atmospheric Pressure (Standard) (1 atm) =
14.7 pounds per square inch (psia)
29.9 inches of mercury
760 millimeter of mercury
760 torr
760,000 millitorr or microns
101,325 pascal
1.013 bar

Conversion Table
Unit Pa bar atm Torr
1 Pa 1 10-5 9.87x10-6 7.5x10-3
1 bar 105 1 0.987 750.06
1 atm 1.013x105 1.013 1 760
1 Torr 133.32 1.33x10-3 1.32x10-3 1
7
Why is a Vacuum Needed?

To move a particle in a (straight) line over a large distance.


Collision free condition, P < 10-4 Torr
Atmosphere (High)Vacuum
Contamination
Clean surface
(usually water)

To provide a clean surface, P < 10-9 Torr


8
History of Turbomolecular Pump
Invented in 1958 by W. Becker

Wolfgang Gaede in 1913

Developed by
Fernand Holweck in 1923

Manne Siegbahn in 1944

9
What is Turbomolecular Pump?
 A turbomolecular pump is a type of vacuum pump, used to
obtain and maintain high vacuum.

 The turbomolecular pump can be a very versatile pump. It


can generate many degrees of vacuum from intermediate
vacuum (~10−2 Torr) up to high vacuum levels (~10−8 Torr).

 Turbomolecular pumps work on the principle that gas


molecules can be given momentum in a desired direction by
repeated collision with a moving solid surface.

 A turbomolecular pump's operate at high rotational speeds.


Some units operate at 60,000 rpm.
10
Applications
⁕ Mass spectrometry
⁕ Electron microscopy(SEM, TEM)
⁕ Focused ion-beam systems (FIB)
⁕ Surface analysis and surface treatments
⁕ Semiconductor manufacturing
⁕ Thin film solar cells production
⁕ Optical data media (CD, DVD, Magneto optical discs)
⁕ TV & monitor picture tube manufacture
⁕ Evacuation of lamps (motorway lighting, beamers)
⁕ X-Ray tubes & electron devices 11
Schematic Diagram
INLET FLANGE ROTOR BODY

STATOR BLADES
HIGH PUMPING SPEED

HIGH COMPRESSION

BEARING

EXHAUST

HIGH FREQ. MOTOR

BEARING

12
Rotor - Stator Assembly

13
Inlet
Structure

Outlet

Non- Rotation
Rotation blades
blades
14
Operation
 As the gas molecules enter
through the inlet, the rotor,
which has a number of
angled blades, hits the
molecules. Thus the
mechanical energy of the
blades is transferred to the
gas molecules.
 With this newly acquired momentum, the gas molecules
enter into the gas transfer holes in the stator. This leads
them to the next stage where they again collide with the
rotor surface, and this process is continued, finally leading
them outwards through the exhaust.
15
Operation

16
Advantages
 Clean comparing to diffusion pump
 No need to warm up or cool down
 Can be started and stopped in a few minuets
 High vacuum
 High pumping speed
 Space-saving
 Easy to integrate into complex vacuum systems
 Low operating costs
 Highly reliable operation
17
Disadvantages

 Expensive
 Can fail catastrophically and expensively
 Pumping speed varies with gas type
 High vibration
 Make noise and
 The problem of broken

18
References
1. P. Duval, A. Raynaud, and C. Saulgeot, J. Vac. Sci.
Technol., 6, 1187 (1988)
2. F. Holweck, C. R. Acad. Sci., 117, 43 (1923).
3. L. Maurice, Jpn. J. Appl. Phys. Suppl., 2, 21 (1974).
4. M. Siegbahn, Arch. Math. Astron. Phys., 30, 30 (1944).
5. H. Gondet., Le Vide, 18, 513 (1948).
6. W. Gaede, Ann. Phys., 41, 337 (1913).
7. G. Carter., Vacuum, 26, 225 (1972)

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