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MEMS Class Orientation -

The document outlines the Class Orientation Session for the course ECT 362 - Introduction to MEMS, detailing the course objectives, outcomes, and module distribution. It covers topics such as microsensors, mechanical structures, scaling laws, micro fabrication techniques, and challenges in design and packaging. Additionally, it provides prerequisites for effective learning, study tips, and references for further reading.

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Binumon Kollam
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3 views

MEMS Class Orientation -

The document outlines the Class Orientation Session for the course ECT 362 - Introduction to MEMS, detailing the course objectives, outcomes, and module distribution. It covers topics such as microsensors, mechanical structures, scaling laws, micro fabrication techniques, and challenges in design and packaging. Additionally, it provides prerequisites for effective learning, study tips, and references for further reading.

Uploaded by

Binumon Kollam
Copyright
© © All Rights Reserved
We take content rights seriously. If you suspect this is your content, claim it here.
Available Formats
Download as PPTX, PDF, TXT or read online on Scribd
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Class Orientation Session

By

Department of ECE

Date: 17-02-2023

Class Orientation Session


ECT 362- INTRODUCTION TO MEMS

S6 ECE

Class Orientation Session


Course Objective(s)
❑To describe the working principles of Microsensors
and Actuators
❑ To identify the mechanical structures used in MEMS
❑ To explain the application of scaling laws in the design
of micro systems
❑ To summarise the principles of standard micro
fabrication techniques
❑ To outline the challenges in the design and packaging
of microsystems

Class Orientation Session


Course Outcome(s)

At the end of the semester, you will be able to

⮚ Understand the rapidly emerging, multi-disciplinary


and exciting field of Micro Electro Mechanical
Systems.

Class Orientation Session


Module wise Distribution

MODULE 2
MECHANICAL
STRUCTURES
MODULE 1
MICROSENSORS MODULE 3
AND SCALING LAWS
MICROACTUATORS

MODULES
MODULE 5
MODULE 4
CHALLENGES IN
MICROFABRICATION
DESIGN AND
TECHNIQUES
PACKAGING

Class Orientation Session


Module(s) – A Glimpse
Module 1 Topics

❖ Definition of MEMS and


MICROSENSORS its applications
AND ❖ Multidicsiplinary nature
MICROACTUATORS of MEMS
❖Microsensors and
examples
❖Microactuators and
examples
❖Actuating and Sensing
techniques

Class Orientation Session


Module(s) – A Glimpse
Module 2 Topics

❖Review of Mechanical
concepts
MECHANICAL ❖General Stress Strain
STRUCTURES Relations
❖Mechanical Structures in
MEMS
❖ Beams, Cantilevers,
Diaphragms and Plates
❖Applications

Class Orientation Session


Module(s) – A Glimpse
Module 3 Topics

❖ Scaling in geometry
❖ Scaling in electrostatic and
electromagnetic forces
SCALING LAWS ❖ Scaling in electricity and fluidic
dynamics
❖ Silicon and Silicon Compounds

Class Orientation Session


Module(s) – A Glimpse
Module 4 Topics

❖ Photolithography
❖Ion implantation
STANDARD
MICRO FABRICATION ❖Diffusion
TECHNIQUES ❖Oxidation
❖Chemical vapour
deposition
❖ Etching
❖Bulk micro manufacturing
❖Surface micro machining
❖LIGA process
❖Microstereo lithography

Class Orientation Session


Module(s) – A Glimpse
Module 5 Topics

❖ Levels of Micro system


CHALLENGES IN
DESIGN AND packaging
PACKAGING ❖Surface bonding
❖Anodic bonding
❖Silicon - on - Insulator
❖wire bonding and Sealing
❖Assembly of micro systems
❖Applications

Class Orientation Session


Module(s) – A Glimpse
Practical Significance

❖Automotive Industry - Safety, Engine and


Power Train, Comfort and Convenience,
Vehicle monitoring
❖Aerospace Industry
❖Industrial Products
❖Health care industry

Class Orientation Session


Unit(s) – A Glimpse
Practical Significance

Pressure sensors

Class Orientation Session


Module(s) – A Glimpse
Practical Significance

Biosensors

RF MEMS

Class Orientation Session


Pre-requisites For Effective Learning

Pre-requisites

❖ EST130-Basics of Electrical and Electronics Engineering


❖ EST 100- Engineering Mechanics

Class Orientation Session


How To Approach The Subject

Tips

❖ To go through the basic concepts and Electrical and Electronics


Engineering and Engineering Mechanics

❖ Effective Class room discussion

❖ Getting informations from various sources (Digital Library,


internet etc.) for understanding the concepts and
applications of MEMS

Class Orientation Session


Books Details

❖ Reference Books:
1.Chang C Y and Sze S M,VLSI Technology,McGraw-Hill,NewYork,
2000
2. Julian W Gardner, Microsensors: Principles and Applications,
John Wiley & Sons, 1994
3. Mark Madou, Fundamentals of Micro fabrication, CRC Press, New
York, 1997 .
❖Text Books:
1.Chang Liu, Foundations of MEMS, Pearson 2012
2.Tai-Ran Hsu, MEMS and Microsystems Design and Manufacture,
TMH, 2002
Web Links
1.https://www.researchgate.net/publication/
242686995_162_Principles_of_MEMS
2.https://www.imm.cnr.it/articles/new-materials-and-enabling-
technologies-mems-moems-and-nems

Class Orientation Session


Class Orientation Session
Class Orientation Session

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